• 제목/요약/키워드: Temperature-difference method

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두께 균일도 향상을 위한 LPCVD 챔버 내 웨이퍼 온도 분포 분석 (Analysis of temperature distribution of wafers inside LPCVD chamber for improvement of thickness uniformity)

  • 강승환;김병훈;공병환;이재원;고한서
    • 한국가시화정보학회지
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    • 제14권2호
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    • pp.25-30
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    • 2016
  • The wafer temperature and its uniformity inside the LPCVD chamber were analyzed. The temperature uniformity at the end of the wafer load depends on the heat-insulating cap. The finite difference method was used to investigate the radiation and conduction heat transfer mechanisms, and the temperature field and heat diffusion in the LPCVD chamber was visualized. It was found that the temperature uniformity of the wafers could be controlled by the size and distance of the heat-insulating cap.

반응로 내 웨이퍼 배치의 온도장 분석 및 가시화 (Analysis and Visualization of Temperature Field for Wafer Batch in Furnace)

  • 강승환;이승호;김병훈;고한서
    • 한국가시화정보학회지
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    • 제13권3호
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    • pp.24-28
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    • 2015
  • The temperature of the wafer batch in the furnace was calculated and its visualized temperature field was analyzed. The main heat transfer mechanisms from the heater wall to the wafers were radiation and conduction, and the finite difference method was used to analyze the complex heat transfer including those two mechanisms. The visualized temperature field shows that the direction of the heat flux in the wafer batch varies during the heating process, and the heat in the wafer batch diffuses faster by conduction within the wafer than by radiation between the wafers, in the condition of the constant temperature at the heater wall and cap.

알루미나 세라믹스의 열피로 거동 (Themal Fatigue Behavior of Alumina Ceramics)

  • 정우찬;한봉석;이홍림;이형직
    • 한국세라믹학회지
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    • 제35권10호
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    • pp.1094-1100
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    • 1998
  • The thermal fatigue behavior of alumina ceramics was investigated by water quenching method. Single-quench thermal shock tests were performed to decide the critical thermal shock temperature difference ($\Delta$Tc) which was found to be 225$^{\circ}C$ Cyclic thermal shock fatigue tests were performed at temperature diff-erences of 175$^{\circ}C$, 187$^{\circ}C$ and 200$^{\circ}C$ respectively. After cyclic thermal shock fatigue test the distributions of retained strength and crack were observed. Retained strength was measured by four point bending method and crack observation method bydye penetration. In terms of the retained strength distribution the critical number of thermal shock cycles(Nc) were 7 for $\Delta$T=200$^{\circ}C$, 35 for $\Delta$T=187$^{\circ}C$ and 180for $\Delta$T=175$^{\circ}C$ respec-tively. In terms of the crack observation the critical number of thermal shock cycles were 5 for $\Delta$T==200$^{\circ}C$ 20 for $\Delta$T==187$^{\circ}C$ and 150 for $\Delta$T=175$^{\circ}C$ respectively. The difference of Nc investigated by two different methods is due to the formation of the longitudinal cracks which had no effect on the four point bending strength. Therefore the thermal fatigue behavior of alumina ceramics could be more accurately described by the crack observation method than the retained strength measurement method.

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디젤차량 연비시험에 있어 시험온도 및 냉각팬 조건이 미치는 영향분석에 관한 연구 (A Study on the Influence of Test Temperature & Cooling Fan Condition on the Fuel Test of Diesel Vehicle)

  • 김현진;김성우;임재혁;노경하;이정천;김기호;오상기
    • 동력기계공학회지
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    • 제21권6호
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    • pp.46-55
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    • 2017
  • Due to the arise of natural disasters caused by global warming, consumers have more interest in the fuel efficiency of their vehicles, and fuel efficiency became an important factor in comparing vehicles. In this market situation, methods to measure fuel efficiency has become one of the main interests of vehicle related organizations and laboratories, and the current method to measure fuel efficiency is to follow the notification established by the ministry of trade, industry and energy, ministry of environment, and the ministry of land, infrastructure and transport. In this study, we analyze the influence of vehicle fuel efficiency according to test temperature and cooling fan condition which have the possibility to cause difference in fuel efficiency. The analysis results of the influence of the fuel efficiency according to the test temperature, the difference of the fuel efficiency of the test temperature ($21{\sim}29^{\circ}C$) within the allowable range of the notification showed a maximum difference of 2.9%. Therefore, it is necessary to consider the introduction of a test method that permits only the temperature change based on the reference point as the allowable range even in the test within the allowable range. The analysis of the influence of the fuel efficiency according to the cooling method showed no significant effect, and it seems reasonable to maintain the test method of the current notification.

수화발열량이 다른 콘크리트조합 모의부재 매스콘크리트의 온도이력 특성 (Temperature History of Mock-up Mass Concrete Considering Different Heat Generation Due to Mixture Adjustment)

  • 김종;전충근;신동안;윤기원;오선교;한천구
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2005년도 춘계 학술기술논문발표대회 논문집
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    • pp.9-12
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    • 2005
  • This paper investigated the temperature history of mass concrete mock up structure considering different heat generation by varying with mixture proportion. Setting time difference between high early strength mixture (E-P) and retarding mixture (R-F30) was 14.5hours. Incorporation of $30\%$ of fly ash contributed to $10^{\circ}C$ of hydration heat reduction. In generally used C and D combination, bottom concrete shows earlier hydration, while E-J combination showed reverse tendency and thus, this method can reduce the crack occurrence. Therefore, heat generation difference method has beneficial effect on reducing crack induced by hydration heat resulting from heat generation difference between surface and center section.

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예열온도조건에 따른 알루미늄 합금 주조재의 응고특성에 관한 연구 (A Study on Solidification Characteristics of Aluminum Alloy Casting Material by Pre-heated Temperature Conditions)

  • 윤천한;윤희성;오율권
    • 한국안전학회지
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    • 제27권4호
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    • pp.7-12
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    • 2012
  • In this study, the solidification characteristics inside the AC7A casting material was analyzed using the numerical analysis method and was verified using the experimental method by the pre-heated temperature conditions of metal casting device. For the numerical analysis, "COMSOL Multiphysics", the commercial code based on the finite element analysis(FEA), was used in order to predict the thermal deformation of the AC7A casting material including temperature, displacement and stress distribution. Also, in order to verify the results calculated by the numerical analysis, the experiment for temperature measurement inside the AC7A casting material was performed using the K-type thermocouple under the same condition of numerical analysis method. In the numerical results, thermal deformation inside AC7A casting material was well-suited for manufacturing products when the pre-heated temperatures of the metal casting device was $250^{\circ}C$. When the results of the temperature distribution were experimentally measured and were compared with those of the numerical result, it appeared that there was some temperature difference because of the latent heat by phase change heat transfer. However, the result of cooling temperature and patterns were almost similar except for the latent heat interval. The solidification characteristics was closely related to the temperature difference between the surface and inside of the casting.

문화재 보존환경 간이 측정을 위한 온도지시카드 신뢰성 평가 (Reliability Assessment of Temperature Indicator for Simplified Measurement on Conservation Environment of Cultural Heritage)

  • 임보아;신은정;이선명
    • 보존과학연구
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    • 통권31호
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    • pp.59-68
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    • 2010
  • Cultural heritages are damaged by surrounding several environmental factors. Main factors are temperature, humidity, light, atmosphere and indoor pollutant, organism, etc. Therefore, to prevent damage of cultural heritage from such environmental factor, conservation environment monitoring becomes more important. Indicator is one of the simple method for environment monitoring. It can be used without expensive and complex equipments. However, it should be performed scientific examination for application to cultural heritage. In this study, some Temperature Indicators were chosen and reliability assessment was carried out for application to cultural heritage. Brightness($L^*$) is selected for reliability assessment factor. As a result of lab test, Temperature Indicators were not influenced greatly in humidity change. When they were exposed to setting temperature, the color was changed in setting temperature area and ${\pm}2^{\circ}C$ part of setting temperature. Especially brightness value was high in setting temperature area. Also, Temperature Indicators were stabilized after about 16 minutes when were exposed to temperature difference of $10^{\circ}C$ and when temperature difference with exposure environment is smaller, stabilization time shortened. Therefore, it is a possible to confirm that selected Temperature Indicator is reliable product through measurement of color difference value and naked eye observation.

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The Improvement of Infrared Brightness Temperature Difference Method for Detecting Yellow Sand Dust

  • Ha, Jong-Sung;Kim, Jae-Hwan
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 2007년도 Proceedings of ISRS 2007
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    • pp.149-152
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    • 2007
  • The detection of yellow sand dust using satellite has been utilized from various bands from ultraviolet to infrared channels. Among them, Infrared channels have an advantage of detecting aerosols over high reflecting surface as well as during nighttime. Especially, brightness temperature difference between 11 and 12{\mu}m(BTD) was often used to distinguish between water cloud and yellow sand, because Ice and liquid water particles preferentially absorb longer wavelengths while aerosol particles preferentially absorb shorter wavelengths. We have found that the BTD significantly depends on surface temperature, emissivity, and zenith angle and thereby the threshold of BTD. In order to overcome these problems, we have constructed the background brightness temperature threshold of BTD and then subtracted it from BTD. Along with this, we utilized high temporal coverage of geostationary satellite, MTSAT-1R, to verify the reliability of the retrieved signal in conjunction with forecasted wind information. The statistical score test illustrated that this newly developed algorithm showed a promising result for detecting mineral dust by reducing the errors in the current BTD method.

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능동열시험법을 이용한 몰드변압기 진단 (Diagnostic of Cast Resin Using Active Infrared Thermal Testing Method)

  • 임용배;정승천
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.481-484
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    • 2004
  • A form of measured temperature distribution to estimate condition of a electrical apparatus is a absolute reference for condition of the apparatus, time rate of transition, and difference between reference and currently temperature. Because passive thermography which has not injection of external thermal stimulation shows difference of temperature being on surface of a structure and temperature difference between the structure and back ground, the result could apply only to estimation or monitor for condition of terminal relaxation and overload related with temperature rising. However, a thermal flow in active thermography is differently generated by structure and condition of surface and subsurface. This paper presents the nondestructive testing using the properties and includes the results by heat injection and cooling to the apparatus. The buried discontinuity of subsurface could be detected by these techniques.

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이중버블시트를 이용한 단열보온양생공법의 한중매스콘크리트 현장적용 (Field Application of the Mass Concrete Using Insulation Curing Method with Double Bubble Sheets Subject to Cold Weather)

  • 이동규;김종;김기훈;황인성;한민철;한천구
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2007년도 춘계학술논문 발표대회
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    • pp.1-4
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    • 2007
  • This study investigated the applicability of insulation curing method with double layer bubble sheets to the man concrete subjected to cold weather. Temperature history of the mass concrete indicated that the highest temperature of center section was exhibited at $34^{\circ}C$ while the that of surface section was $25^{\circ}C$. Difference between center and surface was shown to be less $10^{\circ}C$ when the temperature of center section was peak section, and thereby associated temperature cracking index was calculated 1.5, and occurrence probability of temperature cracking was 5%, so there was no temperature cracking caused by internal restraint. No temperature crack was observed by naked eye. It was clear that early frost demage and temperature cracking could be restrained due to reducing temperature difference between inner part and outside in the case double bubble sheets applied to insulation curing method in cold weather. The maturity of mass concrete is higher than outside about $72\sim89^{\circ}$ DD, so it was demonstrated to prevent early frost demage and ensure strength excellently. Insulation curing method with double bubble sheets was more economic than heating curing method.

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