• 한국재료학회지
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• 제9권11호
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• pp.1129-1136
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• 1999

TEMAT precursor를 사용하여 다양한 증착 조건으로 ICP-CVD 방법으로 Si(100) 기판 위에 TiN 박막을 형성하였다. 형성된 TiN 박막의 결정상, 미세구조, 그리고 전기적 특성은 XRD, XPS, HRTEM, 그리고 전기적 측정으로 특성을 조사하였다. BI 구조를 갖는 다결정 TiN 박막은 기판의 온도가 $200^{\circ}C$ 이상의 온도에서 형성되었다. TiN(111) 박막은 기판의 온도가 $300^{\circ}C$에서 TEMAT, $\textrm{N}_{2}$, 그리고 Ar 가스의 유량이 10, 5, 그리고 5sccm으로 반응로에 주입할 때 형성되었다. TiN/Si(100) 계면은 TiN과 $\textrm{SiO}_2$사이에 계면반응이 없었으며 평탄하였다. 기판의 온도가 $500^{\circ}C$에서 형성된 TiN 박막의 비저항, carrier 농도와 이동도는 21 $\mu\Omega$cm, 9.5$\times\textrm{10}^{18}\textrm{cm}^{-3}$와 $462.6\textrm{cm}^{2}$/Vs으로 주어졌다.

• 한국환경과학회지
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• 제18권11호
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• pp.1215-1224
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• 2009

This study evaluated the applicability of visible-light-driven N- and S-doped titanium dioxide($TiO_2$) for the control of low-level dimethyl sulfide(DMS) and dimethyl disulfide(DMDS). In addition, a photocatalytic unit(PU)-adsorption hybrid was evaluated in order to examine the removal of DMS and DMDS which exited the PU and a gaseous photocatalytic byproduct($SO_2$) which was generated during the photocatalytic processes. Fourier-Tranform-Infrared(FTIR) spectrum exhibited different surface characteristics among the three-types of catalysts. For the N- and S-doped $TiO_2$ powders, a shift of the absorbance spectrum towards the visible-light region was observed. The absorption edge for both the N- and S-doped $TiO_2$ was shifted to $\lambda$ 720 nm. The N-doped $TiO_2$ was superior to the S-doped $TiO_2$ in regards to DMS degradation. Under low input concentration(IC) conditions(0.039 and 0.027 ppm for DMS and DMDS, respectively), the N-doped $TiO_2$ revealed a high DMS removal efficiency(above 95%), but a gradual decreasing removal efficiency under high IC conditions(7.8 and 5.4 ppm for DMS and DMDS, respectively). Although the hybrid system exhibited a superior characteristic to PU alone regarding the removal efficiencies of both DMS and DMDS, this capability decreased during the course of a photocatalytic process under the high IC conditions. The present study identified the generation of sulfate ion on the catalyst surface and sulfur dioxide(maximum concentrations of 0.0019 and 0.0074 ppm for the photocatalytic processes of DMS and DMDS, respectively) in effluent gas of PU. However, this generation of $TiO_2$ would be an insignificant addition to indoor air quality levels.

• 공업화학
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• 제21권1호
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• pp.29-33
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• 2010

본 연구에서는 여러 가지 열처리 온도에서 다성분 도핑에 의한 광촉매의 밴드갭 저감 및 가시광 광분해 효과를 알아보고자 tetraethylammonium tetrafluoroborate (TEATFB)로 B, C, N, F 등이 동시에 도핑된 $TiO_{2}$ 광촉매를 제조하였다. 도핑된 $TiO_{2}$ 광촉매가 가시광선영역에서 분해되는 정도를 확인하기 위해서 태양광에 조사하여 rhodamine B와 acridine orange로 염료분해 실험을 수행하였다. XRD 결과 $800^{\circ}C$ 이하에서 열처리된 $TiO_{2}$ 광촉매는 anatase 구조가 존재하고 있음을 알 수 있었다. XPS 분석을 통하여 광활성에 영향을 미치는 B, C, N, F의 결합구조를 확인하였고 UV-DRS 결과로부터 다성분 도핑된 $TiO_{2}$ 광촉매의 밴드 갭이 2.98 eV로 줄어든 것을 알 수 있었다. 다성분 도핑 $TiO_{2}$의 태양광 조사에 의한 UV-Vis 결과에서 acridine orange에 대한 광분해 효과가 도핑되지 않은 샘플에 비해 1.61배 증가함을 알 수 있었다. 특히, 다성분이 동시 도핑되고 $700^{\circ}C$에서 열처리된 샘플이 acridine orange과 rhodamine B 두 가지 염료 모두에서 가장 좋은 광분해 효과를 보여 주었다.

• 전자공학회논문지A
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• 제33A권10호
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• pp.98-106
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• 1996

A thin film of aluminum for ultra large scale integrated circuits metalization has been deposited on TiN and SiO$_{2}$ substrates by plasma assisted chemical vapor deposition using DMEAA (dimenthylethylamine alane) as a precursor. The effects of plasma on surface topology and growth characteristics were investigated. Thermal CVD Al could not be got continuous films on insulating subsrate such as SiO$_{2}$. However, it was found that Al films could be deposited on SiO$_{2}$ substate without any pretreatments by the hydrogen plasma for pyrolysis of DMEAA. Compared to the thermal CVD, PACVD films showed much better reflectance and resistance on TiN and SiO$_{2}$ substrate. We obtained mirror-like PACVD Al film of 90% reflectance and resistance on TiN and SiO$_{2}$ substrates. We obtained mirror-like PACVD Al film of 90% reflectance on TiN substrate. Excellent conformal step coverage was obtained on submicron contact holes ;by the PACVD blanket deposition.

• 한국재료학회지
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• 제7권2호
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• pp.114-120
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• 1997

$Ba(NO_{3})_{2}$와 $TiCl_{4}$의 혼합 수용액으로부터 전기화학법 중 음극혼원법(cathodic reduction method)을 이용하여 stainless steel기판 위에 $BaTiO_{3}$박막을 제조하였다. $BaTiO_{3}$전구체 박막은 혼합 수용액으로부터 반응초기에 $TiO_{2}{\cdot}nH_{2}O$M/형태로 우선적으로 형성되었으며, 일정 시간이 경과한 후에는 일정한 Ba/Ti몰비를 갖는 박막이 제조되었다. $BaTiO_{3}$박막 내 Ba/Ti조성비는 혼합 수용액 내에 존재하는 이온 조성비 $Ba^{2+}/Ti_{4+}$에 변화하였는데, 0.3M $Ba(NO_{3})_{2}$와 0.1M $TiCI_{4}$의 혼합 수용액과 $10mA/cm^2$의 전류를 흘려주는 조건에서 Ba/Ti의 조성비가 1에 가까운 박막을 얻을 수 있었다. 이러한 전구체 박막을 $500^{\circ}C$이상에서 열처리한 결고 페로브스카이트 상의 $BaTiO_{3}$박막이 제조되었다.

• 한국재료학회지
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• 제20권7호
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• pp.345-350
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• 2010

For the present paper, we prepared MgO/MWCNT/$TiO_2$ photocatalyst by using multi-walled carbon nanotubes (MWCNTs) pre-oxidized by m-chlorperbenzoic acid (MCPBA) with magnesium acetate tetrahydrate $(Mg(CH_2COO)_2\cdot4H_2O)$ and titanium n-butoxide $(Ti\{OC(CH_3)_3\}_4)$ as magnesium and titanium precursors. The prepared photocatalyst was analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive X-ray (EDX) analysis. The decomposition of methylene blue (MB) solution was determined under irradiation of ultraviolet (UV) light. The XRD results show that the MgO/MWCNT/$TiO_2$ photocatalyst have cubic MgO structure and anatase $TiO_2$ structure. The porous structure and the $TiO_2$ agglomerate coated on the MgO/MWCNT composite can be observed in SEM images. The Mg, O, Ti and C elements can be also observed in MgO/MWCNT/$TiO_2$ photocatalyst from EDX results. The results of photodegradation of MB solution under UV light show that the concentration of MB solution decreased with an increase of UV irradiation time for all of the samples. Also, the MgO/MWCNT/$TiO_2$ photocatalyst has the best photocatalytic activity among these samples. It can be considered that the MgO/MWCNT/$TiO_2$ photocatalyst had a combined effect, the effect of MWCNT, which could absorb UV light to create photoinduced electrons $(e^-)$, and the electron trapping effect of MgO, which resulted in an increase of the photocatalytic activity of $TiO_2$.

• 한국세라믹학회지
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• 제34권5호
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• pp.505-511
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• 1997

The effects of sintering atmospheres(air, O2, N2) on the sintering and microwave dielectric properties of (1-x)CaTiO3-xLaAlO3 system was investigated. The sintered density of (1-x)CaTiO3-xLaAlO3 under air atmosphere increased linearly with increasing x, but it decreased in the range of x>0.5 under O2 atmosphere and x>0.6 under N2 atmosphere in spite of the increament of the smaller La(1.06$\AA$) and Al(0.5 $\AA$) ion than Ca(0.99$\AA$) and Ti(0.6$\AA$). In case of the air sintering atmosphere of (1-x)CaTiO3-xLaAlO3 the two phases of orthorhombic and rhombohedral crystal system were coexisting, and the XRD peak of rhombohedral crystalsystem was to be higher with increasing x. However, the sintering atmosphere of O2 and N2 made the monophasic crystal system of orthorhombic keep up by x=0.5 and x=0.6, respectively, and it transformed to pseudo-cubic crystal system in x>0.5 and x>0.6. The XRD peak intensity of (1-x)CaTiO3-xLaAlO3 was to be gradually higher with increasing x under the air atmosphere of sintering. Whereas, its XRD peak intensity increased till x=0.6 but decreased with increasing x in the range of x>0.6 under O2 and N2 atmosphere. The relative dielectric constant of (1-x)CaTiO3-xLaAlO3 sintered under air atmosphere decreased linearly and the Q.f0 value increased according as x increased. On the other hand, the relative dielectric constant of (1-x)CaTiO3-xLaAlO3 under O2 and N2 atmosphere decreased in the range of x$\leq$0.5 with increasing x, but increased rapidly in the range of x$\geq$0.6. And the Q.f0 value increased till x=0.6 but decreased in the range of x>0.6 with increasing x. The temperature coefficient of resonant frequency had no relation to sintering atmosphere.

• Carbon letters
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• 제8권3호
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• pp.177-183
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• 2007

[ $TiO_2$ ]ACF composites were prepared by the electrochemical method with Titanium (IV) n-butoxide (TNB) electrolyte under different electrochemical operation time. The BET surface area for $TiO_2$/ACF composites decrease with the increase of electrochemical operation time. There is a single crystal structure which is anatase in all of the samples from the data of XRD. The SEM micrphotographs of $TiO_2$/ACF composites show that the $TiO_2$ particles were well mixed with the ACF. There are O and P with strong C and Ti peaks in all samples from EDX results, and it also shows that a decrease of the C content with a increasing of Ti content with increasing of the electrochemical operation time in the over all composites. DSC cures show that the exothermic peak of all composites at $560^{\circ}C$ represents the transformation heat of amorphous parts to anatase phase and the discontinuous grain growth of the transformed anatase particles. Finally, the excellent photoactivity of $TiO_2$/ACF composites (especially, ACFT10) could be attributed that the decrease of concentration of MB can be concluded to be much faster for the adsorption by ACF than for photocatalytic decomposition by $TiO_2$.

• 한국전기전자재료학회논문지
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• 제17권10호
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• pp.1056-1060
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• 2004

In this study, 0.96B $i_{0.5}$($Na_{0.84}$ $K_{0.16}$)$_{0.5}$Ti $O_3$ + 0.04SrTi $O_3$ + 0.3 wt% N $b_2$ $O_{5}$+0.2 wt% L $a_2$ $O_3$ + xwt % Mn $O_2$ were investigated as a function of the amount of Mn $O_2$ addition in order to improve dielectric and piezoelectric properties of Lead-free piezoelectric ceramics. With increasing the amount of Mn $O_2$ addition, the density, electromechanical coupling factor( $k_{p}$), piezoelectric constant( $d_{33}$, $g_{33}$) and curie temperature (Tc) showed the maximum value of 5.7 g/㎤, 38 %, 219 pC/N, 26 mVㆍm/N and 32$0^{\circ}C$ at 0.1 wt% Mn $O_2$ addition, respectively, and mechanical quality factor( $Q_{m}$ ) showed the maximum value of 158 at 0.3 wt% Mn $O_2$ addition.ddition.ion.n.

• 한국세라믹학회지
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• 제33권11호
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• pp.1260-1266
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• 1996

The effects of SiO2 MnO2 and sintering atmospheres (O2, N2) on the piezoelectric properties and densification behaviors of Pb0.98Cd0.02Zr0.36Ti0.39Ni0.083Nb0.167O3 were investigated. The addition of SiO2 to the system enhanced the rate of densification but supressed the rate of grain growth. On the other hand the addition of MnO2 to the system did not nearly affect the rate of densification but increased slightly the rate of grain growth The densification of Pb0.98Cd0.02Zr0.36Ti0.39Ni0.083Nb0.167O3 containing of SiO2 or MnO2 was promoted with increasing the partial pressure of O2. The relative dielectric constant ($\varepsilon$r) and piezoelectric constant (d33) of Pb0.98Cd0.02Zr0.36Ti0.39Ni0.083Nb0.167O3 containing of SiO2 or MnO2 sintered under O2 atmosphere were higher than under N2 atmosphere. Whereas the mechanical quality factor (Qm) of specimens sintered under O2 atmosphere were lower than under N2 atmosphere. Thus the sintering atmosphere of O2 and N2 in Pb0.98Cd0.02Zr0.36Ti0.39Ni0.083Nb0.167O3 containing of SiO2 or MnO2 acted as donor and acceptor respectively. As the amount of SiO2 increased the relative dielectric constant ($\varepsilon$r) and piezoelectric constant (d33) of Pb0.98Cd0.02Zr0.36Ti0.39Ni0.083Nb0.167O3 but the mechanical quality factor (Qm) did not nearly change, In the case of the addition of MnO2 to the system the relative dielectric constant ($\varepsilon$r) and piezoelectric constant (d33) of Pb0.98Cd0.02Zr0.36Ti0.39Ni0.083Nb0.167O3 sintered under O2 atmosphere decreased rapidly with increasing the amount of MnO2 but they were unchanged with increasing the amount of MnO2 under N2 sintering atmosphere. Therefore the differences of the relative dielect-ric constant ($\varepsilon$r) and piezoelectric constant (d33) due to sintering atmosphere were diminished as the amount of MnO2 increased.