• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.245-248
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• 2005

This paper is concerned with manufacturing technology of thin foil tensile specimen using CIP(Cold Isostatic Press) and measurement of precision mechanical property. This thin foil tensile specimen manufacturing technology is a method that can make a metal thin foil specimen for micro tensile testing. We can get a burr free micro metallic thin foil specimen using this technology. For testing mechanical property of this micro thin foil, we use a nano scale material testing machine that was developed by KITECH. In this paper, micro tensile specimens of nickel and copper thin foil are fabricated with CIP and precision mechanical properties of these materials could be measured. We will expect that precision mechanical property of micro/nano material and component. Micro and Nano mechanical property can be measured using this technology and mechanical property data base of micro/nano material and component can be constructed.

• Transactions of Materials Processing
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• v.14 no.6 s.78
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• pp.509-513
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• 2005

This paper is concerned with manufacturing technology of thin foil tensile specimen using CIP(Cold Isostatic Press) and measurement of precision mechanical properties using micro tensile testing. We can get a burr free micro metallic thin foil specimen using this technology. For testing mechanical property of this micro thin foil, we use a nano scale material testing machine that was developed by KITECH. In this paper, micro tensile specimens of nickel and copper thin foil are fabricated with CIP and precision mechanical properties of these materials could be measured. We will expect precision mechanical property of micro/nano material and component.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.09a
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• pp.49-53
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• 2005

The objective of this research was to establish the size limitation of micro metal forming and analyze the formability of foil. Flat-rolled ultra thin metallic copper foil($3{\mu}m$ in thickness) was used as a forming material and foil was annealed to improve the formability at the temperature of $385^{\circ}C$. Forming die was fabricated by using etching technique of DRIE(deep reactive ion etching) and HNA isotropic etching. For the forming die and coupe. foil were vacuum packed and the forming was conducted as applying hydrostatic pressure of 250MPa to the vacuum packed unit. We successfully obtained the micro channels of $12\~14{\mu}m$ width and $9{\mu}m$ depth from micro forming process we designed. We also investigated the thickness strain distribution of foil from experiment and FE simulation result. Micro channels had a good formability of smooth surface and size accuracy. We expect that micro metal forming technology will be applied to production of micro parts.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.6
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• pp.1355-1364
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• 1994

This paper analyzes the running mechanism of flexible and thin foil above rotating protrusion through a numerical simulation. The scope of analysis is confined to the phenomena of elastohy-drodynamic lubrication between the stationary and rotary drums with a running protrusion and thin foil. This mathematical model is based on the modified Reynolds equation and the equation of plate, considering the geometry of protrusion, running direction of protrusion, and the effect of geometric nonlinearity. Finite element method is adopted as a numerical simulation technique to solve the avobe coupled nonlinear equations. In numerical analysis, the effects of the scanning angle in Reynolds equation and the nonlinear term in plate equation are evaluated. Furthermore, the simulation is applied to the situation that thin foil is located in the entire drums (stationary and rotary drums).

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.166-171
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• 2007

In this paper Research development about a micro metal forming manufacturing system has been developed. A micro forming system has been achieved in Japan and it's developed micro press is limited to single forming process. To coincide with the purpose to be more practical, research and development is necessary about the press which the multi forming process is possible. We set the development of the equipment including micro deep drawing, micro punching and micro restriking process to the goal. To achieve this goal, we set the application product to a micro thin foil valve which is used in the micro pump module. The compound die set has been designed and manufactured to make two step process. The material of thin foil valve is SUS-304 and its thickness is 50$\mu$m. We can get a good forming results from micro punching experiments in this paper.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.2 s.245
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• pp.157-163
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• 2006

Our research dealt with micro fabrication using micro forming process. The goal of the research was to establish the limit of forming process concerning the size of forming material and formed shape. Flat-rolled ultra thin metallic foils of pure copper(3.0 and $1.0{\mu}m$ in thickness)and stainless steel($2.5{\mu}m$ in thickness) were used for forming material. We obtained the various shapes of micro channels as using designed forming process. $12-14{\mu}m$ wide and $9{\mu}m$ deep channels were made on $3.0{\mu}m$ thick foil and $6{\mu}m$ wide and $3{\mu}m$deep channels were made on $1.0{\mu}m$ thick foil. Si wafer die for forming was fabricated by using etching technique. And the relation of etching time and die dimension was investigated for fabricating precisely die groove. For the forming, die and metal foil were vacuum packed and the forming was conducted with a cold isostatic press. The formed channels were examined in terms of their dimension, surface qualities and potential for defects. Base on the examinations, formability of ultra thin metallic foil was also discussed. Finally, we compared the forming result with simulation. The result of research showed that metal forming technology is promising to produce micro parts.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.66-72
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• 2008

During the plate and foil cold rolling process, considerable values of the force of material pressure on the tool occur. These pressures cause the elastic deformation of the roll, thus changing the shape of the deformation legion. Rolled copper foils should be characterized by a good quality and light dimensional tolerances. Because of automation that is commonly implemented in flat product rolling mills, these products should meet the requirements of tightened tolerances, particularly strip thickness, and feature the greatest possible flatness. The shape of the roll gap is influenced by the elastic deformation of rolls parts of the rolling process affecter of the pressure force. However, to control roll deformation should be difficult. Because the foil thickness is very thin and the permissible deviations in the thickness of foil are small. In this paper, FE-simulation of roll deformation in thin foil cold roiling process is presented.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.413-416
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• 2007

In general, by means of the electrodepositing technique, a copper foil sample was prepared with a high purity and a high density. But the mechanical properties of the electrodepositing copper foil was lower than it's the rolling copper foil. However, the production of copper foil with approximately 36 microns thick in rolling process was very difficult. This paper describes the outline of the high accuracy cold rolling in 6 high mill which was developed for the purpose of rolling very thin accurate gauge copper foil(36 micron thick), and give several rolling characteristic of 600 mm wide copper foil. a) Large strain can be accumulated pass by pass in industrial multi-pass rolling processing to overcome large critical strain for thickness accuracy through optimization of rolling schedule. b) Also, permissible tension for rolling 0.45 $\sim$ 0.036 mm thick copper strip stably in accordance with the each pass work had been established by FEM simulation results. c) During the plate rolling process, considerable values of the forces of material pressure on the tool occur. These pressures cause the elastic deformation of the roll, thus changing the shape of the deformation region. A numerical simulation of roll deflection during cold rolling is presented in the paper. d) The proposed pass schedule can roll very thin copper foil of 36 micron thickness to a tolerance of ${\pm}1$ microns. The validity of simulated results was verified into rolling experiments on the copper foil.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.243-246
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• 2006

In this paper, Experimental results on the measurement of mechanical properties of fine patterns in the MEMS structure are described. The mechanical properties of embossing patterns on metallic thin foil is measured using the nano indentation system, that is developed by Korea Institute of Industrial Technology(KITECH). These micro embossing patterns are fabricated using CIP(Cold Isostatic Press) process on micro metallic thin foils(Al-1100) that are made by rolling process. These embossing patterned metallic thin foils(Al-1100) are used in the reflecting plate of BLU(Back Light Unit) and electrical/mechanical MEMS components. If these mechanical properties of fine patterns are utilized in a design procedure, the optimal design can be achieved in aspects of reliability as well as economy.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.1916-1919
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• 2007

We have been setting up experiments on propagation of shock waves generated by the pulsed laser ablation. One side of a thin metal foil is subjected to laser ablation as a shock wave propagates through the foil. The shock wave, which penetrates through the foil is reflected by an acoustic impedance which causes the metal foil to high-strain rate deform. This short time physics is captured on an ICCD camera. The focus of our research is applying shock wave and deformation of the thin foil from the ablation to accelerating micro-particles to a very high speed.