• Title/Summary/Keyword: Thermal Resolution

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Analytical Approach of Polymer Flow in Thermal Nanoimprint Lithography (열-나노임프린트 리소그래피 공정에서의 폴리머 유동에 대한 해석적 접근)

  • Kim, Kug-Weon;Kim, Nam-Woong
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.17 no.3
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    • pp.20-26
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    • 2008
  • Nanoimprint lithography(NIL) is becoming next generation lithography of significant interest due to its low cost and a potential patterning resolution of 10nm or less. Success of the NIL relies on the adequate conditions of pressure, temperature and time. To have the adequate conditions for NIL, one has to understand the polymer flowing behavior during the imprinting process. In this paper, an analytical approach of polymer flow in thermal NIL was performed based on the squeeze flow with partial slip boundary conditions. Velocity profiles and pressure distributions of the polymer flow were obtained and imprinting forces and residual thickness were predicted with the consideration of the slip velocity between the polymer and the mold/substrate. The results show that the consideration of the slip is very important for investigating the polymer flow in Thermal NIL.

A Study on Thermal Stress Analysis of Plastic-Core Solder Balls (플라스틱 핵 솔더볼의 열응력 해석에 관한 연구)

  • Kim, H.D.;Yoon, D.Y.
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.6
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    • pp.159-162
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    • 2007
  • Recently, Pb-free solder ball technology, which is getting more significant in miniaturization of electronic equipment, and resolution of recent environmental problems, is necessary to be developed. A plastic-core solder ball is much promising in those considerations. Plastic-core solder balls have the tendency to replace the usual metal-core solder ball from low material cost and superior mechanical properties. The thermal effects, however, are important in manufacturing process, such as deposing micro-sized metal thin film on the spherical polymer surface. Furthermore plastic-core solder balls are easy to be broken due to CTE and elastic coefficient of material property from heat transfer. We propose technical computational investigations for the manufacturing design and the reliability of plastic-core solder ball from thermal stress analysis.

Thermal contact resistance on elastoplastic nanosized contact spots (탄소성접촉면의 나노스케일 열접촉저항)

  • Lee, Sang-Young;Cho, Hyun;Jang, Yong-Hoon
    • Proceedings of the KSME Conference
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    • 2008.11b
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    • pp.2214-2219
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    • 2008
  • The thermal contact resistance(TCR) of nanosized contact spots has been investigated through a multiscale analysis which considers the resolution of surface topography. A numerical simulation is performed on the finite element model of rough surfaces. Especially, as the contact size decreases below the phonon mean free path, the size dependent thermal conductivity is considered to calculate the TCR. In our earlier model which follows an elastic material, the TCR increases without limits as the number of nanosized contact spots increases in the process of scale variation. However, the elastoplastic contact induces a finite limit of TCR as the scale varies. The results are explained through the plastic behavior of the two contacting models. Furthermore, the effect of air conduction in nanoscale is also investigated.

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Design and Control of Mini-Scanning Electron Microscope (미니형 주사전자 현미경의 설계 및 제어)

  • Park, Man-Jin;Kim, Dong-Hwan;Kim, Young-Dae;Jang, Dong-Young;Han, Dong-Chul
    • Proceedings of the KSME Conference
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    • 2007.05a
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    • pp.1271-1276
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    • 2007
  • The most powerful analytical equipment usually comes at the cost of having the highest demand for space. Where electron microscopes has traditionally required a room to themselves, not just for reasons of their size but because of ancillary demands for pipes and service. The simple optical microscopes, of course, can occupy the desk-top, but because their performance is limited by the wavelength of light, their powers of magnification and resolution are inferior to that of the electron microscope. Mini SEM will sit comfortably on a desk-top but offers magnification and resolution performances much closer to that of a standard SEM. This new technique extends the scope of SEM as a high-resolution microscope, relatively cheap and widely available imaging tool, for a wider variety of samples.

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A High-Resolution Heterodyne Interferometer using Beat Frequency between Two-Axial Modes of a HeNe Laser (2-종 모드 레이저를 이용한 고분해능 헤터로다인 간섭계)

  • 김민석;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.214-219
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    • 1997
  • We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600-1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with aims to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial mode laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, whlch allows us to perform multiple measurements of up to 10 machine axes simultaneously.

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The Mechanical and Cryogenic Design of IGRINS

  • Park, Chan;Lee, Sung-Ho
    • The Bulletin of The Korean Astronomical Society
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    • v.36 no.2
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    • pp.154.1-154.1
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    • 2011
  • IGRINS (Immersion Grating Infrared Spectrometer) is a cross-dispersed high resolution near-infrared spectrograph whose primary disperser is a silicon immersion grating (SIG) and cross-dispersers are two volume phase holographic gratings (VPHG). IGRINS covers the full ranges of H and K astronomical wavelength bands at a single exposure with the spectral resolution of 40,000. The overall layout of the IGRINS Cryostat is a $960{\times}600{\times}380$ cubic millimeter rectangular box and the whole optical train is sitting on an $880{\times}520{\times}50\;mm^3$ rectangular Optical Bench. The total volume of the instrument has been revolutionarily reduced and remained compact for the spectral coverage and sensitivity of a high resolution spectrograph in infrared. We, in this presentation, introduce the design models, the structural and thermal analysis results of the mechanics and cryogenics of IGRINS.

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Thermal Design and Batch Fabrication of Full SiO2 SThM Probes for Sensitivity Improvement (주사탐침열현미경의 감도향상을 위한 전체 실리콘 산화막 열전탐침의 열적설계 및 일괄제작)

  • Jaung, Seung-Pil;Kim, Kyeong-Tae;Won, Jong-Bo;Kwon, Oh-Myoung;Park, Seung-Ho;Choi, Young-Ki;Lee, Joon-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.32 no.10
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    • pp.800-809
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    • 2008
  • Scanning Thermal Microscope (SThM) is the tool that can map out temperature or the thermal property distribution with the highest spatial resolution. Since the local temperature or the thermal property of samples is measured from the extremely small heat transferred through the nanoscale tip-sample contact, improving the sensitivity of SThM probe has always been the key issue. In this study, we develop a new design and fabrication process of SThM probe to improve the sensitivity. The fabrication process is optimized so that cantilevers and tips are made of thermally grown silicon dioxide, which has the lowest thermal conductivity among the materials used in MEMS. The new design allows much higher tip so that heat transfer through the air gap between the sample-probe is reduced further. The position of a reflector is located as far away as possible to minimize the thermal perturbation due to the laser. These full $SiO_2$ SThM probes have much higher sensitivity than that of previous ones.

Extraction of Sea Surface Temperature in Coastal Area Using Ground-Based Thermal Infrared Sensor On-Boarded to Aircraft (지상용 열적외선 센서의 항공기 탑재를 통한 연안 해수표층온도 추출)

  • Kang, Ki-Mook;Kim, Duk-Jin;Kim, Seung Hee;Cho, Yang-Ki;Lee, Sang-Ho
    • Korean Journal of Remote Sensing
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    • v.30 no.6
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    • pp.797-807
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    • 2014
  • The Sea Surface Temperature (SST) is one of the most important oceanic environmental factors in determining the change of marine environments and ecological activities. Satellite thermal infrared images can be effective for understanding the global trend of sea surface temperature due to large scale. However, their low spatial resolution caused some limitations in some areas where complicated and refined coastal shapes due to many islands are present as in the Korean Peninsula. The coastal ocean is also very important because human activities interact with the environmental change of coastal area and most aqua farming is distributed in the coastal ocean. Thus, low-cost airborne thermal infrared remote sensing with high resolution capability is considered for verifying its possibility to extract SST and to monitor the changes of coastal environment. In this study, an airborne thermal infrared system was implemented using a low-cost and ground-based thermal infrared camera (FLIR), and more than 8 airborne acquisitions were carried out in the western coast of the Korean Peninsula during the periods between May 23, 2012 and December 7, 2013. The acquired thermal infrared images were radiometrically calibrated using an atmospheric radiative transfer model with a support from a temperature-humidity sensor, and geometrically calibrated using GPS and IMU sensors. In particular, the airborne sea surface temperature acquired in June 25, 2013 was compared and verified with satellite SST as well as ship-borne thermal infrared and in-situ SST data. As a result, the airborne thermal infrared sensor extracted SST with an accuracy of $1^{\circ}C$.

The Effect of Climate Data Applying Temperature Lapse Rate on Prediction of Potential Forest Distribution (기온감율을 적용한 기후자료가 잠재 산림분포 예측에 미치는 영향)

  • Lee, Sang-Chul;Choi, Sung-Ho;Lee, Woo-Kyun;Yoo, Seong-Jin;Byun, Jae-Gyun
    • Journal of Korean Society for Geospatial Information Science
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    • v.19 no.2
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    • pp.19-27
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    • 2011
  • The objective of this study was to suggest technical approaches for preparation and down scaling of climate data used for predicting the potential forest distribution. To predict the forest distribution, we employed a Korean-specific forest distribution model, so-called the TAG(Thermal Analogy Group), and defined the PFT(Plant Functional Types) based on the HyTAG(Hydrological and Thermal Analogy Group). The climate data with 20km spatial resolution were interpolated to fit on the input data format with 1km spatial resolution. Two potential forest distribution maps were estimated using climate data constructed by kriging, one of the interpolation and down-scaling approaches, with and without lapse rate considered. Through the verification process by comparing two potential maps with the actual vegetation map, the forest distribution using the lapse rate was proven to be 38% more accurate.

Influences of Physical Soil Properties on Drought Severity in the Central Great Plains Based on Satellite Data and a Digital Soil Database (인공위성자료와 디지털 토양자료를 통해 분석한 미중부 대평원 지역 가뭄정도에 미친 물리적 토양특성의 영향)

  • Sunyurp Park
    • Journal of the Korean Geographical Society
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    • v.38 no.6
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    • pp.935-948
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    • 2003
  • The State Soil Geographic (STATSGO) database is a valuable source for assessment of soil properties at a state level. Using GIS techniques, eight physical soil properties were extracted from the database, including available water capacity, clay content, soil depth, slope, depth to water table, drainage, texture, and permeability. The influences of these soil properties on drought severity, which was estimated by NDVI departures from normal, were determined over western-central Kansas. Study results showed that seven soil properties had significant relationships with drought severity with correlation coefficients, ranging from -0.89 to 0.85. Thermal emission signals from the Moderate Resolution Imaging Spectroradiometer (MODIS) had a significant relationship with drought severity expressed by NDVI departure from normal and represented spatial progression of drought over time well. High thermal signals, indicating high soil moisture deficit, emerged in the western region and their spatial distribution changed over time. Different sets of soil factors influenced drought severity among early-drying and late-drying areas.