• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.78-78
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• 2013

Recently, many platinoid metals like platinum and ruthenium have been used as an electrode of microelectronic devices because of their low resistivity and high work-function. However the material cost of Ru is very expensive and it usually takes long initial nucleation time on SiO2 during chemical deposition. Therefore many researchers have focused on how to enhance the initial growth rate on SiO2 surface. There are two methods to deposit Ru film with atomic layer deposition (ALD); the one is thermal ALD using dilute oxygen gas as a reactant, and the other is plasma enhanced ALD (PEALD) using NH3 plasma as a reactant. Generally, the film roughness of Ru film deposited by PEALD is smoother than that deposited by thermal ALD. However, the plasma is not favorable in the application of high aspect ratio structure. In this study, we used a bis(ethylcyclopentadienyl)ruthenium [Ru(EtCp)2] as a metal organic precursor for both thermal and plasma enhanced ALDs. In order to reduce initial nucleation time, we use several methods such as Ar plasma pre-treatment for PEALD and usage of sacrificial RuO2 under layer for thermal ALD. In case of PEALD, some of surface hydroxyls were removed from SiO2 substrate during the Ar plasma treatment. And relatively high surface nitrogen concentration after first NH3 plasma exposure step in ALD process was observed with in-situ Auger electron spectroscopy (AES). This means that surface amine filled the hydroxyl removed sites by the NH3 plasma. Surface amine played a role as a reduction site but not a nucleation site. Therefore, the precursor reduction was enhanced but the adhesion property was degraded. In case of thermal ALD, a Ru film was deposited from Ru precursors on the surface of RuO2 and the RuO2 film was reduced from RuO2/SiO2 interface to Ru during the deposition. The reduction process was controlled by oxygen partial pressure in ambient. Under high oxygen partial pressure, RuO2 was deposited on RuO2/SiO2, and under medium oxygen partial pressure, RuO2 was partially reduced and oxygen concentration in RuO2 film was decreased. Under low oxygen partial pressure, finally RuO2 was disappeared and about 3% of oxygen was remained. Usually rough surface was observed with longer initial nucleation time. However, the Ru deposited with reduction of RuO2 exhibits smooth surface and was deposited quickly because the sacrificial RuO2 has no initial nucleation time on SiO2 and played a role as a buffer layer between Ru and SiO2.

• 한국재료학회지
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• 제24권7호
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• pp.388-392
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• 2014

$Cu_2O$ nanowires were synthesized at large scale on copper plate by thermal oxidation in air. The effect of oxidation time and temperature on the morphology of the nanowires was examined. The oxidation time had no effect on the diameter of the nanowires, while it had a great effect on the density and the length of the nanowires. The density and the length of the nanowires increased, and then decreased, with increasing oxidation time. The oxidation temperature had a tremendous effect on the size-distribution as well as the density of the nanowires. When the oxidation temperature was $700^{\circ}C$, uniform size-distribution and high density of the nanowires was achieved. At lower and higher temperatures, the density of the nanowires was lower, and they displayed a broader size-distribution. It is suggested that the $Cu_2O$ nanowires were grown via a vapor-solid mechanism because no catalyst particles were observed at the tips of the nanowires.

• Nuclear Engineering and Technology
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• 제55권2호
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• pp.493-505
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• 2023

Comprehensive condition monitoring of large industry systems such as nuclear power plants (NPPs) is essential for safety and maintenance. In this study, we developed novel system-scale diagnostic technology based on deep-learning and IR thermography that can efficiently and cost-effectively classify system conditions using compact Raspberry Pi and IR sensors. This diagnostic technology can identify the presence of an abnormality or accident in whole system, and when an accident occurs, the type of accident and the location of the abnormality can be identified in real-time. For technology development, the experiment for the thermal image measurement and performance validation of major components at each accident condition of NPPs was conducted using a thermal-hydraulic integral effect test facility with compact infrared sensor modules. These thermal images were used for training of deep-learning model, convolutional neural networks (CNN), which is effective for image processing. As a result, a proposed novel diagnostic was developed that can perform diagnosis of components, whole system and accident classification using thermal images. The optimal model was derived based on the modern CNN model and performed prompt and accurate condition monitoring of component and whole system diagnosis, and accident classification. This diagnostic technology is expected to be applied to comprehensive condition monitoring of nuclear power plants for safety.

• Steel and Composite Structures
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• 제44권4호
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• pp.557-567
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• 2022

Nonlinear free vibration analysis of a functionally graded beam resting on the nonlinear viscoelastic foundation is studied with uniform temperature rising. The non-linear strain-displacement relationship is considered in the finite strain theory. The governing nonlinear dynamic equation is derived based on the finite strain theory with using of Hamilton's principle. The Galerkin's decomposition technique is utilized to discretize the governing nonlinear partial differential equation to nonlinear ordinary differential equation and then is solved by using of multiple time scale method. The influences of temperature rising, material distribution parameter, nonlinear viscoelastic foundation parameters on the nonlinear free response and phase trajectory are investigated. In this paper, it is aimed that a contribution to the literature for nonlinear thermal vibration solutions of a functionally graded beam resting on the nonlinear viscoelastic foundation by using of multiple time scale method.

• Nuclear Engineering and Technology
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• 제56권3호
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• pp.1091-1099
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• 2024

Fluoride-salt-cooled High-temperature Reactor (FHR) is a promising nuclear reactor technology. Among many challenges presented by the molten fluoride salts is the corrosion of salt-facing structural components. Higher moisture contents, in the FLiNaK (LiF-NaF-KF, 46.5-11.5-42 mol%) salt, aggravate intergranular corrosion and pitting for the given alloys. Therefore, several thermal dehydration tests of FLiNaK salt were performed with a batch size suitable for thermal-hydraulic experiments. Thermogravimetric Analysis (TGA) was performed for the three constituent fluoride salts individually. Preliminary thermal dehydration plans were then proposed for NaF and KF salts based on the TGA curves. However, the dehydration process may not be required for LiF since its low mass loss (<1.3 wt%). To evaluate the performance of these thermal dehydration plans, a batch-scale salt dehydration test facility was designed and constructed. The preliminary thermal dehydration plans were tested by varying the heating rates, target temperature, and holding time. The sample mass loss data showed that the high temperatures (>500 ℃) were necessary to remove a significant amount of moisture (>1 wt%) from NaF salt, while relatively low temperatures (around 300 ℃) with a long holding time (>10 h) were sufficient to remove most of the moisture from KF salt.

• International Journal of Air-Conditioning and Refrigeration
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• 제16권4호
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• pp.109-116
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• 2008

Ground temperature restoration characteristics are the crucial factors to evaluate whether a ground source heat pump system can keep long time steady operation. They are mainly dependent on soil thermal properties, layout of pile group, operation/shutoff ratio, cooling/heating load, thermal imbalance ratio and so on. On the one hand, several types of vertical pile foundation heat exchangers are intercompared to determine the most efficient one by performance test and numerical method. On the other hand, according to the layout of pile group of a practical engineering and running conditions of a GSHP system in Shanghai, the temperature distribution during a period of five years is numerically studied. The numerical results are analyzed and are used to provide some guidance for the design of large-scale GSHP system.

• 제어로봇시스템학회논문지
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• 제5권4호
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• pp.403-410
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• 1999

In this study, a parallel algorithm has been developed that can quickly solve the optiaml control problem of large-scale dynamic systems. The algorithm adopts the sequential quadratic programming methods and achieves domain decomposition-type parallelism in computing sensitivities for search direction computation. A silicon wafer thermal process problem has been solved using the algorithm, and a parallel efficiency of 45% has been achieved with 16 processors. Practical methods have also been investigated in this study as a way to further speed up the computation time.

• 대한기계학회논문집B
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• 제22권12호
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• pp.1774-1783
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• 1998

The transition from steady laminar to chaotic convection in a glass melting furnace specified by upper surface temperature distribution has been studied by the direct numerical analysis of the two and three-dimensional time dependent Navier-Stokes equations. The thermal instability of convection roll may take place when modified Rayleigh number($Ra_m$) is larger than $9.71{\times}10^4$. It is shown that the basic flows in a glass melting furnace are steady laminar, unsteady periodic, quasi-periodic or chaotic flow. The dimensionless time scale of unsteady period is about the viscous diffusion time, ${\tau}_d=H^2/{\nu}_0$. Through primary and secondary instability analyses the fundamental unsteady feature in a glass melting furnace is well defined as the unsteady periodic or weak chaotic flow.

• 한국구조물진단유지관리공학회 논문집
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• 제16권4호
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• pp.99-106
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• 2012

본 연구는 콘크리트의 열전도 역문제의 해를 통해 온도의존적 열전도도를 추정하는 방법을 제안하였다. 온도의존적 열전도도의 추정은 실물모형 화재실험에서 측정된 하이브리드 섬유보강 쉴드터널 라이닝의 시간 및 깊이별 온도분포 데이터를 이용하였다. 추정된 온도의존적 열전도도는 실험시간이 짧은 시점에서는 상온 영역에서 열전도도의 급격한 감소가 나타나는 것으로 추정되었다. 반면 깊이 25mm 위치에서 최대온도가 측정된 실험시간대에서는 온도에 따른 콘크리트의 특성변화 및 강섬유 혼입 효과를 반영하고 있다. 따라서 온도의존적 열전도도 추정 시 가열면 부근에서 최대온도가 측정된 시점을 기준으로 실험시간을 결정해야 한다. 추정된 열전도도는 유사배합을 사용한 기존연구와 유사한 결과를 나타내고 있다.

• Advances in aircraft and spacecraft science
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• 제5권1호
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• pp.141-164
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• 2018

In this paper, the thermal effect on buckling and free vibration characteristics of functionally graded (FG) size-dependent Timoshenko nanobeams subjected to an in-plane thermal loading are investigated by presenting a Navier type solution for the first time. Material properties of FG nanobeam are supposed to vary continuously along the thickness according to the power-law form and the material properties are assumed to be temperature-dependent. The small scale effect is taken into consideration based on nonlocal elasticity theory of Eringen. The nonlocal equations of motion are derived based on Timoshenko beam theory through Hamilton's principle and they are solved applying analytical solution. According to the numerical results, it is revealed that the proposed modeling can provide accurate frequency results of the FG nanobeams as compared to some cases in the literature. The detailed mathematical derivations are presented and numerical investigations are performed while the emphasis is placed on investigating the effect of the several parameters such as thermal effect, material distribution profile, small scale effects, aspect ratio and mode number on the critical buckling temperature and normalized natural frequencies of the temperature-dependent FG nanobeams in detail. It is explicitly shown that the thermal buckling and vibration behaviour of a FG nanobeams is significantly influenced by these effects. Numerical results are presented to serve as benchmarks for future analyses of FG nanobeams.