• 한국전기전자재료학회논문지
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• 제21권12호
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• pp.1051-1056
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• 2008

In this study, the investigations of the TiN etching characteristics were carried out with addition of $Cl_2$ gas in an inductively coupled $BCl_3$-base plasma system. Dry etching of the TiN was studied by varying the etching parameters including $Cl_2$ gas addition ratio, RF power, DC-bias voltage and pressure. The etch rate of TiN thin film was maximum when the $Cl_2$ gas addition flow was 2 sccm with fixed other conditions. As the RF power DC-bias voltage were increased, the etch rate of TiN thin film showed increasing tendency. $BCl_3/Cl_2$/Ar plasmas were characterized by optical emission spectroscopy (OES) analysis. The chemical reaction on the surface of the etched TiN films was investigated with X-ray photoelectron spectroscopy (XPS).

• 한국세라믹학회지
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• 제33권5호
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• pp.524-530
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• 1996

TiB2-BN-AlN composite was fabricated with the addition of 0~12 wt% WC by HP-sintering. Their sinterability. microstructure mechanical and electrical properties were studied as a function of the WC content. The addition of WC up to 12 wt% increased the flexural strength and decreased electrical resistivity as compared with those of the TiB2-BN-AlN composites. The electrical resistivity of TiB2-BN-AlN composite with 4.3 wt% WC was 640$\mu$$\Omega$-cm. It was found that the TiB2-BN-AlN composites with WC addition more than 4wt% was suitable for the application to the Al evaporation boat.

• 한국표면공학회지
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• 제42권2호
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• pp.73-78
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• 2009

Quinary Ti-Al-Si-C-N films were successfully synthesized on SUS 304 substrates and Si wafers by a hybrid coating system combining an arc ion plating technique and a DC reactive magnetron sputtering technique. In this work, the effect of Si content on the microstructure and mechanical properties of Ti-Al-C-N films were systematically investigated. It was revealed that the microstructure of Ti-Al-Si-C-N coatings changed from a columnar to a nano-composite by the Si addition. Due to the nanocomposite microstructure of Ti-Al-Si-C-N coatings, the microhardness of The Ti-Al-Si-C-N coatings significantly increased up to 56 GPa. In addition the average friction coefficients of Ti-Al-Si-C-N coatings were remarkably decreased with Si addition. Therefore, Ti-Al-Si-C-N coatings can be applicable as next-generation hard-coating materials due to their improved hybrid mechanical properties.

• Bulletin of the Korean Chemical Society
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• 제28권10호
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• pp.1763-1770
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• 2007

Strong solid acid catalysts, NiO/Al2O3-TiO2/WO3 for ethylene dimerization were prepared by the addition of Al2O3 and the modification with WO3. The acid sites and acid strength were increased by the inductive effect of WO3 species bonded to the surface of catalysts. The larger the dispersed WO3 amount, the higher both the acidity and catalytic activity for ethylene dimerization. The addition of Al2O3 to TiO2 up to 5 mol% enhanced acidity and catalytic activity gradually due to the interaction between Al2O3 and TiO2 and consequent formation of Al-O-Ti bond.

• 대한치과기공학회지
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• 제30권2호
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• pp.9-16
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• 2008

The surface microstructural changes, mechanical properties and corrosion resistance of Ti-Pd alloys for dental biomaterials have been investigated. Ti, Ti-Pd alloys were melted in arc furnace and the corrosion resistance of Ti-Pd alloys was evaluated by anodic polarization test. The surface microstructural changes and mechanical properties of Ti-Pd alloys were analysed by scanning electron microscope and Vickers micro-hardness tester. The vickers hardnees of pure Ti improved by addition of Pd but Ti-25Pd alloy showed decreasing compared with Ti-15Pd. And anodic polarization and potentiostatic test were conducted in 5% HCl to quantify the resistance to corrosion with the addition of Pd, There was no significant difference in corrosion resistance between pure Ti, Ti-5Pd and Ti-15Pd alloy. However, Ti-25Pd alloy showed decreasing compared with pure Ti in corrosion resistance. From these results, it was concluded that newly formulated Ti-15Pd experimental alloy have adequate hardness and high corrosion resistance, and this alloy is promising candidate for a successful dental casting alloy.

• 한국결정성장학회지
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• 제24권2호
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• pp.70-76
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• 2014

아연결정유약에 Anatase 형 $TiO_2$에 의해 생성되는 $Zn_2TiO_4$가 효과적인 결정 생성제로 나타났다. 이에 저온에서 생성되는 $Zn_2TiO_4$를 인위적으로 합성하여 유약의 미치는 효과를 규명하였다. 첨가 $Zn_2TiO_4$는 저온에서 생성되는 결정으로 아연결정 W의 핵으로 작용하는 것으로 밝혀졌다. 합성된 $Zn_2TiO_4$를 유약에 5 wt% 첨가하면 유약 내에 결정생성이 증가하며 안정적으로 유지된다. 특히, $Zn_2TiO_4$ 합성 시 발색제로 CoO, NiO, CuO를 각각 고용시켜 유약에 첨가하면 발색제의 고용효과가 커져 Willemite 결정의 다양한 발색에 큰 효과를 얻을 수 있다.

• 한국세라믹학회지
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• 제35권3호
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• pp.287-293
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• 1998

The effects of B2O3 addition on the sintering behavior and th microwave dielectric properties of $(Mg_{0.93}Ca_{0.07})TiO_3$ ceramics were investigated. By addition of $B_2O_3$, increases the density of the ceramics increases and grain growth enhances, It was densified to over 94% of $(Mg_{0.93}Ca_{0.07})TiO_3$ theoretical density by the addition of 0.15-1.0wt% B2O3 and stable microwave dielectric properties observed by the addition of 0.2-0.4wt% $B_2O_3.\;(Mg_{0.93}Ca_{0.07})TiO_3$ ceramics sintered at $1200^{\circ}C$ exhibits maximum dielectric constants of 24-25 quality factor($Q{\times}f$) of more than 70000 and temperature coefficient of resonant frequency of $0\;ppm/^{\circ}C$ by adding of 0.15-0.4wt% $B_2O_3$.

• 한국자기학회지
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• 제9권6호
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• pp.278-284
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• 1999

Mn-Zn ferrites에 TiO2가 첨가될 때 전력손실, 밀도, 초기투자율, 저항, 그리고 미세구조의 변화를 관찰하였다. 첨가량이 증가함에 따라 밀도는 증가했지만, 초기투자율은 감소하였다. TiO2의 첨가에 따라 electron hopping을 일으키는 활성화에너지와 전기저항이 증가하였다. 115$0^{\circ}C$에서 소결한 TiO2를 1.5 wt% 첨가한 시편은 1 MHz, 25 mT, 8$0^{\circ}C$에서 83 mW/㎤의 전력손실을 나타내었다. 그러나 120$0^{\circ}C$에서 소결할 때는 과대입성장이 발생하여 같은 측정 조건에서 1168 mW/㎤의 전략손실을 얻었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 연구회
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• pp.127-130
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• 2001

The $BaTiO_3+xNb_2O_5$(x=6, 8, 10wt%) ceramics were prepared by conventional mixed oxide method. The structural properties of the $BaTiO_3+Nb_2O_5$ ceramics with the sintering temperature and addition of $Nb_2O_5$ were investigated by XRD and SEM. Increasing the sintering temperature, the $2{\theta}$ value of BT(110) peak was shifted to the lower degree and intensity of the $Ba_6Ti_2Nb_8O_{30}$ (133) peak was increased. Increasing the addition of $Nb_2O_5$, the intensity of $BaTiNb_4O_{13}$ (201) peak was decreased and $Ba_6Ti_2Nb_8O_{30}$ (133) peak was increased. The grain size of the $BaTiO_3+Nb_2O_5$ ceramics sintered at $1500^{\circ}C$ were almost uniform.

• 한국재료학회지
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• 제24권1호
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• pp.13-18
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• 2014

In order to clarify the effect of Nb addition on the ductile-brittle transition property of sintered TiC, TiC-10 mol% Nb composites were researched using a three-point bending test at temperatures from room temperature to 2020 K, and the fracture surface was observed by scanning electron microscopy. It was found that the Nb addition decreases the ductile-brittle transition temperature of sintered TiC by 300 K and increases the ductility. The room temperature bending strength was maintained at up to 1800 K, but drastically dropped at higher temperatures in pure TiC. The strength increased moderately to a value of 320MPa at 1600 K in TiC-10 mol% Nb composites, which is 40% of the room temperature strength. Pores were observed in both the grains and the grain boundaries. It can be seen that, as Nb was added, the size of the grain decreased. The ductile-brittle transition temperature in TiC-10 mol% Nb composites was determined to be 1550 K. Above 1970 K, yieldpoint behavior was observed. When the grain boundary and cleavage strengths exceed the yield strength, plastic deformation is observed at about the same stress level in bending as in compression. The effect of Nb addition is discussed from the viewpoint of ability for plastic deformation.