• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.41-44
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• 1998

Dual mode resonators were fabricated using high temperature superconductor. The deposited material was $Y_1Ba_2Cu_3O_{7-x}$(YBCO) on MgO(100) substrate using pulsed laser deposition. Dual mode resonators were patterned by standard photolithography process and wet etching. At the back-side of the substrate, the ground plane with the metal layer of Ti and Ag was fabricated. The transition temperatures of YBCO films were 85-88 K, and network analyzer was used for testing the performance of the resonators. The input/output feedline angles of each resonator were $60^{\circ}$and $100^{\circ}$. The resonant frequency of resonators was 10 GHz. In this paper, dual mode resonator was fabricated for the application of satellite communication.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.873-877
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• 2005

The burr of micro drilling and micro cutting on thin metal film is a major obstacle to mass production for micro PCB boards in micro technologies of personal computing and telecom explosion. As the burr affects on the assembling process, it is necessary to study continuously on control or elimination of the burr. In order to get higher valued products, it is also needed to competitive techniques with the high resolution. In this paper, we studied experimentally the burr generation that when it is processed on the copper foil by laser in micro-hole machining. Unlike mechanical machining the burr produced on substrate is a resultants of melt and re-solidification of a melten metal which was heated and treated by laser. And higher laser energy increases the size of burr. Therefor in micro-drilling with laser, it is difficult to reduce the effects of burr for very thin metal sheets. We investigated the stale of the burr and analyzed the laser ablation Cu micro machining with respect to laser intensity and processing time.

• 한국재료학회지
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• 제10권12호
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• pp.807-811
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• 2000

MFISFET (Metal-ferroelectric-nsulator-semiconductor-field effect transistor)에의 적용을 위해 CeO$_2$와 SrBi$_2$Ta$_2$O$_{9}$ 박막을 각각 r.f. sputtering 및 pulsed laser ablation법으로 제조하였다. CeO$_2$ 박막은 증착시 스퍼터링개스비 (Ar:O$_2$)에 따른 특성을 고찰하였다. Si(100) 기판 위에 $700^{\circ}C$에서 증착된 CeO$_2$ 박막들은 (200)방향으로 우선방향성을 가지고 성장하였고 $O_2$ 개스량이 증가함에 따라 박막의 우선방향성, 결정립도 및 표면거칠기는 감소하였다. C-V특성에서는 Ar:O$_2$가 1 : 1인 조건에서 제조된 박막이 가장 양호한 특성을 보였다. 제조된 박막들의 누설전류값은 100kV/cm의 전계에서 $10^{-7}$ ~$10^{-8}$ A의 차수를 보였다. CeO$_2$/Si 기판위에 성장된 SBT는 다결정질상의 치밀한 구조를 가지고 성장을 하였다 80$0^{\circ}C$에서 열처리된 SBT박막으로 구성된 MFIS구조의 C-V 특성에서 memory window 폭은 0.9V를 보였으며 5V에서 4$\times$$10^{-7}$ A/$\textrm{cm}^2$의 누설전류밀도를 보였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.297.2-297.2
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• 2016

Photoacoustic generation of ultrasound is an effective approach for development of high-frequency and high-amplitude ultrasound transmitters. This requires an efficient energy converter from optical input to acoustic output. For such photoacoustic conversion, various light-absorbing materials have been used such as metallic coating, dye-doped polymer composite, and nanostructure composite. These transmitters absorb laser pulses with 5-10 ns widths for generation of tens-of-MHz frequency ultrasound. The short optical pulse leads to rapid heating of the irradiated region and therefore fast thermal expansion before significant heat diffusion occurs to the surrounding. In this purpose, nanocomposite thin films containing gold nanoparticles, carbon nanotubes (CNTs), or carbon nanofibers have been recently proposed for high optical absorption, efficient thermoacosutic transfer, and mechanical robustness. These properties are necessary to produce a high-amplitude ultrasonic output under a low-energy optical input. Here, we investigate carbon nanotube (CNT)-polydimethylsiloxane (PDMS) composite transmitters and their nanostructure-originated characteristics enabling extraordinary energy conversion. We explain a thermoelastic energy conversion mechanism within the nanocomposite and examine nanostructures by using a scanning electron microscopy. Then, we measure laser-induced damage threshold of the transmitters against pulsed laser ablation. Particularly, laser-induced damage threshold has been largely overlooked so far in the development of photoacoustic transmitters. Higher damage threshold means that transmitters can withstand optical irradiation with higher laser energy and produce higher pressure output proportional to such optical input. We discuss an optimal design of CNT-PDMS composite transmitter for high-amplitude pressure generation (e.g. focused ultrasound transmitter) useful for therapeutic applications. It is fabricated using a focal structure (spherically concave substrate) that is coated with a CNT-PDMS composite layer. We also introduce some application examples of the high-amplitude focused transmitter based on the CNT-PDMS composite film.

• 한국진공학회지
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• 제6권2호
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• pp.114-121
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• 1997

투명전도성 산화주석 박막이 펄스레이저증착에 의하여 파이렉스유리 기판상에 제조 되었다. 진공, $O_2$, 및 $Sn(CH_3)_4$분위기에서 Nd-YAG레이저 빛살이 다결정 $SnO_2$ 타겟을 융제 하여 실온에서 기판상에 박막을 증착시키고, 증착된 막을 230, 420, 및 $610^{\circ}C$에서 각각 2시 간 동안 공기중에서 열처리하였다. 박막의 특성이 UV-VIS-NIR 분광법과 X-선 회절법에 의하여 조사되고, 전기적 성질이 촉심식법으로 구해진 막의 두께와 함께 사점탐침법에 의하 여 측정되었다. $Sn(CH_3)_4$이 존재할 때 $SnO_2$상들이 실온에서조차 성장되는 것이 관찰되었다. 이는 레이저 융제 동안 발생된 마이크로플라즈마가 전구물질분자의 분해에 중요한 역할을 함을 시사한다.

• 센서학회지
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• 제7권1호
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• pp.67-72
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• 1998

Plused ArF excimer laser ablation과 열증착법에 의해 p형 Si 기판위에 PbTe/CuPc 박막을 증착하였다. 성장된 박막의 구조적, 전기적 특성은 XRD, 전류-전압 곡선등의 분석으로 행하였다. XRD 분석으로부터 PbTe박막과 CuPc 박막은 a 축의 배향성을 지닌 박막으로 성장하였음을 알 수 있었다. PbTe/CuPc/Si 박막의 광전특공을 조사하기 위하여 빛을 조사했을 때와 빛을 조사하지 않았을 때의 수직방향의 전류-전압 (I-V) 특성을 CuPc/Si, PbTe/Si 단층막의 특성과 비교 관찰하였다. PbTe/CuPc/Si 박막에서 단축 광전류 ($J_{sc}$)가 $25.46\;mA/cm^{2}$, 개회로 광전압 ($V_{oc}$)이 170 mV인 커다란 광기전력 특성을 나타내었다. 또한 양자효율 (QE)은 15 %, 광전변환효율 (${\eta}$)은 $3.46{\times}10^{-2}$로 측정되었다. QE와 ${\eta}$를 기초로 한 PbTe/CuPc/Si 접합과 광전류 과정은 CuPc 층에서의 광캐리어 생성, PbTe/CuPc 계면에 의 광캐리어 분리 그리고 PbTe층에서의 광캐리어 운송 역할이 효율적으로 수행된 결과임을 알 수 있었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.128-128
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• 2003

Electrochromism (EC) is defined as a phenomenon in which a change in color takes place in the presence of an applied voltage. Because of their low power consumption, high coloration efficiency, EC devices have a variety of potential applications in smart windows, mirror, and optical switching devices. An EC devices generally consist of a transparent conducting layer, electrochromic cathodic and anodic coloring materials and an ion conducting electrolyte. EC has been widely studied in transition metal oxides(e.g., WO$_3$, NiO, V$_2$O$\sub$5/) Among these materials, WO$_3$ is a most interesting material for cathodic coloration materials due to its lush coloration efficiency (CE), large dynamic range, cyclic reversibility, and low cost material. WO$_3$ films have been prepared by a variety of methods including vacuum evaporation, chemical vapor deposition, electrodeposition process, sol-gel synthesis, sputtering, and laser ablation. Sol-gel process is widely used for oxide film at low temperature in atmosphere and requires lower capital investment to deposit large area coating compared to vacuum deposition process.

• 한국산학기술학회논문지
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• 제15권12호
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• pp.6980-6985
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• 2014

레이저 직접묘화방법을 이용하여 절연기판($SiO_2$)위에 미세전도성패턴을 제조하였다. 레이저 유도증착공정은 레이저빔이 금속박막에 조사되면 레이저 빔의 빛 에너지가 금속박막에 흡수되어 열에너지로 바뀌면서 열전도에 의한 열분해반응으로 기판위에 증착이 일어난다. 본 논문에서는 금속박막위에 폴리머 코팅을 하여 레이저 직접묘화공정을 적용하여 미세패턴과 3차원 마이크로 구조물 제조에 관한 연구를 수행하였다. 평균 증착율은 전반적으로 레이저출력이 높을 수록 선형적으로 증가하고, 빔 스캔 속도가 감소할수록 증착율은 증가한다는 것을 확인하였다. Polymer 코팅층을 이용하여 미세전극을 증착하여 비저항값을 측정하여, 코팅층을 사용한 경우의 전기전도도가 코팅을 하지 않은 경우보다 약 3배정도 향상되는 것을 확인할 수 있었다.

• 한국자기학회지
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• 제16권2호
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• pp.140-143
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• 2006

단결정 상태의 $CoFe_2O_4$ 박막을 rf magnetron sputtering 증착법을 이용하여 (100) MgO 기판 위에 성장시켰다. X선 회절기, Rutherford back-scattering 분석기와 고감도 주사전자현미경을 이용하여 측정한 결과 증착된 박막이 기판과 잘 정렬되어 성장한 것을 확인할 수 있었다. $600^{\circ}C$의 기판 온도에서 성장한 페라이트 박막은 약 200nm크기의 사각형 형태로 규칙적으로 분포되어 있음이 관찰되었다. 그러나 $700^{\circ}C$의 기판 온도에서 성장한 박막은 불규칙한 모양으로 이루어져 있었으며 30nm에서 150nm에 이르는 다양한 입자 크기를 보이고 있었다. 섭동자화기를 이용한 자기이력곡선 측정 결과 성장한 박막의 자화용이축이 기판과 수직하게 배열하는 것을 알 수 있었다. 또한 MgO 기판과 성장 박막과의 격자상수 차이로 인하여 기판과 수직한 방향의 보자력은 매우 큰 값을 나타내었다. 즉 평행한 방향의 보자력은 283 Oe이고 수직한 방향의 보자력은 6800 Oe였다. $700^{\circ}C$의 기판 온도에 서 성장한 페라이트 박막은 $600^{\circ}C$의 기판 온도에서 성장한 박막의 보자력 및 포화자화 값과 유사한 값을 보였으나 각형비는 급격하게 감소하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.111-112
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• 2009

Diamond-like carbon (DLC) is a convenient term to indicate the compositions of the various forms of amorphous carbon (a-C), tetrahedral amorphous carbon (ta-C), hydrogenated amorphous carbon and tetrahedral amorphous carbon (a-C:H and ta-C:H). The a-C film with disordered graphitic ordering, such as soot, chars, glassy carbon, and evaporated a-C, is shown in the lower left hand corner. If the fraction of sp3 bonding reaches a high degree, such an a-C is denoted as tetrahedral amorphous carbon (ta-C), in order to distinguish it from sp2 a-C [2]. Two hydrocarbon polymers, that is, polyethylene (CH2)n and polyacetylene (CH)n, define the limits of the triangle in the right hand corner beyond which interconnecting C-C networks do not form, and only strait-chain molecules are formed. The DLC films, i.e. a-C, ta-C, a-C:H and ta-C:H, have some extreme properties similar to diamond, such as hardness, elastic modulus and chemical inertness. These films are great advantages for many applications. One of the most important applications of the carbon-based films is the coating for magnetic hard disk recording. The second successful application is wear protective and antireflective films for IR windows. The third application is wear protection of bearings and sliding friction parts. The fourth is precision gages for the automotive industry. Recently, exciting ongoing study [1] tries to deposit a carbon-based protective film on engine parts (e.g. engine cylinders and pistons) taking into account not only low friction and wear, but also self lubricating properties. Reduction of the oil consumption is expected. Currently, for an additional application field, the carbon-based films are extensively studied as excellent candidates for biocompatible films on biomedical implants. The carbon-based films consist of carbon, hydrogen and nitrogen, which are biologically harmless as well as the main elements of human body. Some in vitro and limited in vivo studies on the biological effects of carbon-based films have been studied [$2{\sim}5$].The carbon-based films have great potentials in many fields. However, a few technological issues for carbon-based film are still needed to be studied to improve the applicability. Aisenberg and Chabot [3] firstly prepared an amorphous carbon film on substrates remained at room temperature using a beam of carbon ions produced using argon plasma. Spencer et al. [4] had subsequently developed this field. Many deposition techniques for DLC films have been developed to increase the fraction of sp3 bonding in the films. The a-C films have been prepared by a variety of deposition methods such as ion plating, DC or RF sputtering, RF or DC plasma enhanced chemical vapor deposition (PECVD), electron cyclotron resonance chemical vapor deposition (ECR-CVD), ion implantation, ablation, pulsed laser deposition and cathodic arc deposition, from a variety of carbon target or gaseous sources materials [5]. Sputtering is the most common deposition method for a-C film. Deposited films by these plasma methods, such as plasma enhanced chemical vapor deposition (PECVD) [6], are ranged into the interior of the triangle. Application fields of DLC films investigated from papers. Many papers purposed to apply for tribology due to the carbon-based films of low friction and wear resistance. Figure 1 shows the percentage of DLC research interest for application field. The biggest portion is tribology field. It is occupied 57%. Second, biomedical field hold 14%. Nowadays, biomedical field is took notice in many countries and significantly increased the research papers. DLC films actually applied to many industries in 2005 as shown figure 2. The most applied fields are mold and machinery industries. It took over 50%. The automobile industry is more and more increase application parts. In the near future, automobile industry is expected a big market for DLC coating. Figure 1 Research interests of carbon-based filmsFigure 2 Demand ratio of DLC coating for industry in 2005. In this presentation, I will introduce a trend of carbon-based coating research and applications.