• 한국재료학회지
• /
• 제13권1호
• /
• pp.43-47
• /
• 2003

As and BF$_2$dopants are implanted for the formation of source/drain with dose of 1${\times}$10$^{15}$ ions/$\textrm{cm}^2$∼5${\times}$10$^{15}$ ions/$\textrm{cm}^2$ then formed cobalt disilicide with Co/Ti deposition and doubly rapid thermal annealing. Appropriate ion implantation and cobalt salicide process are employed to meet the sub-0.13 $\mu\textrm{m}$ CMOS devices. We investigated the process results of sheet resistance, dopant redistribution, and surface-interface microstructure with a four-point probe, a secondary ion mass spectroscope(SIMS), a scanning probe microscope (SPM), and a cross sectional transmission electron microscope(TEM), respectively. Sheet resistance increased to 8%∼12% as dose increased in $CoSi_2$$n^{＋}$ and $CoSi_2$$p^{V}$ , while sheet resistance uniformity showed very little variation. SIMS depth profiling revealed that the diffusion of As and B was enhanced as dose increased in $CoSi_2$$n^{＋}$ and $CoSi_2$$p^{＋}$ . The surface roughness of root mean square(RMS) values measured by a SPM decreased as dose increased in $CoSi_2$$n^{＋}$ , while little variation was observed in $CoSi_2$$p^{＋}$ . Cross sectional TEM images showed that the spikes of 30 nm∼50 nm-depth were formed at the interfaces of $CoSi_2$$n^{＋}$ / and $CoSi_2$/$p^{＋}$, which indicate the possible leakage current source. Our result implied that Co/Ti cobalt salicide was compatible with high dose sub-0.13$\mu\textrm{m}$ process.

• Nutritional Sciences
• /
• 제8권4호
• /
• pp.262-267
• /
• 2005

Reactive oxygen species can be generated in the skin by hair dyeing. The aim of this study was to find out the effects of the oxidative-type hair dye application in young women on the antioxidant systems. We investigated the lipid peroxide levels, glutathione (GSH) levels, and the antioxidant enzyme activities including superoxide dismutase (SOD), glutathione peroxidase (GSHPx) in plasma and erythrocytes and catalase (CAT) in erythrocytes, and DNA damages in lymphocytes. Also, plasma concentrations of antioxidant vitamins, vitamin A and E, were measured and the correlations between various antioxidant parameters and oxidative damages were evaluated The antioxidant enzyme activities in plasma (GSHPx) and in erythrocytes (SOD and CAT) were decreased significantly after hair dyeing. 1be lipid peroxide and GSH levels were not affected in both plasma and erythrocytes. No significant difference was found in the concentrations of both vitamin A and E between before and after hair dyeing. However, DNA damages expressed as the tail extent moment (TEM) and tail length (TL) were significantly (p<0.001) increased. The plasma vitamin E concentration was correlated with DNA damages (TEM: r=-0.590, p<0.01 and TL: r=-0.533. p<0.01) and RBC SOD activity (r=0.570, p<0.05). In turn, RBC SOD activity was significantly correlated with both plasma MDA levels (r=-0.412, p<0.05) and DNA damages (TM: r=-0.546, p<0.01, TL: r=-0.493, p<0.01). Our results demonstrated that the exposure to hair dyeing produced lymphocyte DNA damage and modification of the antioxidant enzyme activities. Also, there were very strong associations between plasma vitamin E concentration, RBC SOD activity and DNA damage induced by hair dyeing. It suggests that the antioxidant status of a subject is likely to be related to the extent of the harmful effects caused by hair dyeing.

• Journal of the Korean Wood Science and Technology
• /
• 제20권1호
• /
• pp.60-71
• /
• 1992

To investigate the delignification behaviour in solvolysis pulping process, Populus alba ${\times}$ glandulosa H. and Pinus Kuraiensis S. et Z. were cooked with p-cresol and vater solvent(2:8, 5:5, 8:2 v/v) at $175^{\circ}C$ for 9 cooking time levels(20, 40, 60, 80, 100, 120, 140, 160, 180, min). Pulp yield, residual lignin content, de lignification rate, decarborhydration rate were determined. Delignification behaviours were analyzed by TEM. 1. The p-cresol-water solvent cooking of P. alba ${\times}$ glandulosa showed good delignification at the solvent system which the mixture ratio of p-cresol and water were 2:8(v/v), while the cooking of P. koraiensis with the p-cresol and water mixture ratio of 5:5 was no good. 2. P. alba ${\times}$ glandulosa showed three step-delignification phenomena at the solvent system which the mixture ratio of p-cresol and water were 2:8(v/v) anti 5:5(v/v). But P. koraiensis showed a first order delignification reaction at the same mixture ratio of p-cresol and water solvent system. 3. In TEM micrograph obtained for the solvent system which the mixture ratio of p-cresol and water was 5:5(v/v), the partial delignification of the cell corner of P. alba ${\times}$ glandulosa and P. koraiensis were observed at 60min. of cooking time. Complete delignification at the cell corner of P. alba ${\times}$ glandulosa was observed at 160min. and that of P. koraiensis was observed of 180min. of cooking time. 4. In optical microscopic observation, fiber separation of P. alba ${\times}$ glandulosa occured at 120min. and that of P. koraiensis began at 140min. of cooking time. 5. At the solvent system which the mixture ratio of p-cresol and water was 5:5(v/v), middle layer on secondary wall($S_2$) and cell corner of P. alba ${\times}$ glandulosa were more selectively delignified than primary wall(P) and outer layer on secondary wall($S_1$). However P. koraiensis did not showed any difference in delignification between cell wall layers and cell corner.

• Applied Microscopy
• /
• 제45권4호
• /
• pp.189-194
• /
• 2015

Backside Ar ion milling technique for the preparation of cross-sectional transmission electron microscopy (TEM) specimens, and backside-ion milling combined with focused ion beam (FIB) operation for electron holography were introduced in this paper. The backside Ar ion milling technique offers advantages in preparing cross-sectional specimens having thin, smooth and uniform surfaces with low surface damages. The back-side ion milling combined with the FIB technique could be used to observe the two-dimensional p-n junction profiles in semiconductors with the sample quality sufficient for an electron holography study. These techniques have useful applications for accurate TEM analysis of the microstructure of materials or electronic devices such as arrayed hole patterns, three-dimensional integrated circuits, and also relatively thick layers (> $1{\mu}m$).

• Journal of the Korean Wood Science and Technology
• /
• 제35권2호
• /
• pp.9-15
• /
• 2007

A comparative study of the structure and organization of the primary and secondary walls in different types of tropical plant waste fibers was carried out using transmission electron microscopy (TEM). The thickness of each layer was also measured using Image Analyzer. TEM micrographs haveconfirmed that cell wall structure of all six types of tropical plant waste fibers (empty fruit bunch, oil palm frond, oil palm trunk, coir, banana stem and pineapple leaf) has the same ultrastructure with wood fibre. The fibers consisted of middle lamella, primary and thick secondary wall with different thickness for different types of fibers. The secondary wall was differentiated into a $S_1$ layer, a unique multi-lamellae $S_2$ layer, and $S_3$ layer.

• 한국세라믹학회지
• /
• 제45권10호
• /
• pp.573-578
• /
• 2008

In the preparation of hydroxyapatite(HAp)/gelatin(GEL) nanocomposite, GEL matrix was modified by the introduction of chondroitin sulfate(ChS) to obtain a strongly organized composite body. The formation reaction of the HAp/GEL-ChS nanocomposite was then investigated via XRD, DT/TGA, FT-IR, TEM and SEM. The organic-inorganic interaction between HAp nanocrystallites and GEL molecules was confirmed from DT/TGA and FT-IR. According to the DT/TGA results, the exothermal temperature zone between 300 and $550^{\circ}C$ showed an additional peak temperature that indicated the decomposition of the combined organics of the GEL and ChS. From the FT-IR analysis, calcium phosphate(Ca-P) was covalently bound with the GEL macromolecules modified by ChS. From TEM and ED, the matrix of the GEL-ChS molecules was mineralized by HAp nanocrystallites and the dense dried nanocomposite body was confirmed from SEM micrographs.

• 한국재료학회지
• /
• 제8권10호
• /
• pp.890-897
• /
• 1998

n-InP(001)기판과 PECVD법으로 ${Si}_3N_4$(200nm)막이 성장된 InP 기판사이의 direct wafer bonding을 분석하였다. 두 기판을 접촉시켰을 때 이들 사이의 결합력에 크게 영향을 주는 표면 상태를 접촉각 측정과 AFM을 통해서 분석하였다. InP 기판은 $50{\%}$ 불산용액으로 에칭하였을 때 접촉각이 $5^{\circ}$, RMS roughness는 $1.54{\AA}$이었다. ${Si}_3N_4$는 암모니아수 용액으로 에칭하였을 때 RMS roughness가 $3.11{\AA}$이었다. Inp 기판과 ${Si}_3N_4$/InP를 각각 $50{\%}$ 불산 용액과 암모니아수 용액에 에칭한 후 접촉시켰을 때 상당한 크기의 초기 겹합력을 관찰할 수 있었다. 기계적으로 결합된 시편을 $580^{\circ}C$-$680^{\circ}C$, 1시간동안 수소 분위기와 질소분우기에서 열처리하였다. SAT(Scanning Acoustic Tomography)측정으로 두 기판 사이의 결합여부를 확인하였다. shear force로 측정한 InP 기판과 ${Si}_3N_4$/InP사이의 결합력은 ${Si}_3N_4$/InP 계면의 결합력만큼 증가되었다. TEM과 AES를 이용해서 di-rect water bonding 계면과 PECVD계면을 분석하였다.

• 한국결정성장학회지
• /
• 제4권1호
• /
• pp.76-82
• /
• 1994

고온용액법(high temperature solution grwth)에 의해 $K_6P_4O_13$의 flux로 부터 KTP 단결정을 성장시켰다. Inclusion이 없는 KTP 단결정을 성장시키기 위해 성방로내 온도기울기, 결정의 회전, 종자결정의 방위, 냉각속도를 조절하였다. 성장된 KTP 단결정은 inclusion이 없었으며, 크기는 $10(a){\times}28(b){\times}33(c)mm^3$ 이었다. 또한 KTP 단결정 boule의 위치에 따른 SHG 출력 특성 측정 및 TEM 분석에 의해 종자결정 주위의 광학적 불균일성의 원인을 조사하였다.

• Elastomers and Composites
• /
• 제44권1호
• /
• pp.34-40
• /
• 2009

In situ 미니에멀젼 중합으로 실리카/폴리스타이렌 하이브리드 나노복합체를 만들기 위하여 9-데세노 산을 실리카 표면 개질제로 처음 도입하였다. 복합체는 나노크기의 잘 분산된 실리카를 함유하고 있었다. 실리카의 표면 개질 및 폴리스타이렌의 합성 등은 FTIR로 확인하였고 생성 라텍스 중에 존재하는 실리카의 양은 TGA 분석으로 확인하였다. 생성된 하이브리드는 실리카의 양 증가에 따라 유리전이온도가 상승하였다. SEM과 TEM으로 확인한 결과 하이브리드 복합체는 평균 직경이 55 nm 정도로 나타났다. 복합체내의 실리카의 존재는 EDS와 연결된 TEM 등으로 확인되었다.

• 핵의학기술
• /
• 제17권1호
• /
• pp.11-17
• /
• 2013

고형암의 치료반응 평가 기준을 제시한 PERCIST에서는 제지방체중으로 표준화한 표준화 섭취계수 즉, SUL을 사용하도록 권고하고 있다. 이 연구에서는 전신 CT에서 측정된 제지방체중을 이용해 SUV를 표준화하여 얻은 SUL의 새로운 측정법을 제시하고 관찰자 사이 및 관찰자 내 재현성 여부를 평가하였다. 52명의 대상에서 전신 CT를 포함한 PET/CT를 시행하였고 -140~-30HU를 가지는 지방조직의 용적을 정확히 측정할 수 있었다. 이를 이용하여 개별 환자에서의 제지방체중을 계산하였고, 이를 이용해 SUV를 표준화하여 SUL을 측정하였다. 정상 참고 장기인 간, 복부 대동맥, 비장에 각각 지름 3 cm의 구형 VOI, $1{\times}2cm$의 원통형 VOI, 그리고 지름 2 cm의 구형 VOI를 그렸다. 경험 있는 두 명의 관찰자가 각 장기의 VOI에서 $SUL_{max}$와 $SUL_{mean}$ 을 측정하였다. 관찰자 1이 2주 간격으로 이전 측정결과를 알지 못하는 상태에서 반복 측정하였고 같은 방법으로 관찰자 2가 동일 환자에서 SUL을 측정하였다. 재현성을 평가하기 위해서 대응표본 t-test를 시행하고 Pearson의 상관계수 (CC)를 계산하였고, 측정오차를 알아보기 위해 TEM을 계산하였다. 관찰자 사이 재현성 즉, 관찰자 1과 관찰자 2가 측정한 간, 복부 대동맥, 비장의 $SUL_{max}$ 사이에는 통계적으로 유의한 차이가 없었고 이는 $SUL_{mean}$에서도 마찬가지였다. 관찰자 내 재현성 즉, 간에서 관찰자 1이 2주 간격으로 두 번 측정한 SUL 측정치 사이에도 통계적으로 유의한 차이가 없었다. 이 연구는 정상 참고 장기에서 SUL 측정이 매우 재현성이 있음을 보여준다. $SUL_{mean}$ 측정의 재현성이 $SUL_{max}$보다 약간 우수하였으며 SUL 측정치는 체중 의존성이 개선되었다. 전신 CT를 시행하여 측정한 제지방체중으로 표준화한 SUL의 새로운 측정법은 향후 여러 연구에서 유용하게 이용될 것으로 기대된다.