• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1395-1400
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• 2003

This paper introduces a novel scheme for determining the thermal diffusivity of solids using the photothermal mirage technique. The suggested scheme extends the thermal-wave coupling method, employing the solution to the heat conduction equation in close proximity to the pump beam. Therefore, determination of thermal diffusivity is possible by detecting the mirage signal with small separation between the probe and pump beams, with enhanced intensity of the mirage signal. Though the method requires information about the probe-beam height, the absolute transverse position of the probe beam need not be known as it is automatically evaluated by the iterative-computation procedure. The thermal diffusivity of Ni is measured by the proposed scheme and the result demonstrates good agreement with the literature value to within 5 %.

• 한국공작기계학회논문집
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• 제10권4호
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• pp.70-75
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• 2001

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindel unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball arti-fact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.

• 한국산학기술학회논문지
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• 제11권11호
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• pp.4121-4128
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• 2010

프로브 카드는 웨이퍼의 칩 검사에 사용된다. 또한 반도체의 고집적화에 따른 미세피치 대응으로 높은 위치 정도가 요구된다. 그러나 실제 장비에서는 하부 척에서 높은 열이 프로브 카드로 전달되어, 프로브 카드의 열변형을 초래하게 된다. 프로브 카드의 수직방향 열변형은 핀의 접촉관련 문제를 야기할 것이고, 수평방향의 열변형은 x-y 방향으로의 위치 오차를 만들 것이다. 따라서 프로브 카드는 허용 범위내의 열변형이 이루어지도록 재질과 구조를 갖게 설계되어야 한다. 본 연구에서는 유한요소 해석프로그램인 ANSYS$^{TM}$를 이용하여 프로브 카드의 실제 부하 조건들을 적용한 열전달 해석을 수행하였다. 정상상태 온도 구배에 대해 열변형이 계산되었으며, 최종적으로 적절한 설계변수들을 조정하여 열변형이 최소화 될 수 있는 새로운 구조를 제안하였다.

• 한국재료학회지
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• 제29권9호
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• pp.547-552
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• 2019

In the present study, the thermal conductivity of a silicon nitride($Si_3N_4$) thin-film is evaluated using the dual-wavelength pump-probe technique. A 100-nm thick $Si_3N_4$ film is deposited on a silicon (100) wafer using the radio frequency plasma enhanced chemical vapor deposition technique and film structural characteristics are observed using the X-ray reflectivity technique. The film's thermal conductivity is measured using a pump-probe setup powered by a femtosecond laser system of which pump-beam wavelength is frequency-doubled using a beta barium borate crystal. A multilayer transient heat conduction equation is numerically solved to quantify the film property. A finite difference method based on the Crank-Nicolson scheme is employed for the computation so that the experimental data can be curve-fitted. Results show that the thermal conductivity value of the film is lower than that of its bulk status by an order of magnitude. This investigation offers an effective way to evaluate thermophysical properties of nanoscale ceramic and dielectric materials with high temporal and spatial resolutions.

• 설비공학논문집
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• 제23권5호
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• pp.356-364
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• 2011

Storage and transfer heat in soils is governed by the soil thermal properties and these properties are therefore needed in many engineering applications, including horizontal ground heat exchanger for ground-coupled heat pumps. This paper presents the evaluation results of the thermal diffusivity of soils (silica, quartzite, limestone, sandstone, granite, and two masonry soils used for the trench backfilling materials of the horizontal ground heat exchanger. To assess this thermal property, we (i) measure the soil thermal conductivities using single-probe method and (ii) use the de Vries method of summing the heat capacities of the soil constituents. The results show that the thermal diffusivity tends to increase as dry soil begins to wet, but it approaches a constant value or even decreases as the soil continues to wet. Combined algorithm with and improved model for the thermal conductivity of soils and the constituent equation provides accurate estimates of the soil thermal diffusivity.

• 한국자동차공학회논문집
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• 제6권6호
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• pp.267-275
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• 1998

In this study, the instantaneous heat flux measurement probe and the linkage system for the measurement of the instantaneous temperature and heat flux of the DI mono cylinder diesel engine were developed, and these were proved to have a good reliability and sensibility. A 3-D FEM model which consist of full piston to accommodate the eccentric bowl in the piston head, was applied for the analysis of the thermal stress and the temperature distribution. The mean heat flux on the piston head was used as boundary condition for the analysis of piston. The analysis showed that thermal stress concentrate on the bowl and inner surface of pin hall.

• International Journal of Precision Engineering and Manufacturing
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• 제1권1호
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• pp.111-117
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• 2000

One of the major limitations of productivity and quality in metal cutting is the machining accuracy of machine tools. The machining accuracy is affected by geometric errors, thermally-induced errors, and the deterioration of the machine tools. Geometric and thermal errors of machine tools should be measured and compensated to manufacture high quality products. In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models the thermal errors for error analysis and develops an on-the-machine measurement system by which the volumetric errors are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses and a designed spherical ball artifact (SBA). Experiments show that the developed system provides a high measuring accuracy, with repeatability of $\pm$2$\mu\textrm{m}$ in X, Y and Z directions. It is believed that the developed measurement system can be also applied to the machine tools with CNC controller. In addition, machining accuracy and product quality can be also improved by using the developed measurement system when the spherical ball artifact is mounted on a modular fixture.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 동계학술발표대회 논문집
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• pp.39-44
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• 2008

The heat exchange between the Borehole Heat Exchanger(BHE) and the surrounding ground depends directly on ground thermal conductivity k at the certain site. The k is thus a key parameter in designing BHE and coupled geothermal heat pump systems. Currently, although a thermal hydraulic response test(TRT) is mostly used in practice, the thermal hydraulic TRT needs additional power and is generally time-consuming. A new, simple wireless P/T probe for a hi-speed k determination was introduced in this paper. This technique using a wireless P/T probe is less time-consuming and requires no external source of energy for measurement and predicts local thermal properties by measuring soil temperatures along the depth. Measured temperature data along the depth was analyzed. In order to verify the new technique for the determination of ground thermal conductivity, ground thermal conductivity k that calculated from the measured temperature data using a wireless P/T probe was compared with one obtained from conventional hydraulic TRT. When comparing the average k of two methods, the relative error was approximately 10%. As a result, the electronic TRT can replace the conventional hydraulic TRT method after carrying out the additional research on a lot of sites.

• Journal of Mechanical Science and Technology
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• 제20권3호
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• pp.297-309
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• 2006

This paper deals with a novel structure for single-cell characterization which makes use of bimorph micro thermal actuators combined with electrical sensor device and integrated microfluidic channel. The goal for this device is to capture and characterize individual biocell. Quantitative and qualitative characteristics of bimorph thermal actuator were analyzed with finite element analysis methods. Furthermore, optimization for the dimension of cantilevers and integrated parallel probe systems with microfluidic channels is able to be realized through the virtual simulation for actuation and the practical fabrication of prototype of probes. The experimental value of probe deflection was in accordance with the simulated one.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2000년도 추계학술대회논문집 - 한국공작기계학회
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• pp.449-453
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• 2000

In metal cutting, the machining accuracy is more affected by thermal errors than by geometric errors. This paper models of the thermal errors for error analysis and develops on-the-machine measurement system by which the volumetric error are measured and compensated. The thermal error is modeled by means of angularity errors of a column and thermal drift error of the spindle unit which are measured by the touch probe unit with a star type styluses, a designed spherical ball artifact, and five gap sensors. In order to analyze the thermal characteristics under several operating conditions, experiments performed with the touch probe unit and five gap sensors on the vertical and horizontal machining centers.