• Journal of the Korean Vacuum Society
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• v.18 no.5
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• pp.372-376
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• 2009

In the modern semiconductor industry, lithography process is used to construct specific patterns. However, due to the decreasing of line width, these days, more and more researchers are interested in PMMA(Poly Methyl Methacrylate) lithography by using e-beam instead of the prior method, PR(Photoresist) lithography by using UV(Ultra-Violet). Additionally, the patterns constructed by lithography are collapsed during the process of cleansing remnants and the resistance against the breakdown of the patterns is known to be proportional to the elastic modulus of pattern-constructing materials. In this research, we measured the change of hardness and elastic modulus of PMMA film surface according to the change of time spent to soft-bake the PMMA film. During the measurement, we controlled the tip pressure from $25{\mu}N$ to $8,500{\mu}N$ having intervals that are $134.52{\mu}N$. For these measurements, we used the Triboindenter from Hysitron to gauge the hardness and elastic modulus and the tip we used was Berkovich diamond Tip.

• Journal of the Korean Institute of Gas
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• v.13 no.5
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• pp.1-6
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• 2009

This paper presents the fuel consumption effects of LPG vehicle depending on the atmospheric temperature, LP gas leakage of vaporizer, viscosity of engine oil and engine load conditions. The fuel consumption test results show that when the temperature of engine temperature rises, the fuel consumption efficiency increases in general. The fuel consumption efficiency for an atmosphere temperature of $24.2^{\circ}C$ is 13.6% high compared to that of $1^{\circ}C$. No leak vaporizer on fuel consumption efficiency is 5.3% high compared to that of the LP gas leak vaporizer. The fuel economy of new engine oils is just 1.1% high compared to that of used oils with a LPG vehicle mileage of 9,500km. This is not an influential factor compared with an atmospheric temperature and a LP gas leakage. The more important factors on the fuel consumption efficiency are driving conditions such as a rapid braking, abrupt start and fast acceleration. The test results indicate that the normal start is 32.3% high compared to that of an abrupt start and the fast acceleration is 10.8% high compared with that of an abrupt start. And the fuel consumption efficiency for a rapid braking is 18.3% higher than that of an abrupt start. These indicate that the driving condition is very important to reduce the fuel consumption rate.

• Composites Research
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• v.22 no.5
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• pp.15-23
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• 2009

The lubricant tribological characteristics of $Al_2O_3$ fiber and SiC particle hybrid metal matrix composites (MMCs) fabricated by squeeze casting method was investigated using a pin-on-disk wear tester. The wear tests of the MMCs were performed according to fiber/particle hybrid ratio in the planar-random (PR) and normal (N) orientations sliding against a counter steel disk at a fixed speed and $25\;kg_f$ loading under different sliding distances and temperatures. The test results showed that the wear behavior of MMCs varied with fiber orientation and hybrid ratio. At room temperature, the lubricant wear behavior of F20P0 unhybrid PR-MMCs was superior to that of N-MMCs while the hybrid composites exhibited the reverse lubricant wear behavior. It was also revealed that the wear resistance of PR-MMCs was superior to that of the N-MMCs due to the joint action of reinforcements and lubricant film between the friction surfaces at an elevated temperature of $100^{\circ}C$ for both fiber only and hybrid cases. In case of $150^{\circ}C$, although the trend of weight loss was similar to that of others, the wear resistance of PR-MMCs was better than that of N-MMCs for hybrid MMCs.