• 한국전기전자재료학회논문지
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• 제13권12호
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• pp.1051-1057
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• 2000

A traveling-wave CPW(coplanar waveguide) electrode with abruptly broken input/output-taper for LiNbO$_3$optical modulator was designed and fabricated. The electrical characteristics of traveling-wave electrode on z-cut LiNbO$_3$crystal with SiO$_2$buffer layers were measured by network analyzer. To confirm the possibility of the electro-optic modulator electrode, detailed calculations of the impedance, microwave effective index and attenuation constants are presented as a function of the microwave electrode thickness, but the buffer layer thickness is fixed as 1${\mu}{\textrm}{m}$. These characteristics are discussed from the viewpoint of the device optimization and are expected to be design guides for the LiNbO$_3$modulator’s electrodes.

• 대한전자공학회논문지SD
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• 제39권7호
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• pp.37-45
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• 2002

본 논문에서는 3차원 FDTD를 이용하여 진행파형 흡수 CPW(Coplanar waveguide) 광 변조기의 마이크로파 특성을 분석하여 최적화 설계하였다. 진행파형 구조에 있어서 마이크로파의 특성은 진성 영역의 두께와 폭에 영향을 받게 되고 신호전극과 접지전극의 위치와 신호전극의 폭에도 영향을 받게 된다. 진성 영역이 InAsP/InGaP (1.3Q) 의 양자우물로 구성되었을 때, 도파관의 폭이 $2{\mu}m$, 진성영역의 두께가 $0.9{\mu}m$ 신호전극과 접지전극 사이의 간격이 $3{\mu}m$일 때 마이크로파 손실을 최소화 하며 광파와의 속도정합을 이루었으며 이때의 임피던스는 약 50${\Omega}$으로 광 변조기의 최적화를 이룰 수 있었다. FDTD를 이용하여 다양한 구조의 변화가 마이크로파에 미치는 영향을 분석 하였으며 이를 이용한 보다 정확한 소자 설계가 가능함을 보였다.

• 한국통신학회논문지
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• 제19권9호
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• pp.1782-1792
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• 1994

$Ti:LiNbO_3$채널형 광도파로와 Asymmetric Coplanar Strip(ACPS) 전극구조를 이용해서, $1.3{\mu}m$에서 동작하는 진형파형 위상 광변조기를 설계, 제작한 다음 변조특성을 관찰하였다. 위상정합이 개선되도록 ACPS 진행파형 전극을 설계하기 위해서 전극과 완충박막의 두께를 포함하여, 전극제원의 해석적 함수로 특성저항, 변조파의 유효굴절률 및 전극손실 등을 고려하였다. Ti 확산방법으로 저손실 채널형 광도파로 제작하였으며, double-spin image reversal 공정을 이용해서 $2.5{\mu}m$ 두께의 전극을 형성하였다. 9GHz 부근에서의 전극구조 공진형상 때문에 변조특성이 제한 되었지만, 2.5GHz 까지는 큰 왜곡없이 변조특성이 관찰되었다.

• 한국광학회:학술대회논문집
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• 한국광학회 1989년도 제4회 파동 및 레이저 학술발표회 4th Conference on Waves and lasers 논문집 - 한국광학회
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• pp.165-168
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• 1989

A finite-element method is developed to calculate the impedance of arbitrarily shaped electrodes on traveling-wave modulators. This method employs the divergence theorem to obtain the total charge on an electrode from the node potential values. By using this method, the impedance of multi strip-line electrodes on anisotropic inhomogeneous dielectric media was analysed and the effect of non-zero electrode thickness was calculated.

• 전자공학회논문지A
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• 제32A권2호
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• pp.96-110
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• 1995

Traveling-wave electrodes for the high-speed Ti:LiNbO$_{3}$ modulators are designed. For a solution to the problems of 1) phase-velocity mismatching between the optical wave and the Modulating M/W, 2) M/W electrode characteristic impedance mismateching, we assume devices with 1$\mu$m thick SiO$_{2}$ buffer layer between the electrode and the Ti:LiNbO$_{3}$ substrate. The electrode analyses are performed by the FEM using the second-order triangular elements. The optimum design parameters to satisfy the phase-velocity matching and the characteristic impedance matching are sought for. By use of the analyses' results, a Mach-Zehnder optical modulator with a CPW electrode is designed as an example. the band-width estimation is also illustrated.

• E2M - 전기 전자와 첨단 소재
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• 제9권1호
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• pp.51-58
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• 1996

This report describes thick traveling-wave electrode formation and microwave transmission characteristics of the fabricated electrodes. Effective refractive indices of the microwave in the 5 micron CPW type traveling-wave electrodes is around 2.45 according to the results of time domain S parameter measurements. The bandwidth of the electrodes is about 10 GHz and could be extended to 15 GHz through optimization of the process. The developed process technique that enables plating of micropatterns upto 20 micron can be applied to broadband optical intensity modulators.

• 전자공학회논문지A
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• 제29A권8호
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• pp.41-48
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• 1992

The characteristics of traveling-wave electrodes for high-frequency electroptic integrated devices are described from the view point of improvement of phase-matching based on the conformal mapping method. Specific calculations of the characteristic impedance, effective microwave index, and eletrode loss for asymmetric coplanar strip(ACPS) and coplanar waveguide(CPW) electrode structures are presented as a function of the geometric electrode parameters including the electrode thickness and buffer layer thickness. 5-10(x10S0-6Tm) thick Au-ACPS electrodes were successfully fabricated by electroplating and ECR etcher. The improvement of modulation bandwidth can be theoretically observed from the combination of electrode and buffer layer thickness.

• 한국진공학회지
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• 제6권S1호
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• pp.89-95
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• 1997

A new type of piexoelectric membrane traveling wave motor has been designed and forbricated. The small motor is composed by the stator which is the combination of annular/circular membrane and metal elastic base using as the common electrode at some time and the rotor which is placed on the metal elastic body. Thus the motor structure is simple and easy to fabricate. The material of a piezoelectric membrane is fabricated by sol-gel method or wear-down method. A piezoelectric traveling wave motor has been fabricated with the stator diameter 8mm The total thickness of the stator is 350$\mu$m. Under the alternative excitation voltage 10-12V the revolving speed of the rotor is more than 100RPM.

• 한국광학회:학술대회논문집
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• 한국광학회 2002년도 제13회 정기총회 및 2002년도 동계학술발표회
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• pp.188-189
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• 2002

• 한국군사과학기술학회지
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• 제24권6호
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• pp.610-618
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• 2021

In this paper, a photonic-based microwave system technology is described, and a traveling-wave electro-optic modulator is designed and manufactured as a key component. The fabricated modulator is composed of a metal diffusion waveguide for optical transmission and a planar waveguide electrode on lithium niobate substrate for microwave transmission. The electro-optic response bandwidth of I and Q channels in a fabricated dual parallel Mach-Zehnder modulator were measured for 27.67 and 28.11 GHz, respectively. Photonic four times up-converted X-band frequency and linear frequency modulated signal were confirmed using the fabricated electro-optic modulator by S-band input signal. The confirmed broadband signal can be applied to a microwave system for surveillance and high-resolution ISAR imaging.