• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.239-240
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• 2008

As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제35회 하계학술대회 초록집
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• pp.83-83
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• 2008

• 한국재료학회:학술대회논문집
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• 한국재료학회 2006년도 추계학술발표대회 및 제11회 신소재 심포지엄
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• pp.30.1-30.1
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• 2006

• 한국재료학회:학술대회논문집
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• 한국재료학회 2008년도 춘계학술발표대회 및 제14회 신소재 심포지엄
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• pp.24.1-24.1
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• 2008

• Bulletin of the Korean Chemical Society
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• 제16권9호
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• pp.819-823
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• 1995

Thin films of two kinds of Prussian Blue (PB)-modified, using iron(Ⅲ) complex instead of conventional FeCl3, were prepared on a gold substrate and these films were able to be electrochemically reduced in potassium nitrate solution. In case of PB-modified films prepared from Fe(Ⅲ)-ethylenediamine-N,N'-diacetic acid (FeEN3+)/K3Fe(CN)6 solution, the mid-peak potential was 0.156 V in 0.1 M KNO3 and it was found that potassium ion migrates into or out of the film during the electrolysis. These films were shown to be electrochromic. These films exhibited smaller peak separation than those formed from Fe(Ⅲ)-tartaric acid (FeTA3+)/K3Fe(CN)6 system. The diffusion coefficient of Fe(CN)63-/4- redox couple, evaluated using the fabricated Au rotating disc electrode(rde) previously reported, was in good agreement with the existing data. Two experimental procedures, including the voltammetry at relatively low scan rates and the rde study, have been used in order to characterize the electrode kinetics. The electrode kinetics of some redox couples (FeEN2+-FeEN3+ and FeTA2+-FeTA3+) on both PB-modified thin films and bare Au electrode were studied using a Au rde. In all cases the rate constants of electron transfer obtained with the PB-modified film electrodes were only slightly less than those obtained for the same reaction on bare Au disc electrodes. The conductivities, as determined from the slopes of the i-V curves for a ca. 1 mm sample for dried PB-modified potassium-rich and deficient bulk samples pressed between graphite electrodes, were 6.21 × 10-7 and 2.03 × 10-7(Ω·cm)-1, respectively.

• Asian-Australasian Journal of Animal Sciences
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• 제32권1호
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• pp.14-22
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• 2019

Objective: The aim of the study was to find a possible association between the ${\beta}-$ and ${\kappa}-casein$ and ${\beta}-lactoglobulin$ genotypes and important milk physiochemical and technological characteristics such as acidity, alcohol stability, the contents of some minerals and the parameters of acid fermentation ability (FEA) in Czech Fleckvieh Cattle. Methods: Milk and blood samples were collected from 338 primiparous Czech Fleckvieh cows at the same stage of lactation. The genotypes of individual cows for ${\kappa}-casein$ (alleles A, B, and E) and ${\beta}-lactoglobulin$ (alleles A and B) were ascertained by polymerase chain reaction-restriction fragment length polymorphism, while their ${\beta}-casein$ (alleles $A^1$, $A^2$, $A^3$, and B) genotype was determined using melting curve genotyping analysis. The data collected were i) milk traits including active acidity (pH), titratable acidity (TA), alcohol stability (AS); calcium (Ca), phosphorus (P), sodium (Na), magnesium (Mg), and potassium (K) contents; and ii) yoghurt traits including active acidity (Y-pH), titratable acidity (Y-TA), and the counts of both Lactobacilli and Streptococci in 1 mL of yoghurt. A linear model was assumed with fixed effects of herd, year, and season of calving, an effect of the age of the cow at first calving and effects of the casein and lactoglobulin genotypes of ${\beta}-CN$ (${\beta}-casein$, CSN2), ${\kappa}-CN$ (${\kappa}-casein$, CSN3), and ${\beta}-LG$ (${\beta}-lactoglobulin$, LGB), or the three-way interaction between those genes. Results: The genetic polymorphisms were related to the milk TA, AS, content of P and Ca, Y-pH and Lactobacilli number in the fresh yoghurt. The CSN3 genotype was significantly associated with milk AS (p<0.05). The effect of the composite CSN2-CSN3-LGB genotype on the investigated traits mostly reflected the effects of the individual genes. It significantly influenced TA (p<0.01), Y-pH (p<0.05) and the log of the Lactobacilli count (p<0.05). Conclusion: Our findings indicate that the yoghurt fermentation test together with milk proteins genotyping could contribute to milk quality control and highlight new perspectives in dairy cattle selection.

• 한국지구과학회지
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• 제38권1호
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• pp.49-63
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• 2017

영남육괴 북동부에 위치하는 춘양화강암은 비알칼리계열 중 칼크-알칼리계열에 해당하는 I-type의 화강암류이며, 고알루미나질이다. 주성분원소 및 미량원소의 함량변화는 체계적인 연속성을 보이며, 일반적인 남한의 쥐라기 화강암류의 분화경향과 유사하다. 미량원소 중 유동성을 가지는 LILE (Sr, K, Rb, Ba)는 부화되어 있는 반면, 비유동성을 나타내는 HFSE 중 Ta, Nb, P, Ti의 함량은 상대적으로 결핍되어 있다. HREE에 대한 LREE의 강한 부화($(La/Lu)_{CN}=41.8-73.2$)와 Eu 부(-)이상[$(Eu/Eu^*)_{CN}=0.89-1.10$]은 남한에 분포하는 쥐라기 화강암류의 패턴과 매우 유사하다. 이러한 춘양화강암을 암체의 서쪽에 위치하며 영주저반의 대부분을 차지하는 부석심성암체와 비교하면 주성분원소 및 미량원소의 Harker 성분변화도에서 $SiO_2$ 함량에 따른 상관관계를 인지할 수 없어 두 암체는 성인적으로 무관한 별개의 암체로 사료된다. 춘양화강암은 지구조 판별도에서 화산호 환경에 도시되고 따라서 춘양화강암의 지화학적 특성을 종합해보면 쥐라기 고태평양판이 섭입하는 활동성 대륙주변부 환경에서 생성되었을 것으로 사료된다.

• 천문학회지
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• 제35권4호
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• pp.187-196
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• 2002

A spectral line survey is performed from 159.7 to 164.7 GHz toward Orion-KL, as an extension of our previous line survey from 138.3 to 150.7 GHz with the same 14 m radio telescope of Taeduk Radio Astronomy Observatory. Typical system temperatures were 260 - 1000 K to achieve a sensitivity of about 0.02 - 0.04 K in TA unit. A total of 63 line spectra are detected in this survey. Among them, 54 lines lines are found to be the first detections towards an astronomical source and only 9 spectral lines have been previously identified from other observations. Forty-eight of 54 lines are believed to be from the known transitions of the known molecules, while 6 lines are 'unidentified'. All detected lines are found to be from a total of 10 molecular species and their isotopic variants. The molecular species with most numerous detected transitions are $HCOOCH_3$ (22), followed by $CH_3OCH_3$ (7), $C_2H_5CN$ (7), and $SO_2$ (6). The LTE rotation diagram analysis using all homogeneous data with those from previous survey gives more reliable determination of physical quantities. The derived values of the rotation temperatures and column densities for $HCOOCH_3$, $CH_3OCH_3$, and $SO_2$ are are 75 $\~$ 197 K and $1.5 {\~}18 {\times} 10^{15}\;cm^{-2}$, respectively.

• 미생물학회지
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• 제30권3호
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• pp.225-231
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• 1992

생물체내의 ascorbic acid :dehydroascorbic acid system 을 조절하는데 관여하는 것으로 알려진 ascorbate 산화효소의 활성을 단세포 녹조류인 Chlamydomonas reinhardtii 에서 확인함으로써 이 효소의 존재와 특성을 고찰하였다. 조효소는 native gel 전기 영동에 의한 활성 염색과 분광광도계에 의한 ascorbic acid .의 흡광도 감소 측정에서 뚜렷한 활성을 나타내었다. 황산암모늄 침전, hydroxyapatite 흡착 크로마토그래피, 그리고 Sephadex G-150 gel 여과 크로마토그래피 분리한 결과 26.1 units/mg /의 specific activity 를 나타내었다. 분리된 ascorbate 산화효소는 $55^{\circ}C$, pH 4.6 에서 가장 활성도가 높았다. Native gel 전기 영동에서 88,000 dalton 갸량의 분자량을 가지고 있었고 소단위체의 분자량을 55,000 이었다. 또한 Western bloting technique 을 이용하여 C. reinhardtii 의 ascorbate oxidase를 확인하였다.