• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.84-84
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• 2012

소자가 고집적화 됨에 따라, 비저항이 낮고 electro migration (EM), Stress Migration (SM) 특성이 우수한 구리(Cu)를 배선재료로서 사용하고 있다. 그러나, 구리는 Si과 $SiO_2$의 내부로 확산이 빠르게 일어나, Si 소자 내부에 deep donor level을 형성하고, 누설 전류를 증가시키는 등 소자의 성능을 저하시킬 수 있는 문제점을 가지고 있다. 그러나, electroplating 을 이용하여 증착한 Cu 박막은 일반적으로 확산 방지막으로 쓰이는 TiN, TaN, 등의 물질과의 접착 (adhesion) 특성이 나쁘다. 따라서, Cu CMP 에서 증착된 Cu 박막의 벗겨지거나(peeling), EM or SM 저항성 저하 등의 배선에서의 reliability 문제를 야기하게된다. 따라서 Cu 와 접착 특성이 좋은 새로운 확산방지막 또는 adhesion layer의 필요성이 대두되고 있다. 본 연구에서는 이러한 Cu 배선에서의 접착성 문제를 해결하고자 Metal organic chemical vapor deposition (MOCVD)을 이용하여 제조한 코발트(Co) 박막을 $Cu/TaN_x$ 사이의 접착력 개선을 위한 adhesion layer로 적용하려는 시도를 하였다. Co는 비저항이 낮고, Cu 와 adhesion이 좋으며, Cu direct electroplating 이 가능하다는 장점을 가지고 있다. 하지만, 수소 분위기에서 $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) 전구체에 의한 MOCVD Co 박막의 경우 탄소, 산소와 같은 불순물이 다량 함유되어 있어, 비저항, surface roughness 가 높아지게 된다. 따라서 구리 전착 초기에 구리의 핵 생성(nucleation)을 저해하고 핵 생성 후에도 응집(agglomeration)이 발생하여 연속적이고 얇은 구리막 형성을 방해한다. 이를 해결하기 위해, MOCVD Co 박막 증착 시 수소 반응 가스에 암모니아를 추가로 주입하여, 수소/암모니아의 분압을 1:1, 1:6, 1:10으로 변화시켜 $Co/TaN_x$ 박막의 특성을 비교 분석하였다. 각각의 수소/암모니아 분압에 따른 $Co/TaN_x$ 박막을 TEM (Transmission electron microscopy), XRD (X-ray diffraction), AES (Auger electron spectroscopy)를 통해 물성 및 조성을 분석하였고, AFM (Atomic force microscopy)를 이용하여, surface roughness를 측정하였다. 실험 결과, $Co/TaN_x$ 박막은 수소/암모니아 분압 1:6에서 90 ${\mu}{\Omega}-cm$의 낮은 비저항과 0.97 nm 의 낮은 surface roughness 를 가졌다. 뿐만 아니라, MOCVD 에 의해 증착된 Co 박막이4-6 % concentration 의 탄소 및 산소 함량을 가지는 것으로 나타났고, 24nm 크기의 trench 기판 위에 약 6nm의 $Co/TaN_x$ 박막이 매우 균일하게 형성된 것을 확인 할 수 있었다. 이러한 결과들은, 향후 $Co/TaN_x$ 박막이 Cu direct electroplating 공정이 가능한 diffusion barrier로서 성공적으로 사용될 수 있음을 보여준다.

• Journal of the Korean Geographical Society
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• v.48 no.6
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• pp.914-928
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• 2013

Establishment of limits and names for oceans and seas is necessary for a safety of navigation. Even if there are no national and international standard for the delimitation of sea boundaries, we can take guidelines for the delimitation of sea boundaries through the analysis of IHO official publications, Limits and Names for Oceans and Sea; S-23. This paper shows the changes of the spatial limit of seas since first edition publication, and the standards for a delimitation of oceans and seas were analyzed using S-23 4th edition draft(2002) in terms of physical geographic features. The generic terms of S-23 include Ocean, Sea, Channel, Passage, Strait, Sound, Gulf, Bay and Bight, and each generic term shows hierarchical structures. Several seas show different characteristics compared with definitions of IHO dictionary. Sea boundaries are delimited by longitude and latitude, cape, river mouth, sandbar, and so on. Undersea features such as a shelf, trench, trough, rise, bank and reef are also important features for delimitation of sea boundary. Especially, seas that are delimited by undersea feature are mainly located Arctic and Southern ocean area in S-23 4th edition. Advanced knowledge of marine science with a technical advance might affect to delimit for sea boundary.

• The Journal of the Korea institute of electronic communication sciences
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• v.3 no.3
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• pp.188-194
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• 2008

In this paper, we propose for improving QoS in Hospital wireless network using Cellular-IP/PRC(Paging Route Cache) with Paging Cache and Route Cache in Cellular-IP and propose for performance of realtime and non-real time handoff service using Handoff state machine Paging Route Cache. Although the Cellular-IP/PRC technology is devised for mobile internet communication, it has its vulnerability in frequent handoff environment. This handoff state machine using differentiated handoff improves quality of services in Cellular-IP/PRC Suggested algorithm shows better performance than existing technology in wireless mobile internet communication environment. When speech quality is secured considering increment of interference to receive in case of suppose that proposed acceptance method grooves base radio station capacity of transfer node is plenty, and moat of contiguity cell transfer node was accepted at groove base radio station with a blow, groove base radio station new trench lake acceptance method based on transmission of a message electric power estimate of transfer node be. Do it so that may apply composing PC(Paging Cache) and RC(Routing Cache) that was used to manage paging and router in radio Internet network in integral management and all nodes as one PRC(Paging Router Cache), and add hand off state machine in transfer node so that can manage hand off of transfer node and Roaming state efficiently, and studies so that achieve connection function at node. Analyze benevolent person who influence on telephone traffic in system environment and forecasts each link currency rank and imbalance degree, forecast most close and important lake interception probability and lake falling off probability, GoS(Grade of Service), efficiency of cell capacity in QoS because applies algorithm proposing based on algorithm use gun send-receive electric power that judge by looking downward link whether currency book was limited and accepts or intercept lake and handles and displays QoS performance improvement.

• The Korean Journal of Quaternary Research
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• v.20 no.1 s.26
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• pp.39-50
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• 2006

Jeonjangri site of Geochang area is located in the Geochang Basin, and lies on the river terrace of upstream part of Hwang River. Fluvial deposits are well distributed at the northern and southern walls of trench 2(district 2) in the Jeonjangri archeological site. This study aims to interpret the occurrences of fluvial sedimentary deposits on the basis of grain size analysis and palynological analysis in the representative sections of Jeongjangri site. The sedimentary profile shows that the upper units are typified by paleosols with soil wedge formed at about $25,000{\sim}30,000yr$ B.P, and the lower units are characterized by reddish brown muddy sands, organic muds and sand/gravel downwards in the profile. Particularly palynological study on the organic muds of southern wall section showed a result that lower unit is dominant with grass vegetation, and upper unit with Alnus-Quercus-Pinus vegetation. The former is interpreted to be formed at $60,000{\sim}50,000yr$ B.P (stadial), while the latter at $80,000{\sim}70,000yr$ B.P. In general broad-leaved/coniferous mixed forests are mostly dominant in Jeongjangri site and the climate was presumed to be cool temperate at that time.

• The Korean Journal of Quaternary Research
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• v.24 no.2
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• pp.23-34
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• 2010

The purpose of this study is to clarify the characteristics of geomorphic surfaces and investigate their geomorphological development at Sinsong-ri archaeological sites by the classification of geomorphic surfaces. The sedimentary facies of trench 1, 2 and 3 were identified and pollen analysis was performed at site 3. The geomorphic surfaces are classified by hillslope, valley plain, alluvial fan and river terrace. Most of the study area is located on low hillsides and valley plains are connected with tidal flats extended from small river valley. Also, alluvial fans are distributed over the piedmont and narrow, long river terraces are developed downstream along the Sojeong-stream flowing between valley plain and hillsides. River valleys were deeply eroded during the Last Glacial Maximum (LGM) periods, responded to the lowest sea level among the hillslopes and valley plains are formed during the Holocene. The sedimentary facies are identified composed of basal gravel layers with coarse gravels and sands, relatively thick culture layer of the Bronze Age and thin layer during the early Iron Age in upper part study area. Thus, land uses during the Bronze Age people was performed more intensively comparing to the early Iron Age by deforestation for habitation.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.123-123
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• 2010

3족 질화물계 물질은 발광다이오드와 같은 광전자소자적용에 있어서 매우 우수한물 질이다.일반적으로, GaN 에피 성장에 있어서 저온 중간층을 삽입한 2 단계 성장 방법은 낮은 결함밀도와 균일한 표면을 얻기 위해 도입된 기술이다. 특히 AlN 중간층은 GaN 중간층과 비교하였을 때 결정성뿐만 아니라 높은 온도에서의 열적안정성, GaN 기반의 자외선 검출기서의빛 흡수 감소 등의 장점을 가지고 있다. 또한 패턴 사파이어 기판위 GaN 에피 성장은 측면성장 효과를 통해 결함 밀도 감소와 광 추출 효율을 향상시키는 것으로 알려져 있다.또한 열응력으로 인한 기판의 휨 현상은 박막성장중 기판의 온도 분포를 불균일하게 만드는 원인이 되며 이는 결국 박막 조성 및 결정성의 열화를 유도하게 되고 최종적으로 소자특성을 떨어 뜨리는 원인이 되는데 AlN 중간층의 도입으로 이것을 완화시킬 수 있는 효과가 있다. 하지만, AlN 중간층이 패턴된 기판 위에 성장시킨 GaN 에피층에 미치는 영향은 명확하지 않다. 본 연구팀은 일반적인 c-plane 사파이어 기판과 플라즈마 건식 에칭을 통한 렌즈 모양의 패턴된 사파이어 기판을 이용해서 AlN 중간층과 GaN 에피층을 유기금속 화학기상증착법으로 성장하였다. 특히, 렌즈 모양의 패턴된 사파이어 기판은 패턴 모양과 패턴 밀도가 성장에 미치는 영향을 연구하기 위해 두가지 패턴의 사파이어 기판을 이용하였다. AlN 중간층 두께를 조절함으로써 최적화된 GaN 에피층을 90분까지 4단계로 시간 변화를 주어 성장 양상을 관찰한 결과, GaN 에피박막의 성장은 패턴 기판의 trench 부분에서 시작하여 기판의 패턴부분을 덮는 측면 성장을 보이고있다. 또한 TEM과 CL을 통해 GaN 에피박막의 관통 전위를 분석해 본 결과 측면 성장과정에서 성장 방향을 따라 옆으로 휘게 됨으로 표면까지 도달하는 결정결함의 수가 획기적으로 줄어드는 것을 확인함으로써 고품질의 GaN 에피층을 성장시킬 수 있었다. 그리고 패턴밀도가 높고 모양이 볼록할수록 측면 성장 효과로 인한 결정성 향상과 난반사 증가를 통한 임계각 증가로 광추출 효율이 향상 되는 것을 확인할 수 있었다. 이러한 결과를 바탕으로 최적화된 AlN 중간층을 이용하여 패턴 기판위에서 고품질의 GaN 에피층을 성장시킬 수 있었다.

• Korean Journal of Environmental Biology
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• v.35 no.4
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• pp.662-669
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• 2017

This study evaluated the ecotoxicological properties of livestock waste water treated by a LID (Low Impact Development) system, using a mixture of bio-reeds and bio-ceramics as suitable bed media for a subsequent treatment process of a livestock wastewater treatment plant. The relationship between the pollutant reduction rate and the ecotoxicity was analyzed with the effluents from the inlet pilot plant, with vegetated swale and wetlands and the batch type of an infiltration trench. Each pilot plant consisted of a bio process using bio-reeds and bio-ceramics as bed media, as well as a general process using general reeds and a bed as a control group. The results indicated that, after applying the HRT 24 hour LID method, the ecotoxicity was considerably lowered and the batch type pilot plant was shown to be effective for toxicity reduction. The LID method is expected to be effective for water quality management, considering ecotoxicity by not only as a nonpoint source pollution abatement facility but also, as a subsequent treatment process linked with a livestock manure purification facility. It is necessary to take the LID technic optimization study further to apply it as a subsequent process for livestock wastewater treatment.

• Journal of Wetlands Research
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• v.21 no.2
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• pp.173-180
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• 2019

This study was conducted to understand factors affecting TSS and heavy metals transport on the road, parking lot and roof. During storm events, heavy metals, which were mostly attached to TSS, were also transported when TSS was washed off in the road, parking lot and roof. This finding may be supported by the significant correlations between TSS load and total and soluble heavy metals load including Cr, Fe, Cu, and Pb (Pearson r value: 0.52 to 0.73; probability p value<0.01). Generation and transport of TSS and heavy metals were greater in the road and parking lot compared to the roof due to vehicular activities, slope and greater catchment areas of these sites. It was found that TSS transport during peak flows of storm events ranges from 65% to 75% implying that by controlling peak flows, TSS transportation to nearby water bodies may be decreased. Depending on the target TSS and heavy metal reduction, sizing of low impact development (LID) technologies and green infrastructures (GI) such as infiltration trench, tree box filter, and rain garden may be calculated. Future researchers were recommended to assess the limitations of the systems and determine the design considerations for these types of facilities.

• Journal of Conservation Science
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• v.37 no.6
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• pp.748-766
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• 2021

The Iksan Ssangneung (twin tombs), a pair of tombs comprising the Daewangneung (large royal tomb) and the Sowangneung (small royal tomb), were constructed in the typical style of stone tunnel and chamber tombs in the Baekje Kingdom during the Sabi period (538 to 660 AD) of ancient Korea. Soil layers exposed during excavation of Sowangneung in a trench east of the tomb are: the bottommost layer, the ground level layer, the Panchuk (rammed earth) layer of the Baekje, the layer created by a grave robbery, and soil recovered during the Japanese colonial period. Soil samples were obtained by segmenting an easy stratigraphic horizon into sub categorized soil layers, and their material properties were analyzed; they are composed mainly of sandy loam based on the particle size distributions. In the site foundation, loamy sand is packed in the bottommost layer, and sandy loam with high sand and silty sand fills most of the overlying layer. The central and topmost portion of the Baekje layer is composed of loam with high clay content. All soil layers show geochemical behaviors similar to those of the bottommost layer. X-ray diffraction analysis verified kaolinite in all layers, also observed in soil layers displaying high crystallinity. Kaolinite and halloysite were identified by scanning electron microscopy. Thus, we conclude that the Baekje layer of the Sowangneung is composed of sandy loam containing kaolin procured from near the site. An impermeable middle to upper layer was created using viscous loam. The top of the tomb was closed tightly.

• Economic and Environmental Geology
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• v.56 no.4
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• pp.365-384
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• 2023

We applied the partitioned waveform inversion to 2,026 event data recorded at 173 seismic stations from the Incorporated Research Institutions for Seismology Data Managing Center and the Ocean Hemisphere network Project to estimate S-wave velocity and radial anisotropy models beneath the Western Pacific. In the Philippine Sea plate, high-Vs anomalies reach deeper in the West Philippine basin than in the Parece-Vela basin. Low-Vs anomalies found at 80 km below the Parece-Vela basin extend deeper into the West Philippine Basin. This velocity contrast between the basins may be caused by differences in lithospheric age. Low-Vs anomalies are observed beneath the Caroline seamount chain and the Caroline plate. Overall positive radial anisotropy anomalies are observed in the Western Pacific, but negative radial anisotropy is found at > 220 km depth on the subducting plate along the Mariana trench and at ~50 km in the Parece-Vela basin. Positive radial anisotropy is found at > 200 km depth beneath the Caroline seamount chain, which may indicate the 'drag' between the plume and the moving Pacific plate. High-Vs anomalies are found at 40 ~ 180 km depth beneath the Ontong-Java plateau, which may indicate the presence of unusually thick lithosphere due to underplating of dehydrated plume material.