• 한국생산제조학회지
• /
• 제22권5호
• /
• pp.845-851
• /
• 2013

In this paper, a robust optimization approach is applied to the two-axes stage using a piezoelectric actuator for precise motion tracking. Robust control is based on LQG/LTR (linear quadratic Gaussian control with loop transfer recovery) control. Further, an LMI (linear matrix inequality) is used to find the optimal parameter in the loop transfer recovery step, instead of a trial and error method. A decoupler in the shape of FIR filter is added to reduce the coupling effect between the motions of the two axes, and hence, the feedback control loop is designed independently for each axis motion. The experimental result shows that the proposed control scheme can be applied effectively for motion control of the two-axes stage.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2012년도 춘계학술대회 논문집
• /
• pp.212-213
• /
• 2012

• 한국기계가공학회지
• /
• 제10권4호
• /
• pp.102-108
• /
• 2011

LQG/LTR control scheme is applied to the two axes stage using piezoelectric actuator for tracking reference input and suppressing hysteresis effect in this paper. The plant is combined with an integrator to improve the tracking ability. LQG/LTR controller is designed by making desirable target filter loop remove all poles except for an integrator included in new design plant model and loop transfer recovery. Decoupler in the shape of FIR filter is added to remove the coupling effect between the two axes motion and so feedback control loop is designed independently for the each axis motion.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2012년도 추계학술대회 논문집
• /
• pp.179-180
• /
• 2012

• 제어로봇시스템학회논문지
• /
• 제12권8호
• /
• pp.798-804
• /
• 2006

To overcome the limited relative uncertainty and work range of the existing planar stage and the bulk structure of the contact-less motor for rotation, the novel operating principle to realize the precise rotation is suggested. It uses the two-axial vector forces, normal force and thrust force, of three-induction type of axial motors located $120^{\circ}$ apart, resulting in the contact-free rotation of the mover. Firstly in this paper, the magnetic forces across the air gap are modeled and simulated under the various conditions. It clarifies the feasible range of the derived solution. And the algorithm compensating the strong cross couple between the forces and the control inputs; generally AC magnitude and slip frequency, is given to realize the independent control of six axes. Finally, for the successfully implemented system, the round test and the micro step test results are given.