• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2004년도 학술대회지
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• pp.347-351
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• 2004

[ $Si_3N_4$ ] composites have been extensively studied for engineering ceramics, because it has excellent room and high temperature strength, wear resistance properties, good resistance to oxidation, and good thermal and chemical stability. In the present work, carbon short fiber reinforced $Si_3N_4$ ceramics were fabricated by hot press method in $N_2$ atmosphere at $1800^{\circ}C$ using $Al_2O_3\;and\;Y_2O_3$ as sintering additives. Content of carbon short fiber was $0\%,\;0.1\%\;and\;0.3\%$. The composites were evaluated in terms of density, flexural strength and elastic modulus through the 3-point bending test at room temperature. Also, The wear behavior was determined by the pin on disk wear tester using silicon nitride ball. Experimental density and flexural strength decreased with increasing content of carbon fiber. But specific modulus increased with increasing content of carbon fiber. In addition, friction coefficient and specific wear loss decreased with increasing content of carbon short fiber by reason of interfacial defects between matrix and fiber.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2003년도 기술심포지움 논문집
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• pp.145-150
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• 2003

최근에 3 GHz이상의 고주파용 전자부품과 소자의 제조에 낮은 TCR 값과 높은 정밀도를 갖는 박막저항이 사용되고 있다. Ni-Cr 박막저항은 낮은 TCR 값과 저항에 대한 높은 안정성 때문에 저항 물질로 사용되는 가장 일반적인 물질이다. 본 연구에서는 $Ni_{72}Cr_{20}Al_3Mn_4Si(wt\%)$ 첨가된 우수한 저항특성을 갖는 s-type의 Evanohm 합금 타겟과 스퍼터링 장비를 이용하여 박막 저항을 제조하였다. 또한 열처리 조건을 $200^{\circ}C,\;300^{\circ}C,\;400^{\circ}C,\;500^{\circ}C$로 변화시키면서 고주파 박막저항의 미세구조와 전기적 특성을 관찰하여 최상의 열처리 조건을 알아보았다.

• 마이크로전자및패키징학회지
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• 제10권3호
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• pp.1-7
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• 2003

잉크젯 헤드의 발열체에 적용하기 위해 $poly-Si/SiO_2/Si$ 다층기판 위에 결정화된 안정한 코발트실리사이드$(CoSi_2)$ 박막을 형성하여 오메가 형태의 발열체를 제작하고 발열체의 구조적 형상과 온도저항계수 등 전기적 특성을 조사, 연구하였다 $(CoSi_2)$ 박막의 형성은 금속 Co 박막을 급속 열처리장치를 이용하여 $800^{\circ}C$에서 20초 동안 질소 분위기에서 열처리하여 실리사이드 박막을 형성하였다. 발열체의 온도 저항계수 값은 약 $0.0014/^{\circ}C$ 값을 얻을 수 있었다. 인가전압 10 V, 주파수 10KHz 및 펄스간격 $1{\mu}s$ 인가시 발열체의 순간전력은 최대 2W를 나타내었다. 반복된 전압인가에 따른 발열체의 피로특성을 조사한 결과 15 V 이하의 전압인가시 $10^8$ 펄스 cycle 까지 저항변화가 거의 없었으나 17 V 인가전압에서는 $10^6$ cycle에서 발열체의 저항이 급격히 증가하였다.

• 마이크로전자및패키징학회지
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• 제11권1호
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• pp.37-42
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• 2004

최근에 3 ㎓이상의 고주파용 전자부품과 소자의 제조에 낮은 저항온도계수(TCR)값과 높은 정밀도를 갖는 박막저항이 사용되고 있다. Ni-Cr 박막저항은 낮은 TCR 값과 저항에 대한 높은 안정성 때문에 저항 물질로 사용되는 가장 일반적인 물질이다. 본 연구에서는 $Ni_{72}Cr_Al_3Mn_4Si$(wt%)이 첨가된 우수한 저항특성을 갖는 S-type의 Evanohm 합금 타겟과 스퍼터링 장비를 이용하여 박막 저항을 제조하였다. 또한 열처리 조건을 $200^{\circ}C$, 300$300^{\circ}C$, $400^{\circ}C$, $500^{\circ}C$로 변화시키면서 고주파 박막 저항의 미세구조와 전기적 특성을 관찰하여 최상의 열처리 조건을 알아보았다.

• Korean Journal of Acupuncture
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• 제38권4호
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• pp.282-289
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• 2021

Objectives : The purpose of this study is to construct a model of the possible thermal runaway of electronic moxibustion and to implement an appropriate risk management method. Methods : To reproduce the system error situation of the electronic moxibustion circuit equipped with microcontroller unit, temperature sensor and heater, a code was set to disable the signal input to temperature sensor and maintain "high" heating signal to heater. The temperature change of electronic moxibustion was compared between 3 types of heater module; module 1 consisting of a combination of heater+0 ohm+0 ohm resistance, module 2 consisting of a combination of heater+Polymeric Positive Temperature Coefficient (PPTC)+0 ohm resistance, and module 3 consisting of a combination of heater+PPTC+10 ohm resistance. The temperature change was measured using a polydimethylsiloxane (PDMS) silicone phantom. After maintaining surface temperature of the phantom at 31~32℃ for 20 seconds, electronic moxibustion was applied. After operating electronic moxibustion, the temperature change was measured for 660 seconds on the surface and 900 seconds at 2 mm depth. Results : Regardless of the module type, the time-dependent change in temperature showed a rapid rise followed by a gentle curve, and a sharp drop in temperature after reaching the maximum temperature about 10 minutes after the switching the moxibustion on. Temperature measured at the depth of 2 mm below the surface increased slower and to a lesser extent. Module 1 reached highest peak temperature with largest change of temperature at both depths followed by module 2, and 3. Conclusions : Through the combination of PPTC+resistance with the heater of electronic moxibustion, it is possible to limit the rise in temperature even with the software error. Thus, this setting can be used as an independent safety measure for the electronic moxibustion control unit.

• 한국전기전자재료학회논문지
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• 제14권4호
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• pp.302-308
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• 2001

The polymers with various composition of 4-vinylpyridine (4-VP) with n-butyl acrylate (n-BA) and 2-hydroxypropyl methacrylate (HPMA) were synthesized as a humidity sensitive material and quaternized with 1.5-dibromopentane. Resistance versus relative humidity decreased with increase in the content of n-BA in the copolymer. The introduction of HPMA increased the resistance of the humidity sensor as well as enhanced the adherence to the alumina substrate. In the case of 4-VP/n-BA/HPMA=80/10.10, the hysteresis and temperature coefficient were $\pm$2%RH and -0.42∼0.46%RH/$\^{C}$. The average resistance at 30%RH, 60%RH and 90%RH are 3.1㏁, 155 ㏀ and 7.9 ㏀, respectively.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1399-1401
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• 2001

We studied on structure and resistivity, temperature coefficient of resistance (TCR) of NiCr and NiCr-N thin resistor films prepared by do reactive magnetron sputtering of NiCr target. It is found that while pure NiCr films are polycrystalline, an addition of nitrogen (N2/(Ar+N2) ratios are between 10% and 70%) into the film is changed into amorphous structure and sheet resistance of films is increased. Measurement temperatures of TCR are ratios of $5^{\circ}C$ per 15min from $25^{\circ}C$ to $130^{\circ}C$. TCR for an as-deposited NiCr-N thin film is varied from positive to negative.

• The Korean Journal of Ceramics
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• 제1권4호
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• pp.185-190
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• 1995

Tribological behavior of the diamond-like carbon (DLC) films sliding on floppy disk has been investigated. Hydrogenated DLC films have been prepared by plasma enhanced chemical vapor deposition (PECVD) using methane and hydrogen mixture in different volume ratios on ferrite substrates. DLC films show lower friction coefficients (0.2~0.4) than those of the uncoated ferrite(0.4~0.5). DLC films containing more hydrogen exhibit higher wear resistance. To investigate the roughness effect on wear, the substrates were polished with SiC papers prior to deposition. Too fine or too rough DLC surfaces result in poor wear resistance. Wear resistance of annealed DLC films at higher temperature slightly increases with respect to as-deposited film.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.456-459
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• 2002

This paper describes fabrication and characteristics of ceramic pressure sensor for working at high temperature. The proposed pressure sensor consists of a Ta-N thin-film, patterned on a Wheatstone bridge configuration, sputter deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21mV/$V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• 반도체디스플레이기술학회지
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• 제22권1호
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• pp.64-71
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• 2023

In this study, we investigated the effects of BiAlSiO glass composition on its glass forming range, thermal properties, and plasma resistance. The results showed that increasing the Al2O3 content suppressed the tendency for crystallization and hindered glass formation beyond a certain threshold. Bi2O3 was found to increase the content of non-bridging oxygen, resulting in a decrease in glass transition temperature and an increase in thermal expansion coefficient. Furthermore, the etching rate was found to improve with increasing Al2O3 content but decrease with increasing SiO2 content. It was concluded that the boiling point of fluorinated compounds should be considered to 900℃. Therefore, this study is expected to contribute to the understanding of the properties of BiAlSiO glass and its application to low temperature melting PRG compositions.