Electrical Properties of $Al_2O_3/Si$ Ferroelectric Thin Films on $(Bi,La)Ti_3O_{12}$ Substrates by Sol-Gel Method
(졸-겔법에 의해 $Al_2O_3/Si$ 기판위에 형성한 $(Bi,La)Ti_3O_{12}$ 강유전체 박막의 전기적 특성)
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- Proceedings of the International Microelectronics And Packaging Society Conference
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- 2002.11a
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- pp.69-72
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- 2002