• 제목/요약/키워드: Ti-doped $In_2O_3$

검색결과 339건 처리시간 0.031초

그래핀을 베이스로 사용한 열전자 트랜지스터의 특성 (Characterization of Hot Electron Transistors Using Graphene at Base)

  • 이형규;김성진;강일석;이기성;김기남;고진원
    • 한국전기전자재료학회논문지
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    • 제29권3호
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    • pp.147-151
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    • 2016
  • Graphene has a monolayer crystal structure formed with C-atoms and has been used as a base layer of HETs (hot electron transistors). Graphene HETs have exhibited the operation at THz frequencies and higher current on/off ratio than that of Graphene FETs. In this article, we report on the preliminary results of current characteristics from the HETs which are fabricated utilizing highly doped Si collector, graphene base, and 5 nm thin $Al_2O_3$ tunnel layers between the base and Ti emitter. We have observed E-B forward currents are inherited to tunneling through $Al_2O_3$ layers, but have not noticed the Schottky barrier blocking effect on B-C forward current at the base/collector interface. At the common-emitter configuration, under a constant $V_{BE}$ between 0~1.2V, $I_C$ has increased linearly with $V_{CE}$ for $V_{CE}$ < $V_{BE}$ indicating the saturation region. As the $V_{CE}$ increases further, a plateau of $I_C$ vs. $V_{CE}$ has appeared slightly at $V_{CE}{\simeq}V_{BE}$, denoting forward-active region. With further increase of $V_{CE}$, $I_C$ has kept increasing probably due to tunneling through thin Schottky barrier between B/C. Thus the current on/off ration has exhibited to be 50. To improve hot electron effects, we propose the usage of low doped Si substrate, insertion of barrier layer between B/C, or substrates with low electron affinity.

Bridgeman 성장 [011] 분극 Mn:PIN-PMN-PT 압전단결정의 물성 분포 연구 (A Study on Property Distribution of [011] Poled Mn:PIN-PMN-PT Single Crystals Grown by Bridgeman Method)

  • 임수현;제엽;조요한;이상구;서희선
    • 한국전기전자재료학회논문지
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    • 제37권4호
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    • pp.412-419
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    • 2024
  • Mn-doped Pb(In1/2Nb1/2)O3-Pb(Mg2/3Nb1/3)O3-PbTiO3 (Mn:PIN-PMN-PT) single crystals, which exhibit improved phase transition temperatures and coercive field properties compared to Pb(In1/2Nb1/2)O3-Pb(Mg2/3Nb1/3)O3-PbTiO3 (PIN-PMN-PT) single crystals, are expected to be utilized in high-power acoustic transducers. Bridgeman method, growing single crystals along the axial direction from melt, is most widely used method for single crystal growth with large size and high quality. However, single crystal boules grown by the Bridgeman method demonstrate a PT compositional variation, giving rise a distribution of crystal structure and material properties along the growing axis. To employ piezoelectric single crystals grown by the Bridgeman method for acoustic transducers, it is essential to investigate their overall property distribution. In this study, the compositional distribution and property variation of Mn:PIN-PMN-PT single crystals grown by the Bridgeman method was investigated. Measured compositional distribution of PT was from 29% to 32.5% in the Rhombohedral crystal region of the boule. Two types of specimen, [011]-poled Mn:PIN-PMN-29PT and Mn:PIN-PMN-32PT single crystals, were fabricated and tested to obtain full property variation at both ends of the Rhombohedral crystal region. The properties related to the 32 directional vibration mode and the properties related to high-power driving were measured to confirm the overall distribution of properties by composition.

N-형 $WO_{3}$계 가스센서의 전기적 특성 (Electrical properties of n-type $WO_{3}$ based gas sensors)

  • 양종인;김일진;임한조;한상도;정관수
    • 센서학회지
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    • 제7권3호
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    • pp.188-196
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    • 1998
  • $WO_{3}$계 n-형 반도체 가스센서의 검지특성 및 전기적 특성을 조사하였다. 공기중에서 결합제가 첨가되지 않은 $WO_{3}:TiO_{2}$(4 wt. %) 센서의 낱알경계에서의 전위장벽의 크기는 0.26 V로 나타났으며, 결합제로서 $Al_{2}O_{3}$, PVA (polyvinyl alcohol ), silica sol이 첨가된 센서의 경우는 전위장벽이 각각 0.17, 0.22, 0.26 V로 관측되었다. 이들 시료를 $NO_{x}$가 120 ppm 첨가된 분위기에 노출시켰을 때, 결합제가 첨가되지 않은 센서의 경우는 낱알경계에서의 전위장벽이 0.59 V로 증가하였으며, 결합제로서 $Al_{2}O_{3}$, PVA, silica sol이 첨가된 경우는 전위장벽이 각각 0.43, 0.66, 0.52 V로 나타나, PVA가 첨가된 센서에서 전위장벽의 변화가 가장 높아 감도가 우수하게 되는 것을 알 수가 있었다. 한편 센서 최적 작동온도 이상의 온도에서 나타나는 감도의 감소는 흡착가스 입자의 탈착보다는 공기중에서 다결정이 보이는 저항의 온도 의존성에 따라 나타남이 판명되었다. 또한 결합제가 첨가되지 않은 센서와 결합제로서 Pt가 첨가된 센서의 경우, CO가 250 ppm 존재할 때까지도 전위장벽의 크기가 약 0.2 V로 공기중에서와 비슷한 크기를 나타내어, CO와 $NO_{x}$가 혼합된 분위기에서 $NO_{x}$만을 선택적으로 검지하는데 유리함이 밝혀졌다.

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Cr 첨가 $\textrm{Ll}_2\textrm{Al}_3\textrm{Ti}$기 2상 금속간화합물의 시효처리 효과 (Aging Effects in the Two-phase Intermetallic compounds Based on Cr-doped $\textrm{Ll}_2\textrm{Al}_3\textrm{Ti}$)

  • 이재경;박정용;오명훈;위당문
    • 한국재료학회지
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    • 제9권10호
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    • pp.951-955
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    • 1999
  • $Ll_2$기지에 20 vol.% $\textrm{Cr}_{2}\textrm{Al}$이 석출된 Al-21Ti-23Cr 2상합금은 $1150^{\circ}C$에서는 2상영역에 위치하지만 $1000^{\circ}C$에서는 3상영역에 위치한다. 이러한 점에 착안하여 본 연구에서는 Al-21Ti-23Cr 2상합금의 시효처리시 $800^{\circ}C$$1000^{\circ}C$이하에서 시효처리하여 $Ll_2$기지에 제3상을 미세하게 석출시켜, 기계적성질을 개선하고자 하였다. Al-21Ti-23Cr 2상합금의 시효처리시 $800^{\circ}C$$1000^{\circ}C$에서는 $Ll_2$기지부분에 수 $\mu\textrm{m}$ 크기의 제3상이 다량 석출되지만 $600^{\circ}C$이하에서는 제3상이 석출이 관찰되지 않았으며, 제3상의 석출형태는 $1000^{\circ}C$보다 $800^{\circ}C$에서 시효처리할 경우 더욱 미세하게 분포하는 것으로 확인되었다. 시효온도 상승에 따른 Al-21Ti-23Cr 2상합금의 항복강도는 $800^{\circ}C$에서 급격히 증가 후 다시 급격히 감소하는경향을 나타냈으며, 이러한 항복강도의 급격한 증가는 $Ll_2$기지 부분에 수 $\mu\textrm{m}$ 크기의 미세한 제3상이 다량 석출되기 때문에 나타나는 현상으로 판단된다. Al-21Ti-23Cr 2상합금의 시효처리시 $Ll_2$기지에 석출되는 제3상은 TiAlCr으로 확인되엇으며, 이러한 TiAlCr 석출상의 이용은 $Ll_2$기지의 균열전파에 대한 저항성를 향상시켜 합금의 기계적성질의 개선에 매우 효과적일 것으로 판단된다.

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광화학반응을 이용한 메틸오렌지의 탈색 (Heterogeneous Photocatalytic Bleaching of Methyl Orange)

  • Lee, Tai K.;Kim, Dong H.;Kim, Kyung N.;Chungmoo Auh
    • 한국에너지공학회:학술대회논문집
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    • 한국에너지공학회 1995년도 춘계학술발표회 초록집
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    • pp.60-68
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    • 1995
  • This work wes performed to investigate the photocatalytic decolorization of waste water from textile industries. Methyl orange was used as a target dye with suspended Hombikat TiO$_2$ photocatalyst with a recirculating annular photoreactor. 1 wt % Pt-doped Hombikat thin film tubular reactor with parabolic reflector also wes usedin this experiment. The pH effect and flow rate effect on photobleaching of 0.012 g/l methyl orange solution, AtpH=3 Colour of methyl orange was completely bleached in 30 min with a 20 W UV lamp.

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Highly Efficient Flexible Perovskite Solar Cells by Low-temperature ALD Method

  • Kim, Byeong Jo;Kwon, Seung Lee;Jung, Hyun Suk
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.469.2-469.2
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    • 2014
  • All-solid-state solar cell based on Chloride doped organometallic halide perovskite, (CH3NH3)PbIxCl3-x, has achieved a highly power conversion efficiency (PCE) to over 15% [1] and further improvements are expected up to 20% [2]. In this way, solar cells using novel light absorbing perovskite material are actively being studied as a next generation solar cells. However, making solution-process require high temperature up to $500^{\circ}C$ to form compact hole blocking layer and sinter the mesoporous oxide scaffold layer. Because of this high temperature process, fabrication of flexible solar cells on plastic substrate is still troubleshooting. In this study, we fabricated highly efficient flexible perovskite solar cells with PCE in excess of 11%. Atomic layer deposition (ALD) is used to deposit dense $TiO_2$ as hole blocking layer on ITO/PEN substrate. The all fabrication process is done at low temperature below $150^{\circ}C$. This work shows that one of the important blueprint for commercial use of perovskite solar cells.

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Ellipsometric study of Mn-doped $Bi_4Ti_3O_{12}$ thin films

  • Yoon, Jae-Jin;Ghong, Tae-Ho;Jung, Yong-Woo;Kim, Young-Dong;Seong, Tae-Geun;Kang, Lee-Seung;Nahm, Sahn
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.173-173
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    • 2010
  • $Bi_4Ti_3O_{12}$ ($B_4T_3$) is a unique ferroelectric material that has a relatively high dielectric constant, high Curie temperature, high breakdown strength, and large spontaneous polarization. As a result this material has been widely studied for many applications, including nonvolatile ferroelectric random memories, microelectronic mechanical systems, and nonlinear-optical devices. Several reports have appeared on the use of Mn dopants to improve the electrical properties of $B_4T_3$ thin films. Mn ions have frequently been used for this purpose in thin films and multilayer capacitors in situations where intrinsic oxygen vacancies are the major defects. However, no systematic study of the optical properties of $B_4T_3$ films has appeared to date. Here, we report optical data for these films, determined by spectroscopic ellipsometry (SE). We also report the effects of thermal annealing and Mn doping on the optical properties. The SE data were analyzed using a multilayer model that is consistent with the original sample structure, specifically surface roughness/$B_4T_3$ film/Pt/Ti/$SiO_2$/c-Si). The data are well described by the Tauc-Lorentz dispersion function, which can therefore be used to model the optical properties of these materials. Parameters for reconstructing the dielectric functions of these films are also reported. The SE data show that thermal annealing crystallizes $B_4T_3$ films, as confirmed by the appearance of $B_4T_3$ peaks in X-ray diffraction patterns. The bandgap of $B_4T_3$ red-shifts with increasing Mn concentration. We interpret this as evidence of the existence deep levels generated by the Mn transition-metal d states. These results will be useful in a number of contexts, including more detailed studies of the optical properties of these materials for engineering high-speed devices.

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전자빔 열 표면처리에 따른 TIO 박막의 투명전극 특성 개선 효과 (Advanced Optical and Electrical Properties of TIO Thin Films by Thermal Surface Treatment of Electron Beam Irradiation )

  • 이연학;박민성;김대일
    • 열처리공학회지
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    • 제36권4호
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    • pp.193-197
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    • 2023
  • Transparent and conducting titanium (Ti) doped indium oxide (TIO) thin films were deposited on the poly-imide (PI) substrate with radio frequency magnetron sputtering and then electron irradiation was conducted on the TIO film's surface to investigate the effect electron irradiation on the crystallization and opto-electrical properties of the films. All x-ray diffraction (XRD) pattern showed two diffraction peaks of the In2O2 (431) and (444) planes with regardless of the electron beam irradiation energy. In the AFM analysis, the surface roughness of as deposited films was 3.29 nm, while the films electron irradiated at 700 eV, show a lower RMS roughness of 2.62 nm. In this study, the FOM of as deposited TIO films is 6.82 × 10-3 Ω-1, while the films electron irradiated at 500 eV show the higher FOM value of 1.0 × 10-2 Ω-1. Thus, it is concluded that the post-deposition electron beam irradiation at 500 eV is the one of effective methods of crystallization and enhancement of opto-electrical performance of TIO thin film deposited on the PI substrate.

미세 전극 패턴을 갖는 알루미나 정전척을 이용한 LED용 사파이어 기판 흡착 연구 (A Study on the Holding of LED Sapphire Substrate Using Alumina Electrostatic Chuck with Fine Electrode Pattern)

  • 김형주;신용건;안호갑;김동원
    • 한국표면공학회지
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    • 제44권4호
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    • pp.165-171
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    • 2011
  • In this work, handling of sapphire substrate for LED by using an electrostatic chuck was studied. The electrostatic chuck consisted of alumina dielectric, which was doped with 1.2 wt% $TiO_2$. As the volume resistivity of alumina dielectric was decreased, the electrostatic force was increased by Johnsen-Rahbek effect. The narrower width and gap size of electrode led to the stronger electrostatic force. When alumina dielectric with $3.20{\times}10^{11}{\Omega}{\cdot}cm$ resistivity and 3 mm width/1.5 mm gap sized electrode was used, the strongest electrostatic force in this work was obtained, which value reached to ~14.46 gf/$cm^2$ at 2.5 kV for 4-inch sapphire substrate. This results show that alumina electrostatic chuck with low resistivity and fine electrode pattern is suitable for handling of sapphire substrate for LED.

Optical and Electrical Properties of Thin Film Electroluminescent Devices with SrS:Cu, Ag Phosphor Layer

  • Chang, Ho-Jung;Park, Jun-Seo;Chang, Young-Chul
    • 마이크로전자및패키징학회지
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    • 제9권1호
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    • pp.29-33
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    • 2002
  • The SrS:Cu, Ag thin film electroluminescient devices were fabricated on $AlTiO_3$/ITO/glass substrates by electron-beam evaporation. The emission spectrum of the device was about 460 nm with $\chi$=0.20, y=0.29 in the CIE color coordinator. It was found that the emission spectrum was saturated to pure blue color when Ag sensitizer was doped in SrS:CuCl phosphors. The luminance of the device was increased by increasing the sulfur pressure. The measured luminance was saturated with 430 cd/$m^2$at the applied voltage of 90 V and the maximum luminance was 580 cd/$m^2$at 110V. The polarization charge and conduction charge of the devices were found to be found to be about $3.5\mu$C/$\textrm{cm}^2$ and $7.4\mu$C/$\textrm{cm}^2$, respectively.

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