• Transactions of Materials Processing
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• v.18 no.3
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• pp.268-273
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• 2009

Ultraviolet nanoimprint lithography (UV-NIL), which is performed at a low pressure and at room temperature, is known as a low cost method for the fabrication of nano-scale patterns. In the patterning process, maintaining the uniformity of the residual layer is critical as the pattern transfer of features to the substrate must include the timed etch of the residual layer prior to the etching of the transfer layer. In pursuit of a thin and uniform residual layer thickness, the initial volume and the position of each droplet both need to be optimized. However, the monomer mixtures of resin had a tendency to evaporate. The evaporation rate depends on not only time, but also the initial volume of the monomer droplet. In order to decide the initial volume of each droplet, the accurate prediction of evaporation behavior is required. In this study, the theoretical model of the evaporation behavior of resin droplets was developed and compared with the available experimental data in the literature. It is confirmed that the evaporation rate of a droplet is not proportional to the area of its free surface, but to the length of its contact line. Finally, the parameter of the developed theoretical model was calculated by curve fitting to decide the initial volume of resin droplets.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.10a
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• pp.467-471
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• 2005

In this paper, experimental methods about the flow behavior of thin polymer film by various edge patterns in the spin coating process for stable cover layer coating of a blu-ray disc is described. The blu-ray disc, a next-generation optical disc format over 25GB, consists of a 1.1m thick substrate and a 0.1mm tick cover layer. Generally, cover layer on the blu-ray disc is made by the polymer spin coating process. However, it is hard to secure sufficient coating uniformity around the rim on the cover layer. In order to get the uniform thickness deviation and to minimize the bead around the rim, the edge of the disc substrate can be modified into various patterns, such as normal plain, trench, step and chamfer pattern, etc, around the rim on the disc and experimented with various parameters, such as surface tension, viscosity, coating time, temperature and rotation speed, etc. And the optimal shape of the rim was tried to get by 3 dimensional computer simulation of the polymer expulsion process.

• Journal of the Korean Society for Heat Treatment
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• v.13 no.4
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• pp.265-271
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• 2000

The microstructural change and transformation characteristics with cooling rate i.e. wheel speed were investigated in 82.8wt%Cu-12.8wt%Al-4.3wt%Ni SMA ribbons fabricated by melt-spinning. The thickness and width of ribbon were decreased with increasing wheel speed, while the uniformity of it was improved. At same wheel speed, the grain size of the contact surface of ribbon was smaller than that of free surface. The mean grain size was decreased with increasing wheel speed, resulted in obtaining grains with $3{\mu}m$ in mean diameter in the wheel speed of 30 m/s. However, micro-voids and cracks at grain boundary could be observed at higher wheel speed. $M_s$ and $A_s$ temperatures were decreased, and $M_s{\sim}M_f$ and $A_s{\sim}A_f$ temperature ranges were broadened with increasing wheel speed. All the ribbons were retained the ordered $D0_3$ due to rapid cooling, the volume fraction of it was increased with increasing wheel speed.

• Journal of the Korean Ceramic Society
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• v.42 no.4
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• pp.219-223
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• 2005

A promising capacitor, which has conformable step coverage and good uniformity of thickness and composition, is needed to manufacture high-density non-volatile FeRAM capacitors with a stacked cell structure. In this study, ferroelectric $Bi_{3.61}Nd_{0.39}Ti_3O_{12}$ (BNdT) thin films were prepared on $Pt(111)/TiO_2/SiO_2/Si$ substrates by the liquid delivery system MOCVD method. In these experiments, $Bi(ph)_{3}$, $Nd(TMHD)\_{3}$ and $Ti(O^iPr)_{2}(TMHD)_{2}$ were used as the precursors and were dissolved in n-butyl acetate. The BNdT thin films were deposited at a substrate temperature and reactor pressure of approximately $600^{\circ}C$ and 4.8 Torr, respectively. The microstructure of the layered perovskite phase was observed by XRD and SEM. The remanent polarization value (2Pr) of the BNdT thin film was $31.67\;{\mu}C/cm^{2}$ at an applied voltage of 5 V.

• Journal of the Korean Ceramic Society
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• v.55 no.4
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• pp.400-405
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• 2018

FCM nuclear fuel, a concept proposed as an accident tolerant fuel in light water reactors, consists of TRISO fuel particles embedded in a SiC matrix. The uniform dispersion of internal TRISO fuel particles in the FCM fuel is very important for improving the fuel efficiency. In this study, FCM sintered pellets with various volume ratios of TRISO-coated particles were prepared by hot press sintering. The distribution of TRISO-coated particles was quantitatively analyzed using X-ray ${\mu}CT$ and expressed as a dispersion uniformity index. TRISO-coated particles were most uniformly dispersed in the FCM pellets prepared using only overcoated TRISO particles without mixing of additional SiC matrix powder. FCM pellets with uniformly dispersed TRISO particle volume fraction of up to 50% were prepared using overcoated TRISO particles with varying thickness.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.8
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• pp.704-710
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• 2000

Metal electrode materials for plasma display panel should have low electrical resistivity in order to maintain stable gas discharge and have fast response time. They should also hae good film uniformity adhesion and thermal stability. In this study Cr/Cu/Cr metal electrode structure is formed by DC magnetron sputtering. Cr and Cu films were deposited on ITO coated glasses with various DC power density and main pressures as the major parameters. After metal electrodes were formed a heat treatment was followed at 55$0^{\circ}C$ for 20 min in a vacuum furnace. The intrinsic stress of the sputtered Cr film passed a tensile stress maximum decreased and then became compressive with further increasing DC power density. Also with increasing the main pressure stress turned from compression to tension. After heat the treatment the electrical resistivity of the sputtered Cu film of 2${\mu}{\textrm}{m}$ in thickness prepared at 1 motor with the applied power density of 3.70 W/cm$^2$was 2.68 $\mu$$\Omega$.cm With increasing the main pressure the DC magnetron sputtered Cu film became more open structure. The heat treatment decreased the surface roughness of the sputtered Cr/Cu/Cr metal electrodes.

• Journal of the Korean Ceramic Society
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• v.34 no.8
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• pp.908-913
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• 1997

Multilayer NbCxC1-x/Y2O3/Ti were sputter-coated on the alumina substrate, starting with a 0.7 ㎛ thick NbCxC1-x layer grown on substrate, followed by 0.7 ㎛ thick Y2O3 layer and 1 ㎛ thick Ti layer. To find out the optimum conditions for thickness uniformity and adhesion, sputtering works have been done with the variation of sputtering power and Ar pressure. After vacuum annealing at 950℃ and 1000℃, the thermal stability of the NbCxC1-x/Y2O3/Ti coated alumina substrates has been investigated by peel off test. The coating scheme didn't cause any debonded layer after an annealing at 950℃ for 3hrs. However, it was peeled off after annealing at 1000℃ for 3hr. It was found that the thermal stability of Al2O3/NbCxC1-x/Y2O3/Ti coating scheme changed with the NbCxC1-x composition.

• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.19-22
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• 2003

In this paper, Si anisotropic etching characteristics of tetramethylammonium hydroxide (TMAH)/ammonium persulfate (AP) solutions were investigated to realize the optimum structure of a diaphragm for the piezoresistive pressure sensor application. Due to its low toxicity and its high compatibility with the CMOS processing, TMAH was used as Si anisotropic etchants. The variations of Si etch rate on the etching temperature, TMAH concentration, and etching time were obtained. With increasing the etching temperature and decreasing TMAH concentrations, the Si etch rate is increased while a significant non-uniformity exists on the etched surface because of formation of hillocks on the <100> surface. With the addition of AP to TMAH solution, the Si etch rate is increased and an improvement in flatness on the etching front is observed. The Si etch rate is also maximized with increasing the number of addition of AP to TMAH solution per one hour. The Si square diaphragms of 20$\mu\textrm{m}$ thickness and 100-400 $\mu\textrm{m}$ one-side length were fabricated successfully by adding AP of (5/6)g to 800 ml TMAH solution every 10 minutes.

• Journal of the Semiconductor & Display Technology
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• v.16 no.1
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• pp.106-111
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• 2017

When a substrate with a pixel-defining layer (bank) is coated, there arises capillary force due to surface tension and adhesive forces between a solvent and the bank layer. It brings in a degradation of film thickness and emission uniformities within pixels. With an attempt to suppress it, we have performed fluid flow simulations of capillary arise by varying the contact angle of bank and the bank structure. We have first demonstrated that the fluid flow model can reproduce the capillary phenomenon that was observed experimentally. It has been found that capillary arise can be suppressed using a hydrophobic material for the bank layer. Furthermore, it was suppressed by tilting the sidewalls outwardly (i.e., using a positive photoresistor). We can obtain very uniform films when the slope is $50^{\circ}$ with the contact angle of $40^{\circ}$.

• Journal of the Korean Graphic Arts Communication Society
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• v.28 no.2
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• pp.101-116
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• 2010

Last printing market is changing to high-quality color prints for web offset printing. But, color image reproduction based on the relative sheet-ped printing compared to the way, web offset printing are falling. Moreover, it's difficult to maintain the quality of the web offset print. The reason is the worker's decision to rely on. Therefore, the quality of prints was no difference in uniformity and objectivity. We have thought the reason, that the physical properties of inks such as fluidity, viscosity and tack. In addition, varies depending on the physical properties of paper, such as thickness, smoothness, roughness and porosity. Therefore, we studied the properties of ink and paper on the relations between the properties used IGT printability tester. This study of domestic web offset printing inks and papers on the relationship between physical properties and printability were studied. So, to improve printability will be used as the basis resources for web offset printing.