• 반도체디스플레이기술학회지
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• 제12권2호
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• pp.93-98
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• 2013

Nanoimprint lithography (NIL) is a next generation technology for fabrication of micrometer and nanometer scale patterns. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. To successfully imprint a nanosized pattern with the thermal NIL, the process conditions such as temperature and pressure should be appropriately selected. This starts with a clear understanding of polymer material behavior during the thermal NIL process. In this paper, a filling process of the polymer resist into nanometer scale cavities during the thermal NIL at the temperature range, where the polymer resist shows the viscoelastic behaviors with consideration of stress relaxation effect of the polymer. In the simulation, the filling process and the residual layer formation are numerically investigated. And the effects of pressure and temperature on NIL process, specially the residual layer formation are discussed.

• Geomechanics and Engineering
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• 제36권2호
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• pp.99-109
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• 2024

Studying the dynamic behavior of axially moving cylindrical shells in hygro-thermal environments has important theoretical and engineering value for aircraft design. Therefore, in this paper, considering hygro-thermal effect, the nonlinear forced vibration of an axially moving cylindrical shell made of functionally graded materials (FGM) is studied. It is assumed that the material properties vary continuously along the thickness and contain pores. The Donnell thin shell theory is used to derive the motion equations of FGM cylindrical shells with hygro-thermal loads. Under the four sides clamped (CCCC) boundary conditions, the Gallekin method and multi-scale method are used for nonlinear analysis. The effects of power law index, porosity coefficient, temperature rise, moisture concentration, axial velocity, prestress, damping and external excitation amplitude on nonlinear forced vibration are explored through parametric research. It can be found that, the changes in temperature and humidity have a significant effect. Increasing in temperature and humidity will cause the resonance position to shift to the left and increase the resonance amplitude.

• 대한조선학회논문집
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• 제60권4호
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• pp.222-230
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• 2023

In the present work, the scale effect on the Boil-Off Rate (BOR) was investigated based on an analytical method to systematically evaluate the thermal performance of a Liquefied Natural Gas (LNG) Cargo Containment System (CCS). A two-dimensional thermal resistance network model was developed to accurately estimate the heat ingress into the CCS from the outside. The analysis was performed for the KC-1 LNG membrane tank under the IGC and USCG design conditions. The ballast compartment of both the LNG tank and cofferdam was divided into six sections and a thermal resistance network model was made for each section. To check the validity of the developed model, the analysis results were compared with those from existing literature. It was shown that the BOR values under the IGC and USCG design conditions were agreed well with previous numerical results with a maximum error of 1.03% and 0.60%, respectively. A SDR, the scale factor of the LNG CCS was introduced and the BOR, air temperature of the ballast compartment, and the surface temperature of the inner hull were obtained to examine the influence of the SDR on the thermal performance. Finally, a correlation for the BOR was proposed, which could be expressed as a simple formula inversely proportional to the SDR. The proposed correlation could be utilized for predicting the BOR of a full-scale LNG tank based on the BOR measurement data of lab-scale model tanks.

• 대한기계학회논문집
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• 제7권4호
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• pp.451-460
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• 1983

Computational four-equation turbulence model is developed and is applied to predict twodimensional unsteady thermal surface discharge into a reservoir. Turbulent stresses and heat fluxes in the momentum and energy equations are determined from transport equations for the turbulent kinetic energy (R), isotropic rate of kinetic energy dissipation (.epsilon.), mean square temperature variance (theta. over bar $^{2}$), and rate of destruction of the temperature variance (.epsilon. $_{\theta}$). Computational results by four-equation model are favorably compared with those obtained by an extended two-equation model. Added advantage of the four-equation model is that it yields quantitative information about the ratio between the velocity time scale and the thermal time scale and more detailed information about turbulent structure. Predicted time scale ratio is within experimental observations by others. Although the mean velocity and temperature fields are similarly predicted by both models, it is found that the four-equation model is preferably candidate for prediction of highly buoyant turbulent flows.

• JSTS:Journal of Semiconductor Technology and Science
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• 제10권4호
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• pp.260-264
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• 2010

In this paper, Ni silicide is formed on boron cluster ($B_{18}H_{22}$) implanted source/drains for shallow junctions of nano-scale CMOSFETs and its thermal stability is improved, using vacuum annealing. Although Ni silicide on $B_{18}H_{22}$ implanted Si substrate exhibited greater sheet resistance than on the $BF_2$ implanted one, its thermal stability was greatly improved using vacuum annealing. Moreover, the boron depth profile, using vacuum post-silicidation annealing, showed a shallower junction than that using $N_2$ annealing.

• 소성∙가공
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• 제33권3호
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• pp.200-207
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• 2024

In this study, we developed a semi-analytical approach for the numerical analysis of residual stress in oxide scales formed on hot-rolled steels. The oxide scale, formed during the hot rolling process, experiences complex interactions due to thermal and mechanical influences, significantly affecting the material's integrity and performance. Our research focuses on integrating various stress components such as thermal stress, growth stress, and creep behavior to predict the residual stress within the oxide layer. The semi-analytical method combines analytical expressions for each stress component with numerical integration to account for their cumulative effects. Validation through instrumented indentation tests confirms the reliability of our model, which considers thermal expansion coefficient (CTE) differences, scale growth, and creep-induced stress relaxation. Our findings indicate that thermal stress resulting from CTE differences significantly impacts the overall residual stress, with growth stress contributing a compressive component during cooling, and creep behavior playing a minor role in stress relaxation. This comprehensive approach enhances the accuracy of residual stress prediction, facilitating the optimization of material design and processing conditions for hot-rolled steel products.

• Nuclear Engineering and Technology
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• 제37권6호
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• pp.511-524
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• 2005

Thermalhydraulic reactor simulation of tomorrow will require a new generation of codes combining at least three scales, the CFD scale in open medium, the component scale and the system scale. DNS will be used as a support for modelling more macroscopic models. NEPTUNE is such a new generation multi-scale platform developed jointly by CEA-DEN and EDF-R&D and also supported by IRSN and FRAMATOME-ANP. The major steps towards the next generation lie in new physical models and improved numerical methods. This paper presents the advances obtained so far in physical modelling for each scale. Macroscopic models of system and component scales include multi-field modelling, transport of interfacial area, and turbulence modelling. Two-phase CFD or CMFD was first applied to boiling bubbly flow for departure from nucleate boiling investigations and to stratified flow for pressurised thermal shock investigations. The main challenges of the project are presented, some selected results are shown for each scale, and the perspectives for future are also drawn. Direct Numerical Simulation tools with Interface Tracking Techniques are also developed for even smaller scale investigations leading to a better understanding of basic physical processes and allowing the development of closure relations for macroscopic and CFD models.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2006년도 춘계학술대회 논문집
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• pp.145-148
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• 2006

Cold gas dynamic spray is a relatively new coating process by which coatings can be produced without significant heating during the process. Cold gas dynamic spray is conducted by powder sprayed by supersonic gas jet, and generally called the kinetic spray or cold-spray. Cold-spray was developed in Russia in the early 1980s to overcome the defect of thermal spray method. Its low process temperature can minimize thermal stress and also reduce the deformation of the substrate. Most researches on cold-spray have focused on micro scale coating, but our research team tried to apply this method to macro scale deposition. The macro scale deposition causes deformation of a thin substrate which is usually convex to the deposited side. In this research, the main cause of the deformation was investigated using 6061-T6 aluminum alloy and properties of deposited aluminum layer such as coefficient of thermal expansion, Elastic modulus, hardness, electric conductivity were measured. From the result of the analysis, it was concluded that compressive residual stress was the main reason of substrate deformation while CTE had little effect.

• 대한기계학회논문집
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• 제12권5호
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• pp.1138-1149
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• 1988

본 연구에서는 논란의 여지가 많은 문제점을 구간별 특성 척도 분석으로 보다 명확히 하고, 매질이 물과 공기인 경우 실험을 통하여 난류 열대류 구조를 분석하여 척도분석 및 Kraichnan등의 분석을 통해 확인된 바 있는 지수법칙층의 존재를 확인하 고자 한다.

• Nuclear Engineering and Technology
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• 제55권2호
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• pp.493-505
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• 2023

Comprehensive condition monitoring of large industry systems such as nuclear power plants (NPPs) is essential for safety and maintenance. In this study, we developed novel system-scale diagnostic technology based on deep-learning and IR thermography that can efficiently and cost-effectively classify system conditions using compact Raspberry Pi and IR sensors. This diagnostic technology can identify the presence of an abnormality or accident in whole system, and when an accident occurs, the type of accident and the location of the abnormality can be identified in real-time. For technology development, the experiment for the thermal image measurement and performance validation of major components at each accident condition of NPPs was conducted using a thermal-hydraulic integral effect test facility with compact infrared sensor modules. These thermal images were used for training of deep-learning model, convolutional neural networks (CNN), which is effective for image processing. As a result, a proposed novel diagnostic was developed that can perform diagnosis of components, whole system and accident classification using thermal images. The optimal model was derived based on the modern CNN model and performed prompt and accurate condition monitoring of component and whole system diagnosis, and accident classification. This diagnostic technology is expected to be applied to comprehensive condition monitoring of nuclear power plants for safety.