• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.475-475
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• 2010

We have generated Ar plasma in dense plasma focus device with coaxial electrodes for extreme ultraviolet (EUV) lithography and investigated an emitted visible light for electro-optical plasma diagnostics. We have applied an input voltage 4.5 kV to the capacitor bank of 1.53 uF and the diode chamber has been filled with Ar gas of pressure 8 mTorr. The inner surface of the cylindrical cathode has been attatched by an acetal insulator. Also, the anode made of tin metal. If we assumed that the focused plasma regions satisfy the local thermodynamic equilibrium (LTE) conditions, the electron temperature and density of the coaxial plasma focus could be obtained by Stark broadening of optical emission spectroscopy (OES). The Lorentzian profile for emission lines of Ar I of 426.629 nm and Ar II of 487.99 nm were measured with a visible monochromator. And the electron density has been estimated by FWHM (Full Width Half Maximum) of its profile. To find the exact value of FWHM, we observed the instrument line broadening of the monochromator with a Hg-Ar reference lamp. The electron temperature has been calculated using the two relative electron density ratios of the Stark profiles. In case of electron density, it has been observed by the Stark broadening method. This experiment result shows the temporal behavior of the electron temperature and density characteristics for the focused plasma. The EUV emission signal whose wavelength is about 6 ~ 16 nm has been detected by using a photo-detector (AXUV-100 Zr/C, IRD). The result compared the electron temperature and density with the temporal EUV signal. The electron density and temperature were observed to be $10^{16}\;cm^{-3}$ and 20 ~ 30 eV, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.2
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• pp.132-135
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• 2014

The Sr based ceramic thin films were deposited on Si substrate by RF magnetron sputtering method. And Sr based thin films were annealed at $500{\sim}700^{\circ}C$ using RTA. The surface roughness showed about 2.4 nm in annealed thin film at $600^{\circ}C$. The capacitance density of Sr based thin films were increased with the increase of annealing temperature. The maximum capacitance density of $0.6{\mu}F/cm^2$ was obtained by annealing temperature at $700^{\circ}C$. The voltage dependence of dielectric loss showed about 0.02 in voltage ranges of -10~+10 V. The leakage current density of annealing temperature of $600^{\circ}C$ was the $4.0{\times}10^{-6}\;A/cm^2$ at applied voltage of -5~+5 V.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.636-639
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• 2000

Effects of sintering temperature and time on relative permittivity $\varepsilon$$\_$r/, unloaded quality factor Q$.$f and temperature coefficient of resonant frequency $\tau$$\_$f/ of dielectric resonator materials produced from commercial ZST powder were investigated in some detail. Q$.$f values, as determined from cavity perturbation method at 1.6 GHz, gradually increased with sintering temperature reaching the maximum at 1420$^{\circ}C$. However, bulk density and relative permittivity values, which increased with temperature, started to decrease above 1380$^{\circ}C$. In addition, Q$.$f values slightly increased with sintering time at the sintering temperature of 1300$^{\circ}C$∼1380$^{\circ}C$, while bulk density and relative permittivity values were approximately constant. It was also found that $\tau$$\_$f/ values were not affected by sintering temperature and time within the experimental conditions used.

• Carbon letters
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• v.6 no.4
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• pp.234-242
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• 2005

Bending and tensile properties of 2D cross-ply C/C composites with processing heat treatment temperature (HTT) are evaluated. C/C composites used are made from two types of PAN based T700 and M40 carbon fibers with phenolic resin as carbon matrix precursor. Both the types of composites are heat treated at different temperatures (ranging from 750 to $2800^{\circ}C$) and characterized for bending and tensile properties. It is observed that, real density and open porosity increases with HTT, however, bulk density does show remarkable change. The real density and open porosity are higher in case T-700 carbon fiber composites at $2800^{\circ}C$, even though the density of M40 carbon fiber is higher. Bending strength is considerably greater than tensile strength through out the processing HTT due to the different mode of fracture. The bending and tensile strength decreases in both composites on $1000^{\circ}C$ which attributed to decrease in bulk density, thereafter with increase in HTT, bending and tensile strength increases. The maximum strength is in T700 fiber based composites at HTT $1500^{\circ}C$ and in M40 fiber based composites at HTT $2500^{\circ}C$. After attending the maximum value of strength in both types of composite at deflection HTT, after that strength decreases continuously. Decrease in strength is due to the degradation of fiber properties and in-situ fiber damages in the composite. The maximum carbon fiber strength realization in C/C composites is possible at a temperature that is same of fiber HTT. It has been found first time that the bending strength more or less 1.55 times higher in T700 fiber composites and in M40 fiber composites bending strength is 1.2 times higher than that of tensile strength of C/C composites.

• Corrosion Science and Technology
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• v.20 no.2
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• pp.85-93
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• 2021

The corrosion damage of materials in marine environment mainly occurs by Cl^- ions due to the breakdown of passive films. Additionally, various characteristics in seawater such as salinity, temperature, immersion time, flow rate, and biological activity also affect corrosion characteristics. In this study, the corrosion characteristics of stainless steels (STS 304 and STS 316L) and anodized aluminum alloys (AA 3003 and AA 6063) were evaluated with seawater temperature parameters. A potentiodynamic polarization experiment was conducted in a potential range of -0.25 V to 2.0 V at open circuit potential (OCP). Corrosion current density and corrosion potential were obtained through the Tafel extrapolation method to analyze changes in corrosion rate due to temperature. Corrosion behavior was evaluated by measuring weight loss before/after the experiment and also observing surface morphology through a scanning electronic microscope (SEM) and 3D microscopy. Weight loss, maximum damage depth and pitting damage increased as seawater temperature increased, and furthermore, the tendency of higher corrosion current density with an increase of temperature attributed to an increase in corrosion rate. There was lower pitting damage and lower corrosion current density for anodized aluminum alloys than for stainless steels as the temperature increased.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.1
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• pp.142-155
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• 1992

Numerical analysis is performed for the unsteady axisymmetric two dimensional phase change problem of freezing of water around a vertical tube. Heat conduction in the tube wall and solid phase, natural convection in liquid phase and volume expansion caused by density difference between solid and liquid phases are included in the numerical analysis. Existing correlation is used for estimating density-temperature relation of water, and the effect of volume expansion is reflected as fluid velocity at the interface and the free surface. As pure water has maximum density at 4.deg. C, it is found that there exists an initial temperature at which the flow direction reverses near the interface and by this effect the slope of interface becomes reversed depending on the initial temperature of water. By considering natural convection and solid-liquid density difference in the calculation, their effects on phase change process are studied and the effects of various parameters are also studied quantitatively.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.4
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• pp.84-91
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• 1994

A compact electron cyclotron resonance(ECR) plasma system composed of a microwave generator and a magnet coil was fabricated. A Langmuir single probe was used to investigate the plasma characteristics of the system through I-V measurements. The performance of the compact ECR plasma system was tested for the case of silicon etching reaction with $CF_{4}/O_{2}$(30%) mixed gas. Electron density and etch rate increased to maximum values and then decreased with increasing argon gas pressure, but electron temperature changed in the opposite way. The electron density and the electron temperature of argon gas plasma were 0.85${\times}~5.5{\times}10^{10}cm^{-3}$ and 4.5~6.0 eV, respectively, in the pressure range from $3{\times}10^{4}$ to 0.05Torr. The etch rate reached a maximum value at the position of 2.5cm from the bottom of plasma cavity. Etch rate uniformity was $\pm$6% across 6cm wafer. Anisotropic index was 0.75 at 1.5${\times}10^{-4}$Torr.

• Journal of applied mathematics & informatics
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• v.12 no.1_2
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• pp.281-289
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• 2003

The convection of water is investigated in the vicinity of its density maximum temperature (277 K) in an inclined square cavity in the presence of heat sources. Numerical investigations are carried out by maintaining one of the vertical walls uniformly at 273 K and varying the other wall between temperatures 275 K and 285 K at different inclinations angles. The isotherms, streamlines and velocity profiles reveal the possible existence of multicellular fluid motions, and bidirectional velocity distributions. These fluid flow and heat transfer characteristics are significantly modified by the cavity inclination in the presence of heat sources.

• Journal of the Korean Society of Combustion
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• v.4 no.2
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• pp.1-10
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• 1999

Pulverized coal is widely used as the source of electrical power generation and industrial processes. Numerical analysis on the transient ignition process of the cloud of pulverized coal particles in various cases is carried out. Particle radius, initial particle temperature, number density are chosen as major parameters that influence the characteristics of ignition and combustion. The result can be summarized as follow. The ignition occurs at the position that is closed to the surface of the cloud. Maximum temperature and velocity appear at ignition point, and the concentrations of gaseous fuel and oxidizer decrease rapidly near the ignition point. The chemical reaction takes place in wider zone as number density and particle radius decrease. The ignition delay is shortest when particle radius is about $50\;{\mu}m$, and tends to be shorter as number density and initial ambient temperature increase.

• Environmental Sciences Bulletin of The Korean Environmental Sciences Society
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• v.4 no.3
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• pp.165-171
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• 2000

Experiments were carried out to measure variations in the oxidation potential and current density using the polarization curves of polycarbonate. The results were then examined to identify the influences affecting the oxidation potential related to various conditions, such as temperature, pH, and oxydase(citrate and lipase). The lines representing the active anodic and cathodic dissolution shifted only slightly in the potential direction relative to temperature, pH, and the effect of the enzyme. The Tafel slope for the anodic and cathodic dissolution was determined such that the reversibility polarization was indicated as being effected by various conditions. The slope of the polarization curves describing the active-to-passive transition region shifted noticeably in their direction. Also, by varying the conditions, the optimum conditions for the most ready transform were identified, including temperature, pH, oxidation rate, and resistance of oxidation potential. The critical oxidation sensitivity(I(sub)r/I(sub)f) of the anodic current density peak and maximum passive current density was also determined, which is used in measuring the critical corrosion sensitivity of a polycarbonate.