The Study of Electron Transport coefficients in $SiH_4$ -Ar Mixtures by Using Boltzmann Equation Analysis and Monte-Carlo Simulation
(볼츠만방정식과 몬테칼로법에 의한 $SiH_4$ -Ar 혼합가스의 전자수송계수에 관한 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.14 no.2
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- pp.169-174
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- 2001