• Title/Summary/Keyword: Time-Mean Film Thickness

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Preparation and characterization of ITO Thin Film By Various Substrate heating temperature (기판온도에 따른 ITO 박막의 제조 및 특성)

  • Kim, Sung Jin;Pak, Hunkyun
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.94.2-94.2
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    • 2010
  • Indium tin oxide (ITO) Thin films were grown on Non-alkarai glass Substrates by PVD method and Subsequently Subjected to ($100^{\circ}C-350^{\circ}C$) Thermal Annealing (TA) In Nitr Oxygen ambinent. Most of all, The effect of TA treatment on the structural properties were studied by using X-Ray diffraction and atomic force microscopy, while optical properties were studied by UV-Transmittance measurements. After TA treatment, the XRD spectra have shown an effective relaxation of the residual compressive stress, As a result, XRD peaks increase of the intensity and narrowing of full width at half-maximun (FWHM). In addtion The microstructure, The surface morphology, the optical transmittance changed and improved, and we investigated The effects of temperature, Time and atmosphere during the TA on the structural and electrical properties of the ITO/glass on TA at $300^{\circ}C$. As a results, the films are highly transparent (80%~89%) in visible region. AFM analysis shows that the films are very smooth with root mean square surface roughness 0.58nm -2.75nm thickness film. It is observed that resistivity of the films drcreases T0 $1.05{\times}10^{-4}{\Omega}cmt$ $6.06{\times}10^{-4}{\Omega}cm$, while mobility increases from $152cm^2/vs$ to $275cm^2/vs$.

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Flowability and Strength of Self-compacting Concrete Mixed with Tailings from the Sangdong Tungsten Mine (상동관상 광미를 혼합한 자기충전콘크리트의 유동 및 강도 특성)

  • Choi, Yun Wang;Kim, Yong Jic;Jung, Moon Young
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.26 no.4A
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    • pp.767-774
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    • 2006
  • This study has focused on the possibility for recycling of tailings from the sangdong tungsten mine as powder (TA) of self-compacting concrete (SCC). The experimental tests for entrapped water ratio were carried out in accordance with the specified method by Okamura. The rheological measurements of cement paste were conducted by using a commercially digital Brookfield viscometer (Model LVDV-II+) equipped with cylindrical spindles, also tests for slump-flow, time required to reach 500 mm of slump flow (sec), time required to flow through V-funnel (sec) and filling height of U-box test (mm) were carried out in accordance with the specified by the Japanese Society of Civil Engineering (JSCE). The results of this study, entrapped water ratio was decreased with increasing replacement of TA. Thickness of pseudo water film was increased, and mean plastic viscosity was decreased with increasing replacement of TA. And slump-flow of SCC was decreased with increasing replacement of TA. But time required to reach 500 mm of slump flow (sec), time required to flow through V-funnel (sec) and filling height of U-box test (mm) were satisfied a prescribed range. The mechanical properties including compressive strength, splitting tensile strength and elastic modulus were checked with the requirements specified by Korean Industrial Standard (KS). The compressive strength of SCC was decreased with increasing replacement of TA, splitting tensile strength and elastic modulus were similar to those of normal concrete.

Dielectric Passivation and Geometry Effects on the Electromigration Characteristics in Al-1%Si Thin Film Interconnections

  • Kim, Jin-Young
    • Journal of Korean Vacuum Science & Technology
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    • v.5 no.1
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    • pp.11-18
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    • 2001
  • Dielectric passivation effects on the EM(electromigration) have been a great interest with recent ULSI and multilevel structure tends in thin film interconnections of a microelectronic device. SiO$_2$, PSG(phosphosilicate glass), and Si$_3$N$_4$ passivation materials effects on the EM resistance were investigated by utilizing widely used Al-1%Si thin film interconnections. A standard photolithography process was applied for the fabrication of 0.7㎛ thick 3㎛ wide, and 200㎛ ~1600㎛ long Al-1%Si EM test patterns. SiO$_2$, PSG, and Si$_3$N$_4$ dielectric passivation with the thickness of 300 nm were singly deposited onto the Al-1%Si thin film interconnections by using an APCVD(atmospheric pressure chemical vapor deposition) and a PECVD(plasma enhanced chemical vapor deposition) in order to investigate the passivation materials effects on the EM characteristics. EM tests were performed at the direct current densities of 3.2 $\times$ 10$\^$6/∼4.5 $\times$ 10$\^$6/ A/cm$^2$ and at the temperatures of 180 $\^{C}$, 210$\^{C}$, 240$\^{C}$, and 270$\^{C}$ for measuring the activation energies(Q) and for accelerated test conditions. Activation energies were calculated from the measured MTF(mean-time-to-failure) values. The calculated activation energies for the electromigration were 0.44 eV, 0.45 eV, and 0.50 eV, and 0.66 eV for the case of nonpassivated-, Si$_3$N$_4$passivated-, PSG passivated-, and SiO$_2$ passivated Al-1%Si thin film interconnections, respectively. Thus SiO$_2$ passivation showed the best characteristics on the EM resistance followed by the order of PSG, Si$_3$N$_4$ and nonpassivation. It is believed that the passivation sequences as well as the passivation materials also influence on the EM characteristics in multilevel passivation structures.

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In Situ Monitoring of the MBE Growth of AlSb by Spectroscopic Ellipsometry

  • Kim, Jun-Yeong;Yun, Jae-Jin;Lee, Eun-Hye;Bae, Min-Hwan;Song, Jin-Dong;Kim, Yeong-Dong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.342-343
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    • 2013
  • AlSb is a promising material for optical devices, particularly for high-frequency and nonlinear-optical applications. And AlSb offers significant potential for devices such as quantum-well lasers, laser diodes, and heterojunction bipolar transistors. In this work we study molecular beam epitaxy (MBE) growth of an unstrained AISb film on a GaAs substrate and identify the real-time monitoring capabilities of in situ spectroscopic ellipsometry (SE). The samples were fabricated on semi-insulating (0 0 1) GaAs substrates using MBE system. A rotating sample stage ensured uniform film growth. The substrate was first heated to $620^{\circ}C$ under As2 to remove surface oxides. A GaAs buffer layer approximately 200 nm- thick was then grown at $580^{\circ}C$. During the temperature changing process from $580^{\circ}C$ to $530^{\circ}C$, As2 flux is maintained with the shutter for Ga being closed and the reflection high-energy electron diffraction (RHEED) pattern remaining at ($2{\times}4$). Upon reaching the preset temperature of $530^{\circ}C$, As shutter was promptly closed with Sb shutter open, resulting in the change of RHEED pattern from ($2{\times}4$) to ($1{\times}3$). This was followed by the growth of AlSb while using a rotating-compensator SE with a charge-coupled-device (CCD) detector to obtain real-time SE spectra from 0.74 to 6.48 eV. Fig. 1 shows the real time measured SE spectra of AlSb on GaAs in growth process. In the Fig. 1 (a), a change of ellipsometric parameter ${\Delta}$ is observed. The ${\Delta}$ is the parameter which contains thickness information of the sample, and it changes in a periodic from 0 to 180o with growth. The significant change of ${\Delta}$ at~0.4 min means that the growth of AlSb on GaAs has been started. Fig. 1b shows the changes of dielectric function with time over the range 0.74~6.48 eV. These changes mean phase transition from pseudodielectric function of GaAs to AlSb at~0.44 min. Fig. 2 shows the observed RHEED patterns in the growth process. The observed RHEED pattern of GaAs is ($2{\times}4$), and the pattern changes into ($1{\times}3$) with starting the growth of AlSb. This means that the RHEED pattern is in agreement with the result of SE measurements. These data show the importance and sensitivity of SE for real-time monitoring for materials growth by MBE. We performed the real-time monitoring of AlSb growth by using SE measurements, and it is good agreement with the results of RHEED pattern. This fact proves the importance and the sensitivity of SE technique for the real-time monitoring of film growth by using ellipsometry. We believe that these results will be useful in a number of contexts including more accurate optical properties for high speed device engineering.

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Effect of Annealing Temperature on the Low Emissivity of TiO2/Ag/TiO2 Films (열처리 온도에 따른 TiO2/Ag/TiO2 박막의 근적외선 반사 특성 변화)

  • Kim, So-young;Moon, Hyun-joo;Kim, Daeil
    • Journal of the Korean Society for Heat Treatment
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    • v.28 no.3
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    • pp.134-138
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    • 2015
  • Ag intermediated $TiO_2$ films were deposited by RF and DC magnetron sputtering and then vacuum annealed at 100, 200 and $300^{\circ}C$ for 30 minutes to investigate the effect of annealing temperature on the structural and optical properties of the films. For all depositions, the thickness of the $TiO_2$ and Ag films were kept constant at 24 and 15 nm by controlling the deposition time. As-deposited $TiO_2/Ag/TiO_2$ trilayer films have a weak crystalline and an optical reflectance in a near infrared wavelength region of 77.8%, while the films annealed at $300^{\circ}C$ show the polycrystalline structure and an increased mean optical reflectance of 80.4%. From the experimental results, it can be concluded that increasing the annealing temperature enhanced the structural and optical properties of the $TiO_2/Ag/TiO_2$ films.

Reference values for selected dry eye tests in normal Beagle dogs: a pilot study

  • Kim, Youngsam;Kang, Seonmi;Kim, Sunhyo;Shim, Jaeho;Go, Seokmin;Seo, Kangmoon
    • Journal of Veterinary Science
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    • v.23 no.1
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    • pp.10.1-10.12
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    • 2022
  • Background: Dry eye disease (DED) cannot be diagnosed by a single test because it is a multifactorial disorder of the ocular surface. Although studies on various dry eye tests (DETs) in dogs have been reported, standard criteria have not been established except for the Schirmer tear test 1 (STT-1). Objectives: To establish reference values for DETs in dogs with normal STT-1 values (≥ 15 mm/min) and to analyze the correlation between DETs. Methods: The STT-1 was performed in 10 healthy Beagle dogs (20 eyes). After 20 min, interferometry (IF) for estimating the lipid layer thickness (LLT) of the tear film, tear meniscus height (TMH), non-invasive tear breakup time (NIBUT), and meibomian gland loss rate of the upper eyelid (MGLRU) and lower eyelid (MGLRL), were measured using an ocular surface analyzer. Results: Mean values for STT-1, TMH, and NIBUT were as follows: 21.7 ± 3.4 mm/min, 0.41 ± 0.21 mm, and 19.1 ± 9.5 sec, respectively. The most frequent LLT range, measured by IF, was 30-80 nm (11 eyes), followed by 80 nm (5 eyes) and 80-140 nm (4 eyes). MGLRU ≤ 25% was measured in 11 eyes and 26%-50% in 9 eyes; MGLRL ≤ 25% in 8 eyes and 26%-50% in 12 eyes. Besides positive correlation between TMH and NIBUT (P = 0.038), there were no significant associations between DETs. Conclusions: Data obtained in this study provided normative references that could be useful for diagnosing DED and for further research into correlation between DETs in dogs with DED.

The Accuracy of the Digital Imaging System and the Frequency Dependent Type Apex Locator in Root Canal Length Measurement (근관장 측정에 있어서 디지털 영상 처리기와 주파수 의존형 측정기의 정확도)

  • Lee Byaung-Rib;Park Chang-Seo
    • Journal of Korean Academy of Oral and Maxillofacial Radiology
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    • v.28 no.2
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    • pp.435-459
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    • 1998
  • In order to achieve a successful endodontic treatment, root canals must be obturated three-dimensionally without causing any damage to apical tissues. Accurate length determination of the root canal is critical in this case. For this reason, I've used the conventional periapical radiography, Digora/sup (R)/(digital imaging system) and Root ZX/sup (R)/(the frequency dependent type apex locator) to measure the length of the canal and compare it with the true length obtained by cutting the tooth in half and measuring the length between the occlusal surface and the apical foramen. From the information obtained by these measurements, I was able to evaluate the accuracy and clinical usefulness of each systems. whether the thickness of files used in endodontic therapy has any effect on the measuring systems was also evaluated in an effort to simplify the treatment planning phase of endodontic treatment. 29 canals of 29 sound premolars were measured with #15, #20, #25 files by 3 different dentists each using the periapical radiography. Digora/sup (R)/ and Root ZX/sup (R)/. The measurements were then compared with the true length. The results were as follows: 1. In comparing mean discrepancies between measurements obtained by using periapical radiography(mean error: -0.449±0.444 mm), Digora/sup (R)/(mean error: -0.417±0.415 mm) and Root ZX/sup (R)/(mean error: 0.123±0.458 mm) with true length. periapical radiography and Digora/sup (R)/ system had statistically significant differences(p<0.05) in most cases while Root ZX/sup (R)/ showed none(p>0.05). 2. By subtracting values obtained by using periapical radiography, Digora/sup (R)/ and Root ZX/sup (R)/ from the true length and making a distribution table of their absolute values. the following analysis was possible. In the case of periapical film. 140 out of 261<53.6%) were clinically acceptable satisfying the margin of error of less than 0.5 mm. 151 out of 261 (53,6%) were acceptable in the Digora/sup (R)/ system while Root ZX/sup (R)/ had 197 out of 261(75.5%) within the limits of 0.5mm margin of error. 3. In determining whether the thickness of files has any effect on measuring methoths, no statistically significant differences were found(p>0.05). 4. In comparing data obtained from these methods in order to evaluate the difference among measuring methods, there was no statistically significant difference between periapical radiography and Digora/sup (R)/ system(p>0.05), but there was statistically significant difference between Root ZX/sup (R)/ and periapical radiography(p<0.05). Also there was statistically significant difference between Root ZX/sup (R)/ and Digora/sup (R)/ system(p<0.05). In conclusion, Root ZX/sup (R)/ was more accurate when compared with the Digora/sup (R)/ system and periapical radiography and seems to be more effective clinically in determining root canal length. But Root ZX/sup (R)/ has its limits in determining root morphology and number of roots and its accuracy becomes questionable when apical foramen is open due to unknown reasons. Therefore the combined use of Root ZX/sup (R)/ and the periapical radiography are mandatory. Digora/sup (R)/ system seems to be more effective when periapical radiographs are needed in a short period of time because of its short processing time and less exposure.

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A COMPARATIVE STUDY ON RADIOPACITY OF ROOT CANAL SEALERS (근관 전색재의 방사선 불투과성에 관한 비교연구)

  • Kim, Tae-Min;Kim, Seo-Kyoung;Hwang, In-Nam;Hwang, Yun-Chan;Kang, Byung-Cheol;Yoon, Suk-Ja;Lee, Jae-Seo;Oh, Won-Mann
    • Restorative Dentistry and Endodontics
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    • v.34 no.1
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    • pp.61-68
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    • 2009
  • This study was performed to assess the radiopacity of a variety of root canal sealers according to the specification concerning root canal sealers. Ten materials including Tubli-$Seal^{TM}$. Kerr Pulp Canal $Sealer^{TM}$, AH $26^{(R)}$, AH $plus^{(R)}$, AH plus $jet^{TM}$, Ad sea $1^{TM}$. $Sealer^{TM}$, $NOGENOL^{TM}$, ZOB $seal^{TM}$, $Epiphany^{TM}$ and dentin were evaluated in this study. In the first part, densitometric reading of an each step of aluminum step wedge on occlusal film was performed at different voltage and exposure time. In the second part, ten specimens were radiographed simultaneously with an aluminum step wedges on the occlusal films under decided condition. The mean radiographic density values of the materials were transformed into radiopacity expressed equivalent thickness of aluminum (mm Al). The following results were obtained. 1. Among the various conditions, the appropriate voltage and exposure time that meet the requirement density was 60 kVp at 0.2 s 2. All of the materials had greater radiopacity than 3 mm Al requirement of ANSI/ADA specification No. 57 (2000) and ISO No. 6876 (2001) standards. 3. The radiopacity of materials increased as thickness of materials increased. 4. The mm Al value of each specimen at 1mm in thickness has a significant difference in the statistics. It suggests that root canal sealers have a sufficient radiopacity that meet the requirement.

A COMPARATIVE STUDY ON RADIOPACITY OF CANAL FILLING AND RETROGRADE ROOT-END FILLING MATERIALS (근관 충전재 및 치근단 역충전재의 방사선 불투과성에 관한 비교 연구)

  • Kim, Yong-Sang;Kim, Seo-Kyong;Hwang, Yun-Chan;Hwang, In-Nam;Oh, Won-Mann
    • Restorative Dentistry and Endodontics
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    • v.33 no.2
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    • pp.107-114
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    • 2008
  • This study was performed to assess the radiopacity of a variety of canal filling and retrograde root-end filling materials according to the specification concerning root canal obturation materials. Ten materials including Gutta-percha pellets, amalgam, Fuji II LC, $Dyract^{(R)}$ AP, Super $EBA^{(R)}$, $IRM^{(R)}$, AH $26^{(R)}$, $Sealapex^{TM}$, Tubli-$Seal^{TM}$, and dentin were evaluated in this study. In the first part, densitometric reading of an each step of aluminum step wedge on occlusal film were performed at 60 kVp (0.2, 0.3, 0.4 s), 70 kVp (0.2, 0.3, 0.33 s) to decide appropriate voltage and exposure time. In the second part, ten specimens which are 5 mm in diameter and 0.5, 1.0, 1.5, 2.0, 2.5, 3.0 mm in thickness, were fabricated from each material studied. The specimens were radiographed simultaneously with an aluminum step wedge under decided condition (60 kVp, 0.2 s). The mean radiographic density values of the materials were transformed into radiopacity expressed equivalent thickness of aluminum (mm Al). The following results were obtained. 1. Among the various conditions including 0.2 s, 0.3 s, 0.4 s at 60 kVp and 0.2 s, 0.3 s, 0.33 s at 70 kVp, the appropriate voltage and exposure time that meet the requirement of density from 0.5 to 2.0 was 0.2 s at 60 kVp. 2. All of the materials in this study had greater radiopacity than the minimun level recommended by ISO No. 4049 standards. 3. Most of the materials had greater radiopacity than 3 mm Al requirement of ANSI/ADA specification No. 57 (2000) and ISO No. 6876 (2001) standards except for Fuji II LC and Dyract. It suggests that all experimental canal filling and retrograde root-end filling materials have a sufficient radiopacity that meet the requirement concerning root canal obturation materials except for Fuji II LC and Dyract.