• Title/Summary/Keyword: Ti-oxide

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Fabrication of Hybrid Films Using Titanium Chloride and 2,4-hexadiyne-1,6-diol by Molecular Layer Deposition

  • Yun, Gwan-Hyeok;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.418-418
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    • 2012
  • We fabricated a new type of hybrid film using molecular layer deposition (MLD). The MLD is a gas phase process analogous to atomic layer deposition (ALD) and also relies on a saturated surface reaction sequentially which results in the formation of a monolayer in each sequence. In the MLD process, polydiacetylene (PDA) layers were grown by repeated sequential surface reactions of titanium tetrachloride and 2,4-hexadiyne-1,6-diol with ultraviolet (UV) polymerization under a substrate temperature of $100^{\circ}C$. Ellipsometry analysis showed a self-limiting surface reaction process and linear growth of the hybrid films. Polymerization of the hybrid films was confirmed by infrared (IR) spectroscopy and UV-Vis spectroscopy. Composition of the films was confirmed by IR spectroscopy and X-ray photoelectron (XP) spectroscopy. The titanium oxide cross-linked polydiacetylene (TiOPDA) hybrid films exhibited good thermal and mechanical stabilities.

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Study for Remove of Cu oxide Layer by Pretreatment

  • Ju, Hyeon-Jin;Lee, Yong-Hyeok;No, Sang-Su;Choe, Eun-Hye;Na, Sa-Gyun;Lee, Yeon-Seung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.326-326
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    • 2011
  • 반도체 소자의 집적화/소형화에 따라, 낮은 비저항을 가진 구리(Cu)를 이용한 배선공정에 관한 연구가 활발하게 진행되고 있다. 구리배선 공정에 있어 전기 도금법이 다양하게 적용됨에 따라, 구리도금 박막 형성을 위해 사용되는 Cu seed 층의 상태는 배선으로 형성된 Cu박막 특성에 크게 영향을 미친다 [1-3]. 본 연구에서는 sputter 방식으로 증착된 Cu seed 층(Cu seed / Ti / Si) 위에 형성된 자연산화막을 제거하기 위하여 다양한 세정방법을 도입하여 비교 분석하였다. 계면활성제인 TS-40A를 비롯한 NH4OH 용액과 H2SO4 용액을 사용하여 Cu seed 층 위에 형성된 구리산화막을 제거함으로서 형성된 표면형상 및 표면상태를 조사분석 하였다. FE-SEM (Field Emission Scanning Electron Microscope)을 이용하여 표면 처리된 Cu seed층 표면의 형상 및 roughness 등을 측정하였고, XPS (X-ray Photoelectron Spectroscopy)를 이용하여 표면 처리된 Cu seed 표면의 화학구조 및 불순물 상태를 조사하였다.

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Powder Production of CuAINi Base Alloy via Rotating Disk Atomization (회전원반분사법에 의한 CuA1Ni계 합금 분말제조)

  • 류봉선
    • Journal of Powder Materials
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    • v.1 no.2
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    • pp.145-152
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    • 1994
  • Atomizing mode and powder characteristics of CuA1Ni base shape memory alloy in rotating disk atomization were investigated in accordance with disk materials and additional elements. Produced powders were classified into two types of spherical and flake shape. In the case of CuAlNiBTi and CuAlNiZr alloy, high yield rate and fine powder were obtained. This tendency was same when we used oxide coated disks. We concluded that this results were steno from the wetting characteristics change between molten metal and disk surface. Especially, due to the reactive properties of Ti and Zr with ceramic disk, the change of atomizing appearance and powder characteristics were noticeable.

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Effective Refractive Index of Dye-Sensitized Solar Cell Using Transmittance and Reflectance Measurements (투과 및 반사율 측정을 이용한 염료감응태양전지의 유효 굴절률 모델링)

  • Kim, Hyeong Seok;Lee, Joocheol;Shin, Myunghun
    • Current Photovoltaic Research
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    • v.3 no.3
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    • pp.91-96
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    • 2015
  • Optical modeling and characterization of transparent dye-sensitized solar cells (DSC) are presented to design and estimate DSC devices numerically. In order to model the inhomogeneous active layer of DSC, the porous structure of titanium oxide ($TiO_2$) and dye mixture, we prepared films consisting of layer by layer of the DSC's basic materials sequentially, and characterized the optical parameters of the films with the effective refractive index, which was extracted from the transmittance and reflectance measurements in ultra violet to near infra-red range. By using the effective refractive index, we made the optical model for DSC, and demonstrated that the optical model based on effective refractive index can be used to design and evaluate the performance of transparent-type DSC modules.

Electrohemical and optical properties of Ta$_2$O$_5$ thin film electrolyte EC windows (Ta$_2$O$_5$ 박막전해질 EC 창의 전기화학 및 광학적 특성에 관한 연구)

  • 김용혁;백지흠;조원일;윤경석;박인철;주재백
    • Journal of the Korean institute of surface engineering
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    • v.30 no.4
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    • pp.231-238
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    • 1997
  • Tantalum oxide thin filme has an amorphous structure and a high resistivity. Its stoichiometric structure was $Ta_2O_{5.3}$ and the transmission ratio was 80%. The high resistivity of $Ta_2O_{5.3}$ thin film electrolyte made an EC windows without electrical shottness, but the bleached/colored cur rent was very low because of the low ion conductivith. Upon adding moisture into the system, the $\Delta$T increased upto 25 %. proton concentration increase was the main cases to improve optical property. The influence of adding precious or transition metal film(~100 $\AA$ thickness) in $Ta_2O_5$layer on the color change performance was observed. The metal insertion layers had formed hydroxide and they behaved as a stable proton source. The transmission diffrnece and cycle life were greatly enhanced in the case of Ti inssertion.The $\Delta$T was 50% and the cycle life was 18, 000.

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Piezoelectric Properties of PSN-PMN-PT-PZ System (TSN-PMN-PT-PZ계 압전특성)

  • 성연우;장창섭;오봉인;강원호
    • Journal of the Korean Ceramic Society
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    • v.25 no.1
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    • pp.21-26
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    • 1988
  • The piezoelectric properties and temperatureproperties of resonant frequency of the pseudoquaternary soild solution 0.075 Pb(Sb$\frac{1}{2}$Nb$\frac{1}{2}$)O3-0.025 Pb(Mn1/3Nb2/3)O3-xPbTiO3-(0.9-x) PbZrO3 were investigated. The composition range examined are 0.32 x 0.57. Specimens were prepared by the conventional mixed oxide technique, calcined at 850$^{\circ}C$ for 1 hour and sintered at 1270$^{\circ}C$ for 2 hours under PbO atmosphere. From the results of XRD, dielectric and piezoelectric properties, it is supposed that the MPB composition between tetragonal and rhombohedral ferroelectric perovskite exists in 0.42$^{\circ}C$ was considered at the nearby MPB.

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Effect of Pyrochlore Phase on Electric Properties for PNN-PT-PZ Piezoelectric Ceramics (PNN-PT-PZ계 압전세라믹스의 전기적 특성에 미치는 Pyrochlore 상의 영향)

  • 이기태;남효덕
    • Journal of the Korean Ceramic Society
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    • v.31 no.9
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    • pp.1030-1036
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    • 1994
  • The ceramics in the system 0.5[Pb(Ni1/3Nb2/3)O3]-0.5[0.65PbTiO3-0.35PbZrO3] were prepared by conventional solid state reaction method, double calcined method (columbite precursor method) and flux method using NaCl-KCl. Amount of pyrochlore phase for the calcined powders, sintering charateristrics, dielectric and piezoelectric properties were then investigated. Sintering temperature was 1000~120$0^{\circ}C$ and in case of flux method, the amount of flux to oxide was 1 : 1 mole ratio. The dielectric and piezoelectric properties of ceramics prepared by double calcined method and flux method were found to be better than those by conventional method. It was also possible to lower sintering temperature and reduce the amount of pyrochlore phase either by double calcined method or flux method. But with increasing sintering temperature, the difference in characteristrics due to diffrent fabrication method gradually.

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Fabrication Process of Light Emitting Diodes Using CdSe/CdS/ZnS Quantum Dot

  • Cho, Nam Kwang;Kang, Seong Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.428-428
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    • 2013
  • Red color light emitting diodes were fabricated using CdSe/CdS/ZnS quantum dots (QDs). Patterned indium-tin-oxide (ITO) was used as a transparent anode, and oxygen plasma treatment on a surface of ITO was performed. Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) was spin coated on the ITO surface as a hole injection layer. Then CdSe/CdS/ZnS QDs was spin coated and thermal treatment was performed for the cross-linking of QDs. TiO2 was coated on the QDs as an electron transport layer, and 150 nm of aluminum cathode was formed using thermal evaporator and shadow mask. The device shows a pure red color emission at 606 nm wavelength. Device characteristics will be presented in detail.

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Microwave Dielectric Properties of the BSST Ceramics doped with Nd. (Nd가 첨가된 BSST 세라믹스의 마이크로파 유전 특성)

  • Park, In-Gil;Lee, Young-Hie;Ryu, Ki-Won;Bae, Seon-Gi
    • Proceedings of the KIEE Conference
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    • 1994.07b
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    • pp.1254-1256
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    • 1994
  • 0.15$(Ba_{0.95}Sr_{0.05})$O-0.15$(Sm_{2(1-x)}Nd-{2x})O_3-0.7TiO_2 (x=0{\sim}10[m/o])$ ceramics were fabricated by mixed-oxide method. Microwave dielectric properties was investigated with the contents of $Nd_2O_3$. Increasing the contents of $Nd_2O_3$ from 0 to 6[m/o], sintered density was increased 5.53 to $5.68[g/ cm^3]$. In the specimen with contents of $Nd_2O_3$(6[m/o]), dielectric content was maximum value of 78.14 and decreased with increasing the contents of $Nd_2O_3$. Quality factor was increased with the contents of $Nd_2O_3$.

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The Reactions of the Ti Melt with CaO and Graphite and the Effect of Pressure on the Formation of Gas Porosity (티타늄 용탕의 산화칼슘 및 흑연과의 반응 및 기포 결함의 형성에 미치는 압력의 영향)

  • Bae, Chang-Gun;Kwon, Hae-Wook
    • Journal of Korea Foundry Society
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    • v.20 no.4
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    • pp.247-253
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    • 2000
  • Titanium was melted in the CaO-coated alumina crucible and the reaction between the melt and the coating layer was negligible. The volume fraction of the gas porosity was decreased with increasing pressure and the sound bar castings with no porosity was obtained under the Ar atmosphere of the pressure of $300kN/mm^2$. The surface of the casting obtained from CaO-coated graphite mold was slightly rougher than that from graphite without coating. The reaction product of titanium melt with the layer of CaO was mainly titanium oxide and that with graphite crucible was titanium cabide with small amount of titanium nitride.

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