• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.413-413
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• 2011

최근 전기, 전자, 반도체 산업의 발전으로 전 고상 박막리튬전지는 초소형, 초경량의 마이크로 소자의 구현을 위한 고밀도 에너지원으로 각광받고 있다. 현재 양극박막은 대부분LCO(LiCoO2)계열이 이용되고 있으나, 코발트는 높은 가격과 인체 유해성 뿐만 아니라 상대적으로 낮은 용량(~140 mAh/g)등의 단점을 갖고 있어 향후 보다 고용량의 양극박막이 요구된다. 3원계 양극활물질 LiMO2(M=Co,Ni,Mn,etc.)은 우수한 충방전 효율 과 열적 안정성 뿐 아니라 277mAh/g의 높은 이론용량을 갖고 있어 고용량 양극박막으로의 적용시 고용량 박막이차전지 제작이 가능하다. 본 연구에서는 전 고상 박막 전지의 구현을 위하여 RF 스퍼터링법을 사용하여 Li[Li0.2Mn0.54Co0.13Ni0.13]O2 박막을 증착하였다. Li/MnCoNi의 몰 비율을 변화시켜 높은 전기화학적 특성을 갖는 분말을 합성하여 제조한 타겟으로 Pt/TiO2/SiO2/Si 기판위에 RF 스퍼터법을 이용하여 박막을 성장시켰다. 박막 증착 시 가스의 비율은 Ar:O2=3:1로 하고 증착 압력의 조절(0.005~0.02 torr)을 통하여 박막의 두께와 표면 특성을 조절하며 성장시켰다. 또한 박막을 다양한 온도에서($400{\sim}550^{\circ}C$) 열처리하여 결정화도와 전기화학적 특성을 측정하였다. 증착 된 박막의 구조적 특성은 X-ray diffraction(XRD) 과 scanning electron microscopy(SEM)로 관찰되었다. 박막의 전기화학적 특성 평가를 위하여 Cyclic voltammatry를 측정하여 가역성의 정도를 확인하고 WBC3000 battery cycler를 이용한 half-cell 테스트를 통하여 박막의 용량을 평가하였다.

• Proceedings of the KAIS Fall Conference
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• 2000.10a
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• pp.42-42
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• 2000

반응소결 탄화규소는 소결체 내에 잔존 실리콘이 남아 있어 고온강도의 감소를 초래하는 단점이 있어 고온 구조재료로서의 사용이 제한되어 왔다. 따라서 이러한 문제점을 해결하기 위한 방법으로 Si 단독으로 용응침투시키는 대신 Si-MoSi₂를 침투시키는 방법이 시도되고 있으며, 이외에도 TiC 성형체에 Co, Ni 등의 금속, ZrB₂ 성형체에 Zr 금속 등을 용융, 침투시켜 성능향상을 유도하는 연구가 진행되고 있다. 본 연구에서는 반응소결에 대한 기본이론과 응용분야, 반응소결 비산화물계 세라믹스의 제조공정 및 이들 소결체의 미세구조와 기계적 특성 등을 소개하고자 한다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.208-209
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• 2005

바나듐 산화물은 반도성-금속성으로 상전이 하는 CTR특성의 대표적인 산화물로 상전이 온도인 68$^{\circ}C$에서 저항의 급변 특성을 보인다. 여기에 Fe, Ni, Mo, Ti, W과 같은 금속성 산화물을 첨가함에 따라 상전이온도를 움직일 수 있다. 그중 $WO_3$를 첨가함으로써 상전이온도를 상온까지 낮출 수 있다. Inorgnic sol-gel 법에 의해 바나듐-텅스텐 sol을 제조 하였으며, 제조된 sol을 기판에 코팅한 후 환원분위기에서 열처리 하여 막을 얻었다. 온도-저항 특성 측정 결과 순수 바나듐 막은 상전이 온도는 68$^{\circ}C$ 전기저항 감소폭은 $10^4$order 이였으나 바나듐-텅스텐막의 상전이 온도는 38$^{\circ}C$, 전기저항 감소폭은 $10_{15}$order 로 감소함을 확인 하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.438-439
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• 2013

Microelectronic devices의 접촉저항의 향상을 위해 Metal silicides의 형성 mechanism과 전기적 특성에 대한 연구가 많이 이루어지고 있다. 지난 수십년에 걸쳐, Ti silicide, Co silicide, Ni silicide 등에 대한 개발이 이루어져 왔으나, 계속적인 저저항 접촉 소재에 대한 요구에 의해 최근에는 Rare earth silicide에 관한 연구가 시작되고 있다. Rare-earth silicide는 저온에서 silicides를 형성하고, n-type Si과 낮은 schottky barrier contact (~0.3 eV)를 이룬다. 또한, 비교적 낮은 resistivity와 hexagonal AlB2 crystal structure에 의해 Si과 좋은 lattice match를 가져 Si wafer에서 high quality silicide thin film을 성장시킬 수 있다. Rare earth silicides 중에서 ytterbium silicide는 가장 낮은 electric work function을 갖고 있어 낮은 schottky barrier 응용에서 쓰이고 있다. 이로 인해, n-channel schottky barrier MOSFETs의 source/drain으로써 주목받고 있다. 특히 ytterbium과 molybdenum co-deposition을 하여 증착할 경우 thin film 형성에 있어 안정적인 morphology를 나타낸다. 또한, ytterbium silicide와 마찬가지로 낮은 면저항과 electric work function을 갖는다. 그러나 ytterbium silicide에 molybdenum을 화합물로써 높은 농도로 포함할 경우 높은 schottky barrier를 형성하고 epitaxial growth를 방해하여 silicide film의 quality 저하를 야기할 수 있다. 본 연구에서는 ytterbium과 molybdenum의 co-deposition에 따른 silicide 형성과 전기적 특성 변화에 대한 자세한 분석을 TEM, 4-probe point 등의 다양한 분석 도구를 이용하여 진행하였다. Ytterbium과 molybdenum을 co-deposition하기 위하여 기판으로 $1{\sim}0{\Omega}{\cdot}cm$의 비저항을 갖는 low doped n-type Si (100) bulk wafer를 사용하였다. Native oxide layer를 제거하기 위해 1%의 hydrofluoric (HF) acid solution에 wafer를 세정하였다. 그리고 고진공에서 RF sputtering 법을 이용하여 Ytterbium과 molybdenum을 동시에 증착하였다. RE metal의 경우 oxygen과 높은 반응성을 가지므로 oxidation을 막기 위해 그 위에 capping layer로 100 nm 두께의 TiN을 증착하였다. 증착 후, 진공 분위기에서 rapid thermal anneal(RTA)을 이용하여 $300{\sim}700^{\circ}C$에서 각각 1분간 열처리하여 ytterbium silicides를 형성하였다. 전기적 특성 평가를 위한 sheet resistance 측정은 4-point probe를 사용하였고, Mo doped ytterbium silicide와 Si interface의 atomic scale의 미세 구조를 통한 Mo doped ytterbium silicide의 형성 mechanism 분석을 위하여 trasmission electron microscopy (JEM-2100F)를 이용하였다.

• Journal of Welding and Joining
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• v.34 no.3
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• pp.52-60
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• 2016

Recently nickel based superalloys are extensively being regarded as the materials for the steam turbine parts for hyper super critical (HSC) power plants working at the temperature over $700^{\circ}C$, since the materials have excellent strength and corrosion resistance in high temperature. In this paper, alloy 617 of solution strengthened material and alloy 263 of ${\gamma}^{\prime}$-precipitation strengthened material were prepared as the testing materials for HSC plants each other. Post weld heat treatment (PWHT) was conducted with the gas tungsten arc (GTA) welded specimens. The microstructure of the base metals and weld metals were investigated with Electron Probe Micro-Analysis (EPMA) and Scanning Transmission Electron Microscope (STEM). The experimental results revealed that Ti-Mo carbides were formed in both of the base metals and segregation of Co and Mo in both of the weld metals before PWHT and PWHT leaded to precipitation of various carbides such as Mo carbides in the specimens. Furthermore, fine ${\gamma}^{\prime}$ particles, that were not precipitated in the specimens before PWHT, were observed in base metal as well as in the weld metal of alloy 263 after PWHT.

• Korean Journal of Materials Research
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• v.7 no.3
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• pp.218-223
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• 1997

At the aim of finding a Fehased amorphous alloy with a wide supercooled liquid region (${\Delta}T_{x}=T_{x}-T_{g}$) before crystallization, the changes in glass transition temperatudfI$T_{g}$ and crystallization temperature ($T_{x}$) by the dissolution of additional M elements were examined for the $Fe_{80}P_{10}C_{6}B_{4}$(x~6at%. M= transition metals) amorphous alloys. The ${\Delta}T_{x}$ value is 27K for the Fe,,,P,,,C,,R, alloy and increases to 40K for the addition of M=4at%Hf, 4at%Ta or 4at%Mo. The increase in ${\Delta}T_{x}$ is due to the increase of $T_{x}$ exceeding the degree in the increase in $T_{g}$. The $T_{g}$ and $T_{x}$ increase with decreasing electron concentration (e/a) from about 7 38 to 7.05. The decrease of e/a also implies the increase in the attractive bonding state between the M elements and other constitutent elements. It is therefore said that $T_{g}$ and $T_{x}$ increase kith increasing attractive bonding force.

• Nuclear Engineering and Technology
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• v.52 no.3
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• pp.647-653
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• 2020

Stainless steel is used commonly in nuclear applications for shielding radiation, so in this study, three different types of new stainless steel samples were designed and developed. New stainless steel compound ratios were determined by using Monte Carlo Simulation program Geant 4 code. In the sample production, iron (Fe), nickel (Ni), chromium (Cr), silicium (Si), sulphur (S), carbon (C), molybdenum (Mo), manganese (Mn), wolfram (W), rhenium (Re), titanium (Ti) and vanadium (V), powder materials were used with powder metallurgy method. Total macroscopic cross sections, mean free path and transmission number were calculated for the fast neutron radiation shielding by using (Geant 4) code. In addition to neutron shielding, the gamma absorption parameters such as mass attenuation coefficients (MACs) and half value layer (HVL) were calculated using Win-XCOM software. Sulfuric acid abrasion and compressive strength tests were carried out and all samples showed good resistance to acid wear and pressure force. The neutron equivalent dose was measured using an average 4.5 MeV energy fast neutron source. Results were compared to 316LN type stainless steel, which commonly used in shielding radiation. New stainless steel samples were found to absorb neutron better than 316LN stainless steel at both low and high temperatures.

• Proceedings of the KACD Conference
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• 2008.05a
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• pp.204-212
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• 2008

The purpose of this study was to compare the apical microleakage in root canal filled with Resilon by methacrylate-based root canal sealer or 2 different self-adhesive resin cements. Seventy single-rooted extracted human teeth were sectioned at the CEJ perpendicular to the long axis of the roots with diamond disk. Canal preparation was performed with crown-down technique using Profile NiTi rotary instruments and GG drill. Each canal was prepared to ISO size 40, .04 taper and 1 mm short from the apex. The prepared roots were randomly divided into 4 experimental groups of 15 roots each and 5 roots each for positive and negative control group. The root canals were filled by lateral condensation as follows. Group 1: Gutta-percha with AH-26, Group 2: Resilon with RealSeal primer & sealer, Group 3: Resilon with Rely-X Unicem, Group 4: Resilon with BisCem. After stored in $37^{\circ}C$, 100% humidity chamber for 7 days, the roots were coated with 2 layers of nail varnish except apical 3 mm. The roots were then immersed in 1% methylene blue dye for 7 days. Apical microleakage was measured by a maximum length of linear dye penetration after roots were separated longitudinally. One way ANOVA and Scheffe's post-hoc test were performed for statistical analysis. Group 1 showed the least apical leakage and there was no statistical significance between Group 2, 3, 4. According to the results, the self adhesive resin cement is possible to use as sealer instead of primer & sealant when root canal filled by Resilon.

• Restorative Dentistry and Endodontics
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• v.33 no.3
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• pp.204-212
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• 2008

The purpose of this study was to compare the apical microleakage in root canal filled with Resilon by methacrylate-based root canal sealer or 2 different self-adhesive resin cements. Seventy single-rooted extracted human teeth were sectioned at the CEJ perpendicular to the long axis of the roots with diamond disk. Canal preparation was performed with crown-down technique using Profile NiTi rotary instruments and GG drill. Each canal was prepared to ISO size 40, .04 taper and 1 mm short from the apex. The prepared roots were randomly divided into 4 experimental groups of 15 roots each and 5 roots each for positive and negative control group. The root canals were filled by lateral condensation as follows. Group 1: Guttapercha with AH-26, Group 2: Resilon with RealSeal primer & sealer, Group 3: Resilon with Rely-X Unicem, Group 4: Resilon with BisCem. After stored in $37{\circ}C$, 100% humidity chamber for 7 days, the roots were coated with 2 layers of nail varnish except apical 3 mm. The roots were then immersed in 1% methylene blue dye for 7 days. Apical microleakage was measured by a maximum length of linear dye penetration after roots were separated longitudinally. One way ANOVA and Scheffe's post-hoc test were performed for statistical analysis. Group 1 showed the least apical leakage and there was no statistical significance between Group 2, 3, 4. According to the results, the self adhesive resin cement is possible to use as sealer instead of primer & sealant when root canal filled by Resilon.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2002.07a
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• pp.25-37
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• 2002

The most important industrial application of gamma radiation in characterizing green compacts is the determination of the density. Examples are given where this method is applied in manufacturing technical components in powder metallurgy. The requirements imposed by modern quality management systems and operation by the workforce in industrial production are described. The accuracy of measurement achieved with this method is demonstrated and a comparison is given with other test methods to measure the density. The advantages and limitations of gamma ray densitometry are outlined. The gamma ray densitometer measures the attenuation of gamma radiation penetrating the test parts (Fig. 1). As the capability of compacts to absorb this type of radiation depends on their density, the attenuation of gamma radiation can serve as a measure of the density. The volume of the part being tested is defined by the size of the aperture screeniing out the radiation. It is a channel with the cross section of the aperture whose length is the height of the test part. The intensity of the radiation identified by the detector is the quantity used to determine the material density. Gamma ray densitometry can equally be performed on green compacts as well as on sintered components. Neither special preparation of test parts nor skilled personnel is required to perform the measurement; neither liquids nor other harmful substances are involved. When parts are exhibiting local density variations, which is normally the case in powder compaction, sectional densities can be determined in different parts of the sample without cutting it into pieces. The test is non-destructive, i.e. the parts can still be used after the measurement and do not have to be scrapped. The measurement is controlled by a special PC based software. All results are available for further processing by in-house quality documentation and supervision of measurements. Tool setting for multi-level components can be much improved by using this test method. When a densitometer is installed on the press shop floor, it can be operated by the tool setter himself. Then he can return to the press and immediately implement the corrections. Transfer of sample parts to the lab for density testing can be eliminated and results for the correction of tool settings are more readily available. This helps to reduce the time required for tool setting and clearly improves the productivity of powder presses. The range of materials where this method can be successfully applied covers almost the entire periodic system of the elements. It reaches from the light elements such as graphite via light metals (AI, Mg, Li, Ti) and their alloys, ceramics ($AI_20_3$, SiC, Si_3N_4, $Zr0_2$, ...), magnetic materials (hard and soft ferrites, AlNiCo, Nd-Fe-B, ...), metals including iron and alloy steels, Cu, Ni and Co based alloys to refractory and heavy metals (W, Mo, ...) as well as hardmetals. The gamma radiation required for the measurement is generated by radioactive sources which are produced by nuclear technology. These nuclear materials are safely encapsulated in stainless steel capsules so that no radioactive material can escape from the protective shielding container. The gamma ray densitometer is subject to the strict regulations for the use of radioactive materials. The radiation shield is so effective that there is no elevation of the natural radiation level outside the instrument. Personal dosimetry by the operating personnel is not required. Even in case of malfunction, loss of power and incorrect operation, the escape of gamma radiation from the instrument is positively prevented.