Fabrication and pH response characteristics of LAPS(Light addressable potentiometric sensor) with electrolyte/$Si_3N_4/SiO_2$ /Si structure
(Electrolyte/$Si_3N_4/SiO_2/Si$ 구조의 LAPS 제작 및 pH 응답특성)
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- Journal of the Korean Electrochemical Society
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- v.1 no.1
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- pp.40-44
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- 1998