• 한국분말재료학회지
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• 제15권6호
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• pp.503-508
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• 2008

Ti(C,N) solid solutions in hot-pressed Ti($C_{x}N_{1-x}$) (x=0.0, 0.3, 0.5, 0.7, 1.0) and 40TiC-40TiN-20Ni (in wt.%) cermet were characterized in this study. For hot-pressed Ti(C,N)s, the lattice parameters and hardness values of Ti(C,N) were determined by using XRD (X-Ray Diffraction) and nanoindentation. The properties of hot-pressed Ti(C,N) samples changed linearly with their carbon or nitrogen contents. For the TiC-TiN-Ni cermet, the hardness of the hard phase and binder phase were determined by nanoindentation in conjunction with microstructural observation. The measured hardness values were ${\sim}8.7$ GPa for the binder phase and ${\sim}28.7$ GPa for the hard phase, which was close to the hardness of hot-pressed Ti($C_{0.7}N_{0.3}$).

• 한국재료학회지
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• 제5권1호
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• pp.87-95
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• 1995

Al과 Si사이에서 Ti의 충진처리가 확산방지막 성능에 미치는 영향에 대해서 조사하였다. TiN의 충진처리는 $450^{\circ}C$의 $N_{2}$ 분위기에서 30분간 열처리함으로써 행하였다. TEM 분석을 통해 갓 증착된 TiN의 결정립 사이에는 약 10-20$\AA$ 정도의 고체물질이 없거나 TiN에 비해 밀도가 매우 낮은 공간이 존재함을 알 수 있었다. 또한 충진처리된 TiN의 경우에는 이러한 공간의 폭이 10$\AA$ 이하로 줄어듦을 알 수 있었다. RBS와 AES 분석에 의해 갓 증착된 TiN는 dir 7at.% 정도의 산소를 함유하고 있었고, 충진처리된 TiN는 약 10-15at.%의 산소를 함유하고 있었다. 갓 증착된 TiN와 충진처리된 TiN를 확산방지막으로 시험한 결과, 갓 증착된 TiN는 $650^{\circ}C$, 1시간의 열처리 후에 Al 스파이크와 Si 패임자국의 형성으로 이해 파괴되었다. 하지만 충진처리된 TiN의 경우에는 같은 열처리 조건에서 Al 스파이크나 Si 패임자국을 전혀 찾아볼수 없었다. 따라서, TiN의 충진처리가 Al과 Si사이에서 확산 방지막 성능을 크게 향상시켜주는 효과가 있음을 알 수 있었다. 이와 같은 충진처리 효과는 TiN의 결정립계의 간격이 줄어듦에 의해서 빠른 확산 경로인 결정립계를 통한 확산이 감소하는 것에 기인하는 것으로 이해된다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.344-349
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• 2005

This paper is studied on the effect of TiAlN coated ball end mill on cutting characteristic of high hardness steels in dry cutting condition without coolant. KP4 steels[HRC32] and STD11[HRC60] heat treated steels wert: used as the workpiece and WC-Co ball end mill and single and multi layer TiAlN coated ball end mill were utilized. Results showed that TiAlN coated ball end mill were increased the cutting length than WC-Co ball end mill in the cutting speed$[245\~320m/min]$ about $2\~5$ times for KP4 steels and about $2.7\~4.3$ times for STD11 heat treated steels. The multi layer TiAlN coated ball end mill is good about $1.2\~1.7$ times for KP4 steels and STD11 steels than single layer coated.

• 한국세라믹학회지
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• 제33권1호
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• pp.41-48
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• 1996

Self-propagating High-temperature Synthesis of Ti+N system has been investigated using the cylindrical high pressure reactor. The nitrogen pressure was varied from 40 to 80 atmosphere and TiNx(x=0.55) powder produced by SHS process was used as a diluent in order to control the reaction. Both the velocity of surface reaction and the ratio of TiN synthesis increased with increasing the nitrogen pressure. As the amount of diluent increases the degree of conversion to titanium nitride increases. Homogenious TiN powder was obtained in the composition 50Ti+50TiN0.94(diluent)

• 한국진공학회지
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• 제7권2호
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• pp.112-117
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• 1998

TiN을 Cu의 확산방지막으로 사용하기 위해 많은 연구가 되어왔는데, 이 연구에서는 특히 X-ray photoelectron spectroscopy(XPS)를 이용하여 TiN박막에서의 Cu의 확산현상을 연구하였다. TiN박막은 일반적으로 columnar grain을 형성하면서 성장을 하는데, 녹는점의 1/3에 해당하는 비교적 낮은 온도에서는 grain들의 경계를 따라 Cu가 확산함을 확인하였다. Atomic force microscopy(AFM)를 이용하여 grain의 모양을 관찰하였고, 이 grain boundary 를 통한 확산 현상을 연구하기 위하여, modified surface accumulation method를 이용하였 다. 연구 결과, TiN박막에서의 Cu의 grain boundary diffusion의 활성화 에너지 $Q_b$는 0.23 eV, Diffusivity $D_{bo}$는 $5.5\times10^{-12{\textrm{cm}^2$/sec의 값을 얻었다.

• 한국표면공학회지
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• 제22권1호
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• pp.17-25
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• 1989

The structural Charactesties and adhesion of chemically vapor deposited TiN film on stain less steels have been investated as functions of deposition temperature, surface roughness of sub state, and types of substrates. The grain zine and the lattice parameter of TiN film decreased with decreasing roughness of substates. The(200) preferred orientation was developed dominatly and the lattlice parameter decreased as temperature intereased reardless of the surdless roughnessand type of the substrates used. The surface morphology of TiN film changed from bushed crystal to a plate and then to pyamidal dense crystals with an increase in the deposition temperature. The adhesion of TiN films increased with coating thinkness and decreased with surface roughness in general. The calculations using a Bejamin & Weaver's model have been compard. Maximum valuse of adhesion energy calculated using Laguier's model were W304=331Jm-2,w410=113Jm-2,andW430=107jm-2

• 한국안광학회지
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• 제15권4호
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• pp.361-366
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• 2010

목적: Hollow Cathode Discharge방법을 이용한 HCD 이온플레이팅 장비를 제작하였고, 이 장비를 이용하여 stainless steel 위에 TiN 박막을 질소 가스양을 변화하면서 코팅하였으며, 이때 TiN 박막의 미세색상변화를 분석하였다. 방법: 질소 가스에 대한 TiN박막의 미세색상변화를 광학적으로 관찰하기 위해 분광복사계와 분광광도계를 사용하였고, 질소 가스에 대한 TiN 박막의 성분 변화를 알기위해 XPS로 분석하였다. 결과: 질소가스 120 sccm의 TiN 박막의 CIE 색좌표는 (0.382, 0.372)로 은색과 금색의 혼합색으로 나타나고 질소 가스양이 증가함에 따라 x, y값 둘다 조금씩 커져 금색이 점점 진해지는 것을 알 수 있었다. 또한 분광광도계에 의한 TiN 박막의 반사율에 있어서 질소 가스양이 증가함에 따라 550 nm 파장근처에서의 반사율의 기울기가 대체적으로 점점 커지는 것을 알 수 있었다. 그리고 XPS를 사용하여 Ti scan 한 결과, $N_2$ 성분에서 유래된 458 eV의 조그마한 피크는 조금씩 더 들어가며 TiN 성분에서 유래된 455 eV의 큰 피크는 약간씩 커지는 것을 볼 수 있었다. 결론: 질소 가스양이 120 sccm인 TiN 박막에서는 표면에 있는 TiC 성분과 표면과 내부에 존재하는 $N_2$, TiN 성분으로 인해 은색과 금색의 혼합색으로 나타났으나, 질소 가스양이 증가함에 따라 TiN 성분이 다른 성분에 비해 점점 많아져 금색이 점점 진해진 것으로 유추할 수 있었다.

• 한국표면공학회지
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• 제34권5호
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• pp.435-444
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• 2001

WC-( $Ti_{1-x}$ A $l_{x}$) N coatings of constant changing Al concentration were deposited on S45C substrates by high-ionization sputtered PVD method. The Al concentration could be controlled by using evaporation source for Al and fixing the evaporation rate of the metals (i.e, WC- $Ti_{0.86}$A $l_{0.14}$N, WC- $Ti_{0.72}$A $l_{0.28}$N, and WC- $Ti_{0.58}$A $l_{0.42}$N). The corrosion behavior of WC-( $Ti_{1-x}$ A $l_{x}$)N coatings in a deaerated 3.5% NaCl solution was investigated by electrochemical corrosion tests and surface analyses. The measured galvanic corrosion currents between coating and substrate indicated that WC- $Ti_{0.72}$A $l_{0.28}$N coating showed the best resistance of the coating tested. The results of potentiodynamic polarization tests showed that the WC- $Ti_{0.72}$A $l_{0.28}$N coating deposited with 32W/c $m^2$ of Al target revealed higher corrosion resistance. This indicated that the WC- $Ti_{0.72}$A $l_{0.28}$N coating is effective in improving corrosion resistance. In EIS, the WC- $Ti_{0.72}$A $l_{0.28}$N coating showed one time constant loop and increased a polarization resistance of coating ( $R_{coat}$) relative to other samples. Compositional variations of WC-( $Ti_{1-x}$ A $l_{x}$)N coatings were analyzed by EDS and XRD analysis was performed to evaluate the crystal structure and compounds formation behavior. Surface morphologies of the films were observed using SEM and AFM. Scratch test was performed to measure film adhesion strength.strength. adhesion strength.strength.

• 한국세라믹학회지
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• 제37권4호
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• pp.381-387
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• 2000

Si3N4/stainless steel 316 joints with Ni buffer layer were fabricated by direct active brazing method (DIB) using Ag-Cu-Ti brazing alloy only and double brazing method (DOB) using Ag-Cu brazing alloy with Si3N4 pretreated with Ag-Cu-Ti brazing alloy. For the joint brazed by DIB method, Ti was segregated at the Si3N4/brazing alloy interface, but was not enough to form a stable joint interface. In addition, large amounts of Ni-Ti inter-metallic compounds were formed in tehbrazing alloy near the joint interface, which could deplete the contents of Ti involved in the interfacial reaction. However, for the joint brazed by DOB method, segregation of Ti at the joint interface were enough to enhance the formation of stable interfacial reaction products such as TiN and Ti-Si-Ni-N-(Cu) multicompounds, which restricted the formation of Ni-Tio inter-metallic compounds in the brazing alloy during brazing with Ni buffer layer. Fracture strength of Si3N4/S.S 316 joints with Ni buffer layer was much improved by using DOB method rather than DIB method. It could be deduced that the differences of fracture strength of the joint with Ni buffer layer depending on brazing process adapted were directly affected by the formation of stable joint interface and the change in microstructure of the brazing alloy near the joint interface. It was found that fracture strength of Si3N4/S.S 316 joints with Ni buffer layer was gradually reduced as the thickness of interface. It was found that fracture strength of Si3N4/S.S 316 joints with Ni buffer layer was gradually reduced as the thickness of Ni buffer layer in the joint was increased from 0.1 mm to 10 mm. It seems to due to the increased residual stress in the joint as the thickness of Ni buffer layer is increased. The maximum fracture strength of Si3N4/S.S 316 joints with Ni buffer layer was 386 MPa, and the fracture of joint was originated at Si3N4/brazing alloy joint interface and propagated into Si3N4 matrix.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.54-54
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• 2011

The demand for low-friction, wear and corrosion resistant components, which operate under severe conditions, has directed attentions to advanced surface engineering technologies. The Filtered Vacuum Arc Cathode Deposition (FVACD) process has demonstrated atomically smooth surface at relatively high deposition rates over large surface areas. Preparation of Ti-Si-C-N nanocomposite coatings on (100) Si and stainless steel substrates with tetramethylsilane (TMS) gas pressures to optimize the film preparation conditions. Ti-S-C-N coatings were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, transmission electron microscopy, nanoindentation, Rockwell C indentation and ball-on-disk wear tests. The XRD results have confirmed phase formation information of TiSiCN coatings, which shows mixing of TiN and TiC structure, corresponding to (111), (200) and (220) planes of TiCN. The chemical composition of the film was investigated by XPS core level spectra. The binding energy of the elements present in the films was estimated using XPS measurements and it shows present of elemental information corresponding to Ti2p, N1s, Si 2p and C1. Film hardness and elastic modulus were measured with a nano-indenter, and film hardness reached 40 GPa. Tribological behaviors of the films were evaluated using a ball-on-disk tribometer, and the films demonstrated properties of low-friction and good wear resistance.