• Title/Summary/Keyword: Thickness Uniformity

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Development of capacitive Micromachined Ultrasonic Transducer (II) - Analysis of Microfabrication Process (미세가공 정전용량형 초음파 탐촉자 개발(II) - 미세공정기술 분석)

  • Kim, Ki-Bok;Ahn, Bong-Young;Park, Hae-Won;Kim, Young-Joo;Kim, Kuk-Jin;Lee, Seung-Seok
    • Journal of the Korean Society for Nondestructive Testing
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    • v.24 no.6
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    • pp.573-580
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    • 2004
  • The main goal of this study was to develop a micro-fabrication process for the capacitive micromachined ultrasonic transducer (cMUT). In order to achieve this goal, the former research results of the micro-electro-mechanical system (MEMS) process for the cMUT were analyzed. The membrane deposition, sacrificial layer deposition and etching were found to be a main process of fabricating the cMUT. The optimal conditions for those microfabrication were determined by the experiment. The thickness, uniformity, and residual stress of the $Si_3N_3$ deposition which forms the membrane of the cMUT were characterized after growing the $Si_3N_3$ on Si-wafer under various process conditions. As a sacrificial layer, the growth rate of the $SiO_2$ deposition was analyzed under several process conditions. The optimal etching conditions of the sacrificial layer were analyzed. The microfabrication process developed in this study will be used to fabricate the cMUT.

Studies on the Electrochemical Dissolution for the Treatment of 10 g-Scale Zircaloy-4 Cladding Hull Wastes in LiCl-KCl Molten Salts (LiCl-KCl 용융염 내에서 10 g 규모의 Zircaloy-4 폐 피복관 처리를 위한 전기화학적 용해 연구)

  • Lee, You Lee;Lee, Chang Hwa;Jeon, Min Ku;Kang, Kweon Ho
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.10 no.4
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    • pp.273-280
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    • 2012
  • The electrochemical behaviors of 10 g-scale fresh and oxidized Zircaloy-4 cladding hulls were examined in $500^{\circ}C$ LiCl-KCl molten salts to confirm the feasibility of the electrorefining process for the treatment of hull wastes. In the results of measuring the potential-current response using a stainless steel basket filled with oxidized Zircaloy-4 hull specimens, the oxidation peak of Zr appears to be at -0.7 to -0.8 V vs. Ag/AgCl, which is similar to that of fresh Zircaloy-4 hulls, while the oxidation current is found to be much smaller than that of fresh Zircaloy-4 hulls. These results are congruent with the outcome of current-time curves at -0.78 V and of measuring the change in the average weight and thickness after the electrochemical dissolution process. Although the oxide layer on the surface affects the uniformity and rate of dissolution by decreasing the conductivity of Zircaloy-4 hulls, electrochemical dissolution is considered to occur owing to the defect of the surface and phase properties of the Zr oxide layer.

Studies on the Nucleation of CVD Tungsten on the TiN substrate (TiN 기판상에서의 CVD텅스텐의 핵생성에 관한 연구)

  • Kim, Eui-Song;Lee, Chong-Mu;Lee, Jong-Gil
    • Korean Journal of Materials Research
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    • v.2 no.2
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    • pp.110-118
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    • 1992
  • When CVD-W films deposited on the reactively sputter-deposited TiN(${\circled1}$), the $NH_3$-RTP (rapid themal processed) TiN(${\circled2}$), and the furnace-annealed TiN submitate (${\circled3}$) by $SiH_4$, reduction, deposition rate is in the order of ${\circled1}>{\circled2}>{\circled3}$ and incubation period of W nucleation is in the order of ${\circled1}{\leq}{\circled2}<{\circled3}$. The longest incubation period of nucleation and lowest deposition rate for the CVD-W on the annealed TiN is due to the incorporation of oxygen from the nitrogen ambient containing some oxygen as contaminant into the TiN film. The higher W deposition rate and the lower incubation period of W nucleation on the RTP-TiN substrate in comparison with those on the sputtered TiN substrate seem to be due to a negative effect of the high compressive stress of the RTP-TiN on the nucleation and growth of W. Also the thickness uniformity of the W film deposited on the TiN substrate by $SiH_4$ reduction turns out to be better than that by $H_2$ reduction.

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Copper Film Growth by Chemical Vapor Deposition: Influence of the Seeding Layer (ICB seeding에 의한 CVD Cu 박막의 증착 및 특성 분석)

  • Yoon, Kyoung-Ryul;Choi, Doo-Jin;Kim, Seok;Kim, Ki-Hwan;Koh, Seok-Keun
    • Korean Journal of Materials Research
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    • v.6 no.7
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    • pp.723-732
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    • 1996
  • Cu films were deposited by chemical wapor deposition on the as-received substrates (TiN/Si) and three kinds of Cu-seeded substrates (Cu/TiN/Si) which had seeding layer in the thick ness of 5 ${\AA}$ and 130 ${\AA}$ coated by ICB(Ionized Cluster Beam) method. The effect of Cu seeding layers on the growth rate, crystallinity, grain size uniformity and film adhesion strength of final CVD-Cu films was investigated by scanning eletron microscopy(SEM), X-ray diffractometry and scratch test. The growth rate was found to incresase somewhat in the case of ICB-seeding. The XRD patterns of the Cu films on the as-received substrate and ICB Cu-seeded substrates exhibited the diffraction peaks corresponding to FCC phase, but the peak intensity ratio($I_{111}/I_{200}$) of Cu films deposited on the ICB Cu-seeded substrates increased compared with that of Cu films on the as-received substrate. The resistivity of final Cu film on 40 ${\AA}$ seeded substrate was observed as the lowest value, 2.42 $\mu\Omega\cdot$cm compared with other Cu films. In adhesion test, as the seeding thickness increased from zero to 130 ${\AA}$, the adhesion strength increased from 21N to 27N.

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Effect of Mechanical Stress on Postharvest Quality of Baby Leaf Vegetables (재배조건에 따른 어린잎 채소 '다채'의 수확 후 품질변화)

  • Lee, Hye-Eun;Lee, Jung-Soo;Choi, Ji-Weon;Pae, Do-Ham;Do, Kyung-Ran
    • Food Science and Preservation
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    • v.16 no.5
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    • pp.699-704
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    • 2009
  • Commercially produced 'baby leaves' of Brassica campestris var. narinosa (Chinese cabbage) were used in the present study. Baby leaf vegetables were sown on 128 cell plug trays and harvested 30 days after sowing. For mechanical stress experiments, seedlings were thinned to three per cell, selected for uniformity, and watered at the base. Trays were treated with mechanical stress by stroking back and forth 50 times, using a sheet of A4 paper folded to double thickness. Plants were treated between 12:00 and 14:00 daily for 15-20 days. Harvested baby leaf vegetables were packed in MAP salad bags made of P-plus film, $50{\mu}m$ polypropylene (PP) film, and polyethylene terephthalate (PET) boxes. Fresh weight was well-maintained under P-plus and PP film on storage at $8^{\circ}C$. However, loss of fresh weight occurred quickly in PET boxes, and vegetable quality deteriorated rapidly. Stressed leaves were smaller but thicker, with an increased dry weight ratio. We thus suggest that P-plus or PP film is most appropriate packing for marketing of baby leaf vegetables, which should be stored at $8^{\circ}C$. Our data on baby leaf vegetables also make a significant new contribution in that we demonstrate a positive effect of stress touching on baby leaf processability.

Superconducting Thick Film by Lateral Field Assisted EPD (측면보조전계 인가 전기영동전착 초전도후막)

  • 전용우;소대화;조용준
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.8 no.3
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    • pp.679-685
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    • 2004
  • Although the electrophoretic deposition method has the advantage of simple processing procedure, less fabrication facilities, and easier control for deposition thickness and wire length, providing economical and technical merits, it also has the disadvantages of cracking and porosity phenomena, requiring an improved processing method for higher particle density and constant particle orientation. we have developed an optimization method to increase the particle density and to unify its orientation, and have performed a study to overcome the cracking and porosity problems in the fabricated superconductor. In order to improve the surface uniformity and the conduction properties of the fabricated YBCO thick films, a system that applies alternate voltage vertically has been developed for the first time and applied to the electrophoretic deposition process. The applied alternate electric field caused a force to be exerted on each YBCO particle and resulted in a rotation of the particle in the direction of applied electric field, accomplishing a uniform particle orientation. We name this process as the shaky-aligned electrophoretic deposition method. For commercial utilization and efficiency, in this dissertation, alternating voltage of 60 Hz and 25 ∼ 120 V/cm was proposed to apply it as a subsidiary source for shaky-flow deposition so that the fabricated thin film showed uniform surface morphology with less voids and cracks and Tc,zero of 90 K and the critical current density of 3419 A/$cm^2$.

A Study on the Improvement of the Electrochemical Performance of Graphite Anode by Controlling Properties of the Coating Pitch (코팅 피치의 물성제어를 통한 흑연 음극재의 전기화학 성능 향상 연구)

  • Kim, Bo Ra;Kim, Ji Hong;Kang, Seok Chang;Im, Ji Sun
    • Applied Chemistry for Engineering
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    • v.33 no.5
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    • pp.459-465
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    • 2022
  • A pitch coating method was proposed for the purpose of improving the electrochemical properties of natural graphite. The synthesis conditions of pitch coating were optimized via measuring electrochemical properties of pitch-coated graphite anodes. As the synthesis temperature increased, the thermal stability was improved in addition to an increase in the softening point and residual carbon weight. However, the synthesis temperature of 430 ℃ resulted in the synthesis of a large amount of NI (NMP Insoluble) due to excessive condensation reaction. As the surface uniformity and coating thickness increased due to high thermal stability, the initial coulombic efficiency and rate capability of the pitch-coated graphite were improved. However, the graphite coated with the pitch containing excessive NI showed lower electrochemical properties than the uncoated graphite. NI had low dispersibility and formed spheres after heat treatment, so it formed the heterogeneous and thicker SEI layer. The optimum conditions for forming a uniform surface and an appropriate coating layer were investigated.

Investigation of Damage to Polyurethane Topcoat Based on De-icing Cycles (De-icing 횟수에 따른 폴리우레탄 탑코트의 손상 조사)

  • Donghyeon Lee;Joung-Man Park;Hyung Mi Lim;Dong-Jun Kwon
    • Composites Research
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    • v.37 no.3
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    • pp.204-208
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    • 2024
  • De-icing/anti-icing fluid is essential for removing ice formation on aircraft. It chemically removes ice using organic solvents, which can cause damage to the topcoat surface in the process. In this study, glycol-based deicing/anti-icing fluid was used to remove ice, and the resulting damage to the topcoat was examined. USB microscope was used to observe the formation and growth of ice, while a confocal microscope was employed to observe the surface morphology after treatment with de-icing/anti-icing fluid. Additionally, coating thickness measurements and Fourier transform infrared (FT-IR) analysis were conducted to investigate the physical and chemical changes on the surface. The repeated application of de-icing/anti-icing fluid showed a reduction in the ice formation rate and an increase in the growth rate. Damage during the pressurization process and surface damage to the polyurethane topcoat caused by ethylene glycol were observed during the de-icing process. Although no chemical changes were detected, the analysis revealed that surface uniformity decreased, with physical damage such as cracks and undulations forming on the surface. It was confirmed that while de-icing/anti-icing fluid is effective in removing ice, it also causes surface damage.

Evaluation of Retro recon for SRS planning correction according to the error of recognize to coordinate (SRS의 좌표 인식 오류 시 Retro recon을 이용한 수정 방법에 관한 평가)

  • Moon, hyeon seok;Jeong, deok yang;Do, gyeong min;Lee, yeong cheol;Kim, sun myung;Kim, young bum
    • The Journal of Korean Society for Radiation Therapy
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    • v.28 no.2
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    • pp.101-108
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    • 2016
  • Purpose : The purpose of this study was to evaluate the Retro recon in SRS planning using BranLAB when stereotactic location error occurs by metal artifact. Materials and Methods : By CT simulator, image were acquired from head phantom(CIRS, PTW, USA). To observe stereotactic location recognizing and beam hardening, CT image were approved by SRS planning system(BrainLAB, Feldkirchen, Germany). In addition, we compared acquisition image(1.25mm slice thickness) and Retro recon image(using for 2.5 mm, 5mm slice thickness). To evaluate these three images quality, the test were performed by AAPM phantom study. In patient, it was verified stereotactic location error. Results : All the location recognizing error did not occur in scanned image of phantom. AAPM phantom scan images all showed the same trend. Contrast resolution and Spatial resolution are under 6.4 mm, 1.0 mm. In case of noise and uniformity, under 11, 5 of HU were measured. In patient, the stereotactic location error was not occurred at reconstructive image. Conclusion : For BrainLAB planning, using Retro recon were corrected stereotactic error at beam hardening. Retro recon may be the preferred modality for radiation treatment planning and approving image quality.

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Application of PCM Technology to Concrete II : Effects of SSMA(Sulfonated Styrene-Maleic Anhydride) on the Properties of the 1-Dodecanol Micro-Capsule (PCM 기술의 콘크리트 적용 II : 계면중합법에 의한 1-도데카놀 마이크로 캡슐에 있어서 계면활성제로 사용된 SSMA의 표면활성도가 마이크로 캡슐의 특성에 미치는 영향)

  • Shin, Se-Soon;Jung, Jae-Yun;Lim, Myung-Kwan;Choi, Dong-Uk;Kim, Young-Ho
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.1 no.1
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    • pp.17-25
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    • 2013
  • Thermal storage technology used for indoor heating and cooling to maintain a constant temperature for a long period of time has an advantage of raising energy use efficiency. This, the phase changing material, which utilizes heat storage properties of the substances, capsulizes substances that melt at a constant temperature. This is applied to construction materials to block or save energy due to heat storage and heat protection during the process in which substances melt or freeze according to the indoor or outdoor temperature. The micro-encapsulation method is used to create thermal storage from phase changing material. This method can be broadly classified in 3 ways: chemical method, physical and chemical method and physical and mechanical method. In the physical and chemical method, a wet process using the micro-encapsulation process utilized. This process emulsifies the core material in a solvent then coats the monomer polymer on the wall of the emulsion to harden it. In this process, a surfactant is utilized to enhance the performance of the emulsion of the core material and the coating of the wall monomer. The performance of the micro-encapsulation, especially the coating thickness of the wall material and the uniformity of the coating, is largely dependent on the characteristics of the surfactant. This research compares the performance of the micro-capsules and heat storage for product according to molecular mass and concentration of the surfactant, SSMA (sulfonated styrene-maleic anhydride), when it comes to micro-encapsulation through interfacial polymerization, in which Dodecan-1 is transformed to melamin resin, a heat storage material using phase changing properties. In addition, the thickness of the micro-encapsulation wall material and residual melamine were reduced by adjusting the concentration of melamin resin microcapsules.