• 제어로봇시스템학회논문지
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• 제14권6호
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.19-23
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• 1998

Water tree degradations have been considered as one of the most important causes of failure in underground distribution cables with polymeric insulation. Water tree growth is a preliminary step in the sequence of electrical tree initiation and electrical breakdown of the insulation. In this paper, needle electrode is made use of the etching methods and the pellet type specimen is made to observe the water tree in succession. In previous methods are able to observe the tree degradations without cutting and dyeing. The water tree image is recorded on VTR with CCD camera. The tree length of X, Y axis direction and aging area(treeing area) are calculated with image measurement. As a result of this study, water tree is observed by non-destructive method. Electrical tree is initiated from needle electrode tip only but water tree is initiated from total area of water electrode. Electrical tree owing to water treeing is initiated at low electric field and grown with discontinuously. Namely, water tree is shown up a different characteristics of tree growth.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.152-153
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• 2007

This paper describes a resonant driving piezoelectric micro cantilever practicable to ultrasound thrombolysis device for the treatment of ischemic stroke. The proposed piezoelectric cantilever was designed to be a unimorph structure of Si/$SiO_2$/Ti/Pt/PZT/Pt, and fabricated by top-down sequence etching process. The red blood cell (RBC) lysis experiment was carried out to confirm the usability of the proposed cantilever. Total 87.76 % of RBCs were ruptured using the ultrasound generated by up-down actuations of the fabricated cantilever with AC voltage having the frequency of 19.36 Hz and the magnitude of $30V_{p-p}$.

• 한국재료학회지
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• 제6권11호
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• pp.1127-1135
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• 1996

반도체 소자가 고집적화 됨에 따라 단위공정의 수가 증가하게 되었고 동시에 실리콘 기판의 오염에 대한 문제가 증가하였다. 실리콘 기판의 주 오염물로는 유기물, 파티클, 금속분순물 등이 있으며 특히, Cu와 Fe과 같은 금속불순물은 이온주입 공정, reactive ion etching, photoresist ashing과 같은 실 공정 중에 1011-1013atoms/㎤정도로 오염이 되고 있다. 그러나 금속불순물 중 Cu와 같은 전기음성도가 실리콘 보다 큰 오염물질은 일반적인 습석세정방법으로는 제거하기 힘들다. 따라서 본 연구에서는 Cu와 Fe과 같은 금속불순물을 제거할 목적을 건식과 습식 세정방법을 혼합한 UV/ozone과 HF세정을 제안하여 실시하였다. CuCI2와 FeCI2 표준용액으로 실리콘 기판을 인위적 오염한 후 split 1(HF-only), split 2 (UV/ozone+HF), split 3 (UV/ozone + HF 2번 반복), split 4(UV/ozone-HF 3번 반복)를 실시하였고 TXRF(Total Reflection X-Ray Fluorescence)와 AFM(Atomic Force Microscope)으로 금속불순물 제거량과 표면거칠기를 각각 측정하였다. 또한 contact angle 측정으로 세정에 따른 표면상태도 측정하였다. TXRF 측정결과 split 4가 가장 적은 양의 금속불순물 잔류량을 보였으며 AFM 분석을 통한 표면거칠기도 가장 작은 RMS 값을 나타내었다. Contact angle 측정 결과 UV/ozone 처리는 친수성 표면을 형성하였고 HF처리는 소수성 표면을 형성하였다.

• Restorative Dentistry and Endodontics
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• 제12권2호
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• pp.101-108
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• 1987

The purpose of this study was to investigate the pulpal responses of dental adhesive resins. A total of 40 cavities of the permanent healthy teeth from 4 dogs were prepared. In the experimental group, the cavities were etched for 1 minute with citric acid and filled with experimental resins (ie. Super-Bond C & B$^{(R)}$). In the control group, the cavities were filled with calcium hydroxide base materials (ie. Dycal$^{(R)}$) without etching. The dogs were sacrificed at one, two, three and four weeks after the time of filling and the specimens were routinely prepared and stained with Hematoxylin-Eosin. The microscopic findings were as follows: Infiltration of inflammatory cells was not observed in both experimental and control groups. Change in the odontoblastic layer was not observed in all control groups but severe swelling was observed in deep dental pulp tissue of the control two and three week cases. Pulp tissue was recovered with plenty of fibrous component in the control four week case and reparative dentin formation was not occurred in all cases. Slight changes of the odontoblastic layer beneath the cavity were observed in the experimental one week case. In experimental two and three week cases, swelling of deep pulp tissue was increased and localized reparative dentin formation was observed. In the experimental four week case, odontoblastic layer was recovered with regular appearance and fibrous component of the pulp was increased, but reparative dentin formation was not evident.

• Journal of Periodontal and Implant Science
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• 제39권3호
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• pp.293-301
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• 2009

Purpose: The purpose of this study is to show the total survival rate of implants with maxillary sinus floor elevation and the effects that reach the survival rate by classifying types of graft materials, implant surface, operation method, bone height. Methods: In a total of 131 patients, 251 implants with sinus floor elevation were installed simultaneously or after regular healing. Various bone grafts (autograft, xonograft, allograft, alloplast) and implant surface (MTX-HA implant, chemical etching implant, Titanium oxide surface implant, resorbable blasting media implant, resorbable blast texturing implant, HA-coated implant) were used. All implants were investigated clinically and radiographically, being with 1 to 5 years follow-up period after installation. Results: The survival rate of 251 implants with maxillary sinus floor elevation was 94%. The types of implant, surface, graft material, bone height have no statistically signi-ficant differencies. Conclusions: It can be suggested that maxillary sinus floor elevation may have predictable result with various bone graft materials and implant surface.

• 대한환경공학회지
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• 제35권4호
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• pp.257-262
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• 2013

불산(HF)을 함유한 폐수는 주로 불소이온($F^-$)과 불화붕산염($BF{_4}{^-}$)을 포함하고 있으며, 불산 폐수처리는 보편적으로 칼슘을 이용한 응집 침전 공정을 사용하고 있다. 불소이온은 칼슘이온에 의해 높은 제거효율을 나타내지만 불화붕산염($BF{_4}{^-}$)의 경우 반응성이 낮아 총 불소 제거에 많은 어려움이 있다. 본 연구의 목적은 알루미늄을 이용하여 불화붕산염을 분해하여 총 불소 제거 효율을 향상 시키는데 있다. 불소처리공정 모사 반응기를 이용하여 pH, 알루미늄 주입량, 수온에 따른 불화붕산염의 분해 실험을 실시하였다. 실험결과 알루미늄을 이용한 불화붕산염 분해는 낮은 pH와 높은 수온 그리고 Al/T-F (Aluminum/Total Fluoride) mole ratio가 증가할수록 분해속도도 증가하였으며 반응시간 120분 후에는 큰 농도변화가 없는 것으로 나타났다. 연구결과 알루미늄을 이용한 처리를 통하여 불화붕산염을 포함한 폐수의 처리효율을 향상시킬 수 있을 것으로 판단된다.

• Korean Chemical Engineering Research
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• 제49권4호
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• pp.485-490
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• 2011

사불화탄소($CF_4$)는 반도체 제조공정에서 에칭과 반응기 세척에서 사용되어온 가스이다. $CF_4$는 적외선을 강하게 흡수하고 대기 중 잔류시간이 길어서 지구온난화에 영향을 미치기 때문에 고효율의 분해가 필요하다. 본 연구에서는 플라즈마와 워터젯을 결합하여 워터젯 글라이딩 아크 플라즈마 시스템을 개발하고, 이를 이용하여 $CF_4$를 고효율로 분해할 수 있도록 방전영역을 증가시키고 다량의 OH 라디칼을 생성시킬 수 있는 최적의 조업 조건을 결정하였다. 공정 실험 변수로는 워터젯 주입량, $CF_4$ 초기 농도, 전체 가스량과 주입에너지량(SEI : Specific energy input)을 선정하였다. 변수실험을 통하여 워터젯 주입량이 25.5 mL/min, $CF_4$ 초기 농도 2.2%, 전체 가스량 9.2 L/min, SEI 7.2 kJ/L일 때 $CF_4$ 분해율은 최고 97%까지 도달하였다.

• Journal of Periodontal and Implant Science
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• 제49권1호
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• pp.25-38
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• 2019

Purpose: This study evaluated differences in bone healing and remodeling among 3 implants with different surfaces: sandblasting and large-grit acid etching (SLA; IS-III $Active^{(R)}$), SLA with hydroxyapatite nanocoating (IS-III $Bioactive^{(R)}$), and SLA stored in sodium chloride solution ($SLActive^{(R)}$). Methods: The mandibular second, third, and fourth premolars of 9 dogs were extracted. After 4 weeks, 9 dogs with edentulous alveolar ridges underwent surgical placement of 3 implants bilaterally and were allowed to heal for 2, 4, or 12 weeks. Histologic and histomorphometric analyses were performed on 54 stained slides based on the following parameters: vertical marginal bone loss at the buccal and lingual aspects of the implant (b-MBL and l-MBL, respectively), mineralized bone-to-implant contact (mBIC), osteoid-to-implant contact (OIC), total bone-to-implant contact (tBIC), mineralized bone area fraction occupied (mBAFO), osteoid area fraction occupied (OAFO), and total bone area fraction occupied (tBAFO) in the threads of the region of interest. Two-way analysis of variance (3 types of implant $surface{\times}3$ healing time periods) and additional analyses for simple effects were performed. Results: Statistically significant differences were observed across the implant surfaces for OIC, mBIC, tBIC, OAFO, and tBAFO. Statistically significant differences were observed over time for l-MBL, mBIC, tBIC, mBAFO, and tBAFO. In addition, an interaction effect between the implant surface and the healing time period was observed for mBIC, tBIC, and mBAFO. Conclusions: Our results suggest that implant surface wettability facilitates bone healing dynamics, which could be attributed to the improvement of early osseointegration. In addition, osteoblasts might become more activated with the use of HA-coated surface implants than with hydrophobic surface implants in the remodeling phase.

• 대한치과교정학회지
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• 제40권4호
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• pp.260-266
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• 2010

본 연구의 목적은 서로 다른 종류의 접착시스템과 법랑질 보호제 등이 설측 브라켓의 인장강도에 영향을 미치는지 알아보는데 있다. 75개의 발치된 하악 전치를 5개의 그룹으로 임의로 나눈 후 설측 브라켓을 부착하였다. Group 1은 Transbond XT를, Group 2는 Transbond XT와 함께 불소 유리레진(Ortho-coat)을 Group 3는 Transbond XT와 Chlorohexidine varnish (Cervitec Plus)를 Group 4는 광중합 접착제(Aegis Ortho)를 Group 5는 antimicrobial self-etching primer (Clearfil Protect Bond)을 사용하였다. 불소유리 레진이나 Chlorohexidine varnish의 사용유무는 접착력에 영향을 미치지 못하였다. Group 5이 다른 그룹에 비해 접착력과 접착제 잔류지수(adhesive remnant index, ARI)가 통계적으로 유의하게 높았다 (p < 0.001). 법랑질 보호제 적용 시 설측 브라켓의 접착력에 부정적인 영향을 미치지 못하였다. 이상의 결과로 이번에 사용한 제품들은 설측 교정치료 기간 동안 환자의 구강위생을 개선시킬 수 있어 환자와 술자에게 도움을 줄 수 있을 것이다. 그러나 에나멜 층이 얇은 경우 Clearfil Protect Bond의 과도한 접착강도에 대해 고려해야 할 것이다.