• Title/Summary/Keyword: TiN-M

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Characteristics of Amorphous/Polycrystalline $BaTiO_3$ Double Layer Thin Films with High Performance Prepared New Stacking Method and its Application to AC TFEL Device (새로운 적층방법으로 제조된 고품위 비정질/다결정 $BaTiO_3$ 적층박막의 특성과 교류 구동형 박막 전기 발광소자에의 응용)

  • 송만호;이윤희;한택상;오명환;윤기현
    • Journal of the Korean Ceramic Society
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    • v.32 no.7
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    • pp.761-768
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    • 1995
  • Double layered BaTiO3 thin films with high dielectric constant as well as good insulating property were prepared for the application to low voltage driving thin film electroluminescent (TFEL) device. BaTiO3 thin films were formed by rf-magnetron sputtering technique. Amorphous and polycrystalline BaTiO3 thin films were deposited at the substrate temperatures of room temperature and 55$0^{\circ}C$, respectively. Two kinds of films prepared under these conditions showed high resistivity and high dielectric constant. The figure of merit (=$\varepsilon$r$\times$Eb.d) of polycrystalline BaTiO3 thin film was very high (8.43$\mu$C/$\textrm{cm}^2$). The polycrystalline BaTiO3 showed a substantial amount of leakage current (I), under the high electric field above 0.5 MV/cm. The double layered BaTiO3 thin film, i.e., amorphous BaTiO3 layer coated polycrystalline BaTiO3 thin film, was prepared by the new stacking method and showed very good dielectric and insulating properties. It showed a high dielectric constant fo 95 and leakage current density of 25 nA/$\textrm{cm}^2$ (0.3MV/cm) with the figure of merit of 20$\mu$C/$\textrm{cm}^2$. The leakage current density in the double layered BaTiO3 was much smaller than that in polycrystalline BaTiO3 under the high electric field. The saturated brightness of the devices using double layered BaTiO3 was about 220cd/$m^2$. Threshold voltage of TFEL devices fabricated on double layered BaTiO3 decreased by 50V compared to the EL devices fabricated on amorphous BaTiO3.

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A 1$\times$4 Integrated Optical Matrix Switch Using the Three Guided Couplers in a Ti:LiNbO$_3$ (Ti:LiNbO$_3$세 도파로 결합기를 이용하여 집적한 1$\times$4 광 매트릭스 스위치)

  • 변영래
    • Proceedings of the Optical Society of Korea Conference
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    • 1991.06a
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    • pp.22-22
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    • 1991
  • 광의 병렬처리 능력을 잘 활용한 1$\times$4 매트릭스 스위치의 구조와 전극구조를 설계하고 스위치 특성을 조사하기 위하여 beam propagation method(BPM)를 이용하여 수치계산을 하였다. 기존의 매트릭스 스위치는 대부분의 경우 방향성 결합기를 스위치 element로 이용하여 왔으나 이 결합기는 소자의 길이가 길기 때문에 단일 LinBO3 웨이퍼상에 집적할 수 있는 매트릭스 스위치의 크기가 제한되는 단점이 있다. 본 연구에서는 두 도파로 사이에 세 번째 도파로를 삽입하여 두 도파로를 결합시키는 세 도파로 결합기를 스위치 element로 사용하여 세 개의 스위치 element를 LiNbO3기판위에 직렬로 집적시킨 1$\times$4 매트릭스 스위치를 구성하였다. 스위치 element와 1$\times$4 매트릭스 스위치를 구성하였다. 스위치 element와 1$\times$4 매트릭스 스위치의 특성을 BPM을 사용하여 수치계산할 때 단일 모드 도파로의 유효 굴절을 분포는 n(X) = nm + $\Delta$ncosh-2(2x/w)의 형태로 가정했으며, 사용된 파라미터의 값은 각각 nm=2.1455, $\Delta$n=0.003, W=5$mu extrm{m}$, d=5$\mu\textrm{m}$, λ=1.3$\mu\textrm{m}$ 이고 S-파라메터의 값은 0.95927이므로 단일 모드 도파로가 된다. 계산결과 스위치 element의 결합길이는 3810$\mu\textrm{m}$이며 도파로의 길이가 결합길이와 같을 때 전극에 인가된 전압에 의한 도파로의 굴절을 섭등의 함수로 출력광의 세기를 계산한 결과 스위칭 전압은 14.85volt이고 crosstalk는 -18.9dB였다. 이 스위치 element로 구성된 1$\times$4 매트릭스 스위치는 스위칭 전압을 세 개의 전극에 적절한 조합으로 인가함으로써 한 입력 도파로에 결합된 광이 내개의 출력 도파로중 한 도파로에 스위칭 된다. 한편 수치계산의 결과를 실험적으로 확인하기 위해 스위치 element와 1$\times$4 매트릭스 스위치를 z-cut의 LinbO3 결정에 Ti을 열확산시켜 제작한 소자의 스위칭 특성을 발표할 예정이다.

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Measurement of Effective Transverse Piezoelectric Coefficients $(e_{31,f})$ of Fabricated Thick PZT Films on $SiN_x/Si$ Substrates ($SiN_x/Si$ 기판에 제조된 후막 PZT의 횡 압전 계수 $(e_{31,f})$ 측정)

  • Jeon, Chang-Seong;Park, Joon-Shik;Lee, Sang-Yeol;Kang, Sung-Goon;Lee, Nak-Kyu;Ha, Kyoang-Hwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.07b
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    • pp.965-968
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    • 2004
  • Effective transverse Piezoelectric Coefficients $(e_{31,f})$ of thick PZT $(Pb(Zr_{0.52}Ti{0.48}Ti_{0.48})O_3)$ films on $SiN_x/Si$ substrates were measured with PZT thicknesses and top electrode dimensions. $e_{31,f}$ is one of important Parameters characterizing Piezoelectricity of PZT films. Thick PZT films have been used as various sensors and actuators because of their high driving force and high breakdown voltage. Thick PZT films were fabricated on Pt/Ta/$SiN_x$/Si substrates using sol-gel method. Thicknesses of PZT films were $1{\mu}m$ and $1.8{\mu}m$. $|e_{31,f}|$ values of $1.8{\mu}m$-thick-PZT films were higher than those of $1{\mu}$-thick-PZT films. Maximum $|e_{31,f}|$ of $1.8{\mu}$-thick-PZT films was about $50^{\circ}C/m^2$.

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Catalytic Dehydropolymerization of Di-n-butylstannane n-$Bu_2SnH_2$ by Group 4 and 6 Transition Metal Complexes

  • 우희권;박종목;송선정;양수연;김익식;김환기
    • Bulletin of the Korean Chemical Society
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    • v.18 no.12
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    • pp.1291-1295
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    • 1997
  • The catalytic dehydrocoupling of di-n-butylstannane n-Bu2SnH2 by the Cp2MCl2/Red-Al (M = Ti, Zr, Hf) and M(CO)6/Red-Al in situ combination catalysts yielded a mixture of two kinds of catenated products: one is a cross-linked insoluble solid, and the other is a non-cross-linked soluble solid (≒Sn5) or viscous oil (≒Sn2). The soluble oligostannanes could be produced by simple dehydrocoupling of n-Bu2SnH2, whereas the insoluble polystannanes could be obtained via disproportionation/dehydrocoupling combination process of n-Bu2SnH2. The disproportionation/dehydrocoupling combination process may initially produce a low-molecular-weight oligostannane with partial backbone Sn-H bonds which could then undergo an extensive cross-linking reaction of backbone Sn-H bonds, resulting in the formation of an insoluble polystannane.

High Efficiency Solar Cell(I)-Fabrication and Characteristics of $N^+PP^+$ Cells (고효율 태양전지(I)-$N^+PP^+$ 전지의 제조 및 특성)

  • 강진영;안병태
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.18 no.3
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    • pp.42-51
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    • 1981
  • Boron was predeposited into p (100) Si wafer at 94$0^{\circ}C$ for 60minutes to make the back surface field. High tempreature diffusion process at 1145$^{\circ}C$ for 3 hours was immediately followed without removing boron glass to obtain high surface concentration Back boron was annealed at 110$0^{\circ}C$ for 40minutes after boron glass was removed. N+ layer was formed by predepositing with POCI3 source at 90$0^{\circ}C$ for 7~15 minutes and annealed at 80$0^{\circ}C$ for 60min1es under dry Of ambient. The triple metal layers were made by evaporating Ti, Pd, Ag in that order onto front and back of diffused wafer to form the front grid and back electrode respectively. Silver was electroplated on front and back to increase the metal thickness form 1~2$\mu$m to 3~4$\mu$m and the metal electrodes are alloyed in N2 /H2 ambient at 55$0^{\circ}C$ and followed by silicon nitride antireflection film deposition process. Under artificial illumination of 100mW/$\textrm{cm}^2$ fabricated N+PP+ cells showed typically the open circuit voltage of 0.59V and short circuit current of 103 mA with fill factor of 0.80 from the whole cell area of 3.36$\textrm{cm}^2$. These numbers can be used to get the actual total area(active area) conversion efficiency of 14.4%(16.2%) which has been improved from the provious N+P cell with 11% total area efficiency by adding P+ back.

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AN ELECTROCHEMICAL STUDY ON THE CORROSION RESISTANCE OF THE VARIOUS IMPLANT METALS (수종 임플랜트 금속의 내식성에 관한 전기화학적 연구)

  • Jeon Jin-Young;Kim Yung-Soo
    • The Journal of Korean Academy of Prosthodontics
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    • v.31 no.3
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    • pp.423-446
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    • 1993
  • Titanium and its alloys are finding increasing use in medical devices and dental implants. The strong selling point of titanium is its resistance to the highly corrosive body fluids in which an implant must survive. This corrosion resistance is due to a tenacious passive oxide or film which exists on the metal's surface and renders it passive. Potentiodynamic polarization measurement is one of the most commonly used electro-chemical methods that have been applied to measure corrosion rates. And the potentiodynamic polarization test supplies detailed information such as open circuit, rupture, and passivation potential. Furthermore, it indicates the passive range and sensitivity to pitting corrosion. This study was designed to compare the corrosion resistance of the commonly used dental implant materials such as CP Ti, Ti-6A1-4V, Co-Cr-Mo alloy, and 316L stainless steel. And the effects of galvanic couples between titanium and the dental alloys were assessed for their useful-ness-as. materials for superstructure. The working electrode is the specimen , the reference electrode is a saturated calomel electrode (SCE), and the counter electrode is made of carbon. In $N_2-saturated$ 0.9% NaCl solutions, the potential scanning was performed starting from -800mV (SCE) and the scan rate was 1 mV/sec. At least three different polarization measurements were carried out for each material on separate specimen. The galvanic corrosion measurements were conducted in the zero-shunt ammeter with an implant supraconstruction surface ratio of 1:1. The contact current density was recorded over a 24-hour period. The results were as follows : 1. In potential-time curve, all specimens became increasingly more noble after immersion in the test solution and reached between -70mV and 50mV (SCE) respectively after 12 hours. 2. The Ti and Ti alloy in the saline solution were most resistant to corrosion. They showed the typical passive behavior which was exhibited over the entire experimental range. Therefore no breakdown potentials were observed. 3. Comparing the rupture potentials, Ti and Ti alloy had the high(:st value (because their break-down potentials were not observed in this study potential range ) followed by Co-Cr-Mo alloy and stainless steel (316L). So , the corrosion resistance of titanium was cecellent, Co-Cr-Mo alloy slightly inferior and stainless steel (316L) much less. 4. The contact current density sinks faster than any other galvanic couple in the case of Ti/gold alloy. 5. Ag-Pd alloy coupled with Ti yielded high current density in the early stage. Furthermore, Ti became anodic. 6. Ti/Ni-Cr alloy showed a relatively high galvanic current and a tendency to increase.

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Fabrication of a Nano-sized Conical-type Tungsten Field-emitter Based on Carbon Nanotubes (탄소나노튜브를 이용한 텅스텐 나노팁 전계방출기 제작)

  • Park, Chang-Kyun;Kim, Jong-Pil;Kim, Young-Kwang;Yun, Sung-Jun;Kim, Won;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 2007.11a
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    • pp.90-91
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    • 2007
  • Nano-sized conical-type tungsten(W) field-emitters based on carbon nanotubes(CNTs) are fabricated with the configuration of CNTs/catalyst/buffer/W-tip by adopting various buffer layers, such as TiN, Al, Al/TiN, and Al/hi/TiN. This study focuses on elucidating how the buffer layers affect the structural properties of CNTs and the electron-emission characteristics of CNT-emitters. Field-emission scanning electron microscopy(FESEM) and high-resolution transmission electron microscopy(HRTEM) are used to monitor the nanostructures and surface morphologies of all the catalysts and CNTs grown. The crystalline structure of CNTs is also characterized by Raman spectroscopy. Furthermore, the measurement of field-emission characteristics for all the field-emitters fabricated shows that the emitter using the Al/Ni/TiN stacked buffer reveals the most excellent performances, such as maximum emission current of $202{\mu}A$, threshold field of 2.08V/${\mu}m$, and long-term (up to 24h) stability of emission current.

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Characteristics of Piezoelectric Transformer Using PMS-PZT, PMN-PZT Ceramics (PMS-PZT, PMN-PZT계 세라믹스를 이용한 압전변압기의 특성)

  • 이동균;안형근;한득영;윤석진;김현재
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.3
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    • pp.220-226
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    • 2000
  • The piezoelectric material for piezoelectric transformer needs the high electromechanical coupling factor( $k_{p}$) the piezoelectric constant( $d_{33}$) and the mechanical quality factor( $Q_{m}$)in order to obtain high voltage step-up ratio and low temperature rising. In this study the piezoelectric transformers were fabricated using Pb[$Zr_{0.45}$/ $Ti_{0}$48//L $u_{0.02}$(M $n_{1}$3//S $b_{2}$3/)$_{0.05}$$O_3$(PMS-PZT) and Pb[Z $r_{0.25}$/ $Ti_{0.375}$(M $g_{1}$3//N $b_{2}$3/)$_{0.375}$$O_3$+0.5wt%Mn $O_2$(PMN-PZT) ceramics. The piezoelectric properties of PMS-PZT and PMN-PZT were measured. The voltage set-up ratios of the piezoelectric transformers using PMS-PZT and PMN-PZT were the value of 15, 20 respectively under 100$_{KΩ}$ in Rosen type transformer.r.ormer.r.r.r.r.r.r.

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Characteristic of PECVD-$WN_x$ Thin Films Deposited on $Si_3N_4$ Substrate ($Si_3N_4$ 기판 위에 PECVD 법으로 형성한 Tungsten Nitride 박막의 특성)

  • Bae, Seong-Chan;Park, Byung-Nam;Son, Seung-Hyun;Lee, Jong-Hyun;Choi, Sie-Young
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.7
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    • pp.17-25
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    • 1999
  • Tungsten nitride($WN_x$) films were deposited by PECVD method on silicon nitride($WSi_3N_4$) substrate. The characteristics of $WN_x$ film were investigated with changing various processing parameters ; substrate temperature, gas flow rate, rf power, and different nitrogen sources. The nitrogen composition in $WN_x$ film varied from 0 to 45% according to the $NH_3$ and $N_2$ flow rate. The highest deposition rate of 160 nm/min was obtained for the $NH_3$ gas and relatively low deposition rate of $WN_x$ films were formed by $N_2$ gas. $WN_x$ films deposited on $WSi_3N_4$ substrate had higher deposition rate than that of TiN and Si substrates. The purity of $WN_x$ film were analyzed by AES and higher purity $WN_x$ films were deposited using $NH_3$ gas. The XRD analysis indicates a phase transition from polycrystalline tungsten(W) to amorphous tungsten nitride($WN_x$), showing improved etching profile of $WN_x$ films Thick $WN_x$ films were deposited on various substrates such as Tin, NiCr and Al and maximum thickness of $1.6 {\mu}m$ was obtained on the Al adhesion layer.

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Studying the $SrTiO_3$: Pr cathode-luminescence

  • Kargin, N.I.;Vorobiev, V.A.;Sinelnikov, B.M.;Kuznetsov, U.V.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.268-269
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    • 2006
  • The estimation of applicability $SrTiO_3:Pr^{3+}$, Al to a class low-voltage flat-panel displays based on field emission effect, which have average value anode voltage $U_a=300V$ and current density $j=100\;mA/sm^2$ at duty 240, has given positive result. In the same time observably for the most effective sample in similar conditions of excitation high brightness - more than $500\;Kd/m^2$ and linear brightness dependences from current density and voltage allows to decrease greatly the power which consumed by the device.

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