• 한국분말재료학회지
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• 제5권4호
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• pp.329-333
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• 1998

Copper-10 wt. % tungsten alloyed powder was obtained by co-reduction of mixed tungsten-trioxide and copper oxide powders at 973 K for 7.2 Ks. In the alloy obtained by pressure-assisted sintering of this co-reduced powder, ultra fine tungsten particles (about 100nm) were dispersed uniformly in the copper matrix. At room temperature, the hardness of this alloy was Hv151 and the electrical conductivity was 85% IACS. After annealing at 1173 K for 3.6 Ks, the hardness and electrical conductivity were Hv147 and 84% IACS, respectively, and were same as before annealing. It was confirmed that the hardness and electrical conductivity of this alloy were hardly influenced by annealing condition since the microstructure of this alloy is highly stabilized.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.366-367
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• 2006

In general, HF chemistry lifts off the particles during scrubbing after polishing and effectively removes particles. It is sometimes impossible to apply HF chemistry on W plug due to the degradation of electrical characteristics of a device. In this paper, a post W CMP cleaning process is proposed to remove residue particles without applying HF chemistry. After W CMP, recessed plugs are created, therefore they easily trap slurry particles during CMP process. These particles in recessed plug are not easy to remove by brush scrubbing when $NH_4OH$ chemistry is used for the cleaning because the brush surface can not reach the recessed area of plugs. Buffing with oxide slurry was followed by W CMP due to its high selectivity to W. The buffing polishes only oxide slightly which creates higher plug profiles than surrounding oxide. Higher profiles make the brush contact much more effectively and result in a similar particle removal efficiency even in $NH_4OH$ cleaning to that in HF brush scrubbing.

• 한국분말재료학회지
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• 제15권4호
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• pp.314-319
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• 2008

Nano-sized tungsten disulfide ($WS_2$) powders were synthesized by chemical vapor condensation (CVC) process using tungsten carbonyl ($W(CO)_6$) as precursor and vaporized pure sulfur. Prior to the synthesis of tungsten disulfide nanoparticles, the pure tungsten nanoparticles were produced by same route to define the optimum synthesis parameters, which were then successfully applied to synthesize tungsten disulfide. The influence of experimental parameters on the phase and chemical composition as well as mean size of the particles for the produced pure tungsten and tungsten disulfide nanoparticles, were investigated.

• 한국산업융합학회 논문집
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• 제24권3호
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• pp.289-294
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• 2021

Tungsten (W) is used as a facing material for nuclear fusion reactors, and it is used in conjunction with structural materials such as copper alloy (CuCrZr), graphite, or stainless steel. On the other hand, since tungsten is a material with a high melting point, a method that can be manufactured at a lower temperature is important. Therefore, in this study, tungsten, which is a facing material, was attempted to be manufactured using a pressure sintering method. Material properties of sintered tungsten materials were analyzed for each solvent using two types of solvents, acetone and polyethylene glycol. The sintered tungsten material using acetone as a solvent exhibited a hardness value of about 255 Hv, and when polyethylene glycol was used, a hardness value of about 200 Hv was shown. The flexural strength of the sintered tungsten material was 870 MPa and 307 MPa, respectively, when acetone and polyethylene glycol were used as solvents. The sintered tungsten material using acetone as a solvent caused densification between particles, which served as a factor of increasing the strength.

• KIEE International Transactions on Electrophysics and Applications
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• 제4C권2호
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• pp.68-72
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• 2004

The performance of copper-tungsten for electrodes used in an ultra high voltage interruption system was evaluated by means of an interruption test, which requires a large-scale apparatus and high cost. In this study, prior to the interruption test, the characteristics of a Cu-W electrode were estimated through the DC arc test, which is a simple, low cost procedure. The DC arc characteristics of a 20wt%Cu-80wt%W electrode were investigated with the change of tungsten powder size distribution and the addition of nickel. In specimens containing a high volume fraction of large sized tungsten particles, the relative density and hardness of sintered Cu-W electrodes increased while the electrical conductivity and the DC arc resistance decreased. Furthermore, the relative density became enhanced with the increase of the amount of nickel while the hardness and electrical conductivity diminished and the DC arc resistance worsened.

• 한국분말재료학회지
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• 제16권6호
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• pp.403-409
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• 2009

Plasma spray forming is recently explored as a near-net-shape fabrication route for ultra-high temperature metals and ceramics. In this study, monolithic tungsten has been produced using an atmospheric plasma spray forming and subsequent high temperature sintering. The spray-formed tungsten preform from different processing parameters has been evaluated in terms of metallurgical aspects, such as density, oxygen content and hardness. A well-defined lamellae structure was formed in the as-sprayed deposit by spreading of completely molten droplets, with incorporating small amounts of unmelted/partially-melted particles. Plasma sprayed tungsten deposit had 84-87% theoretical density and 0.2-0.3 wt.% oxygen content. Subsequent sintering at 2500$^{\circ}C$ promoted the formation of equiaxed grain structure and the production of dense preform up to 98% theoretical density.

• 대한방사선기술학회지:방사선기술과학
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• 제43권5호
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• pp.375-382
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• 2020

PET/CT is a medical equipment that detects 0.511 MeV of gamma rays. The radiation workers are inevitably exposed to ionizing radiation in the process of handling the isotope. Accordingly, PET/CT workers use syringe shields made of lead and tungsten to protect their hands. However, lead and tungsten are known to generate very high scattering particles by interacting with gamma rays. Therefore, in this study, we tried to find out the effect on the scattering particles emitted from the syringe shield. In the experiment, first, the exposure dose to the hand (Rod phantom) was evaluated according to the metal material (lead, tungsten, iron, stainless steel) using Monte Carlo simulation. The exposure dose was compared according to whether or not plastic is attached. Second, the exposure dose of scattering particles was measured using a dosimeter and lead. As a result of the experiment, the shielding rate of plastics using the Monte Carlo simulation showed the largest difference in dose of about 40 % in lead, and the lowest in iron, about 15 %. As a result of the dosimeter test, when the plastic tape was wound on lead, it was found that the reduction rate was about 15 %, 28 %, and 39 % depending on the thickness. Based on the above results, it was found that 0.511 MeV of gamma ray interacts with the shielding tool to emit scattered rays and has a very large effect on radiation exposure. However, it was considered that the scattering particles could be sufficiently removed with plastics with a low atomic number. From now on, when using high-energy radiation, the shielding tool and the skin should not be in direct contact, and should be covered with a material with a low atomic number.

• 한국전기전자재료학회논문지
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• 제17권2호
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• pp.156-161
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• 2004

We investigated the effects of oxidizer additive on the performance of Cu-CMP process using commonly used tungsten slurry. In order to compare the removal rate and non-uniformity as a function of oxidizer contents, we used alumina-based tungsten slurry and copper blanket wafers deposited by DC sputtering method. According to the CMP removal rates and particle size distribution, and the microstructures of surface layer by SEM image as a function or oxidizer contents were greatly influenced by the slurry chemical composition of oxidizers. The difference in removal rate and roughness of copper surface are believed to cause by modification in the mechanical behavior of $Al_2$O$_3$abrasive particles in CMP slurry.

• 한국분말재료학회지
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• 제1권2호
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• pp.167-173
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• 1994

Cu-10wt%W composite powders have been manufactured by a high energy ball milling technique. The composite powders were pressed at 250 MPa and sintered in a dry hydrogen at 103$0^{\circ}C$ for 4 hours. After sintering, Cu-10wt%W composite materials were forged. And the arc-resistance of forged materials which have the same relative density of 94% has been tested. Composite particles, i.e. tungsten particles distributed homogeneously in the copper matrix, was formed after 480 min mechanical alloying. Densities of these sintered materials were ranged from 74 to 84%. Densification degree was due to the formation of composite powders. As the mechanical alloying time increased, the hardness was increased and tungsten particle size was decreased. Arc loss of the forged specimens was decreased as increasing the mechanical alloying time.

• 한국표면공학회지
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• 제41권4호
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• pp.174-179
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• 2008

Nanosize tungsten powder was synthesized by ultrasonic spray pyrolysis method through a solution containing ammonium metatungstate hydrate $[(NH_4)_6W_{12}O_{39}{\cdot}H_2O]$ and reduction treatment. It was expected the improvement of mechanical properties due to increasing surface free energy and surface activity. Starting solutions with each concentration, reaction temperature and reduction treatment were significantly influenced on the formation of tungsten size and phase. It was found that particle size was decreased with concentration of starting solution and surface tension were decreased. The particle size was increased at thermal decomposition temperature above $600^{\circ}C$ by neck growth of interparticles. Tungsten particles were formed by reduction reaction in atmosphere of hydrogen gas at the temperature above $700^{\circ}C$.