• Proceedings of the KSME Conference
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• 2003.11a
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• pp.278-283
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• 2003

Analysis has been carried out to investigate the temperature variation and the uniformity of the temperature distribution of the glass panel by infrared radiant heating. Halogen lamps are used to heat the panel and located near the top and bottom of the rectangular chamber. The thermal energy is transfered only by radiation and the radiation exchange occurs only on the solid surfaces and is considered by using the view factor. The results show that the uniformity of the temperature distribution of the panel is improved but the time for heating increases as the wall reflectivity is large. The temperature difference reaches a maximum in the early stage of the heating process and then decreases until it reaches the uniform steady-state value.

• Journal of the Korean Society of Combustion
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• v.15 no.2
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• pp.27-33
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• 2010

Recently, much attention has been paid to utilizing highly preheated air up to $1,000^{\circ}C$ through waste gas in industrial furnaces. The regenerative burner technology has shown to provide significant reduction in energy consumption (up to 60%), downsizing of the equipment (about 30%) and lower emissions (about 30%) while maintaining high thermal performance of the system since 2000. The object of this study is to develop the flameless regenerative burner for industrial furnaces based on the FLOX(Flameless Oxidation) principle and it has been designed and manufactured as pilot scale. Performance tests are experimentally done and their results are discussed. They showed 1) a very good uniformity in temperature distribution, 2) about 100 ppm in NOx at the temperature $1,300^{\circ}C$, 3) about 95% in temperature efficiency. Besides, the regenerative burner has advantage in easy maintenance and high usage rate of regenerator due to the separate and portable type of heat exchanger.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.172-176
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• 1996

The rapid structural change of ULSI chip includes minimum features, multilevel interconnection and large diameter wafers. Demands for the advanced chip structure necessitates the development of enhanced deposition, etching and planarization techniques. Planarization refers to a process that make rugged surfaces flat and uniform. One of the emerging technologies for planarization is chemical mechanical polishing(CMP). Chemical and mechanical removal actions occur during CMP, and both appear to be closely interrelated. The purpose of this study is the optimal application of the slurry to the various types of device materials during CMP. We investigates the effect of slurry on CMP characteristics for thermal oxide and sputtered Al blanket wafers. Results from the polishing rate and the uniformity of residual film include mechanical and chemical reactions between several set of slurry and work material.

• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.161-168
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• 2014

A real-time monitoring of immersed antenna type inductively coupled plasma (ICP) was done with a homemade 2 dimensional voltage probe array to check the uniformity of the plasma. Measured voltage values with a high impedance voltmeter are close to the floating potential of the plasma. As the substrate carrier was moving into a magnetron sputtering plasma diffusive from a $125mm{\times}625mm$ size cathode, measured results showed reliably separation of plasma into the upper and lower empty space over the carrier. Infra red thermal imaging camera was used to observe the cross corner effect in situ without eroding a target to the end of the usage. 3 dimensional particle trace model was used to analyze the magnetron discharge's behavior.

• 한국전산유체공학회:학술대회논문집
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• 2007.04a
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• pp.153-158
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• 2007

Since the introduction of Nanoimprint in the mid-1990s, Nanoimprint lithography, a low-cost, non-convential method, has been the dominant lithography technology that guarantees high-throughput patterning of nanostructures. Based on the mechanical embossing mechanism, Nanoimprint lithography creates the nanopatterns on the polymer material cast on the substrate. In essence, the process needs nanofabrication equipment for printing with the adequate control of temperature, pressure and control of parallels of the stamp and substrate. This article introduce the possibility and reality of the thermal control on the hot plate using a CFD code. Numerical computation has been conducted for assessing the feasibility of a hot plate($120{\times}120\;mm2$). PID control is adopted to ensure high temperature uniformity in several zones. Parallel experiments have also been performed for verifying thermal performance. Not only show the results the optimum number of thermocouples related to controllers but also suggest that the thermal simulation using a CFD code would be an alternative method to design and develop the thermal control equipment in the financial aspect.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.11
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• pp.881-887
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• 2014

This paper presents numerical study on flow and heat transfer characteristics in micro-gap plate heat exchanger. In particular, we investigate the effect of flow inertia on the flow distribution from single main channel to multiple parallel micro-gaps. The flow regime of the main channel is varied from laminar regime (Reynolds number of 100) to turbulent regime (Reynolds number of 10000) by changing the flow rate, and non-uniformity of the flow distribution and temperature field is evaluated quantitatively based on the standard deviation. The flow distribution is found to be significantly affected by not only the header design but also the flow rate of the main channel. It is also observed that the non-uniformity of the temperature field has its maximum at the intermediate flow regime.

• ETRI Journal
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• v.26 no.3
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• pp.252-256
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• 2004

We formed silver nanocrystallites by the thermal decomposition of a $Ag^{+1}$-oleate complex, which was prepared by a reaction with $AgNO_{3}$ and sodium oleate in a water solution. The resulting monodispersed silver nanocrystallites were produced by controlling the temperature (290$^{\circ}$C). Transmission electron microscopic (TEM) images of the particles showed a 2-dimensional assembly of the particles with a diameter of $9.5{\pm}0.7nm$, demonstrating the uniformity of these nanocrystallites. An energy-dispersive X-ray (EDX) spectrum and X-ray diffraction (XRD) peaks of the nanocrystallites showed the highly crystalline nature of the silver structure. We analyzed the decomposition of the $Ag^{+1}$-oleate complex using a Thermo Gravimetric Analyzer (TGA) and observed the crystallization process using XRD.

• Journal of Information Display
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• v.10 no.2
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• pp.49-53
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• 2009

In this study, a very small LED packaging lead frame with a low thermal resistance was developed. The cost of the package process was reduced by the use of many small LED lamps, which increased the light emission efficiency. Compared to the large lead frame lamp, however, the optical property of the small LED packaging lead frame lamp was not sufficiently improved because its reflection structure was changed and its reflection area was reduced. The luminous efficiency of the LED lamp reaches 58 lm/W at the current density of 0.16 A/$cm^2$. Using the LED lamps, 46-inch LCD BLU was manufactured. The BLU-made LED lamps have a low power consumption of 146 W and have a slim (10-mm-thick) BLU, keeping good uniformity in terms of brightness, and maintaining good thermal properties.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.12
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• pp.1784-1792
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• 2001

Numerical analysis on a parallel flow heat exchanger(PFHE) is performed using 2 dimensional turbulent porous modeling. This modeling can consider three-dimensional configuration of passage (flat tube with micro-channels), and the stability and accuracy of numerical results are improved. The geometrical parameters(e.g., the position of separators, inlet/outlet, and porosity of passages of a PFHE) are varied in order to examine the flow and thermal characteristics and flow distribution of the single phase multiple passages system. The flow non-uniformities along the paths of the PFHE are observed to evaluate the thermal performance of the heat exchanger. The location of inlet affects the heat transfer, and the location of outlet affects the pressure drop. The porosity with the optimum thermal performance is around 0.53.

• Journal of the Korean Vacuum Society
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• v.1 no.1
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• pp.168-175
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• 1992

The surface and interface morphology as well as the sheet resistance, and uniformity of TiSiz film are significantly improved and the lateral titanium silicide growth over the oxide spacer is minimized by the use of ion beam mixing and rapid thermal annealing in nitrogen ambient. In addition, TiSiz film formations on TiISi and TiISiOz system were also studied.