• 대한전자공학회논문지SD
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• 제39권7호
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• pp.37-45
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• 2002

본 논문에서는 3차원 FDTD를 이용하여 진행파형 흡수 CPW(Coplanar waveguide) 광 변조기의 마이크로파 특성을 분석하여 최적화 설계하였다. 진행파형 구조에 있어서 마이크로파의 특성은 진성 영역의 두께와 폭에 영향을 받게 되고 신호전극과 접지전극의 위치와 신호전극의 폭에도 영향을 받게 된다. 진성 영역이 InAsP/InGaP (1.3Q) 의 양자우물로 구성되었을 때, 도파관의 폭이 $2{\mu}m$, 진성영역의 두께가 $0.9{\mu}m$ 신호전극과 접지전극 사이의 간격이 $3{\mu}m$일 때 마이크로파 손실을 최소화 하며 광파와의 속도정합을 이루었으며 이때의 임피던스는 약 50${\Omega}$으로 광 변조기의 최적화를 이룰 수 있었다. FDTD를 이용하여 다양한 구조의 변화가 마이크로파에 미치는 영향을 분석 하였으며 이를 이용한 보다 정확한 소자 설계가 가능함을 보였다.

• 전자공학회논문지A
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• 제32A권12호
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• pp.80-90
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• 1995

In this paper, methods of designing CPW(coplanar waveguide) traveling-wave electrodes are described and their properties are discussed. Especially, the effect of buffer layer thickness to the microwave characteristics of the CPW electrodes are studied in detail. The trade-off relationship between buffer layer thickness and electro-optical properties of the devices are clearly revealde. The microwave characteristics and driving voltage can be further improved by using selected parameters suggested in this paper. To reduce time and effort in designing CPW electrode structure, exact analytical models are proposed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 센서 박막재료 반도체재료 기술교육
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• pp.111-118
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• 2002

A new lithium niobate optical modulator with a polymer buffer layer on Ni in-diffused optical waveguide is proposed for the fist time, successfully fabricated and examined at a wavelength of 1.3 mm. By determining the diffusion parameters of Ni in-diffused waveguide to achieve more desirable mode size which is well matched to the mode in the fiber, the detailed results on the achievement of high optical throughput are reported. In addition, the usefulness of polymer buffer layer which can be applicable to a buffer layer in Ni in-diffused waveguide devices is demonstrated. Several sets of channel waveguides fabricated on Z-cut lithium niobate by Ni in-diffusion were obtained and on which coplanar traveling-wave type electrodes with a polymer-employed buffer layer were developed by a conventional fabrication method for characterizing of electro-optical performances of the proposed device. The experimental results show that the measured half-wave voltage is of ~10 V and the total measured fiber-to-fiber insertion loss is of ~6.4 dB for a 40 mm long at a wavelength of =1.3 mm, respectively. From the experimental results, it is confirmed that the polymer-employed buffer layer in LiNbO3 optical modulator can be a substitute material instead of silicon oxide layer which is usually processed at a high temperature of over $300^{\circ}C$. Moreover, the fabrication tolerances by using polymer materials in LiNbO3 optical modulators are much less strict in comparison to the case of dielectric buffer layer.