• 제목/요약/키워드: Titanium film

검색결과 388건 처리시간 0.027초

졸-겔 방법으로 제조한 TiN 박막에 관한 연구 (A Study on the TiN Thin Film by Sol-Gel Method)

  • 김왕섭;선효님;김경용;김병호
    • 한국세라믹학회지
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    • 제29권4호
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    • pp.328-334
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    • 1992
  • TiO2 sols were prepared by hydrolysis and polymerization of titanium tetra-isopropoxide (TTIP) in the presence of diethanolamine (DEA). The optimal mole ratio of water to TTIP is 2 and the concentration of the TiO2 sol 0.7 M. Golden TiN films without cracks were obtained by dipping Si(110) wafers into the TiO2 sol and followed by nitridation in NH3 at 1100$^{\circ}C$ for 5 h. The TiN films were studied by an optical microscope, DTA, TGA and X-ray analysis.

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Self-Assembled $TiO_2$ and Polyelectrolyte Multilayer as OTFT Gate Insulator

  • Moon, Zi-Su;Kim, Hong-Doo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1422-1424
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    • 2009
  • Modified self-assembled $TiO_2$ and polyelectrolyte multilayer film have been used as OTFT insulator. Both films were used as gate insulator and their thickness were reduced to the order of 10nm. The operating voltage of OTFT was substantially reduced due to nanoscale thickness of titanium oxide and polyelectrolyte multilayer. Pentacene-based OTFT characteristics will be discussed.

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Preparation and Electric Properties of PbTiO$_3$Thin Films by Low-pressure Thermal Plasma Deposition

  • Nagata, Shingo;Wakiya, Naoki;Shinozaki, Kazuo;Mizutani, Nobuyasu
    • The Korean Journal of Ceramics
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    • 제7권1호
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    • pp.20-25
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    • 2001
  • PbTiO$_3$ thin films were prepared by low-pressure thermal plasma deposition on (100)Pt/(100)MgO substrates. Mist of source material in which metal alkoxides are dissolved in 2-methoxyethanol was introduced into plasma through heating furnace and deposited onto substrates at $600^{\circ}C$. As-deposited PbTiO$_3$/Pt/MgO thin film prepared at 1.33$\times$10$^4$ Pa was grown epitaxially, but was consisted of many rectangular shaped grains, with many grain boundaries and it was impossible to measure electric properties. As-deposited film prepared at 1.00$\times$10$^4$ Pa showed weak peaks of X-ray diffraction and the film was not grown epitaxially. On the other hand, the film after annealed at $700^{\circ}C$ showed strong diffraction peaks and epitaxial growth was also observed. For annealed film, moreover, no clear grain boundaries were observed. The value of ${\varepsilon}_r$, tan${\delta}$, Pr and Ec of annealed film were 160, 3.2%, 10.4${\mu}$C.cm$^-2$ and 51.2kV.cm$^-1$, respectively. Since the composition, Pb/Ti, measured by EDS attaching to SEM changed point by point, the distribution of composition in annealed film was investigated and found out several relations between composition and electric properties. At stoichiometric composition, Pr and Ec showed the lowest value and they gradually became large as composition deviated from stoichiometric one. Moreover, the value of ${\varepsilon}_r$ became gradually large as the ratio of Ti became high.

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Quantitative Comparison of the Photocatalytic Efficiency of TiO2 Nanotube Film and TiO2 Powder

  • Jang, Jun-Won;Park, Sung Jik;Park, Jae-Woo
    • 한국지하수토양환경학회지:지하수토양환경
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    • 제21권2호
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    • pp.8-14
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    • 2016
  • We compared the plausible reaction mechanism and quantitative efficiency of highly self-organized TiO2 nanotube (ntTiO2) film with TiO2 powder. Film was fabricated by electrochemical potentiostatic anodization of titanium thin film in an ethylene-glycol electrolyte solution containing 0.3 wt% NH4F and 2 vol% deionized water. Nanotubes with a pore size of 80-100 nm were formed by anodization at 60 V for 3 h. Humic acid (HA) was degraded through photocatalytic degradation using the ntTiO2 film. Pseudo first-order rate constants for 0.3 g of ntTiO2, 0.3 g TiO2 powder, and 1 g TiO2 powder were 0.081 min−1, 0.003 min−1, and 0.044 min−1, respectively. HA adsorption on the ntTiO2 film was minimal while adsorption on the TiO2 powder was about 20% based on thermogravimetric analysis. Approximately five-fold more normalized OH radicals were generated by the ntTiO2 film than the TiO2 powder. These quantitative findings explain why ntTiO2 film showed superior photocatalytic performance to TiO2 powder.

화학적 처리가 티타늄의 생체활성도에 미치는 영향 (EFFECT OF CHEMICAL TREATMENT ON THE BIOACTIVITY OF TITANIUM)

  • 민관식;이민호;안승근;박찬운
    • 대한치과보철학회지
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    • 제43권4호
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    • pp.562-572
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    • 2005
  • Statement of problem : Titanium is widely used as an implant material lot artificial teeth. Also, studies on surface treatment to form a fine passive film on the surface of commercial titanium or its alloys and improving bioactivity with bone have been carried out. However, there is insufficient data about the biocompatibility of the implant materials in the body. Purpose: The purpose of this study was to examine whether the precipitation of apatite on titanium metal is affected by surface modification. Materials and methods: Specimens chemically washed for 2 minute in a 1:1:1.5 (in vol%) mixture of 48% HF 60% $HNO_3$ and distilled water. Specimens were then chemically treated with a solution containing 97% $H_2SO_4$ and 30% $H_2O_2$ at $40^{\circ}C$S for 1 hour, and subsequently heat-treated at $400^{\circ}C$ for 1 hour. All specimens were immersed in the HBSS with pH 7.4 at $36.5^{\circ}C$ for 15 days, and the surface were examined with TF-XRD, SEM, EDX and XPS. Also, commercial purity Ti specimens with and without surface treatment were implanted in the abdominal connective tissue of mice for 4 weeks. Conventional aluminium and stainless steel 316L were also implanted for comparison. Results and conclusions : The results obtained were summarized as follows. 1. An amorphous titania gel layer was formed on the titanium surface after the titanium specimen was treated with a $H_2SO_4$ and $H_2O_2$ solution. The average roughness was $2.175{\mu}m$ after chemical surface treatment. 2. The amorphous titania was subsequently transformed into anatase by heat treatment at $400^{\circ}C$ for 1 hour. 3. The average thickness of the fibrous capsule surrounding the specimens implanted in the connective tissue was $46.98{\mu}m$ in chemically-treated Ti, and 52.20, 168.65 and $100.95{\mu}m$ respectively in commercial pure Ti, aluminum and stainless steel 316L without any treatment.

단일 분절 퇴행성 경추질환에서 Titanium Cage를 이용한 전방 융합술의 조기 치험 : 골편 이식을 동반하지 않은 경우의 임상적 방사선학적 초기 결과 (Preliminary Experience with Cervical Implantable Titanium Cage(RABEA) in Patients with Monosegmental Degenerative Disease : Clinical and Radiological Outcomes without Cancellous Bone Filling into Cage)

  • 이영균;한영민;김종태;정동섭;박영섭;박춘근;강준기
    • Journal of Korean Neurosurgical Society
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    • 제30권sup2호
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    • pp.300-308
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    • 2001
  • Objectives : Anterior cervical discectomy and interbody fusion has become a well-accepted surgical treatment of degenerative cervical diseases. Implatable cages have a stabilizing effect without plates and no need for autogenous bone graft. The authors evaluates the effect of implatable titanium cage(RABEA) on the clinical and radiological outcomes. Methods : 34 patients with symptomatic cervical degenerative diseases due to one level disc pathology were underwent anterior cervical discectomy and interbody fusion with titanium cages(RABEA) which were not filled with cancallous bone grafts from January 1999 to May 2001. Patients with osteoporosis and older than 65 years were not included. Among them, 15 patients could be followed-up for at least 1 year. The authors retrospectively reviewed the charts and radiographic data. Mean follow-up period was $1.3{\pm}0.2years$. Results : Clinical results according to the Odom's criteria was exellent and good in 14(93%) patients. One patient with fair result showed complete loss of the disc space height due to settlement of the cage. Preoperatively, the mean height of the disc space(${\pm}$standard deviation) was $3.42{\pm}1.10mm$(range 2.0-5.5mm), and at 1 day postoperatively it was $7.88{\pm}0.90mm$(range 6.50-9.0). The mean height of the disc space after 1 year was $6.50{\pm}1.38mm$(range 3.0-8.0). The restoration of the height was statistically significant(p<0.05). The mean height after 1 year was $82.7{\pm}15.9%$ of the height at 1 day postoperatively. Preoperatively the mean value of the cervical lodortic angle was $21.8{\pm}11.8^{\circ}$ and 1 year postopertively, it was $24.5{\pm}8.3^{\circ}$, which was statistically not significant. All patients showed no abnormal movements on flexion and extension lateral film after 6 months. Conclusion : Implantable titanium cages appear safe and effective in selected patients, and their use helps to avoid complications associated with bone graft harvest. Subsidence of the cage seems to be a potential risk factor for recurrence of the symptoms. For long-term results, a longer follow-up is required.

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티타늄 나프테네이트를 이용한 나노결정질 $TiO_2$ 광촉매 박막의 제조 (Preparation of nanocrystalline $TiO_2$ photocatalyst films by using a titanium naphthenate)

  • 이선옥;김상복;윤연흠;강보안;황규석;오정선;양순호;김병훈
    • 한국결정성장학회지
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    • 제12권5호
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    • pp.240-246
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    • 2002
  • 티타늄 나프테네이트를 출발 원료로 사용하고 스핀코팅-열분해법을 이용하여 소다-라임-실리카 슬라이드 유리기판 위에 $TiO_2$ 박막을 제조하였다. 도포된 박막은 $500^{\circ}C$로 10분간 공기분위기에서 전열처리를 행하였고, 최종 열처리는 500, 550과 $600^{\circ}C$로 30분간 공기분위기에서 각각 행하였다. X-선 회절분석법을 이용하여 박막의 결정화도를 조사하였고, 전계 방출 주사형 전자 현미경과 원자간력 현미경을 이용하여 $TiO_2$ 박막의 표면미세구조와 표면 거칠기를 조사하였다. 550 과 $600^{\circ}C$로 최종 열처리한 박막의 X-선 회절분석 결과, 아나타제 상만이 존재하였다. 500과 $550^{\circ}C$로 열처리한 박막의 표면은 균질하였으나, 열처리온도가 $600^{\circ}C$로 증가함에 따라서, 박막의 표면에는 바늘모양의 상이 3차원적으로 성장하였다. 모든 박막에 있어서 가시영역에서의 투과율은 500nm에서 90% 이상의 높은 값을 나타냈다. 박막의 광촉매특성을 조사하기 위하여 stearic acid가 코팅된 박막에 365nm 파장의 UV를 2.4mW/$\textrm{cm}^2$의 강도로 조사하여 C-H모드에 대한 IR 흡수단의 변화를 관찰하였다.

유기금속 화학 기상증착법으로 실리콘 기판위에 증착된 질소치환 $TiO_2$ 박막의 특성분석 (Characterization of Nitrogen-Doped $TiO_2$ Thin Films Prepared by Metalorganic Chemical Vapor Deposition)

  • 이동헌;조용수;이월인;이전국;정형진
    • 한국세라믹학회지
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    • 제31권12호
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    • pp.1577-1587
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    • 1994
  • TiO2 thin films with the substitution of oxygen with nitrogen were deposited on silicon substrate by metalorganic chemical vapor deposition (MOCVD) using Ti(OCH(CH3)2)4 (titanium tetraisopropoxide, TTIP) and N2O as source materials. X-ray diffraction (XRD) results indicated that the crystal structure of the deposited thin films was anatase TiO2 with only (101) plane observed at the deposition temperatures of 36$0^{\circ}C$ and 38$0^{\circ}C$, and with (101) and (200) plane at above 40$0^{\circ}C$. Raman spectroscopic results indicated that the crystal structure was anatase TiO2 in accordance with the XRD results without any rutile, fcc TiN, or hcp TiN structure. No fundamental difference was observed with temperature increase, but the peak intensity at 194.5 cm-1 increased with strong intensity at 143.0 cm-1 for all samples. The crystalline size of the films varied from 49.2 nm to 63.9 nm with increasing temperature as determined by slow-scan XRD experiments. The refractive index of the films increased from 2.40 to 2.55 as temperature increased. X-ray photoelectron spectroscopy (XPS) study showed only Ti 2s, Ti 2p, C 1s, O 1s and O 2s peaks at the surface of the film. The composition of the surface was estimated to be TiO1.98 from the quatitative analysis. In the bulk of the film Ti 2s, Ti 2p, O 1s, O 2s, N 1s and N 2s were detected, and Ti-N bonding was observed due to the substitution of oxygen with nitrogen. A satellite structure was observed in the Ti 2p due to the Ti-N bonding, and the composition of titanium nitride was determined to be about TiN1.0 from the position of the binding energy of Ti-N 2p3/2 and the quatitative analysis. The spectrum of Ti 2p energy level could be the sum of a 4, 5, or 6 Gaussian curve reconstruction, and the case of the sum of the 6 Gaussian curve reconstruction was physically most meaningful. From the results of Auger electron spectroscopy (AES), it was known that the composition was not varied significantly throughout the whole thickness of the film, and silicon oxide was not observed at the interface between the film and the substrate. The composition of the film was possible (TiO2)1-x.(TiN)x or TiO2-2xNx and in this experimental condition x was found to be about 0.21-0.16.

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Influence of Silver Ions in HA Film on Morphology of Macrophages

  • Feng, Q.L.;Kim, T.N.;Kim, J.W.
    • 한국진공학회지
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    • 제7권s1호
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    • pp.50-56
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    • 1998
  • Ion beam assisted deposition (IBAD) was successfully used to produce a dense and ultra-adherent Hydroxyapatite (HA) film on titanium alloy and alumina. Recently it is also proved that the HA coatings on alumina substrate treated with 20 ppm $AgNO_3$ had the structure of $(Ag, Ca)_10(PO_4)6(OH)_2$, which exhibited excellent antimicrobial effects. The present paper aims to morphlogically characterize the adhesion of macrophages on newly developed Ag-HA coated alumina and Ti6A14V substrates and to evaluate the biocompatibility of the coatings in vitro. It can be found that the cell number on alumina of the concentration of $AgNO_3$ in the treatment, the cell number on Ag-HA coatings decreased. Up to 20 ppm $AgNO_3$ by Ag-treatment, the morphological development of the cells on Ag-HA coating was similar to that of the cells on HA coating, suggesting the biotolerance of the Ag-HA coatings.

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