• 한국표면공학회지
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• 제24권4호
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• pp.196-205
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• 1991

Multi-level thin films are very important in ULSI applications because of their high electromigration resistance. This study presents the effects of titanium, titanium nitride and titanium tungsten underlayers of the stability of multi-aluminum thin films during isothermal annealing. High purity Al(99.999%) films have been electron-beam evaporated on Ti, TiN, TiW films formed on SiO2/Si (P-type(100))-wafer substrates by RF-sputtering in Ar gas ambient. The hillock growth was increased with annealing temperatures. Growth of hillocks was observed during isothermal annealing of the thin films by scanning electron microscopy. The hillock growth was believed to appear due to the recrystallization process driven by stress relaxation during isothermal annealing. Thermomigration damage was also presented in thin films by grain boundary grooving processes. It is shown that underlayers of Al/TiN/SiO2, Al/TiW/SiO2 thin films are preferrable to Al/SiO2 thin film metallization.

• Journal of Microbiology and Biotechnology
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• 제16권4호
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• pp.505-510
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• 2006

A gallocyanine-bound nanoporous titanium dioxide electrode system was investigated to carry out a mediated enzyme reaction. Gallocyanine was bound either directly or through an aminopropylsilane linker to the film of nanoporous titanium dioxide and used as a mediator for nitrate reductase in the mediated enzymatic nitrate reduction. The electrode with the aminopropylsilane linker showed 20% higher efficiency of electron transfer at the same potential than that directly linked. The prepared electrodes showed $0.26{\mu}mol/h$ nitrate reduction at a $100mm^2$ surface of the electrode, and linear current response on nitrate ion concentration up to 1.0 mM, which is very useful as a biosensor of nitrate ion in water.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.545-546
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• 2006

This study was performed to investigate the surface properties of electrochemically oxidized pure titanium by anodic spark discharging method. Commercially pure titanium plates of $10{\times}20{\times}1[mm]$ in dimensions were polished sequentially emery paper. Anodizing was performed at current density of $76.2\;[mA/cm^2]$, application voltage of 290, 350, 400 [V] using a regulated DC power supply, which allowed automatic transition constant current when a preset maximum voltage has been reached. The Ti surface oxided films was characterized by scanning electron microscope(SEM). The precipitation of HA(Hydroxyapatite) crystals on anodized surface was greatly accelerated by hydrothermal treatment. The concentrations of DL-$\alpha$-Glycerolphosphate Magnesiurn(DL-$\alpha$-GP-Mg) salt and Ca acetate in an electrolyte was highly affected the precipitation of HA crystals converted by Ti Anodized oxide films by Shape of Impulse Voltage.

• 공업화학
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• 제30권3호
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• pp.261-279
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• 2019

The aim of this review article is to summarize the role of titanium oxide ($TiO_2$) nanomaterials in the remediation of the aquatic environment contaminated with various emerging pollutants. The advanced oxidation process led by the semiconductor $TiO_2$ is an impetus in the remediation technology. Therefore, a vast number of literature works are available in this area. Further, the role of modified $TiO_2$ or thin film materials were discussed in the review. Also, the Localized Surface Plasmon Resonance (LSPR) effect of using noble metaldoped $TiO_2$ played an interesting role in the remediation process.

• Journal of Advanced Marine Engineering and Technology
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• 제29권1호
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• pp.98-106
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• 2005

The chemical conversion film formed on magnesium alloy was investigated by using the colloidal silica with some parameters such as solution pH. temperature, solution conditions, and treatment time. Moreover. the solutions consisted of colloidal silica titanium sulfate, and cobalt ions were used for the colloidal silica film to having a good corrosion resistance and adhesion properties. It was thought that the film at 298K was made with combination of Si-O. The quantity of film formed at high temperature such as 333K and 353K is smaller than dissolved quantity during chemical conversion treatment. Adding $CoSO_4$ to the colloidal silica solution enhanced the adhesion force between the silica film and magnesium substrate, The optimum conditions for the chemical conversion treatment solution were PH 2.90 s treatment, and 298K.

• 공업화학
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• 제16권2호
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• pp.187-193
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• 2005

광촉매 $TiO_2$박막은 titanium (IV) isopropoxide, 에탄올, HCl을 일정한 비율로 졸-겔방법에 의해 제작하였다. SEM에 의한 표면관찰에서는 $500^{\circ}C$에서 5회 반복해서 코팅하여 제작한 것이 우수했다. EDX에 의한 성분비는 spin코팅이 O : Ti의 atom%가 61 : 39로 dip코팅보다 우수했다. 그리고 박막제작의 온도에 따라서 anatase상에서 rutile상으로 결정구조가 변화되어 가는 것을 XRD측정으로 알았다. 제작한 $TiO_2$박막에 UV빔을 조사해서 얻은 TOC의 광분해효율이 1 h 이내에 20~65%를 나타내었고, 그 이후에는 서서히 감소하는 것을 확인했다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
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• pp.60-63
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• 2000

We have investigated the relationship between electrical and morphological properties of titanium silicide films. In this study, the C54 titanium silicides were formed by using high temperature sputtering and one-step annealing. From the measurement of electrical and morphological properties, a smooth surface and a relaxed roughness were observed for the titanium silicide film fabricated by high temperature sputtering. And it seems that the previous effect could improve electrical properties.

• Journal of Electrochemical Science and Technology
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• 제8권4호
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• pp.294-306
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• 2017

Stainless steels and titanium alloys are widely used in the medical industry as replacement materials. These materials may be affected by the conditions and type of environment. In the same manner, soft drinks are widely consumed products. It is of interest for dental industry to know the behavior of medical-grade alloys when these are in contact with soft drinks, since any excessive ion release can suppose a risk for human health. In the present study, the electrochemical behavior of three stainless steel alloys and pure titanium was analyzed using three types of cola soft drinks as electrolyte. The objective of this study was to evaluate the response of these metallic materials in each type of solution (cola standard, light and zero). Different electrochemical techniques were used for the evaluation of the alloys, namely potentiodynamic polarization, linear polarization, and open-circuit potential measurements. The corrosion resistance of the stainless-steel alloys and titanium in the cola soft drinks was provided by the formation of a stable passive film formed by metal oxides. Scanning electron microscopy was used as a complementary technique to reveal corrosion phenomena at the surface of the materials evaluated.

• 한국재료학회지
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• 제14권11호
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• pp.821-827
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• 2004

Titanium oxide thin films were prepared on Si(100) substrates by R.F. magnetron reactive sputtering at $30\sim200watt$ R.F power range, and annealed at $600^{\circ}C\sim800^{\circ}C$ for 1 hour. The properties of $TiO_2$ thin films were analyzed using x-ray, ${\alpha}-step$, ellipsometer, scanning electron microscopy, and FT-IR spectrometer. Upon in-situ depositions, the initial phase of $TiO_2$ thin film showed non-crystalline phase at R.F. power $30\sim100$ watt. The crosssection of $TiO_2$ thin films were sbserved to be the columnar structure. With the increasing R.F power and annealing temperature, the grain size, crystallinity, refractive index, and void size of titanium oxides showed a tended to increase. The FT-IR transmittance spectra of titanium oxide thin films have the obsorption band of Ti-O bond, Si-O bond, Si-O-Ti bond and O-H bond. With the increase of R.F. power and annealing temperature, these films have the stronger bond structures. It is considered that such a phenomena is due to phase transition and good crystallinity

• 전력전자학회:학술대회논문집
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• 전력전자학회 2008년도 하계학술대회 논문집
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• pp.643-645
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• 2008

Stainless steel 304 and 316 plates were deposited with the multi-layered coatings of titanium film (0.1um) and gold film (1-2um) by an electron beam evaporation method. The XRD patterns of the stainless steel plates modified with the multi-layered coatings showed the crystalline phases of the external gold film and the stainless steel substrate. Surface microstructural morphologies of the stainless steel bipolar plates modified with multi-layered coatings were observed by AFM and FE-SEM images. The external gold films formed on the stainless steel plates showed microstructure of grains of about 100nm diameter. The grain size of the external surface of the stainless steel plates increased with the gold film thickness. The electrical resistance and water contact angle of the stainless steel bipolar plates covered with multi-layered coatings were examined with the thickness of the external gold film.