• Journal of Sensor Science and Technology
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• v.5 no.6
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• pp.51-59
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• 1996

A flow sensor has been fabricated by preparing thin film Pt-heater and Bi-Sb thermocouples array on 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ dielectric diaphragm which has low thermal conductivity and balanced stress with silicon substrate for the purpose of improving the thermal isolation between heater and silicon substrate. Pt-heater showed nonlinear I-V characteristics due to the thermal isolation effect of the diaphragm. Its temperature coefficient of resistance was about $0.00378\;/^{\circ}C$ and Seebeck coefficient of Bi-Sb thermocouple was about $97\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and flow sensitivity increased as heater voltage increased or as the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_{2}$-flow sensitivity and thermal response time of the sensor were about $1.27\;mV{\cdot}(sccm)^{-1/2}$ and 0.13 sec., respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.171-172
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• 2011

• Journal of the Korean Society for Precision Engineering
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• v.31 no.7
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• pp.569-576
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• 2014

Sensor node means a device to include sensor, amplifier, and data acquisition (DAQ) equipment. The sensor converts physical signals to electric signals and weak signals from the sensor can be amplified through the amplifier. DAQ equipment converts analog signal to digital signal and collects converted digital signal. Since the sensor node is sensitive to the environment so that selection of mounting position and fixture design of sensor are applied differently depending on the characteristics of a target. This study is about designing and manufacturing sensor node to be used in a machine tool. The environment of machine tool is very severe due to noise, temperature fluctuation, and dust, etc. Hence, the sensor and amplifier must be designed and manufactured by considering the environmental issues. The designed and manufactured sensor node was tested for the reliability and effectiveness of the developed sensor nodes in the study.

• Journal of Sensor Science and Technology
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• v.23 no.4
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• pp.234-237
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• 2014

In this paper, a copper foil-thick grapheme (thin graphite sheet)-copper foil structure is reported to achieve mechanically strong and high thermal conductive layer suitable for heat spreading components. Since graphene provides much higher thermal conductivity than copper, thick graphene embedded copper layer can achieve higher effective thermal conductivity which is proportional to graphene/copper thickness ratio. Since copper is nonreactive with carbon material which is graphene, chromium is used as adhesion layer to achieve copper-thick graphene-copper bonding for graphene embedded copper layer. Both sides of thick graphene were coated with chromium as an adhesion layer followed by copper by sputtering. The copper foil was bonded to sputtered copper layer on thick graphene. Angstrom's method was used to measure the thermal conductivity of fabricated copper-thick graphene-copper structure. The thermal conductivity of the copper-thick graphene-copper structures is measured as $686W/m{\cdot}K$ which is 1.6 times higher than thermal conductivity of pure copper.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.2
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• pp.113-120
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• 2011

A technique for measuring the thermal diffusivity of nanofluids is proposed in this study. In theory, it has been well known that the transient hot-wire method can be used to measure the thermal conductivity and diffusivity of fluids simultaneously. However, when traditional methods were employed, the accuracy of the calculated thermal conductivity was considerably higher than that of diffusivity. The proposed method has two advantages for practical use: it only needs a simple data-conversion process for calculating the diffusivity, and it can skip the tedious calibration process involved in the case of a wire sensor. A validation experiment for the new system has been performed with the basic fluids, and the comparison experiment to compare the change in diffusivity of the base oil and the change in diffusivity of the nano oil has been carried out. It is expected that the present system will provide numerous methods for investigating the variation in the thermal properties other than thermal conductivity.

• Journal of Environmental Impact Assessment
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• v.24 no.4
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• pp.367-374
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• 2015

To examine the effect of thermal discharge from nuclear power plants, Sea Surface Temperature (SST) is one of the most important variables measured by satellite remote sensing. However, the study was not much comparison of field data and satellite SST from operational Landsat 8 Thermal Infrared Sensor(TIRS) and Landsat 7 ETM+. The Landsat 8 TIRS have 2 spilt Thermal Infrared channels but ETM+ uses one channel for extracting of SST. In spite of that this research carried out that Landsat 7 ETM+ have more profitable for correction of SST than Landsat 8 TIRS. The used 15 Landsat 7 and 8 Thermal Infrared data of path/row 114-36 were processed by SST algorithm of ENVI and IDL. The in-situ SST data from KHOA(Korea Hydrographic and Oceanographic Administration) compared with satellite SST and the accuracy of extracted SST were assessed by each field sites in-situ point data with time series satellite SST.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.6 s.249
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• pp.531-537
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• 2006

A lever type $NO_2$ micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro heater was built on the gas sensor. The sensing material laid on the heater and electrodes and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor to a target temperature was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power of micro heater to heat up the sensing material to the target temperature showed a good agreement with the measured data. The design of micro gas sensor could be modified to show more uniform temperature distribution and to consume less electric power by optimizing the layout of micro heater and electrodes.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.5
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• pp.278-285
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• 2006

A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electrodes, and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power to heat up th sensing material showed a good agreement with the measured data. The design of micro gas sensor could be modified to increase the temperature uniformity and to decrease the electric power consumption by optimizing the layout of micro hotplate and electrodes.

• Progress in Superconductivity and Cryogenics
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• v.14 no.4
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• pp.46-49
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• 2012

The selection of the temperature sensor in the cryogenic system depends on the temperature range, shape and accuracy. The accuracy of the temperature sensor is essential to improve the reliability of experiment. We have developed the variable temperature cryostat using a two-stage cryocooler. In order to reduce heat load, thermal shield is installed at the first stage with MLI (Multiple layer insulation). We have also developed the sensor holder calibrating more than twenty sensors at the same time for saving time and money. The system can calibrate sensor at variable temperature by controlling electric heater. In this paper, we present design and fabrication of variable temperature cryostat and representative result of Cernox sensor calibration.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.6
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• pp.571-576
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• 2015

Temperature characteristics of supply oil in an ultra-precision hydrostatic table are largely influenced by parameter setting in an oil cooler such as the location of reference sensor and cooling temperature. In this paper, influences of the parameter setting on the temperature variation in the hydrostatic table are experimentally analyzed to suggest the guidelines for practical application. In case of using temperature of inlet oil as a reference sensor in the oil cooler, temperature rise of the supply oil is smaller and thermal settling time is faster than that of using temperature of outlet oil as a reference sensor. The experimental results also show that temperatures of table, rail and return oil can be made almost same, and thermal settling time can be decreased by setting cooling temperature in the oil cooler to be lower than atmospheric temperature.