• Title/Summary/Keyword: Time Warping

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Data Qualification of Optical Emission Spectroscopy Spectra in Resist/Nitride/Oxide Etch: Coupon vs. Whole Wafer Etching

  • Kang, Dong-Hyun;Pak, Soo-Kyung;Park, George O.;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.433-433
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    • 2012
  • As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

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Non-linear Time History Analysis of Piloti-Type High-rise RC Buildings (필로티형 고층 RC건물의 비선형시간이력해석)

  • Ko, Dong-Woo;Lee, Han-Seon
    • Journal of the Earthquake Engineering Society of Korea
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    • v.13 no.1
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    • pp.35-43
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    • 2009
  • Two types of piloti-type high-rise RC building structures having irregularity in the lower two stories were selected as prototypes, and nonlinear time history analysis was performed using OpenSees to verify the analysis technique and to investigate the seismic capacity of those buildings. One of the buildings studied had a symmetrical moment-resisting frame (BF), while the other had an infilled shear wall in only one of the exterior frames (ESW). A fiber model, consisting of concrete and reinforcing bar represented from the stress-strain relationship, was adapted and used to simulate the nonlinearity of members, and MVLEM (Multi Vertical Linear Element Model) was used to simulate the behavior of the wall. The analytical results simulate the behavior of piloti-type high-rise RC building structures well, including the stiffness and yield force of piloti stories, the rocking behavior of the upper structure and the variation of the axial stiffness of the column due to variation in loading condition. However, MVLEM has a limitation in simulating the abrupt increasing lateral stiffness of a wall, due to the torsional mode behavior of the building. The design force obtained from a nonlinear time history analysis was shown to be about $20{\sim}30%$ smaller than that obtained in the experiment. For this reason, further research is required to match the analytical results with real structures, in order to use nonlinear time history analysis in designing a piloti-type high-rise RC building.

Multi-view Generation using High Resolution Stereoscopic Cameras and a Low Resolution Time-of-Flight Camera (고해상도 스테레오 카메라와 저해상도 깊이 카메라를 이용한 다시점 영상 생성)

  • Lee, Cheon;Song, Hyok;Choi, Byeong-Ho;Ho, Yo-Sung
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.37 no.4A
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    • pp.239-249
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    • 2012
  • Recently, the virtual view generation method using depth data is employed to support the advanced stereoscopic and auto-stereoscopic displays. Although depth data is invisible to user at 3D video rendering, its accuracy is very important since it determines the quality of generated virtual view image. Many works are related to such depth enhancement exploiting a time-of-flight (TOF) camera. In this paper, we propose a fast 3D scene capturing system using one TOF camera at center and two high-resolution cameras at both sides. Since we need two depth data for both color cameras, we obtain two views' depth data from the center using the 3D warping technique. Holes in warped depth maps are filled by referring to the surrounded background depth values. In order to reduce mismatches of object boundaries between the depth and color images, we used the joint bilateral filter on the warped depth data. Finally, using two color images and depth maps, we generated 10 additional intermediate images. To realize fast capturing system, we implemented the proposed system using multi-threading technique. Experimental results show that the proposed capturing system captured two viewpoints' color and depth videos in real-time and generated 10 additional views at 7 fps.

A Study on the Development of Embedded Serial Multi-modal Biometrics Recognition System (임베디드 직렬 다중 생체 인식 시스템 개발에 관한 연구)

  • Kim, Joeng-Hoon;Kwon, Soon-Ryang
    • Journal of the Korean Institute of Intelligent Systems
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    • v.16 no.1
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    • pp.49-54
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    • 2006
  • The recent fingerprint recognition system has unstable factors, such as copy of fingerprint patterns and hacking of fingerprint feature point, which mali cause significant system error. Thus, in this research, we used the fingerprint as the main recognition device and then implemented the multi-biometric recognition system in serial using the speech recognition which has been widely used recently. As a multi-biometric recognition system, once the speech is successfully recognized, the fingerprint recognition process is run. In addition, speaker-dependent DTW(Dynamic Time Warping) algorithm is used among existing speech recognition algorithms (VQ, DTW, HMM, NN) for effective real-time process while KSOM (Kohonen Self-Organizing feature Map) algorithm, which is the artificial intelligence method, is applied for the fingerprint recognition system because of its calculation amount. The experiment of multi-biometric recognition system implemented in this research showed 2 to $7\%$ lower FRR (False Rejection Ratio) than single recognition systems using each fingerprints or voice, but zero FAR (False Acceptance Ratio), which is the most important factor in the recognition system. Moreover, there is almost no difference in the recognition time(average 1.5 seconds) comparing with other existing single biometric recognition systems; therefore, it is proved that the multi-biometric recognition system implemented is more efficient security system than single recognition systems based on various experiments.

Behavior of Horizontally Curved I-Girder Bridges under Seismic Loading (지진하중하에서의 수평곡선I형교의 거동특성)

  • Yoon, Ki Yong;Sung, Ik Hyun;Choi, Jin Yu;Kang, Young Jong
    • Journal of Korean Society of Steel Construction
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    • v.14 no.6
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    • pp.793-802
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    • 2002
  • This study presented a finite element formulation for the dynamic analysis of horizontally curved I-girder bridges. The stiffness and mass matrices of the curved and the straight beam elements are formulated. Each node of both elements has seven degrees of freedom, including the warping degree of freedom. The curved beam element is derived from Kang and Yoo's theory of thin-walled curved beams. The computer program EQCVB has been developed to perform dynamic analyses of various horizontally curved I-girder bridges. The Gupta method is used to solve the eigenvalue problem efficiently, while the Wilson-${\theta}$ method is used for the seismic analysis. The efficiency of EQCVB is demonstrated by comparing solution time with ABAQUS. Using EQCVB, the study is applied to investigate the dynamic behavior of horizontally curved I-girder bridges under seismic loading.

A Bio-Inspired Modeling of Visual Information Processing for Action Recognition (생체 기반 시각정보처리 동작인식 모델링)

  • Kim, JinOk
    • KIPS Transactions on Software and Data Engineering
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    • v.3 no.8
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    • pp.299-308
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    • 2014
  • Various literatures related computing of information processing have been recently shown the researches inspired from the remarkably excellent human capabilities which recognize and categorize very complex visual patterns such as body motions and facial expressions. Applied from human's outstanding ability of perception, the classification function of visual sequences without context information is specially crucial task for computer vision to understand both the coding and the retrieval of spatio-temporal patterns. This paper presents a biological process based action recognition model of computer vision, which is inspired from visual information processing of human brain for action recognition of visual sequences. Proposed model employs the structure of neural fields of bio-inspired visual perception on detecting motion sequences and discriminating visual patterns in human brain. Experimental results show that proposed recognition model takes not only into account several biological properties of visual information processing, but also is tolerant of time-warping. Furthermore, the model allows robust temporal evolution of classification compared to researches of action recognition. Presented model contributes to implement bio-inspired visual processing system such as intelligent robot agent, etc.

Virtual Make-up System Using Light and Normal Map Approximation (조명 및 법선벡터 지도 추정을 이용한 사실적인 가상 화장 시스템)

  • Yang, Myung Hyun;Shin, Hyun Joon
    • Journal of the Korea Computer Graphics Society
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    • v.21 no.3
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    • pp.55-61
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    • 2015
  • In this paper, we introduce a method to synthesize realistic make-up effects on input images efficiently. In particular, we focus on shading on the make-up effects due to the lighting and face curvature. By doing this, we can synthesize a wider range of effects realistically than the previous methods. To do this, the information about lighting information together with the normal vectors on all pixels over the face region in the input image. Since the previous methods that compute lighting information and normal vectors require relatively heavy computation cost, we introduce an approach to approximate lighting information using cascade pose regression process and normal vectors by transforming, rendering, and warping a standard 3D face model. The proposed method consumes much less computation time than the previous methods. In our experiment, we show the proposed approximation technique can produce naturally looking virtual make-up effects.

Construction Issues and Design Procedure for Transverse Steel in Continuously Reinforced Concrete Pavement (CRCP) (연속철근콘크리트 포장의 횡방향 철근 설계방법 및 시공관련 이슈 검토)

  • Choi, Pangil;Won, Moon Cheol
    • International Journal of Highway Engineering
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    • v.16 no.4
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    • pp.1-9
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    • 2014
  • PURPOSES: The objective of this study is to evaluate construction issues and design for transverse steel in continuously reinforced concrete pavement(CRCP). METHODS : The first continuously reinforced concrete pavement(CRCP) design procedure appeared in the 1972 edition of the "AASHTO Interim Guide for Design of Pavement Structures", which was published in 1981 with Chapter 3 "Guide for the Design of Rigid Pavement" revised. A theory that was accepted at that time for the analysis of steel stress in concrete pavement, called subgrade drag theory(SGDT), was utilized for the design of reinforcement of CRCP - tie bar design and transverse steel design - in the aforementioned AASHTO Interim Guide. However SGDT has severe limitations due to simple assumptions made in the development of the theory. As a result, any design procedures for reinforcement utilizing SGDT may have intrinsic flaws and limitations. In this paper, CRCP design procedure for transverse steel was introduced and the limitations of assumptions for SGDT were evaluated based on various field testing. RESULTS: Various field tests were conducted to evaluate whether the assumptions of SGDT are reasonable or not. Test results show that 1) temperature variations exist along the concrete slab depth, 2) very little stress in transverse steel, and 3) warping and curling in concrete slab from the field test results. As a result, it is clearly revealed out that the assumptions of SGDT are not valid, and transverse steel and tie bar designs should be based on more reasonable theories. CONCLUSIONS : Since longitudinal joint is provided at 4.1-m spacing in Korea, as long as joint saw-cut is made in accordance with specification requirements, the probability of full-depth longitudinal cracking is extremely small. Hence, for transverse steel, the design should be based on the premise that its function is to keep the longitudinal steel at the correct locations. If longitudinal steel can be placed at the correct locations within tolerance limits, transverse steel is no longer needed.

Acceleration of Feature-Based Image Morphing Using GPU (GPU를 이용한 특징 기반 영상모핑의 가속화)

  • Kim, Eun-Ji;Yoon, Seung-Hyun;Lee, Jieun
    • Journal of the Korea Computer Graphics Society
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    • v.20 no.2
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    • pp.13-24
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    • 2014
  • In this study, a graphics-processing-unit (GPU)-based acceleration technique is proposed for the feature-based image morphing. This technique uses the depth-buffer of the graphics hardware to calculate efficiently the shortest distance between a pixel and the control lines. The pairs of control lines between the source image and the destination image are determined by user's input, and the distance function of each control line is rendered using two rectangles and two cones. The distance between each pixel and its nearest control line is stored in the depth buffer through the graphics pipeline, and this is used to conduct the morphing operation efficiently. The pixel-unit morphing operation is parallelized using the compute unified device architecture (CUDA) to reduce the morphing time. We demonstrate the efficiency of the proposed technique using several experimental results.

Virtual View-point Depth Image Synthesis System for CGH (CGH를 위한 가상시점 깊이영상 합성 시스템)

  • Kim, Taek-Beom;Ko, Min-Soo;Yoo, Ji-Sang
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.16 no.7
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    • pp.1477-1486
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    • 2012
  • In this paper, we propose Multi-view CGH Making System using method of generation of virtual view-point depth image. We acquire reliable depth image using TOF depth camera. We extract parameters of reference-view cameras. Once the position of camera of virtual view-point is defined, select optimal reference-view cameras considering position of it and distance between it and virtual view-point camera. Setting a reference-view camera whose position is reverse of primary reference-view camera as sub reference-view, we generate depth image of virtual view-point. And we compensate occlusion boundaries of virtual view-point depth image using depth image of sub reference-view. In this step, remaining hole boundaries are compensated with minimum values of neighborhood. And then, we generate final depth image of virtual view-point. Finally, using result of depth image from these steps, we generate CGH. The experimental results show that the proposed algorithm performs much better than conventional algorithms.