• 한국전기전자재료학회논문지
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• 제13권12호
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• pp.1051-1057
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• 2000

A traveling-wave CPW(coplanar waveguide) electrode with abruptly broken input/output-taper for LiNbO$_3$optical modulator was designed and fabricated. The electrical characteristics of traveling-wave electrode on z-cut LiNbO$_3$crystal with SiO$_2$buffer layers were measured by network analyzer. To confirm the possibility of the electro-optic modulator electrode, detailed calculations of the impedance, microwave effective index and attenuation constants are presented as a function of the microwave electrode thickness, but the buffer layer thickness is fixed as 1${\mu}{\textrm}{m}$. These characteristics are discussed from the viewpoint of the device optimization and are expected to be design guides for the LiNbO$_3$modulator’s electrodes.

• E2M - 전기 전자와 첨단 소재
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• 제9권1호
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• pp.51-58
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• 1996

This report describes thick traveling-wave electrode formation and microwave transmission characteristics of the fabricated electrodes. Effective refractive indices of the microwave in the 5 micron CPW type traveling-wave electrodes is around 2.45 according to the results of time domain S parameter measurements. The bandwidth of the electrodes is about 10 GHz and could be extended to 15 GHz through optimization of the process. The developed process technique that enables plating of micropatterns upto 20 micron can be applied to broadband optical intensity modulators.

• 전자공학회논문지A
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• 제32A권2호
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• pp.96-110
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• 1995

Traveling-wave electrodes for the high-speed Ti:LiNbO$_{3}$ modulators are designed. For a solution to the problems of 1) phase-velocity mismatching between the optical wave and the Modulating M/W, 2) M/W electrode characteristic impedance mismateching, we assume devices with 1$\mu$m thick SiO$_{2}$ buffer layer between the electrode and the Ti:LiNbO$_{3}$ substrate. The electrode analyses are performed by the FEM using the second-order triangular elements. The optimum design parameters to satisfy the phase-velocity matching and the characteristic impedance matching are sought for. By use of the analyses' results, a Mach-Zehnder optical modulator with a CPW electrode is designed as an example. the band-width estimation is also illustrated.

• 전자공학회논문지A
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• 제29A권8호
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• pp.41-48
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• 1992

The characteristics of traveling-wave electrodes for high-frequency electroptic integrated devices are described from the view point of improvement of phase-matching based on the conformal mapping method. Specific calculations of the characteristic impedance, effective microwave index, and eletrode loss for asymmetric coplanar strip(ACPS) and coplanar waveguide(CPW) electrode structures are presented as a function of the geometric electrode parameters including the electrode thickness and buffer layer thickness. 5-10(x10S0-6Tm) thick Au-ACPS electrodes were successfully fabricated by electroplating and ECR etcher. The improvement of modulation bandwidth can be theoretically observed from the combination of electrode and buffer layer thickness.

• 대한전자공학회논문지SD
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• 제39권7호
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• pp.37-45
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• 2002

본 논문에서는 3차원 FDTD를 이용하여 진행파형 흡수 CPW(Coplanar waveguide) 광 변조기의 마이크로파 특성을 분석하여 최적화 설계하였다. 진행파형 구조에 있어서 마이크로파의 특성은 진성 영역의 두께와 폭에 영향을 받게 되고 신호전극과 접지전극의 위치와 신호전극의 폭에도 영향을 받게 된다. 진성 영역이 InAsP/InGaP (1.3Q) 의 양자우물로 구성되었을 때, 도파관의 폭이 $2{\mu}m$, 진성영역의 두께가 $0.9{\mu}m$ 신호전극과 접지전극 사이의 간격이 $3{\mu}m$일 때 마이크로파 손실을 최소화 하며 광파와의 속도정합을 이루었으며 이때의 임피던스는 약 50${\Omega}$으로 광 변조기의 최적화를 이룰 수 있었다. FDTD를 이용하여 다양한 구조의 변화가 마이크로파에 미치는 영향을 분석 하였으며 이를 이용한 보다 정확한 소자 설계가 가능함을 보였다.

• 전자공학회논문지A
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• 제32A권12호
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• pp.80-90
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• 1995

In this paper, methods of designing CPW(coplanar waveguide) traveling-wave electrodes are described and their properties are discussed. Especially, the effect of buffer layer thickness to the microwave characteristics of the CPW electrodes are studied in detail. The trade-off relationship between buffer layer thickness and electro-optical properties of the devices are clearly revealde. The microwave characteristics and driving voltage can be further improved by using selected parameters suggested in this paper. To reduce time and effort in designing CPW electrode structure, exact analytical models are proposed.

• 대한전자공학회논문지SD
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• 제37권11호
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• pp.50-58
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• 2000

Goodved $SiO_2$ 박막을 갖는 Mach-Zehnder(M-Z)형태의 $Ti:LiNbO_3$ 진행파 광변조기의 전극구조를 변화시켜가며 유한요소법에 의한 해석을 수행하였다. 최적의 설계치를 추출하였으며, 제작된 전극에 대하여 특성임피던스($Z_o$), 마이크로파 유효굴절률($N_{eff}$), 감쇠정수($a_o$)를 측정하여 그 결과를 이론치와 비교하였다. 전극두께가 11${\mu}m$이고, $SiO_2$ 완중박막을 식각한 전극에 대하여, RF 측정결과로부터 계산된 3dB 변조대역폭은 18GHz로 나타났다.