Effect of Contact Conductance and Semitransparent Radiation on Heat Transfer During CVD Process of Semiconductor Wafer (접촉전도와 반투명 복사가 반도체 웨이퍼의 CVD 공정 중 열전달에 미치는 영향)
-
- Transactions of the Korean Society of Mechanical Engineers B
- /
- v.32 no.2
- /
- pp.149-157
- /
- 2008