• Title/Summary/Keyword: Ti thickness

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An effect of component layers on the phases and dielectric properties in $PbTiO_3$ thin films prepared from multilayer structure (다층구조박막으로부터 $PbTiO_3$ 박막 제조시 요소층이 상형성 및 유전특성에 미치는 영향)

  • Do-Won Seo;Song-Min Nam;Duck-Kyun Choi
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.4 no.4
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    • pp.378-387
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    • 1994
  • To improve the properties of $PbTiO_3$ thin films successfully grown by thermal diffusion of 3 component layers of $Ti0_2/Pb/TiO_2(900{\AA}/900{\AA}/900{\AA})$ in preceding research, 3, 5, 7, 9, and 11 multilayer structures $(TiO_2/Pb/.../Tio_2)$ with thinner component layer of $200~300 {\AA}$ thick were deposited on Si substrate by RF sputtering, which were followed by RTA to form $PbTiO_3$ thin films. As a result, $PbTiO_3$ single phase was formed above $500^{\circ}C$. When the thickness of component layer reduced and the number of component layers increased, suppression of Pb-silicate and voids formation resulted in relatively sharp interfaces and the film composition became more homogeneous. Relative dielectric constants in MIM structure were independent of the annealing condition, but they increased with increasing thickness of the $PbTiO_3$ thin films. The maximum breakdown field in MIS structure reached 150kV/cm.

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A Study on the Operational Variables of the UV-TiO$_2$ Based Photocatalytic Air Cleaning System (UV-TiO$_2$ 광촉매 기반의 공기 정화 시스템의 운전조건에 대한 연구)

  • Han, Chang-Seok;Chang, Hyuk-Sang
    • Journal of Korean Society of Environmental Engineers
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    • v.30 no.3
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    • pp.293-301
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    • 2008
  • A study on the operational variables of the UV-TiO$_2$ based photocatalytic air cleaning system was tried. In this study, to examine effects as various air cleaning system conditions, a duct-type reactor was made, and TiO$_2$ was immobilized on a stainless mesh. Benzene was chosen as a target compound. Removal experiments for benzene were done under different initial benzene concentration, air velocity, TiO$_2$ loading, area coated TiO$_2$ as the same TiO$_2$ loading, and UV light intensity conditions. During the experiments, relative humidity was 55%, and reactor temperature was 45$^{\circ}C$. As a result, the photocatalytic degradation of benzene decreased as the inlet concentration increased. But the photocatalytic degradation increased as the concentration boundary layer thickness, amount of TiO$_2$, area coated TiO$_2$ as the same amount of TiO$_2$, and UV light intensity increased. Based on results of current study, they can be applied to the design of air cleaning system over low level VOCs in the indoor air.

Effect of Oxygen Incorporation in the Fabrication of TiN Thin Film for Frame by UBM Sputtering System (UBM Sputtering System에 의한 안경테용 TiN막 제작에 있어 Oxygen 영향 연구)

  • Park, Moon Chan;Lee, Jong Geun;Joo, Kyung Bok;Lee, Wha Ja;Kim, Eung Soon;Choi, Kwang Ho
    • Journal of Korean Ophthalmic Optics Society
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    • v.14 no.1
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    • pp.63-68
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    • 2009
  • Purpose: TiN films were deposited on sus304 by unbalanced magnetron sputtering system which was designed and developed as unbalancing the strength of the magnets in the magnetron electrode. The effect of oxygen incorporation in the fabrication of deposited films was investigated. Methods: The cross sections of deposited films on Silicon wafer were observed by SEM to measure the thickness of the films, the components of the surface of the films were identified by XPS survey spectra, the compositional depth-profile of deposited films was examined by an XPS apparatus. Results: From the data of XPS depth profile of films, it could be seen that the element O as well as the elements Ti and N present in the surface of the film and the relative percentage of the element O was constant at 65 at.% with respect to the depth of film. Conclusions: The color change with thickness of the films had something to do with the change of Ti $ 2p_{3/2}$ peak intensity and shape mixed of $ TiO_2$, TiN, $ TiO_{x}N_{y}$ compound.

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Development of New Titanium Alloys for Castings (주조용 티타늄 신합금 개발)

  • Kim, Seung-Eon;Jeong, Hui-Won;Hyeon, Yong-Taek;Kim, Seong-Jun;Lee, Yong-Tae
    • 연구논문집
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    • s.29
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    • pp.163-171
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    • 1999
  • A new titanium alloy system. Ti-xFe-ySi (x,y=0-4 wt%). was designed and characterized with the point at low cost and high strength for casting applications. Fe improved room and elevated temperature mechanical properties owing to solid solution hardening and beta phase stabilization. Si yielded titanium silicides and Si addition over 1 wt% resulted in poor ductility due to coarse silicide chains at prior beta boundaries. The optimum composition was found to be Ti-4Fe-(0.5-1)Si in the viewpoint of tensile strength and ductility which are comparable to the Ti-6Al-4V. The metal-mould reaction was also examined for Ti-xFe and Ti-xSi binary alloy system. The thickness of surface reaction layer w as not affected significantly with Fe content, while it was decreased with Si content. In the Ti-4Si alloy, no reaction layer was found. The depth of surface hardening layer was about $200\mum$ regardless of the mould materials.

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Characteristics of $TiO_2-$SnO_2$ Thin Films Fabricated Using Sol-Gel Method (솔-젤법에 의해 제작된 $TiO_2-$SnO_2$ 박막의 특성)

  • You, Do-Hyun;Yuk, Jae-Ho;Lim, Kyung-Bum
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.11
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    • pp.511-516
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    • 2002
  • $TiO_2-SnO_2$ thin films are fabricated using sol-gel method. In case the amount of water required hydrolysis smaller than that for stoichiometry, Ti sol forms clear sol which has normal chain structure. On the contrary, in case the amount of water required hydrolysis larger than that for stoichiometry, Ti sol forms suspended sol which has cluster structure. The thickness of thin films increase about $0.03{\sim}0.04{\mu}m$ every a dipping. The permittivity and dissipation factor of $TiO_2-SnO_2$ thin films decrease with increasing frequency. Thin films show semiconductive characteristics above $400^{\cric}C$.

Characterizations of Highly Ordered TiO2 Nanotube Arrays Obtained by Anodic Oxidation

  • Park, Hun;Kim, Ho-Gi;Choi, Won-Youl
    • Transactions on Electrical and Electronic Materials
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    • v.11 no.3
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    • pp.112-115
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    • 2010
  • This paper provides the properties of $TiO_2$ nanotube arrays which are fabricated by anodic oxidation of Ti metal. Highly ordered $TiO_2$ nanotube arrays could be obtained by anodic oxidation of Ti foil in $0.3\;wt{\cdot}%$ $NH_4F$ contained ethylene glycol solution at $30^{\circ}C$. The length, pore size, wall thickness, tube diameter etc. of $TiO_2$ nanotube arrays were analyzed by field emission scanning electron microscopy. Their crystal properties were studied by field emission transmission electron microscopy and X-ray photoelectron spectroscopy.