Nanometer Scale Vacuum Lithography using Plasma Polymerization and Plasma Etching (플라즈마 중합과 플라즈마 에칭을 이용한 나노미터 단위의 진공리소그래피)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 1998.06a
- /
- pp.131-134
- /
- 1998