• Journal of the Korean Society of Marine Environment & Safety
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• v.28 no.spc
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• pp.30-36
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• 2022

A sensor is needed to continuously and automatically measure the change in HNS concentration in industrial facilities that directly discharge to the sea after water treatment. The basic function of the sensor is to be able to detect ppb levels even at room temperature. Therefore, a method for increasing the sensitivity of the existing sensor is proposed. First, a method for increasing the conductivity of a film using a conductive carbon-based additive in a nanoparticle thin film and a method for increasing ion adsorption on the surface using a catalyst metal were studied.. To improve conductivity, carbon black was selected as an additive in the film using ITO nanoparticles, and the performance change of the sensor according to the content of the additive was observed. As a result, the change in resistance and response time due to the increase in conductivity at a CB content of 5 wt% could be observed, and notably, the lower limit of detection was lowered to about 250 ppb in an experiment with organic solvents. In addition, to increase the degree of ion adsorption in the liquid, an experiment was conducted using a sample in which a surface catalyst layer was formed by sputtering Au. Notably, the response of the sensor increased by more than 20% and the average lower limit of detection was lowered to 61 ppm. This result confirmed that the chemical resistance sensor using metal oxide nanoparticles could detect HNS of several tens of ppb even at room temperature.

• Journal of the Korean Vacuum Society
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• v.17 no.2
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• pp.130-137
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• 2008

$La_{0.7}Sr_{0.3}MnO_3$ films were deposited on $SiO_2$/Si and Si substrates annealed at $350^{\circ}C$ by rf magnetron sputtering. The oxygen gas flow rates were varied as 0, 40, and 80 sccm. Without post annealing process, $La_{0.7}Sr_{0.3}MnO_3$ thin films on $SiO_2$/Si and Si substrates were polycrystalline with (100), (110), and (200) growth planes. The grain size of $La_{0.7}Sr_{0.3}MnO_3$ thin films was increased with increasing oxygen gas flow rate. The sheet resistance of $La_{0.7}Sr_{0.3}MnO_3$ thin films was decreased with oxygen flow rate due to the increased grain size which induced a reduction of grain boundary. TCR (temperature coefficient of resistance) values of $La_{0.7}Sr_{0.3}MnO_3$ thin films were obtained from -2.0% to -2.2%.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1710-1712
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• 1999

암모니아가스에 민감한 In이 도핑된 ZnO(ZnO:In) 박막을 In 박막$(100{\AA})$ 및 ZnO박막$(3000{\AA})$의 연속적인 증착과 열처리공정을 통하여 제조하고, 이와 같은 방법으로 Al과 In이 도핑된 ZnO (ZnO:Al, In) 박막을 In 박막과 ZnO:Al 박막의 연속적인 증착과 같은 조건에서의 열처리를 통하여 제조하였다. 기판은 $1000{\AA}$의 산화막이 열적으로 성장되어 있는 Si 기판을 사용하였다. In/ZnO 및 In/ZnO:Al 박막 이중층의 열처리온도에 따른 구조적 및 전기적 특성을 x-선회절기, 주사전자현미경, 오제전자분광법 및 4점측정시스템을 통하여 조사하였다. 이들 막에 대하여 열처리온도에 따른 암모니아가스에 대한 감도, 선택성 및 시간응답특성을 구하였다. 열처리온도 $400^{\circ}C$, 동작온도 $300^{\circ}C$에서 100 ppm의 암모니아가스를 주입한 결과 140 %의 최대감도를 나타내었으며 CO, $NO_x$ 가스에 대한 감도는 아주 낮은 것으로 나타났다.

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1162-1164
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• 1995

In this paper, $TiO_2$-xmol%$V_2O_5$, x=0.0, 1.0, 2.0, 3.0 specimens are fabricated by Sol-Gel method. For the improvement of humidity sensitive characteristics for specimens, their microstructures are analysed and the optimum processing condition is established. Grain size increases with substitution rate of $V^{5+}$, on $Ti^{4+}$ site. Their humidity sensitive characteristics is good at 1mol% of $V_2O_5$ rate and heat-treated at $700^{\circ}C$. The capacitance of specimens decreases with frequency.

• Journal of Sensor Science and Technology
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• v.4 no.4
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• pp.10-15
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• 1995

Organic thin film electroluminescent(EL) cells were fabricated. Their output characteristics and luminance versus voltage characteristics were measured with different work function metal electrodes. The EL structure was Indium-Tin-Oxide(ITO)/hole transport layer/emission layer(electron transport layer)/metal electrode. PMMA+TPD(0.5 wt%), MC homopolymer+TPD(0.005 wt%) and (MC/MMA) copolymer+TPD(0.005 wt%) were used as hole transport layer. Ca, Mg, Mg:Ag(10:l) and Al were used as metal electrode. I-V output showed exponential feature, and the threshold voltage of 5 volts and the luminance of over 700 $Cd/m^{2}$ at 10 volts were observed.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.45-48
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• 2003

In the research of proteomics, mass spectrometry analysis is the essential method for identification of the unknown proteins. Trypsin treatment for the sample preparation of mass spectrometry is the inevitable procedure[1]. However, sample preparation procedure is cumbersome and time consuming. To resolve these problems, Temperature controllable microreactor was designed and fabricated. It consists of metering chamber, micro channel, reaction chamber, platinum (Pt) thin film heater and a temperature sensor so that micro metering and mixture of reagent with temperature control can be done on the same chip. The total size of the fabricated microreactor was $37{\times}30{\times}1\;mm^3$ and the size of channel cross section was $200{\times}100{\mu}m^2$. PID temperature controller was realized using NI DAQ, PCI-MIO-l6E-1 board and LabVIEW program.

• The Journal of Korea Robotics Society
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• v.8 no.3
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• pp.156-163
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• 2013

This paper describes a flexible visuo-haptic display module. We have developed a flexible electro-active polymer (EAP) actuator and a thin flexible visual display with $3{\times}3$ array configuration via polymer technology. The flexible actuator consists of nine EAP cells vertically moving in response to change in their thickness. The flexible display uses polymer based optical waveguide allowing light to scatter only at specific area. The display film is transparent and identically designed to the array pattern to fit for the arrangement of actuator cells. A pressure sensor is installed under the integrated module. The performance of the actuator is proved to be sufficient for satisfying perceivable range of human touch sense. The integrated system can provide interactive haptic feedback such as key pressing, contact vibration sensations, and etc. in accordance with user input.

• Particle and aerosol research
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• v.11 no.4
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• pp.93-98
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• 2015

Particles which generated from plasma enhanced chemical vapor deposition (PECVD) during thin film deposition process can affect to the process yield. By using light extinction method, ISPM can measure particles in the large-diameter pipe (${\leq}300mm$). In our research, in-situ particle monitor (ISPM) sensor was installed at the 300 mm diameter exhaust-line to count the particles in each size. In-house flange for mounting the transmitting and receiving parts of ISPM was carefully designed and installed at a certain point of exhaust line where no plasma light affect to the light extinction measurement. Measurement results of trend changes on particle count in each size can confirm that ISPM is suitable for real-time monitoring of vacuum process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.252-252
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• 2008

The microhotplates consisting of a Pt-ased heating element on AlN/poly 3C-SiC layers were fabricated. The microhotplate has a $600{\mu}m{\times}600{\mu}m$ square shaped membrane which made of $1{\mu}m$ thick ploycrystalline 3C-SiC suspended by four legs. 3C-SiC is known for excellent chemical durability, mechanical strength and sustaining of high temperature. The membrane is fabricated by surface micromachining using oxidized Si sacrificial layer. The Pt thin film is used for heating material and resist temperature sensor. The fabrication methodology allows intergration of an array of heating material and resist temperature detector. For reasons of a short response time and a high sensitivity a uniform temperature profile is desired. The dissipation of microhotplate was examined by a IR thermoviewer and the power consumption was measured. Measured and simulated results are compared and analyzed. Thermal characterization of the microhotplates shows that significant reduction in power consumption was achieved using suspended structure.