• Title/Summary/Keyword: Tungsten particles

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Removal of small particles from silicon wafers using laser-induced shock waves (레이저 유기 충격파를 이용한 웨이퍼 표면 미소입자 제거)

  • 이종명;조성호
    • Laser Solutions
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    • v.5 no.2
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    • pp.9-15
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    • 2002
  • Basic principles and unique characteristics of laser-induced shock cleaning have been described compared to a conventional laser cleaning method and the removal of small tungsten particles from silicon wafer surfaces was attempted using both methods. It was found that the conventional laser cleaning was not feasible to remove the tungsten particles whereas a successful removal of the particles was carried out by the laser-induced shock waves. From the quantitative analysis using a surface scanner, the average removal efficiency of the particles was more than 98% where smaller particles were slightly more difficult to remove probably due to the increased adhesion force with a decrease of the particle size. It was also seen that the gap distance between the laser focus and the wafer surface is an important processing parameter since the removal efficiency is strongly dependent on the gap distance.

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Study on sputtering yield of tungsten with different particle sizes: Surface roughness dependence

  • Kwon, Tae Hyun;Park, Sangjune;Ha, Jeong Min;Youn, Young-Sang
    • Nuclear Engineering and Technology
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    • v.53 no.6
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    • pp.1939-1941
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    • 2021
  • The sputtering yield of tungsten pellets composed of different particle sizes of <1, 12, 44-74, and 149-297 ㎛ was systematically investigated by bombardment with Ar+ ions accelerated at 2.0 keV in an ultra-high vacuum chamber. We found that the tungsten sample fabricated from larger particles had a higher surface roughness, based on the surface profile results. Using the data of the surface roughness for the four types of tungsten pellets, we confirmed that the sputtering yield for a tungsten pellet with the highest surface roughness was 7 times lower than that of the lowest surface roughness. This could be due to the redeposition of sputtered tungsten particles onto neighboring asperities.

Non-electrolytic Deposition of Silver on Tungsten Powders for Functionally Gradient Composite Powder

  • Lee, Jae-Ho;Change, Gun-Ho
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.1225-1226
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    • 2006
  • Particles of high strength material when coated with silver offer a means of obtaining desirable electrical properties and high strength. The coating process employed aqueous ammoniacal silver-nitrate electrolytes with a formaldehyde solution as the reductant. Modifying additives were also applied. The reduction and subsequent deposition of silver occurred selectively on the surface of the tungsten particles. The morphologies of the coated particles were assessed by SEM imaging. The silver was uniformed coated on tungsten powder and its thickness was estimated to be approximately 100nm on the basis of a mass account.

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Synthesis and Microstructural Changes of Nanostructured Tungsten Carbide Powder by Chemical Vapor Condensation Process (화학기상응축법에 의한 나노구조 텅스텐카바이드 분말의 제조와 미세구조 변화)

  • ;;;;O.V.Tolochko
    • Journal of Powder Materials
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    • v.9 no.3
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    • pp.174-181
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    • 2002
  • Nanosized tungsten carbide powders were synthesized by the chemical vapor condensation(CVC) process using the pyrolysis of tungsten hexacarbonyl($W(CO)_6$). The effect of CVC parameters on the formation and the microstructural change of as-prepared powders were studied by XRD, BET and TEM. The loosely agglomerated nanosized tungsten-carbide($WC_{1-x}$) particles having the smooth rounded tetragonal shape could be obtained below $1000^{\circ}C$ in argon and air atmosphere respectively. The grain size of powders was decreased from 53 nm to 28 nm with increasing reaction temperature. The increase of particle size with reaction temperature represented that the condensation of precursor vapor dominated the powder formation in CVC reactor. The powder prepared at $1000^{\circ}C$ was consisted of the pure W and cubic tungsten-carbide ($WC_{1-x}$), and their surfaces had irregular shape because the pure W was formed on the $WC_{1-x}$ powders. The $WC_{1-x}$ and W powders having the average particles size of about 5 nm were produced in vacuum.

A study on the Formation of Adiabatic Shear Band of Tungsten Heavy Alloys (텅스텐 중합금의 단열전단밴드 형성 연구)

  • 이승우;문갑태;홍성인
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2002.05a
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    • pp.187-190
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    • 2002
  • To study adiabatic shear band formation of tungsten heavy alloys, 5 prismatic specimens are loaded by high velocity impacts and treated as plane strain problems. Their volume percent of tungsten particles in WHA are 81%, 93% and 97% respectively and for the fixed 81% volume percent, small size particle model, large size particle model, undulated particle models are considered and then, the effects of particle's volume ratio, geometry and size to the formation of shear band are discussed.

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Investigation on Size Distribution of Tungsten-based Alloy Particles with Solvent Viscosity During Ultrasonic Ball Milling Process (초음파 볼밀링 공정에 의한 용매 점도 특성에 따른 텅스텐계 합금 분쇄 거동)

  • Ryu, KeunHyuk;So, HyeongSub;Yun, JiSeok;Kim, InHo;Lee, Kun-Jae
    • Journal of Powder Materials
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    • v.26 no.3
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    • pp.201-207
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    • 2019
  • Tungsten heavy alloys (W-Ni-Fe) play an important role in various industries because of their excellent mechanical properties, such as the excellent hardness of tungsten, low thermal expansion, corrosion resistance of nickel, and ductility of iron. In tungsten heavy alloys, tungsten nanoparticles allow the relatively low-temperature molding of high-melting-point tungsten and can improve densification. In this study, to improve the densification of tungsten heavy alloy, nanoparticles are manufactured by ultrasonic milling of metal oxide. The physical properties of the metal oxide and the solvent viscosity are selected as the main parameters. When the density is low and the Mohs hardness is high, the particle size distribution is relatively high. When the density is high and the Mohs hardness is low, the particle size distribution is relatively low. Additionally, the average particle size tends to decrease with increasing viscosity. Metal oxides prepared by ultrasonic milling in high-viscosity solvent show an average particle size of less than 300 nm based on the dynamic light scattering and scanning electron microscopy analysis. The effects of the physical properties of the metal oxide and the solvent viscosity on the pulverization are analyzed experimentally.

Size, Shape, and Crystal Structure-dependent Toxicity of Major Metal Oxide Particles Generated as Byproducts in Semiconductor Fabrication Facility (반도체 가공 작업환경에서 부산물로 발생되는 주요 금속산화물의 입자 크기, 형상, 결정구조에 따른 독성 고찰)

  • Choi, Kwang-Min
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.26 no.2
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    • pp.119-138
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    • 2016
  • Objectives: The purpose of this study is to review size, shape, and crystal structure-dependent toxicity of major metal oxide particles such as silicon dioxide, tungsten trioxide, aluminum oxide, and titanium dioxide as byproducts generated in semiconductor fabrication facility. Methods: To review the toxicity of major metal oxide particles, we used various reported research and review papers. The papers were searched by using websites such as Google Scholar and PubMed. Keyword search terms included '$SiO_2$(or $WO_3$ or $Al_2O_3$ or $TiO_2$) toxicity', 'health effects $SiO_2$(or $WO_3$ or $Al_2O_3$ or $TiO_2$). Additional papers were identified in references cited in the searched papers. Results: In various cell lines and organs of human and animals, cytotoxicity, genotoxicity, hepatoxicity, fetotoxicity, neurotoxicity, and histopathological changes were induced by silicon dioxide, tungsten trioxide, aluminium oxide, and titanium dioxide particles. Differences in toxicity were dependent on the cell lines, organs, doses, as well as the chemical composition, size, surface area, shape, and crystal structure of the particles. However, the doses used in the reported papers were higher than the possible exposure level in general work environment. Oxidative stress induced by the metal oxide particles plays a significant role in the expression of toxicity. Conclusions: The results cannot guarantee human toxicity of the metal oxide particles, because there is still a lack of available information about health effects on humans. In addition, toxicological studies under the exposure conditions in the actual work environment are needed.

3D Printing of Tungsten-Polymer Composites for Radiation Shielding (방사선 차폐를 위한 3D 프린팅용 텅스텐-고분자 복합체 설계)

  • Eom, Don-Geon;Kim, Shin-Hyun
    • Journal of the Korean Society of Radiology
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    • v.14 no.5
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    • pp.643-650
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    • 2020
  • The materials with a high processiblity for radiation shielding, in particular for 3D printable materials, are highly demanding for producing robots working in nuclear plants and designing customized personal protection equipment. In this study, we suspend tungsten particles in a polymeric matrix of either PLA or ABS to compose tungsten-polymer composite filaments; PLA and ABS are widely used for conventional FDM-based 3D printing. The weight fraction of tungsten particles can be increased up to 50% without forming macroscopic aggregates. The composite filaments can be used to print 3D architectures with any shape and geometry. To demonstrate one of potential applications, we print parts for robot actuator and assemble them to protect PCB against gamma ray.

Effect of Electrical Parameters and Surrounding Gas on the Electroexplosive Tungsten Nanopowders Characteristics

  • Kwon, Young-Soon;Kim, Jin-Chun;Ilyin, Alexander P.;Nazarenko, Olga B.;Tikhonov, Dmitry V.
    • Journal of Powder Materials
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    • v.19 no.1
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    • pp.49-54
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    • 2012
  • Tungsten nanopowders were produced by the method of wires electrical explosion in the different gases. The study of phase and dispersed composition of the powders was carried out. The influence of electrical parameters such as the value of energy input in wire and the arc stage of the explosion was discussed. The factors that make for decreasing the particles size are the lower pressure of surrounding gas and the use of addition of chemically reactive gas.

Development of Tungsten Dispersed Copper Based Alloy and its Physical Property

  • Mishima, Akira;Sakaguchi, Shigeya
    • Journal of Powder Materials
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    • v.5 no.4
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    • pp.329-333
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    • 1998
  • Copper-10 wt. % tungsten alloyed powder was obtained by co-reduction of mixed tungsten-trioxide and copper oxide powders at 973 K for 7.2 Ks. In the alloy obtained by pressure-assisted sintering of this co-reduced powder, ultra fine tungsten particles (about 100nm) were dispersed uniformly in the copper matrix. At room temperature, the hardness of this alloy was Hv151 and the electrical conductivity was 85% IACS. After annealing at 1173 K for 3.6 Ks, the hardness and electrical conductivity were Hv147 and 84% IACS, respectively, and were same as before annealing. It was confirmed that the hardness and electrical conductivity of this alloy were hardly influenced by annealing condition since the microstructure of this alloy is highly stabilized.

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