• Journal of the Semiconductor & Display Technology
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• v.6 no.2 s.19
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• pp.35-40
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• 2007

An integrated material removal model considering thermal, chemical and contact mechanical effects in CMP process is proposed. These effects are highly coupled together in the current modeling effort. The contact mechanics is employed in the model incorporated with the heat transfer and chemical reaction mechanisms. The mechanical abrasion actions happening due to the mechanical contacts between the wafer and abrasive particles in the slurry and between the wafer and pad asperities cause friction and consequently generate heats, which mainly acts as the heat source accelerating chemical reaction(s) between the wafer and slurry chemical(s). The proposed model may be a help in understanding multi-physical interactions in CMP process occurring among the wafer, pad and various consumables such as slurry.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.29-30
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• 2007

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.5
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• pp.617-623
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• 2004

This paper describes a dynamic thermal model for a representative dual axis rotational Chemical-Mechanical Polishing (CMP) tool. The model is one-dimensional but configured in the two-dimensional space and consists of three sub-models (pad, wafer and slurry fluid), with the first and the second that are time-dependent heat conduction-convection models with linear stationary (wafer) and nonlinear moving (pad) boundary conditions, and the last one that is a heat transport-convection model (slurry fluid). The modeling approach is validated by comparing the simulation results with available experimental data.

• Journal of the Semiconductor & Display Technology
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• v.6 no.3
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• pp.1-6
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• 2007

The integrated thermal-chemical-mechanical (TCM) material removal model presented in the companion paper is dynamically simulated in this work. The model is applied to a Cu CMP process for the simulation and the results of the three individual ingredients composing the model are presented separately first. These results are then incorporated to calculate the total material removal rate (MRR) of the Cu CMP. It is shown that the non-linear trend of MRR with respect to the applied mechanical power (i.e., non-Prestonian behavior), which is not well explained with the models established in principle on conventional contact mechanics, may be due to the chemical reaction(s) varying non-linearly with the temperature in the wafer.

• Structural Engineering and Mechanics
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• v.37 no.5
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• pp.459-473
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• 2011

The study of the early age concrete properties is becoming more important, as the thermal effects and the shrinkage, even in the first hours, could generate cracks, increasing the permeability of the structure and being able to induce problems of durability and functionality in the same ones. The detailed study of the stresses development during the construction process can be decisive to keep low the cracking levels. In this work a computational model, based on the finite element method, was implemented to simulate the early age concrete behavior and, specially, the evaluation of the cracking risk. The finite element analysis encloses the computational modeling of the following phenomena: chemical, thermal, moisture diffusion and mechanical which occur at the first days after the concrete cast. The developed software results were compared with experimental values found in the literature, demonstrating an excellent approach for all the implemented analysis.

• Journal of the Korean Society of Safety
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• v.19 no.4 s.68
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• pp.135-140
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• 2004

Wear mechanisms may be briefly classified by mechanical, chemical and thermal wear. A plane strain finite element method is used with a new material stress and temperature fields to simulate orthogonal machining with continuous chip formation. Deformation of the workpiece material is healed as elastic-viscoplastic with isotropic strain hardening and the numerical solution accounts for coupling between plastic deformation and the temperature field, including treatment of temperature-dependent material properties. Effect of the uncertainty in the constitutive model on the distributions of strait stress and temperature around the shear zone are presented, and the model is validated by comparing average values of the predicted stress, strain, and temperature at the shear zone with experimental results.

• Macromolecular Research
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• v.17 no.10
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• pp.797-806
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• 2009

The mechanical and thermal behaviors of polyamide-6/clay nanocomposites were studied using the continuum-based, micromechanical models such as Mori-Tanaka, Halpin-Tsai and shear lag. Mechanic-based model prediction provides a better understanding regarding the dependence of the nanocomposites' reinforcement efficiency on conventional filler structural parameters such as filler aspect ratio ($\alpha$), filler orientation (S), filler weight fraction (${\Psi}_f$), and filler/matrix stiffness ratio ($E_f/E_m$). For an intercalated and exfoliated nanocomposite, an effective, filler-based, micromechanical model that includes effective filler structural parameters, the number of platelets per stack (n) and the silicate inter-layer spacing ($d_{001}$), is proposed to describe the mesoscopic intercalated filler and the nanoscopic exfoliated filler. The proposed model nicely captures the experimental modulus behaviors for both intercalated and exfoliated nanocomposites. In addition, the model prediction of the heat distortion temperature is examined for nanocomposites with different filler aspect ratio. The predicted heat distortion temperature appears to be reasonable compared to the heat distortion temperature obtained by experimental tests. Based on both the experimental results and model prediction, the reinforcement efficiency and heat resistance of the polyamide-6/clay nanocomposites definitely depend on both conventional (${\alpha},\;S,\;{\Psi}_f,\;E_f/E_m$) and effective (n, $d_{001}$) filler structural parameters.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.720-725
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• 2000

To remove harmful gases from combustion exhaust gases. fundamental study on NOx removal using pulse corona discharge has been performed through experiments and simulations. The energy consumption should be decreased in order to apply non-thermal plasma technology to industry process. This work summarized the effects of $H_2O$ and Hydrocarbon additive in NOx removal efficiency. The Radical program is used to simulate high voltage discharge and the process of NOx removal. At last, experimental results were compared with simulation results to verify the reliability of this program.

• Structural Engineering and Mechanics
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• v.64 no.6
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• pp.793-802
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• 2017

The damage of concrete due to the expansion of alkali-aggregate reaction (AAR) and thermal-chemical reactions affecting the strength of concrete is studied. The empirical equations for the variations of expansion of AAR, compressive strength and degradation of the modulus of elasticity with time, and compressive strength with degradation of the modulus of elasticity are proposed by analysing numerous experimental data. It is revealed that the expansion of AAR and compressive strength increase with time. The proposed combination of the time variations of chemical and mechanical parameters provides a satisfactory prediction of the concrete strength. Seismic analysis of the aged Koyna dam is conceded for two different long-term experimental data of concrete incorporating the proposed AAR based properties. The responses of aged Koyna dam reveal that the crest displacement of the Koyna dam significantly increases with time while the contour plots show that major principal stress at neck level reduces with time. As the modulus of elasticity decreases with ages the stress generated in the concrete structure get reduces. On the other hand with lesser value of modulus of elasticity the structure becomes more flexible and the crest displacement becomes very high that cause the seismic safety of the dam reduce.

• International Journal of Automotive Technology
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• v.7 no.7
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• pp.867-872
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• 2006

Fuel cells are devices that convert chemical energy directly into electrical energy. Owing to the high efficiency of the fuel cells, a large number of research work have been done during these years. Among many kinds of the fuel cells, a polymer electrolyte membrane fuel cell is such kind of thing which works under low temperature. Because of the specialty, it stimulated intense global R&D competition. Most of the major world automakers are racing to develop polymer electrolyte membrane fuel cell passenger vehicles. Unfortunately, there are still many problems to be solved in order to make them into the commercial use, such as the thermal and water management in working process of PEMFCs. To solve the difficulites facing the researcher, the analysis of the inner mechanism of PEMFC should be implemented as much as possible and mathematical modeling is an important tool for the research of the fuel cell especially with the combination of experiment. By regarding some of the assumptions and simplifications, using the finite element technique, a two-dimensional electrochemical mode is presented in this paper for the further comparison with experimental data. Based on the principals of the problem, the equations of electronic charge conservation equation, gas-phase continuity equation, and mass balance equation are used in calculating. Finally, modeling results indicate some of the phenomenon in a unit cell, and the relationships between potential and current density.