• Title/Summary/Keyword: ToF sensor

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Design and Fabrication of Capacitive Pressure Sensor (용량형 압력센서의 설계 및 제작)

  • 이승준;김병태;권영수;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.561-564
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    • 2000
  • Silicon capacitive pressure sensor has been fabricated by using electrochemical etching stop and silicon-to-glass electrostatic bonding technique. A diaphragm structure is designed to compensate the nonlinear response. A cavity is etched into the silicon to the depth of 2$\mu\textrm{m}$ by anisotropic etching in 20wt.% TMAH solution at 80$^{\circ}C$. A fabricated sensor showed 3.3 pF zero-pressure capacitance, 297 pp.m/mmHg sensitivity, and a 7.4 7%F.S. nonlinear response in a 0-1 kgf/cm$^2$pressure range.

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Augmented Feature Point Initialization Method for Vision/Lidar Aided 6-DoF Bearing-Only Inertial SLAM

  • Yun, Sukchang;Lee, Byoungjin;Kim, Yeon-Jo;Lee, Young Jae;Sung, Sangkyung
    • Journal of Electrical Engineering and Technology
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    • v.11 no.6
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    • pp.1846-1856
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    • 2016
  • This study proposes a novel feature point initialization method in order to improve the accuracy of feature point positions by fusing a vision sensor and a lidar. The initialization is a process that determines three dimensional positions of feature points through two dimensional image data, which has a direct influence on performance of a 6-DoF bearing-only SLAM. Prior to the initialization, an extrinsic calibration method which estimates rotational and translational relationships between a vision sensor and lidar using multiple calibration tools was employed, then the feature point initialization method based on the estimated extrinsic calibration parameters was presented. In this process, in order to improve performance of the accuracy of the initialized feature points, an iterative automatic scaling parameter tuning technique was presented. The validity of the proposed feature point initialization method was verified in a 6-DoF bearing-only SLAM framework through an indoor and outdoor tests that compare estimation performance with the previous initialization method.

Development of Capacitive Type Humidity Sensor using Polyimide as Sensing Layer (폴리이미드를 감지층으로 이용한 정전용량형 습도센서 개발)

  • Hong, Soung-Wook;Kim, Young-Min;Yoon, Young-Chul
    • The Journal of Korea Institute of Information, Electronics, and Communication Technology
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    • v.12 no.4
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    • pp.366-372
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    • 2019
  • In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

MEMS based capacitive biosensor for real time detection of bacterial growth (실시간 박테리아 감지를 위한 정전용량방식의 MEMS 바이오센서)

  • Seo, Hye-Kyoung;Lim, Dae-Ho;Lim, Mi-Hwa;Kim, Jong-Baeg;Shin, Jeon-Soo;Kim, Yong-Jun
    • Journal of Sensor Science and Technology
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    • v.17 no.3
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    • pp.195-202
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    • 2008
  • A biosensor based on the measurement of capacitance changes has been designed and fabricated for simple and realtime detection of bacteria. Compared to an impedance measurement technique, the capacitance measurement can make additional measurement circuits simpler, which improves a compatability for integration between the sensor and circuit. The fabricated sensor was characterized by detecting Escherichia coli(E. coli). The capacitance changes measured by the sensor were proportional to E. coli cell density, and the proposed sensor could detect $1{\times}10^6$ cfu/ml E. coli at least. The real-time detection was verified by measuring the capacitance every 20 minutes. After 7 hours of E. coli growth experiment, the capacitance of the sensor in the micro volume well with $4.5{\times}10^5$ cfu/ml of initial E. coli density increased by 20 pF, and that in another wells with $1.5{\times}10^6$ cfu/ml and $8.5{\times}10^7$ cfu/ml initial E. coli density increased by 56 pF and 71 pF, respectively. The proposed sensor has a possibility of the real-time detection for bacterial growth, and can detect E. coli cells with $1.8{\times}10^5$ cfu in nutrient broth in 5 hours.

MEASUREMENT OF $CO_2$ CONCENTRATION AND A/F RATIO USING FAST NDIR ANALYZER ON TRANSIENT CONDITION OF SI ENGINE

  • Lee, S.W.;Kim, W.S.;Lee, J.H.;Park, J.I.;Yoo, J.S.
    • International Journal of Automotive Technology
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    • v.7 no.4
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    • pp.385-390
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    • 2006
  • A fast response $CO_2$ analyzer has been developed to study transient characteristics on an SI engine. The analyzer has the delay time of 4.5 ms and time constant of 2.8 ms, which is fast enough to measure $CO_2$ concentration on a transient condition. Wide range of A/F(Air/Fuel) ratio can be estimated using the analyzer with an additional switch type oxygen sensor. The results of measurement of $CO_2$ concentration and A/F ratio on a transient condition including rapid acceleration/deceleration and EGR(Ehxaust Gas Recirculation) on/off are presented and compared with a commercial exhaust gas analyzer and UEGO(Universial Exhaust Gas Oxyzen) sensor.

A Proposal of Intellect Database Using Bluetooth (BlueTooth를 이용한 지능형 데이터베이스 제안)

  • Kong Whue-Sik;Han Sang-Woo;Choi Jong-Jin
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2006.05a
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    • pp.328-331
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    • 2006
  • In Ubiquitous age, data collection that using wireless sensor node is increasing necessity. In this paper, collect data because uses PIC16F877 and Bluetooth, and constructs database in PC. The PIC16F877 is control radio sensor node. The PC construct to propose algorithm that updates control data with table. It is changes sensing cycle time of node into intelligence style because compare collected data of DB. Result of study inexpensive , and practical, and I can apply to industry spot constructing system briefly.

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Implementation of Multi-function Sensor Module for Vessel Safety Monitoring (어선안전 모니터링 다기능 센서 모듈의 구현)

  • Choi, Jo-Cheon;Cho, Seung-Il;Kim, Seong-Kweon;Kim, Jai-Hyun;Choi, Gyoo-Seok;Cha, Jea-Sang
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.9 no.6
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    • pp.135-139
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    • 2009
  • In order to cope with safety issues regarding fisher vessels, a device is required with the real-time monitoring for the safety and risk factors for a capability of informing and alerting function. In embedded modules, there is a trouble that we should design device drivers and application programs for usage of the multi-function sensors in order to detect risk factors. In this paper, we designed hardware circuit and implemented control program of the sensor part using PIC18F, in order to control and process the input and output data of multi-function sensors without device drivers and application programs. We confirmed the operation of multi-function sensor module to generate output data according to sensor operation.

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Study on Angular Rate Sensor using Sol-Gel PZT thin film (Sol-gel 압전체 박막을 이용한 각속도 센서에 대한 연구)

  • Lee, S. H.;R. Meada;M. Esashi
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.34-34
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    • 2003
  • Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

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Low Noise and Low Power IC Using Opamp Sharing Technique for Capacitive Micro-Sensor Sensing Platform (증폭기 공유 기법을 이용한 저전력 저잡음 용량형 센서용 신호 처리 IC)

  • Park, Yunjong;Kim, Choul-Young;Jung, Bang Chul;Yoo, Hoyoung;Ko, Hyoungho
    • Journal of Sensor Science and Technology
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    • v.26 no.1
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    • pp.60-65
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    • 2017
  • This paper describes the low noise and low power IC using the opamp sharing technique for the capacitive micro-sensor sensing platform. The proposed IC reduces noise using correlated double sampling (CDS) and reduces power consumption using the opamp sharing technique. The IC is designed to be fully programmable, and can be digitally controlled by serial peripheral interface (SPI). The power consumption and the integrated input referred noise are 1.02 mW from a 3.3 V supply voltage and $0.164aF_{RMS}$ with a bandwidth of 400 Hz. The capacitive sensitivity, the input-output linearity and the figure of merits (FoM) are 2.5 mV/fF, 2.46 %FSO, and 8.4, respectively.

Improvement of Class Reuse at Sensor Network System Based on TinyOS Using CATL Model and Facade Pattern (CATL 모델과 Facade 패턴을 이용한 TinyOS 기반 센서네트워크 시스템 클래스 재사용 개선)

  • Baek, Jeong-Ho;Lee, Hong-Ro
    • Journal of the Korean Association of Geographic Information Studies
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    • v.15 no.2
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    • pp.46-56
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    • 2012
  • Recently, when software architecture is designed, the efficiency of reusability is emphasized. The reusability of the design can raise the quality of GIS software, and reduce the cost of maintenance. Because the object oriented GoF design pattern provides the class hierarchy that can represent repetitively, the importance is emphasized more. This method that designs the GIS software can be applied from various application systems. A multiple distributed sensor network system is composed of the complex structure that each node of the sensor network nodes has different functions and sensor nodes and server are designed by the combination of many classes. Furthermore, this sensor network system may be changed into more complex systems according to a particular purpose of software designer. This paper will design the CATL model by applying Facade pattern that can enhance the efficiency of reuse according to attributes and behaviors in classes in order to implement the complicated structure of the multiple distributed sensor network system based on TinyOS. Therefore, our object oriented GIS design pattern model will be expected to utilize efficiently for design, update, or maintenance, etc. of new systems by packing up attributes and behaviors of classes at complex sensor network systems.