• Journal of the Institute of Electronics Engineers of Korea SD
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• v.46 no.4
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• pp.21-27
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• 2009

In this work, Er-silicided SB-SOI nMOSFET and Pt-silicided SB-SOI pMOSFET have been fabricated to investigate the current-voltage characteristics of Schottky barrier SOI nMOS and pMOS at elevated temperature. The dominant current transport mechanism of SB nMOS and pMOS is discussed using the measurement results of the temperature dependence of drain current with gate voltages. It is observed that the drain current increases with the increase of operating temperature at low gate voltage due to the increase of thermal emission and tunneling current. But the drain current is decreased at high gate voltage due to the decrease of the drift current. It is observed that the ON/Off current ratio is decreased due to the increased tunneling current from the drain to channel region although the ON current is increased at elevated temperature. The threshold voltage variation with temperature is smaller and the subthreshold swing is larger in SB-SOI nMOS and pMOS than in SOI devices or in bulk MOSFETs.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.18-22
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• 2008

The pitch and orthogonality of two-dimensional (2-D) gratings were measured using a metrological atomic force microscope (MAFM), and the measurement uncertainty was analyzed. Gratings are typical standard devices for the calibration of precision microscopes, Since the magnification and orthogonality in two perpendicular axes of microscopes can be calibrated simultaneously using 2-D gratings, it is important to certify the pitch and orthogonality of such gratings accurately for nanometrology. In the measurement of 2-D gratings, the MAFM can be used effectively for its nanometric resolution and uncertainty, but a new measurement scheme is required to overcome limitations such as thermal drift and slow scan speed. Two types of 2-D gratings with nominal pitches of 300 and 1000 nm were measured using line scans to determine the pitch measurement in each direction. The expanded uncertainties (k = 2) of the measured pitch values were less than 0.2 and 0.4 nm for each specimen, and the measured orthogonality values were less than $0.09^{\circ}$ and $0.05^{\circ}$, respectively. The experimental results measured using the MAFM and optical diffractometer agreed closely within the expanded uncertainty of the MAFM. We also propose an additional scheme for measuring 2-D gratings to increase the accuracy of calculated peak positions, which will be the subject of future study.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.239-239
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• 2011

최근에 감지막의 pH 감지특성을 평가하기 위해 electrolyte insulator semiconductor (EIS) 구조가 유용하게 이용되고 있다. EIS는 CMOS공정과 호환이 가능하고 구조가 간단하며 pH 변화에 반응속도가 빠르다는 장점을 가지고 있다. EIS 구조를 갖는 pH 센서의 동작 메커니즘은 pH 용액의 수소이온이 감지막의 표면에서 표면전위를 변화시키는 것에 기인한다. pH 감지막으로는 높은 유전율과 안정성이 뛰어난 high-k 물질이 많이 연구되고 있다. 그 중 high-k 물질인 ZrO2은 낮은 열전도도, 산성에서 알칼리성 영역까지의 넓은 화학안정성을 가지며 낮은 열 팽창성, 높은 유전상수 등 우수한 특성을 가지고 있다. 본 실험은 SiO2/ZrO2를 적층한 EIS 소자를 제작하여 열처리에 따른 전기적 특성과 pH 감지 특성을 평가해 보았다. EIS 적층막으로 사용된 SiO2는 실리콘과 high-k 감지막 사이의 계면상태를 양호하게 유지시키기 위한 완충막으로 성장되었다. 후속열처리는 rapid thermal annealing (RTA) 시스템을 이용하여 750$^{\circ}C$, 850$^{\circ}C$, 950$^{\circ}C$로 H2/N2 분위기에서 30초 동안 실시하였다. RTA 열처리 온도가 증가할수록 높은 pH 감지특성이 보였으며 hysteresis 현상과 drift 효과와 같은 non ideal 효과에 강한 immunity가 있는 것을 확인하였다. 결론적으로 SiO2/ZrO2 적층구조를 갖는 EIS는 RTA 950$^{\circ}C$ 열처리를 실시하였을 때 우수한 EIS pH 센서를 제작할 수 있을 것으로 기대된다.

• Journal of Biomedical Engineering Research
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• v.20 no.2
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• pp.205-212
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• 1999

When we want to observe and record a patient's EEG in an operating room, the operation of electrosurgical unit(ESU) causes undesirable artifacts with high frequency and high voltage. These artifacts make the amplifiers of the conventional EEG system saturated and prevent the system from measuring the EEG signal. This paper describes a high-performance bipolar EEG amplifier for a CSA (compressed spectral array ) system with reduced ESU artifacts. The designed EEG amplifier uses a balanced filter to reduce the ESU artifacts, and isolates the power supply and the signal source of the preamplifier from the ground to cut off the current from the ESU to the amplifier ground. To cancel the common mode noise in high frequency, a high CMRR(common mode rejection ratio) diffferential amplifier is used. Since the developed bipolar EEG amplifier shows high gain, low noise, high CMRR, high input impedance, and low thermal drift, it is possible to observe and record more clean EEG signals in spite of ESU operation. Therefore the amplifier may be applicable to a high-fidelity CSA system.

• Journal of Sensor Science and Technology
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• v.22 no.6
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• pp.404-409
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• 2013

We devised calibration procedure for industrial thermometers by a comparison method at the boiling point of nitrogen (${\sim}-196^{\circ}C$). The uncertainty of the calibration was 4 mK (k = 2). As experimentally demonstrated in this work, the effect of the atmospheric pressure on the boiling point of nitrogen can be easily detected by the thermometer. Therefore, when the boiling point of nitrogen is used for calibration of thermometer by comparison, either a reference thermometer must be used to provide the reference temperature or the effect of atmospheric pressure should be carefully considered. The use of a copper block with a large thermal mass soaked into the liquid nitrogen was proven to be more reliable, and the stability of the temperature immersed into the copper block was 1.4 mK. The temperatures at the thermometer wells, evaluated by the crossed-measurement method to compensate for the inaccuracy of the thermometers and the linear drift of the temperature of the copper block, were equivalent within 0.23 mK of standard uncertainty.

• Journal of Broadcast Engineering
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• v.23 no.2
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• pp.274-282
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• 2018

Most occupancy sensors installed in buildings, households and so forth are pyroelectric infra-red (PIR) sensors. One of disadvantages is that PIR sensor can not detect the stationary person due to its functionality of detecting the variation of thermal temperature. In order to overcome this problem, the utilization of camera vision sensors has gained interests, where object tracking is used for detecting the stationary persons. However, the object tracking has an inherent problem such as tracking drift. Therefore, the recognition of humans in static trackers is an important task. In this paper, we propose a CNN-based human recognition to determine whether a static tracker contains humans. Experimental results validated that human and non-humans are classified with accuracy of about 88% and that the proposed method can be incorporated into practical vision occupancy sensors.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.11
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• pp.75-82
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• 2004

A metrological atomic force microscope (M-AFM) was developed fur the length measurements of nanometer range, through the modification of a commercial AFM. To eliminate nonlinearity and crosstalk of the PZT tube scanner of the commercial AFM, a two-axis flexure hinge scanner employing built-in capacitive sensors is used for X-Y motion instead of PZT tube scanner. Then two-dimensional displacement of the scanner is measured using two-axis heterodyne laser interferometer to ensure the meter-traceability. Through the measurements of several specimens, we could verify the elimination of nonlinearity and crosstalk. The uncertainty of length measurements was estimated according to the Guide to the Expression of Uncertainty in Measurement. Among several sources of uncertainty, the primary one is the drift of laser interferometer output, which occurs mainly from the variation of refractive index of air and the thermal stability. The Abbe error, which is proportional to the measured length, is another primary uncertainty source coming from the parasitic motion of the scanner. The expanded uncertainty (k =2) of length measurements using the M-AFM is √(4.26)$^2$+(2.84${\times}$10$^{-4}$ ${\times}$L)$^2$(nm), where f is the measured length in nm. We also measured the pitch of one-dimensional grating and compared the results with those obtained by optical diffractometry. The relative difference between these results is less than 0.01 %.

• Korean Journal of Optics and Photonics
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• v.29 no.3
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• pp.110-118
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• 2018

We have designed a mid-infrared optical system for an airborne electro-optical targeting system. The mid-IR optical system is a dual-field-of-view (FOV) optics for an airborne electro-optical targeting system. The optics consists of a beam-reducer, a zoom lens group, a relay lens group, a cold stop conjugation optics, and an IR detector. The IR detector is an f/5.3 cooled detector with a resolution of $1280{\times}1024$ square pixels, with a pixel size of $15{\times}15{\mu}m$. The optics provides two stepwise FOVs ($1.50^{\circ}{\times}1.20^{\circ}$ and $5.40^{\circ}{\times}4.23^{\circ}$) by the insertion of two lenses into the zoom lens group. The IR optical system was designed in such a way that the working f-number (f/5.3) of the cold stop internally provided by the IR detector is maintained over the entire FOV when changing the zoom. We performed two analyses to investigate thermal effects on the image quality: athermalization analysis and Narcissus analysis. Athermalization analysis investigated the image focus shift and residual high-order wavefront aberrations as the working temperature changes from $-55^{\circ}C$ to $50^{\circ}C$. We first identified the best compensator for the thermal focus drift, using the Zernike polynomial decomposition method. With the selected compensator, the optics was shown to maintain the on-axis MTF at the Nyquist frequency of the detector over 10%, throughout the temperature range. Narcissus analysis investigated the existence of the thermal ghost images of the cold detector formed by the optics itself, which is quantified by the Narcissus Induced Temperature Difference (NITD). The reported design was shown to have an NITD of less than $1.5^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.73-75
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• 2013

Atomic force microscopy (AFM) [1] can now not only image individual atoms but also construct atom letters using atom manipulation method [2]. Therefore, the AFM is the second generation atomic tool following the well-known scanning tunneling microscopy (STM). The AFM, however, has the advantages that it can image even insulating surfaces with atomic resolution and also measure the atomic force itself between the tip-apex outermost atom and the sample surface atom. Noting these advantages, we have been developing a novel bottom-up nanostructuring system, as shown in Fig. 1, based on the AFM. It can identify chemical species of individual atoms [3] and then manipulate selected atom species to the designed site one-by-one [2] to assemble complex nanostructures consisted of many atom species at room temperature (RT). In this invited talk, we will introduce our results toward atom-by-atom assembly of composite nanomaterials based on the AFM at RT. To identify chemical species, we developed the site-specific force spectroscopy at RT by compensating the thermal drift using the atom tracking. By converting the precise site-specific frequency shift curves, we obtained short-range force curves of selected Sn and Si atoms as shown in Fig. 2(a) and 2(b) [4]. Then using the atom-by-atom force spectroscopy at RT, we succeeded in chemical identification of intermixed three atom species in Pb/Sn/Si(111)-(${\surd}3$'${\surd}3$) surface as shown in Fig. 2(c) [3]. To create composite nanostructures, we found the lateral atom interchange phenomenon at RT, which enables us to exchange embedded heterogeneous atoms [2]. By combining this phenomenon with the modified vector scan, we constructed the atom letters "Sn" consisted of substitutional Sn adatoms embedded in Ge adatoms at RT as shown in Fig. 3(a)~(f) [2]. Besides, we found another kind of atom interchange phenomenon at RT that is the vertical atom interchange phenomenon, which directly interchanges the surface selected Sn atoms with the tip apex Si atoms [5]. This method is an advanced interchangeable single atom pen at RT. Then using this method, we created the atom letters "Si" consisted of substituted Si adatoms embedded in Sn adatoms at RT as shown in Fig. 4(a)~(f) [5]. In addition to the above results, we will introduce the simultaneous evaluation of the force and current at the atomic scale using the combined AFM/STM at RT.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.18 no.2
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• pp.166-179
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• 1985

The seasonal distribution and migration of flying squid, Ommastrephes bartrami (LeSueur), in the North Pacific were studied by means of mantle length, surface temperature, and catch and effort data of the Korean drift gillnet fishery from 1980 to 1983. The water temperature for the best fishing ranged from $15^{\circ}\;to\;16^{\circ}C$ in May through July and from $13^{\circ}\;to\;18^{\circ}C$ in August through January. High densities of flying squid were found in the thermal fronts with $18^{\circ}C$ isotherm in August and with $15^{\circ}C$ isotherm in September. The densities of flying squid were higher in the western region than in the eastern region in the North Pacific. The high densities of flying squid in the northwestern Pacific were attributed to the high gradients of oceanographic properties in the region. Migration models for flying squid were hypothesized based on the monthly distributions of catch per unit net, mantle length compositions by statistical blocks, and the hydrographic features of the North Pacific. The large flying squid moved to the northern region and to the central Pacific region earlier than the small sized group in the northward migration period (from June to August). Flying squid begin the reverse southward migration from the Subarctic Frontal Zone in autumn with onset of cooling and the development of Oyashio Current. The large sized group starts their southward return migration from more northern waters than the small sized group but the former moves past the later ana reaches the spawing ground first.