• Title/Summary/Keyword: Ti-S-N

Search Result 676, Processing Time 0.031 seconds

완전화 박막의 구현을 위한 기술적 과제와 도전

  • Jeong, Jae-In;Yang, Ji-Hun;Park, Hye-Seon;Jeong, Jae-Hun;Song, Min-A
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2013.02a
    • /
    • pp.98-98
    • /
    • 2013
  • 완전화 박막이란 사용자가 원하는 용도에 맞게 최적의 성능을 구현하도록 제조된 박막을 의미하며 금속이나 화합물 박막을 제조하되 각종 구조 제어 Tool이나 증착 공정을 변화시켜 나노화와 다층화 또는 치밀화를 통해 구현될 수 있다. 최근 고성능의 증착 및 제어 Tool이 개발되고 빗각증착(Oblique Angle Deposition)이나 스침각 증착(Glancing Angle Deposition) 방법 등의 기술이 개발되면서 사용자 목적에 최적인 박막 소재를 제공하여 User-friendly한 응용을 위한 연구개발이 활발히 진행되고 있다. 완전화 박막 제조에 대한 시도는 1990년대에 일본에서 시작되었다. 일본에서는 산학연이 공동으로 참여하는 NEDO 프로그램을 통해 경질코팅을 이용한 Protective Layer를 제조하여 차단 방식에 의한 내식성 구현 연구를 수행하였다. 유럽에서는 제 7차 European Framework Program (7th FT)을 통해 2007년부터 CORRAL (Corrosion Protection with Perfect Atomic Layer) 프로젝트를 만들어 완전화 박막 연구를 진행하고 있다. 상기 프로젝트는 얇은 자연 산화막이 Bulk의 부식을 방지해주는 것에 착안하여 HIPIMS나 Filtered Arc 또는 ALD 공정을 이용하여 자연 산화막과 유사한 Defect-free 산화막을 제조하여 Barrier형 내식성 박막을 구현하는 것을 목표로 하고 있다. 본 연구에서는 완전화 박막 구현을 위한 연구동향을 파악하고 완전화 박막 제조를 위한 기술적 과제와 몇 가지의 시도에 대한 기초 연구 자료를 소개한다.

  • PDF

Measurement of Ion Energy Distribution using QMS & Ionization Enhancement by usign Magnetic Field in Triod BARE (자장을 이용한 이온화율 증대형 삼극형 BARE에서 이온화율의 증대경향과 QMS를 이용한 이온의 에너지 분포 측정)

  • 김익현;주정훈;한봉희
    • Journal of the Korean institute of surface engineering
    • /
    • v.24 no.3
    • /
    • pp.119-124
    • /
    • 1991
  • Recently, the trend of research in hard coating is concentrate on developing the process of ionization rate under low operating pressure, to get the thin film with high adhesion and dense microstructures. In this study ionization rate enhancement type PVD process using permanent magnet is developed, which enhances the ionization rate by confining the plasma suppressing the wall loss of electron. By the result to investigate the characteristic of glow discharge, the ionization rate of this process is enhanced about twice as high as that of triod BARE process (about 26%), and more dense TiN microstructures are obtained in this process. Cylindrical ion energy analyzer is made and attached in front of a quadrupole mass filter for the analysis of the energy distribution of reactive gas and activated gas ions from the plasma zone. To analyze the operation mechanism of ion energy analyzer, computer simulation is performed by calculation the electric field environment using finite element method. By these analyses of ion energy distribution of outcoming ions from the plasma zone, it is found that magnetic field enhances ion kinetic energy as well as ionization rate. The other results of this study is that the foundation of feed-back system is constructed, which automatically control the partial pressure of reactive gas. In can be possible by recording the data of mass spectrum and ion energy analysis using A-D converter.

  • PDF

The Electric Conductivity $SrBi_2Ta_2O_9$ Capacitors using Rf Magnetron Sputtering Technique

  • Cho, C.N.;Shin, C.G.;Song, M.J.;Choi, W.S.;Park, G.H.;So, B.M.;Kim, C.H.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.04b
    • /
    • pp.3-5
    • /
    • 2008
  • The $SrBi_2Ta_2O_9$ thin films are deposited on Pt-coated electrode(Pt/$TiO_2/SiO_2$/Si) using RF magnetron sputtering method. The ferroelectric properties of SBT capacitors with annealing temperatures were studied. Through the x-ray diffraction analysis and the scanning electron microscopy (SEM), it could be observed that crystallization of the SBT thin film started around $650^{\circ}C$ and complete crystallization was accomplished around $750^{\circ}C$ and grains grew from a small spheric form to rod-like. For the leakage current density of the SBT capacitor depending upon various annealing atmospheres, capacitor annealed in the oxygen atmosphere showed the most excellent characteristic, and they were respectively about $2.13\times10^{-9}[A/cm^2]$ at 5V and 340.

  • PDF

Study on Fuzzy Control of Electric Car via TMS320F240 (TMS320F240 칩을 이용한 전동차의 퍼지 주행 제어기에 대한 연구)

  • Son, J.W.;Choi, S.M.;Song, D.K.;Kim, J.K.;Bae, J.I.;Lee, M.H.
    • Proceedings of the KIEE Conference
    • /
    • 1998.07g
    • /
    • pp.2381-2383
    • /
    • 1998
  • 직류직권모터는 전동지게차와 같은 물류용 전동차에서 사용되는데, 우수한 기동 토오크를 가지는 반면에 파라미터의 열적, 변화가 심하고 마찰과 부하의 비선형성이 존재해 기존의 제어기로는 만족할 만한 성능을 내지 못한다. 본 논문에서는 이를 해결하기 위해 퍼지제어기를 사용한다. 퍼지제어기는 변수의 애매성에 바탕을 두고 제어하기 때문에 이러한 비선형성에 대해 강인하나, 소속함수의 결정과 퍼지규칙의 선정이 어려우며, 체계적인 방법이 존재하지 않는다. 이러한 퍼지제 어의 결점을 해결하기 위해 소속함수는 유전 알고리즘을 통해 자기동조 시키며 퍼지규칙은 오차와 오차변화율의 위상평면을 이용하여 결정한다. 실용성을 검증하기 위해 TI사의 DSP TMS320F240을 이용해 실시스템에 적용했으며, 이를 통해 부하의 변동 및 기준 속도의 변화에도 잘 대처함을 알 수가 있었다.

  • PDF

Preparation and characterization of TiO2 membrane on porous 316 L stainless steel substrate with high mechanical strength

  • Mohamadi, Fatemeh;Parvin, Nader
    • Membrane and Water Treatment
    • /
    • v.6 no.3
    • /
    • pp.251-262
    • /
    • 2015
  • In this work the preparation and characterization of a membrane containing a uniform mesoporous Titanium oxide top layer on a porous stainless steel substrate has been studied. The 316 L stainless steel substrate was prepared by powder metallurgy technique and modified by soaking-rolling and fast drying method. The mesoporous titania membrane was fabricated via the sol-gel method. Morphological studies were performed on both supported and unsupported membranes using scanning electron microscope (SEM) and field emission scanning microscope (FESEM). The membranes were also characterized using X-ray diffraction (XRD) and $N_2$-adsorption / desorption measurement (BET analyses). It was revealed that a defect-free anatase membrane with a thickness of $1.6{\mu}m$ and 4.3 nm average pore size can be produced. In order to evaluate the performance of the supported membrane, single-gas permeation experiments were carried out at room temperature with nitrogen gas. The permeability coefficient of the fabricated membrane was $4{\times}10^{-8}\;lit\;s^{-1}\;Pa^{-1}\;cm^{-1}$.

Piezoelectric and dielectric properties of PMN-PZN ceramics for multilayer piezoelectric transformer with PZN substitution (PZN 치환에 따른 적층 압전변압기용 PMN-PZT 세라믹의 압전 및 유전 특성)

  • Lee, Chang-Bae;Yoo, Ju-Hyun;Paik, Dong-Soo;Im, In-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2005.07a
    • /
    • pp.59-61
    • /
    • 2005
  • In this paper, in order to develop the low temperature sintering ceramics for multilayer piezoelectric transformer, $Pb[(Mn_{1/3},Nb_{2/3})_{0.07}(Zn_{1/3}Nb_{2/3})_a(Zr_{0.48}Ti_{0.52})_{1-0.07-a}O_3]$ ceramics were manufactured with the variations of PZN from 2 to 14mol% and their dielectric and piezoelectric properties were investigated. Sintering temperature was varied from 910 to $1000^{\circ}C$. At 8mol% PZN substituted specimen sintered at $970^{\circ}C$, electromechanical coupling factor(kp), mechanical quality factor(Qm), dielectric constant and peizoelectric constant($d_{33}$) showed the optimal values of 0.536, 1803, 1551 and 328[pC/N), respectively, for multilayer piezoelectric transformer application.

  • PDF

Atomic Force Microscopy Study on Correlation between Electrical Transport and Nanomechanical properties of Graphene Layer

  • Kwon, Sang-Ku;Choi, Sung-Hyun;Chung, H.J.;Seo, S.;Park, Jeong-Young
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.85-85
    • /
    • 2010
  • Graphene, the building block of graphite, is one of the most promising materials due to their fascinating electronic transport properties. The pseudo-two-dimensional sp2 bonding in graphene layers yields one of the most effective solid lubricants. In this poster, we present the correlation between electrical and nanomechanical properties of graphene layer grown on Cu/Ni substrate with CVD (Chemical Vapor Deposition) method. The electrical (current and conductance) and nanomechanical (adhesion and friction) properties have been investigated by the combined apparatus of friction force microscopy/conductive probe atomic force microscopy (AFM). The experiment was carried out in a RHK AFM operating in ultrahigh vacuum using cantilevers with a conductive TiN coating. The current was measured as a function of the applied load between the AFM tip and the graphene layer. The contact area has been obtained with the continuum mechanical models. We will discuss the influence of mechanical deformation on the electrical transport mechanism on graphene layers.

  • PDF

The Study of Ni-Pd Alloy Characteristics to Form a NiSi for Shallow S/D Junction (Shallow S/D Junction에 적용 가능한 NiSi를 형성하기 위한 Ni-Pd 합금의 특성 연구)

  • Lee, Won-Jae;Oh, Soon-Young;Agchbayar, Tuya;Yun, Jang-Gn;Kim, Yong-Jin;Zhang, Ying-Ying;Zhong, Zhun;Kim, Do-Woo;Cha, Han-Seob;Heo, Sang-Bum;Wang, Jin-Suk;Lee, Hi-Deok
    • Proceedings of the IEEK Conference
    • /
    • 2005.11a
    • /
    • pp.603-606
    • /
    • 2005
  • In this paper, the formation and thermal stability of Ni-silicide using Ni-Pd alloys is studied for ultra shallow S/D junction of nano-scale CMOSFETs. There are no different effects when Ni-Pd is used in single structure and TiN capping structure. But, in case of Cobalt interlayer structure, it was found that Pure Ni had lower sheet resistance than Ni-Pd, because of a thick silicide. Also, Ni-Pd has merits that surface of silicide and interface between silicide and silicon have a good morphology characteristics. As a result, Ni-Pd is an optimal candidate for shallow S/D junction when cobalt is used for thermal stability.

  • PDF

A Study on the Usage of Miào(廟) and Gōng(宮) in Zhou Dynasty through the Mentions to Them in the Scripture Sentences of 『Chūn-qiū(春秋)』 - In the Process of Investigating the Existence of Zhou Dynasty's System to Regulate the Number of Zōng-miào(宗廟) 【1/2】 (『춘추』 경문에서의 묘(廟)·궁(宮) 언급을 통한 주대(周代)의 그 쓰임 사례 일고찰 - 주대의 묘수제(廟數制) 실재 여부에 대한 궁구 과정에서 【1/2】-)

  • Seo, Jeong-Hwa
    • The Journal of Korean Philosophical History
    • /
    • no.57
    • /
    • pp.57-90
    • /
    • 2018
  • In this discussion, as a way to verify the existence of the system to regulate Zhou dynasty's $z{\bar{o}}ng-mi{\grave{a}}o$(宗廟) numbers, the discussion was focused on '$mi{\grave{a}}o$ (廟)' and '$g{\bar{o}}ng$(宮)' in the records of "$Ch{\bar{u}}n-qi{\bar{u}}$(春秋)". As for the parts where the contents of scripture sentences were not specific, the context of the case was investigated through the writings in "$Zu{\breve{o}}-zhu{\grave{a}}n$(左傳)" and other materials. In the cases of the usage of the letter, '$mi{\grave{a}}o$(廟 : a ruler's house, a nation's royal court)', in the scripture sentences in "$Ch{\bar{u}}n-qi{\bar{u}}$(春秋)", the followings need to be noticed. In $t{\grave{a}}i-mi{\grave{a}}o$(太廟) of State $L{\check{u}}$(魯), nationwide events and a ruler's political ancestral rite, $d{\grave{i}}$(?) ritual, were performed, and fancy tools for ancestral rites used in those rituals were equipped. As for the $z{\bar{o}}ng-mi{\grave{a}}o$(宗廟) of a ruler of those times, a ritual of royal court, $ch{\acute{a}}o$(朝) rite, was performed. The usage case of the letter, '$g{\bar{o}}ng$(宮 : house)', is as the following. In $g{\bar{o}}ng$(宮) where a ruler's personal family lived was a family ancestral rite for them carried out. The record about the ornate decorating for the $hu{\acute{a}}n-g{\bar{o}}ng$ house(桓宮), which can be said to have been the political base of $s{\bar{a}}n-hu{\acute{a}}n-sh{\grave{i}}$(三桓氏), three politically noble families of State $L{\check{u}}$(魯), is outstanding. The $x{\bar{i}}-g{\bar{o}}ng$ house(西宮) during $X{\bar{i}}-g{\bar{o}}ng$(魯 僖公)'s reign and a $x{\bar{i}}n-g{\bar{o}}ng$ house(新宮 : a newly built house) destroyed by fire at the third year of $Ch{\acute{e}}ng-g{\bar{o}}ng$(魯 成公), are assumed to have been a ruler's another house, such as the $ch{\check{u}}-g{\bar{o}}ng$ house(楚宮) in which $Xi{\bar{a}}ng-g{\bar{o}}ng$(魯 襄公) used to enjoy staying, which is different from the viewpoint that it might be a $m{\acute{i}}-g{\bar{o}}ng$ shrine(?宮 : a house constructed as a shrine for the deceased father or the deceased grand father) that had been formed since Han dynasty. It has been discussed that, regarding the records that the '$w{\check{u}}-g{\bar{o}}ng$ house(武宮) was built' and that the '$y{\acute{a}}ng-g{\bar{o}}ng$ house(煬宮) was built', certain buildings were established with the symbols of '$w{\check{u}}$(武 : martial arts and force of arms)' and '$y{\acute{a}}ng$(煬 : to burn and get rid of everything)', and the events that a lord stood as its lord continued. Therefore, its main goal was not the performance of a dutiful ancestral rite by a ruler of those times for deceased rulers, for instance, $W{\check{u}}-g{\bar{o}}ng$(魯 武公) or $Y{\acute{a}}ng-g{\bar{o}}ng$(魯 煬公), but display of certain political symbolism through the ritual. This symbolism is most obvious with the $hu{\acute{a}}n-g{\bar{o}}ng$ house(桓宮) and the $x{\bar{i}}-g{\bar{o}}ng$ house(僖宮). As a consequence, all $mi{\grave{a}}os$(廟) and $g{\bar{o}}ngs$(宮) in scripture sentences had the functions of a shrine in some part, but it has been verified that they were not the buildings set up as a shrine to follow '$z{\bar{o}}ng-mi{\grave{a}}o$(宗廟)'s number regulation system' of '$ti{\bar{a}}nz{\check{i}}-7-mi{\grave{a}}o$(天子七廟 : an emperor owns seven $mi{\grave{a}}os$(廟))' or '$zh{\bar{u}}h{\acute{o}}u-5-mi{\grave{a}}o$(諸侯五廟 : a lord owns five $mi{\grave{a}}os$(廟))'.

Effects of ZnO on the Piezoelectric Properties of PMS-PZT Ceramics (PMS-PZT 세라믹스의 압전특성에 미치는 ZnO의 영향)

  • Son Y.-J.;Hwang D.-Y.;Kim J.-C.;Cho K.-W.;Kim Y.-M.;Ur S.-C.;Kim I.-H.
    • Korean Journal of Materials Research
    • /
    • v.14 no.11
    • /
    • pp.764-768
    • /
    • 2004
  • Perovskite Pb(Mn_{1/3}Sbu_{2/3})O_2-Pb(Zr,Ti)O_3\;(PMS-PZT) was prepared and ZnO doping effects on its piezoelectric properties were investigated. Pyrochlore phase was not identified in the PMS-PZT ceramics with $0\sim5\;mol\%$ ZnO sintered at $1100^{\circ}C$ for 2 hrs, and maximum sintered density of $7.92 g/cm^3$ was obtained. Piezoelectric charge constant and voltage constant increased to $359{\times}10^{-12}\;C/N\;and\;22.5{\times}10^{-13}\;Vm/N$, respectively, with increasing ZnO content. Mechanical quality factor reduced considerably with increasing ZnO content. When the ZnO content was 3 $mol\%$, electromechanical coupling factor and relative dielectric constant showed maximum values of $56\%$ and 1727, respectively. This should be evaluated by complicated variations of sintered density, tetragonality of lattice, grain size, and A-site vacancy generated by ZnO addition and $Zn^{2+}$ substitution.