• Tribology and Lubricants
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• v.30 no.1
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• pp.59-63
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• 2014

Laser Surface Texturing(LST) is a surface engineering process used to improve tribological characteristics of materials by creating patterned microstructures on the mechanical contact surface. In LST technology, a pulsated laser beam is used to create arranged dimples on a surface by a material ablation process, which can improve such as load capacity, wear resistances, lubrication lifetime, and reduce friction coefficients. In the present study, the effect of multi-scale LST on lubricant regime was investigated. A pulsed Nd:YAG laser was applied on the bearing steel(AISI 52100) to create arranged dimples. To optimize the surface texturing effect on friction, multi-scale texture dimples with some specific formula arrays were fabricated by combining circles, ellipses and the laser ablation process. The tribological testing of multi-scale textured surface was performed by a flat-on-flat unidirectional tribometer under lubrication and the results compared with that of the non-textured surface. Through an increase in sliding speed, the beneficial effect of multi-scale LST performance was achieved. The multi-scale textured surface had lower friction coefficient performances than the non-textured surface due to the hydrodynamic lubrication effect.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.3
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• pp.1253-1258
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• 2014

The tribological properties of TiC, TiN and TiC/TiN coatings on steels prepared by the cathodic-arc (CA) ion plating technique were investigated. Experiments were carried out on a tribo-test machine using a Falex journal V block system. The friction and wear characteristics of the coatings were determined by varying the applied load and sliding speed. The TiC, TiN and TiC/TiN coatings markedly increased the tribological characteristics of the surface. As far as a single layer coating was concerned, TiN goes better results than TiC. However, the TiC/TiN multilayer coating performed better than either single layer coating. The major factor in the improved performance of the multilayer coating was the role of TiC in improving the adhesion between the external TiN layer and the substrate steel.

• Korean Journal of Materials Research
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• v.20 no.8
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• pp.444-449
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• 2010

Transparent ceramics are used in new technology because of their excellent mechanical properties over glasses. Transparent ceramics are nowadays widely used in armor, laser windows, and in high temperature applications. Silicon nitride ceramics have excellent mechanical properties and if transparent silicon nitride is fabricated, it can be widely used. h-BN has a lubricating property and is ductile. Therefore, adding h-BN to silicon nitride ceramics gives a lubricating property and is also machinable. Translucent silicon nitride was fabricated by hot-press sintering (HPS) and 57% transmittance was observed in the near infrared region. A higher wt. % of h-BN in silicon nitride ceramics does not favor transparency. The optical, mechanical, and tribological properties of BN dispersed polycrystalline $Si_3N_4$ ceramics were affected by the density, ${\alpha}:{\beta}$-phase ratio, and content of h-BN in sintered ceramics. The hot pressed samples were prepared from the mixture of $\alpha-Si_3N_4$, AlN, MgO, and h-BN at $1850^{\circ}C$. The composite contained from 0.25 to 2 wt. % BN powder with sintering aids (9% AlN + 3% MgO). A maximum transmittance of 57% was achieved for the 0.25 wt. % BN doped $Si_3N_4$ ceramics. Fracture toughness increased and wear volume and the friction coefficient decreased with an increase in BN content. The properties such as transmittance, density, hardness, and flexural strength decreased with an increase in content of h-BN in silicon nitride ceramics.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.356-356
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• 2010

Tribological behaviors of the hard film on soft substrate system were explored using the hard thin film of diamond-like carbon (DLC) coated the soft polymer of polydimethysiloxane (PDMS). A DLC film with the Young's modulus of 100 GPa was coated on PDMS substrate with Young's modulus of 10 MPa using plasma enhanced chemical vapor deposition (PECVD) technique. The deposition time was varied from 10 sec to 10 min, resulting in nanoscale roughness of wrinkle patterns with the thickness of 20 nm to 510 nm, respectively, at a bias voltage of $400\;V_b$, working pressure 10 mTorr. Nanoscale wrinkle patterns with 20-100 nm in width and 10-30 nm height were formed on DLC coating due to the residual stress in compression and difference in Young's modulus. Nanoscale roughness effect on tribological behaviors was observed by performing a tribo-experiment using the ball-on-disk type tribometer with a steel ball of 6 mm in diameter at the sliding speed of 220 rpm, normal load of 1N and 25% humidity at ambient temperature of $25^{\circ}C$. Friction force were measured with respect to thickness change of coated DLC thin film on PDMS. It was found that with increases the thickness of DLC coating on PDMS, the coefficient of friction decreased by comparison to that of the uncoated PDMS. The wear tracks before and after tribo-test were analyzed using SEM and AFM.

• Tribology and Lubricants
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• v.35 no.5
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• pp.274-285
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• 2019

Chemical mechanical polishing (CMP), which is a material removal process involving chemical surface reactions and mechanical abrasive action, is an essential manufacturing process for obtaining high-quality semiconductor surfaces with ultrahigh precision features. Recent rapid growth in the industries of digital devices and semiconductors has accelerated the demands for processing of various substrate and film materials. In addition, to solve many issues and challenges related to high integration such as micro-defects, non-uniformity, and post-process cleaning, it has become increasingly necessary to approach and understand the processing mechanisms for various substrate materials and abrasive particle behaviors from a tribological point of view. Based on these backgrounds, we review recent CMP R&D trends in this study. We examine experimental and analytical studies with a focus on substrate materials and abrasive particles. For the reduction of micro-scratch generation, understanding the correlation between friction and the generation mechanism by abrasive particle behaviors is critical. Furthermore, the contact stiffness at the wafer-particle (slurry)-pad interface should be carefully considered. Regarding substrate materials, recent research trends and technologies have been introduced that focus on sapphire (${\alpha}$-alumina, $Al_2O_3$), silicon carbide (SiC), and gallium nitride (GaN), which are used for organic light emitting devices. High-speed processing technology that does not generate surface defects should be developed for low-cost production of various substrates. For this purpose, effective methods for reducing and removing surface residues and deformed layers should be explored through tribological approaches. Finally, we present future challenges and issues related to the CMP process from a tribological perspective.

• Journal of Ocean Engineering and Technology
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• v.32 no.6
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• pp.492-501
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• 2018

The following results were obtained from a series of studies to accumulate data to reduce the coefficient of friction for press dies by performing tribological tests before and after the UNSM treatment of SM45C. The UNSM-treated material had a nano-size surface texture, high surface hardness, and large and deep compressive residual stress formation. Even when the load was doubled, the small amount of abrasion, small weight of the abrasion, and width and depth of the abrasion did not increase as much as those for untreated materials. When loads of 5 N, 7.5 N, and 10 N were applied to the untreated material of SM45C, the coefficient of friction was approximately 0.76-0.78. With the large specimen, a value of 0.72-0.78 was maintained at a load of 50 N despite the differences in the size of the wear specimen and working load. Tribological tests of large specimens of SM45C treated with UNSM under tribological conditions of 100 N and 50 N showed that the frictional coefficient and time constant stably converged between 0.7 and 0.8. The friction coefficients of the small specimens treated with UNSM showed values between 0.78 and 0.75 under 5 N, 7.5 N, and 10 N. The friction coefficients of the SM45C treated with UNSM were comparable to each other.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.1
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• pp.111-116
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• 1998

Silicon nitride is hard and tough ceramic material. Hereby, mechanical machinability is very poor. It has also high electrical resistance. Silicon nitride of extremely high electrical resistivity becomes conductive ceramic composite by adding 30 wt% TiN. Ceramics with high electrical conductivity can be electrical discharge machined. Using by the Electrical Discharge Machining (EDM) technique. $Si_3N_4-TiN$ ceramic composite with high electrical conductivity is utilized to make metal working tool. These tool materials have severe wear problem as well as oxidation. Post HIP processing after sintering $Si_3N_4-TiN$ ceramic composites was performed. The tribological property of $Si_3N_4-TiN$ composite as a function of content of TiN was investigated in air, at room temperature. The hardness, fracture toughness, and flexural strength were compared with the wear volume. SEM observation of wear tracks can make an explanation of wear mode of $Si_3N_4-TiN$ composite.

• The Korean Journal of Ceramics
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• v.4 no.3
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• pp.193-198
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• 1998

This paper presents the effects of an initial braking velocity, a braking pressure, and the number of braking stop on the tribological behaviors for the three different C-C composites using an inertia dynamic-friction tester. The C-C composites were prepared through the processes of several cycles of pitch impregnation/carbonization with different friction surface texture such as continuous 8-harness satin fabric (ADD-1), chopped fiber (ADD-2) and chopped fiber (ADD-3) having higher fiber volume fraction on friction than ADD-2 by about 10%. ADD-1 exhibited a higher fraction coefficient (0.41~0.33) than those of ADD-2 and ADD-3 (0.32~0.26) under the various initial braking velocities and braking pressures. The fraction coefficients decreased with increasing the initial velocity and the braking pressures. Wear rate by the thickness change after every 25 stop indicated that ADD-2 and ADD-3 having 1.7~2.7 $\mu\textrm{m}$/stop/pair were much lower than that of ADD-1 showing 5.0~6.5 $\mu\textrm{m}$/stop/pair. All specimens showed a little bit lower wear rate during the middle stage than the initial and latter stages among 100 braking stops. ADD-1 showed higher friction coefficient and wear rate due to the active pull-out of the fibers, evidenced by thicker were film and wear debrises.

• Tribology and Lubricants
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• v.33 no.2
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• pp.59-64
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• 2017

This study investigates friction and wear characteristics of anodized aluminum (Al) alloy 6061 by using a reciprocating tribotester. The diameter and height of the specimen are 30 mm and 10 mm, respectively. The surface roughness of the mirrored-surface is approximately $0.01{\sim}0.02{\mu}m$, and it is used throughout the current study. As a result of anodizing, the depth and diameter of the nanopore are approximately $25{\mu}m$ and 30-40 nm, respectively. The testing conditions are as follows: loads of 1, 3, and 5 N; a frequency of 1 Hz; a stoke of 3 mm; and a duration of 1800 s. We use deionized water with a volume of approximately $25{\mu}l$, as the lubricant. Micro Vickers hardness measurements show that mirrored-surface specimens had lower hardness values than anodized specimens. Further, their coefficients of friction are lower than those of the anodized samples, and the width of their wear track increases with load, as expected. The anodized specimens' coefficients of friction increase with stable frictional behavior and exhibit insignificant load dependence. Further, we observe that the width of the wear track is less than that of the mirrored-surface specimens, and micro cracks are present near it. Moreover, the anodizing process increases the hardness of the samples, improving their wear resistance. These results indicate that nanoporous structures are not effective in lowering friction under the water-lubricated condition.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.5
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• pp.559-566
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• 2014

Plasma coatings have been conducted to improve the mechanical properties of thermal resistance, wear resistance, corrosion resistance and thermal shock with respect to Great-Bar which is used as a carrier device for ironstone sintering under $700^{\circ}C$. The surface coatings on the upper side of the Great-Bar exposed on extreme environments of high temperature, severe wear, corrosion and thermal shock extended the life time due to the barrier coating layer. $Al_2O_3$, $Cr_2O_3$, WC coatings were applied to Great-Bar and their mechanical and chemical properties are analyzed by several experimental tests such as thermal resistance, wear resistance, corrosion resistance and thermal shock resistance. It shows excellent advantages with respect to wear, thermal shock and corrosion.