• Title/Summary/Keyword: Thin membrane

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A Polymer-based Capacitive Air Flow Sensor with a Readout IC and a Temperature Sensor

  • Kim, Wonhyo;Lee, Hyugman;Lee, Kook-Nyeong;Kim, Kunnyun
    • Journal of Sensor Science and Technology
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    • v.28 no.1
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    • pp.1-6
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    • 2019
  • This paper presents an air flow sensor (AFS) based on a polymer thin film. This AFS primarily consists of a polymer membrane attached to a metal-patterned glass substrate and a temperature-sensing element composed of NiCr. These two components were integrated on a single glass substrate. The AFS measures changes in capacitance caused by deformation of the polymer membrane based on the air flow and simultaneously detects the temperature of the surrounding environment. A readout integrated circuit (ROIC) was also fabricated for signal processing, and an ROIC chip, 1.8 mm by 1.9 mm in size, was packaged with an AFS in the form of a system-in-package module. The total size of the AFS is 1 by 1 cm, and the diameter and thickness of the circular-shaped polymer membrane are 4 mm and $15{\mu}m$, respectively. The rate of change of the capacitance is approximately 11.2% for air flows ranging between 0 and 40 m/s.

Fabrication and Characterization of Thermopile on Low-Stress $Si_3N_4$ Membrane for Microspectrometer Infrared Sensor (마이크로 스펙트로미터 적외선 센서용 저응력 $Si_3N_4$ Membrane 상에서의 Thermopile 제조 및 특성)

  • Choi, Gong-Hee;Park, Kwang-Bum;Park, Joon-Shik;Chung, Kwan-Soo
    • Proceedings of the IEEK Conference
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    • 2005.11a
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    • pp.781-784
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    • 2005
  • Twenty four types of thermopile for micro spectrometer infrared sensors were fabricated on low-stress $Si_3N_4$ membranes with $1.2{\mu}m-thickness$ using MEMS technology. Poly-Si thin film with thickness of 3500 ${\AA}$ as the first thermocouple material, was deposited by LPCVD method. And aluminum thin film with thickness of 6000 ${\AA}$ as the second thermocouple material, was deposited by sputtering method. Thermopile were designed and fabricated for optimum conditions by five parameters of thermocouple numbers (16 ${\sim}$ 48), thermocouple line widths (10 ${\mu}m$ ${\sim}$ 25 ${\mu}m$), thermocouple lengths (100 ${\mu}m$ ${\sim}$ 500 ${\mu}m$), membrane areas ($1^2\;mm^2$ ${\sim}$ $2.5^2\;mm^2$) and junction areas (150 ${\mu}m^2$ ${\sim}$ 750 ${\mu}m^2$), respectively. Electromotive forces of fabricated thermopile were measured 1.1 mV ${\sim}$ 7.4 mV at $400^{\circ}C$. It was thought that measurement results could be used for thermopile infrared sensors optimum structure for micro spectrometers.

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Modification of polyamide reverse osmosis membranes seeking for better resistance to oxidizing agents

  • Silva, Lucinda F.;Michel, Ricardo C.;Borges, Cristiano P.
    • Membrane and Water Treatment
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    • v.3 no.3
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    • pp.169-179
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    • 2012
  • One of the major limitations in the use of commercial aromatic polyamide thin film composite (TFC) reverse osmosis (RO) membranes is to maintain high performance over a long period of operation, due to the sensitivity of polyamide (PA) skin layer to oxidizing agents, such as chlorine, even at very low concentrations in feed water. This article reports surface modification of a commercial TFC RO membrane (BW30-Dow Filmtec) by covering it with a thin film of poly(vinyl alcohol) (PVA) crosslinked with glutaraldehyde (GA) to improve its resistance to chlorine. Crosslinking reaction was carried out at 25 and $40^{\circ}C$ by using PVA 1.0 wt.% solutions at different GA/PVA mass ratio, namely 0.0022, 0.0043 and 0.013. Water swelling measurements indicated a maximum crosslinking density for PVA films prepared at $40^{\circ}C$ and GA/PVA 0.0043. ATR-FTIR and TGA analysis confirmed the reaction between GA and PVA. SEM images of the original and modified membranes were used to evaluate the surface coating. Chlorine resistance of original and modified membranes was evaluated by exposing it to an oxidant solution (NaClO 300 mg/L, NaCl 2,000 mg/L, pH 9.5) and measuring water permeability and salt rejection during more than 100 h period. The surface modification effectively was demonstrated by increasing the chlorine resistance of PA commercial membrane from 1,000 ppm.h to more than 15.000 ppm.h.

The Enhanced Thermoforming Stability of ITO Transparent Electrode Film by Using the Conducting Polymer Thin-Film (전도성 고분자 박막을 이용한 ITO 투명 전극 필름의 열성형 안정성 향상 연구)

  • Seo Yeong Son;Seong Yeon Park;Sangsub Lee;Changhun Yun
    • Membrane Journal
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    • v.33 no.5
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    • pp.248-256
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    • 2023
  • Indium tin oxide (ITO) transparent electrode film has been widely adopted for the various applications such as display and electric vehicle. In this paper, we studied how to enhance the thermoforming stability of ITO film by applying the highly conductive Poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) (PEDOT:PSS) thin layer. Based on the change of sheet resistance value, the influence of the additional solvent with different boiling point was investigated for the PEDOT:PSS coating solution. In addition, by analyzing optical transmittance and Raman spectrum, we confirmed the key mechanism which determine the final electrical conductivity of the PEDOT:PSS on ITO film using an ethylene glycol solvent. The final ITO transparent electrode coated with PEDOT:PSS performed the outstanding endurance of electrical conduction even in 126% stretching condition.

Fabrication of Polysulfone Hollow Fiber Membranes for N2/NF3 Separation (N2/NF3 분리용 폴리썰폰 중공사막 제조 연구)

  • Lim, Min Su;Kim, Seong-Joong;Kang, Ha Sung;Park, Ho Bum;Nam, Seung Eun;Park, Ho Sik;Lee, Pyung Soo;Park, You In
    • Membrane Journal
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    • v.26 no.1
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    • pp.76-85
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    • 2016
  • Fabrication of polysulfone (PSf) hollow fiber membranes was investigated for the separation of $N_2/NF_3$ gas mixtures, which are emitted from the display and the semiconductor industries. A combination of the non-solvent induced phase separation (NIPS) and the vapor-induced phase separation (VIPS) technique was applied to develop high flux hollow fiber membranes. Thin polymer layers were further coated onto the surface of the hollow fiber membranes by using polydimethylsiloxiane (PDMS) or Teflon AF1600(R), which contributes to improve the $N_2/NF_3$ selectivity. The $N_2/NF_3$ separation performances of our PSf hollow fiber membranes were determined by the intrinsic properties of coating materials. Especially, the PSf hollow fiber membrane coated with Teflon AF 1600(R) exhibited a higher $N_2/NF_3$ selectivity (> 14) with a slightly lower $N_2$ permeance (4.5 GPU), as compared to the commercial PSf counterparts. This feature provides a good potential as a membrane structure to separate $N_2/NF_3$.

Research Trends on Developments of High-performance Perfluorinated Sulfonic Acid-based Polymer Electrolyte Membranes for Polymer Electrolyte Membrane Fuel Cell Applications (고분자 전해질 막 연료전지 응용을 위한 고성능 과불소화계 전해질 막 개발 연구 동향)

  • Choi, Chanhee;Hwang, Seansoo;Kim, Kihyun
    • Membrane Journal
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    • v.32 no.5
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    • pp.292-303
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    • 2022
  • An eco-friendly energy conversion device without the emission of pollutants has gained much attention due to the rapid use of fossil fuels inducing carbon dioxide emissions ever since the first industrial revolution in the 18th century. Polymer electrolyte membrane fuel cells (PEMFCs) that can produce water during the reaction without the emission of carbon dioxide are promising devices for automotive and residential applications. As a key component of PEMFCs, polymer electrolyte membranes (PEMs) need to have high proton conductivity and physicochemical stability during the operation. Currently, perfluorinated sulfonic acid-based PEMs (PFSA-PEMs) have been commercialized and utilized in PEMFC systems. Although the PFSA-PEMs are found to meet these criteria, there is an ongoing need to improve these further, to be useful in practical PEMFC operation. In addition, the well-known drawbacks of PFSA-PEMs including low glass transition temperature and high gas crossover need to be improved. Therefore, this review focused on recent trends in the development of high-performance PFSA-PEMs in three different ways. First, control of the side chain of PFSA copolymers can effectively improve the proton conductivity and thermal stability by increasing the ion exchange capacity and polymer crystallinity. Second, the development of composite-type PFSA-PEMs is an effective way to improve proton conductivity and physical stability by incorporating organic/inorganic additives. Finally, the incorporation of porous substrates is also a promising way to develop a thin pore-filling membrane showing low membrane resistance and outstanding durability.

Measurement of Mechanical Properties of a Thermally Evaporated Gold Film Using Blister Test (블리스터 시험법을 이용한 열증착 금박막의 기계적 성질 측정)

  • Moon, Ho-Jeong;Ham, Soon-Sik;Earmme, Yun-Young;Cho, Young-Ho
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.3
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    • pp.882-890
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    • 1996
  • Mechanical properties, including Young's modulus, residual stress and rupture strength, of a thermally evaporated gold film have been measured form a blister test. In a theoretical study, the priniple of minimum potential energy and that of virtual work have been applied to the pressurized circular membrane problem, and load-deflection relations have been derived for typical membrane deflection mode of spheroidal shape. In an experimental study, circular gold membranes of 4800 A-thickness and 3.5mm diameter were fabricated by the silicon electropolishing technique. Mecahnical properties of the thin gold films were deduced from the load-deflection curves obtained by the blister test, Young's moduli, obtianed from blister test, have been in the range of 45-70 GPa, while those of bulk gold have been in the range of 78-80 GPa. Residual stresses in the evaporated gold films have been measured as 28-110MPa in tension, The rupture strength of the gold film has turned out to be almost equal to that of dental gold alloy (310-380MPa). It has been demonstrated that the present specimen fabrication method and blister test apparatus have been effective for simultaneous measurement of Young's modulus, residual stress and repture strength of thin solid films. Especially, the electropolishing technique employed here has provided a simple and practical way to fabricate thin membranes in a circular or an arbitrary shape, which could not be obtained by the conventional anisotropic silicon mecromachining technique.

Development of Active thin Film Optical Waveguide $C^{2+}$ -ion Sensor (능동형 박막 광도파로 칼슘 이온 센서의 개발)

  • Lee, Su-Mi;Gang, Sin-Won
    • Journal of the Institute of Electronics Engineers of Korea SC
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    • v.37 no.4
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    • pp.49-54
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    • 2000
  • A new functional organic thin film optical waveguide ion sensor is designed, which can select a specific ion, i.e., $Ca^{2+}$ -ion. The sensing membrane was composed of PVC-PVAC-PVA copolymer matrix based on anionic cation-selective chromoionophor(ETH5294), neutral ionophore(K23El), anionic site and plasticizer and it was coated on the etched glass substrate as embeded type optical waveguide itself. The sensor sensitivity dependence on waveguide length and thickness, contence of chromoionophore, and each mode was investigated. And this sensor could detect $Ca^{2+}$ ion in concentrations ranging from 1$\times$10­6~1M(with 0.05M tris-HCI buffer solution of pH7.4) by measuring the absorbance change at 514nm of light. Utilizing thin film membrane, the fast response time and high sensitivity are obtained. Also, it is expected that this sensor can be applied to various biochemical important ions.ons.

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The Finite Element Analysis of Shell Structures Using Improved Shell Element (개선된 쉘 요소를 이용한 쉘 구조의 유한 요소 해석)

  • 허명재;김홍근;김진식
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.13 no.4
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    • pp.449-459
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    • 2000
  • The original Mindlin-type degenerated shell element perform reasonably well for moderately thick shell structures. However, when full integration for analysis of thin shell is used to evaluate the stiffness matrix, the stiffness of shell element is often over-estimated due to shear or membrane locking phenomena. To correct this problem, the formulation of the new degenerated shell element is derived by the combination of two different techniques. The first type of elements(TypeⅠ) has used assumed shear strains in the natural coordinate system to overcome the shear locking problem, the reduced integration technique in in-plane strains(membrane strains) to avoid membrane locking behaviour. Another element(TypeⅡ) has applied the assumed strains to both of membrane strain and transverse shear strains. The improved degenerated shell element has been tested by several numerical problems of shell structures. Numerical results indicate that this shell element shows fast convergence and reliable solutions.

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Form-finding of Free-form Membrane Structure based on Geometrically Non-linear Analysis and Interface method (기하학적 비선형해석을 이용한 비정형 막 구조물의 형상탐색과 인터페이스 기법)

  • Kim, Jee-In;Na, Yoo-Mi;Kang, Joo-Won;Lee, Jae-Hong
    • Journal of Korean Association for Spatial Structures
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    • v.12 no.1
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    • pp.77-85
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    • 2012
  • The membrane structure maintains stable form by giving initial tension to ductile membrane and increasing the stiffness of exterior that is much adopted in the large span spatial structure by making its thickness thin. This kind of membrane structure has characteristic that can express free-form curve, so the selection of structural form is very important. So, this paper proposes the expression of free-form surface based on NURBS basis function and the finite element method considering geometrical nonlinearity for the deduction of large deformation result. Also, for minimizing the approximation of the surface that is derived from the form-finding result, the interface method that change finite element mesh to NURBS is proposed. So, the optimum surface of free-form membrane is derived.