• 제목/요약/키워드: Tilt actuator

검색결과 58건 처리시간 0.02초

Wafer Hybrid Bonding을 위한 Upper Wafer Handling 모듈 설계 및 제어 (Upper Wafer Handling Module Design and Control for Wafer Hybrid Bonding)

  • 김태호;문제욱;최영만;안다훈;이학준
    • 반도체디스플레이기술학회지
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    • 제21권1호
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    • pp.142-147
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    • 2022
  • After introducing Hybrid Bonding technology into image sensors using stacked sensors and image processors, large quantity production became possible. As a result, it is currently used in most of the CMOS image market in smartphones and other image-based devices worldwide, and almost all stacked CIS manufacturing sites have focused on miniaturization using hybrid bonding. In this study, an upper wafer handling module for Wafer to Wafer Hybrid Bonding developed to increase the alignment and precision between wafers when wafer bonding. The module was divided two parts to reduce error of both the alignment and degree of precision during wafer bonding. Wafer handling module developed both new Tip/Tilt system controlling θx,θy of upper wafer and striker to push upper wafer. Based on this, it was confirmed through the stability evaluation that the upper wafer handling module can be controlled without any problem during W2W hybrid bonding.

출력기반 적응제어기법을 이용한 틸트로터 항공기의 회전익 모드 설계연구 (Flight Control of Tilt-Rotor Airplane In Rotary-Wing Mode Using Adaptive Control Based on Output-Feedback)

  • 하철근;임재형
    • 한국항공우주학회지
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    • 제38권3호
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    • pp.228-235
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    • 2010
  • 본 논문에서는 틸트로터 항공기의 회전익 모드에 대한 자율비행 유도제어 알고리즘을 적응제어기법을 이용하여 설계하는 것이다. 이를 위해 우선 출력기반 근사적 궤환선형화 기법을 통하여 알고리즘의 내부루프를 구성하고 그로부터 발생하는 모델오차를 단일 은닉층-신경망을 적용하여 상쇄하였다. 그리고 리아푸노프 안정성 이론에 따른 적응제어 갱신법칙은 선형 관측기를 기반으로 설계하였다. 나아가 외부루프는 경로점 유도법칙으로부터 생성되는 궤적을 추종하도록 하였으며 특히 엄밀한 자동착륙 궤적추종 성능 향상을 위하여 방향각 및 비행경로각 시선유도법칙을 설계하였다. 틸트로터 비선형 모델 시뮬레이션 결과는 콜렉티브 입력에서 보이는 순간적인 작동기 포화현상 이외에는 만족할 만한 안정성과 추종성능을 보여 주고 있다.

시간-주파수 영역에서의 연성 충격 스펙트럼 분석을 통한 하드디스크 드라이브의 충격진동 제어 (현장개발사례: SAMSUNG HDD 'SPINPOINT V40/P40 SERIES') (Shock Vibration Control of Hard-Disk Drive Using Coupled Shock Spectrum Analysis in Time-Frequency Domain)

  • 한윤식;강성우;오동호;황태연;손영
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2001년도 춘계학술대회논문집
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    • pp.1111-1116
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    • 2001
  • A transient T-F(time-frequency) signal processing technique is applied to a tilt drop and a linear shock test rigs for identification of shock characteristics of hard disk drive (HDD). The T-F technique essentially tracks the shock characteristics of pivot point response as well as head slap and lift-off phenomena. From the T-F analysis result, the shock characteristic in HDD is modeled by the two degree of freedom coupled-dynamic system, which consists of actuator arm and suspension. As shock designing tool, the maximax shock response spectrum is employed for prediction of shock performance. Finally, the shock control technique is tested with newly designed actuator arm and suspension. Experimental head slap test result shows that the shock performance is much higher with the new shockproof designed model than the current model

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중부하용 가변속 카메라 회전대 개발에 대한 연구 (A study on the development of variable speed camera for heavy duty)

  • 김주한;성하경
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.299-300
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    • 2006
  • The camera and reduction mechanism that are equipment outdoors camera for general CCTV are miniaturization trend gradually. The foreign countries began to sell variableness speed type camera drivels that do DC voltage by motive power recently. But, Domestic is state that enterprise which has technology connected with this does not exist. We need optimum control program design, an internal organs technology, actuator interface and a driver design technology that have position control special quality of high accuracy as a necessary technology for CCTV camera drivers. Also, we need detailed mechanism design and a manufacture technology of camera drivers that behave variable speed essentially.

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A 3-axis Focus Mechanism of Small Satellite Camera Using Friction-Inertia Piezoelectric Actuators

  • Hong, Dae Gi;Hwang, Jai Hyuk
    • International Journal of Aerospace System Engineering
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    • 제5권2호
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    • pp.8-15
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    • 2018
  • For small earth observation satellites, alignment between the optical components is important for precise observation. However, satellite cameras are structurally subject to misalignment in the launch environment where vibration excitations and impacts apply, and in space environments where zero gravity, vacuum, radiant heat and degassing occur. All of these variables can cause misalignment among the optical components. The misalignment among optical components results in degradation of image quality, and a re-alignment process is needed to compensate for the misalignment. This process of re-alignment between optical components is referred to as a refocusing process. In this paper, we proposed a 3 - axis focusing mechanism to perform the refocusing process. This mechanism is attached to the back of the secondary mirror and consists of three piezoelectric inertia-friction actuators to compensate the x-axis, y-axis tilt, and de-space through three-axis motion. The fabricated focus mechanism demonstrated excellent servo performance by experimenting with PD servo control.

직교형 2차원 진동절삭기의 기구학적 해석 및 진동 특성 고찰 (Kinematical Analysis and Vibrational Characteristics of Orthogonal 2-dimensional Vibration Assisted Cutting Device)

  • 노병국;김기대
    • 한국소음진동공학회논문집
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    • 제22권9호
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    • pp.903-909
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    • 2012
  • In elliptical vibration cutting(EVC) where the cutting tool traces a micro-scale 2-dimensional elliptical trajectory, the kinematical and vibrational characteristics of the EVC device greatly affect cutting performance. In this study, kinematical and vibrational characteristics of an EVC device constructed with two orthogonally-arranged stacked piezoelectric actuators were investigated both analytically and experimentally. The step voltage was applied to the orthogonal EVC device and the associated displacements of the cutting tool were measured to assess kinematical characteristics of the orthogonal EVC device. To investigate the vibrational characteristic of the orthogonal EVC, sinusoidal voltage was applied to the EVC device and the resulting displacements were measured. It was found from experiments that coupling of displacements in the thrust and cutting directions and the tilt of the major axis of the elliptical trajectory exists. In addition, as the excitation frequency is in vicinity of resonant frequencies the distortion in the shape of the elliptical trajectory becomes greater and change in the rotation direction occurs. To correct the shape distortion of the elliptical trajectory, the shape correcting procedure developed for the parallel EVC device was applied for the orthogonal EVC device and it was shown that the shape correcting method successfully corrects distortion.

기구학적 커플링으로 구성된 3자유도 병렬 메커니즘 해석 및 설계 (Analysis and Design of 3-DOF Parallel Mechanism Based on Kinematic Couplings)

  • 왕위준;한창수
    • 한국생산제조학회지
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    • 제21권3호
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    • pp.479-486
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    • 2012
  • This paper presents a high-speed automatic micro-alignment system that is a part of an inspection machine for small-sized molded lenses of mobile phones, palm-top computers, and so on. This work was motivated by the shortcomings of existing highest-grade commercial machine. A simple tip/tilt/Z parallel mechanism is designed based on kinematic couplings, which is a 3-degree-of-freedom (3-DOF) moderate-cost alignment stage. It is used to automatically adjust the posture of each lens on the tray, which is impossible by the conventional instrument. Amplified piezoelectric actuators are used to ensure the accuracy and dynamic response. Forward kinematic analysis and simulation show that the parasitic motion is small enough compared to the actuator stroke. From the workspace analysis of the moving platform, it is clear that the output motion range satisfies the design requirements.

Design and analysis of slider and suspension in 4${\times}$l near-field probe array

  • Hong Eo-Jin;Oh Woo-Seok;Jung Min-Su;Park No-Cheol;Yang Hyun-Seok;Park Young-Pil;Lee Sung-Q;Park Kang-Ho
    • 정보저장시스템학회:학술대회논문집
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    • 정보저장시스템학회 2005년도 추계학술대회 논문집
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    • pp.47-52
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    • 2005
  • A lot of information storage devices have been introduced and developed for recently years. The trends of those devices are high capacity, compact size, low power consumption, reliability, and removability for data interchange with other device. As a satisfaction of these trends, near-field technique is in the spotlight as the next generation device. In order for a near-field recording to be successfully implemented in the storage device, a slider and suspension is introduced as actuating mechanism. The optical slider is designed considering near-filed optics. Suspension is not only supports slider performance, and tracking servo capacity but also meets the optical characteristics such as tilt aberration, and guarantee to satisfy shock performances for the mobility fir the actuator. In this study, the optical slider and the suspension for near-field probe array are designed and analyzed considering dynamic performance of head-gimbal assembly and shock simulation..

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