• 제목/요약/키워드: Ta2O5 film

검색결과 156건 처리시간 0.03초

기판의 표면에너지가 반사경의 산란에 미치는 영향 (Effect of Substrata Surface Energy on Light Scattering of a Low Loss Mirror)

  • 이범식;유연석;이재철;허덕재;조현주
    • 한국광학회지
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    • 제18권6호
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    • pp.452-460
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    • 2007
  • ZERODUR와 용융 석영으로 저산란 반사경을 제작하고 산란 특성을 연구하였다. Bowl feed 법을 이용하여 초연마면인 표면거칠기 0.326 ${\AA}$인 용융 석영 기판과 표면거칠기 0.292 ${\AA}$의 ZERODUR 기판을 얻었다. 이온빔 스퍼터링 방법으로 초연마된 기판 위에 $SiO_2$$Ta_2O_5$를 교번으로 22층을 증착하여 다층박막 고반사 거울을 얻었다. 용융 석영 반사경과 ZERODUR 반사경의 산란이 각각 4.6 ppm과 30.9 ppm으로 측정되었으며, 이로부터 산란이 매우 작은 경우 기판의 표면거칠기가 산란을 결정하는 주요 파라미터가 아니라는 것을 알았다. 나아가 반사경의 표면거칠기를 AFM으로 측정한 결과. ZERODUR 반사경이 용융 석영 반사경 보다 박막의 표면거칠기가 2.3배 더 높게 측정 되었다. 이 결과는 기판-박막 경계면에서 박막 형성 초기에 기판의 화학조성 또는 결정방향과 증착물질의 상호관계로 인하여 박막 형성 초기에 표면거칠기가 급격히 나빠져서 발생하는 것으로 유추되었다. SEO 300A으로 접촉각 측정을 하여 Giriflaco-Good-Fowkees-Young 방법으로 표면에너지를 계산하였다. 표면거칠기 0.46 ${\AA}$을 갖는 용융 석영 기판이 표면거칠기 0.31 ${\AA}$을 갖는 ZERODUR 기판보다 접촉각이 더 작고 표면에너지는 크게 나타났다. 이러한 차이가 기판 종류에 따라 박막형성 초기에 표면거칠기를 다르게 하는 한 요인으로 판단되며, 기판의 표면에너지가 높을수록 미려한 박막표면을 얻는 것으로 확인되었다. ZERODUR의 표면에너지 차이를 설명하기 위해 XPS 분석으로 용융 석영은 Si, O로 구성되었고 ZERODUR는 Si, O, Al, Na 그리고 F로 구성되었다는 것을 알 수 있었다.

Annealing Effects of Indium Tin Oxide films grown on 91ass by radio frequency magnetron sputtering technique

  • Jan M. H.;Choi J. M.;Whang C. N.;Jang H. K.;Yu B. S.
    • 한국진공학회지
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    • 제14권3호
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    • pp.159-164
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    • 2005
  • Indium tin oxide (ITO) films were deposited on a glass slide at a thickness of 280 nm by radio frequency(rf) magnetron sputtering from a ceramic target composed of $In_2O_3\;(90\%)\;+\;SnO_2\;(10\%)$. We investigated the effects of the annealing temperature (Ta) between 200 and 350'E for 30 min in air on such properties as thermal stability, surface morphology, and crystal structure of the films. X-ray diffraction spectra revealed that all the films were oriented preferably with [222] direction and [440] direction and the peak intensity increased with increasing annealing temperature. X-ray photoelectron spectroscopy (XPS) showed that the sodium was out-diffused from the glass substrate at the annealing temperature of $350^{\circ}C$. The sodium composition of the ITO film amlealed at $350^{\circ}C\;for\;30\;min\;was\;2.5\%$ at the surface. Also the sodium peak almost disappeared after 3 keV $Ar^+$sputtering for 6 min. The visible transmittance of all ITO films was over $77\%$.

Multi-point detection of hydrogen using the hetero-core structured optical fiber hydrogen tip sensors and Pseudorandom Noise code correlation reflectometry

  • Hosoki, Ai;Nishiyama, Michiko;Igawa, Hirotaka;Seki, Atsushi;Watanabe, Kazuhiro
    • 동력기계공학회지
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    • 제19권3호
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    • pp.11-15
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    • 2015
  • In this paper, the multi-point hydrogen detection system based on the combination of the hetero-core optical fiber SPR hydrogen tip sensor and interrogator by pseudorandom noise (PN) code correlation reflectometry has been developed. In a light intensity-based experiment with an LED operating at 850 nm, it has been presented that a transmitted loss change of 0.32dB was induced with a response time of 25 s for 4% $H_2$ in $N_2$ in the case of the 25-nm Au, 60-nm $Ta_2O_5$, and 5-nm Pd multi-layers film. The proposed sensor characteristic shows excellent reproducibility in terms of loss level and time response for the in- and out- $H_2$ action. In addition, in the experiment for multi-point hydrogen detection, all sensors show the real-time response for 4% hydrogen adding with reproducible working. As a result, the real-time multi-point hydrogen detection could be realized by means of the combination of interrogating system and hetero-core optical fiber SPR hydrogen tip sensors.

합성형 반강자성체인 CoFe/Ru/CoFe/FeMn에서 고정층의 두께 차이에 따른 스핀 밸브 구호의 자기저항 특성 (Magnetoresistance Properties in Synthetic CoFe/Ru/CoFe/FeMn Spin Valves with Different Pinned Layer Thicknesses)

  • 김광윤
    • 한국자기학회지
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    • 제11권5호
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    • pp.211-216
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    • 2001
  • 합성형 반강자성체(synthetic antiferromagnet)인 CoFe/Ru/CoFe/FeMn을 사용하고 자유층으로 NiFe/CoFe 이중 층을 사용한 탑 스핀밸브 구조를 직류 마그네트론 방식으로 제조하여, 구속층의 두께변화에 따른 자기적 특성과 층간교환자계(interlayer coupling field)의 변화를 조사하였다. Si/Ta(50 )/NiFe(34 )CoFe(16 )/Cu (26 )/CoFe(Pl )/Ru(7 )/CoFe(P2 )/FeMn(100 )/Ta(50 ) 합성형 탑 스핀 밸브 시료에서 고정층의 두께 변화에 따른 자기저항 특성을 조사한 결과 자기저항비가 Pl-P2가 +25 에서 -25 으로 변화시 자기저항비는 완만하게 감소하나, Pl-P2가 영 근처에서는 자화방향의 큰 이탈(canting)에 의하여 자기저항비가 급격히 감소함을 알 수 있다. 합성형 탑 스핀 밸브의 고정층의 두께에 따른 층간교환자계의 변화에 관한 모델을 제시하였으며, 이 모델과 실험에서 구한 결과가 일치함을 확인 할 수 있었다. 단지 Pl-P2근처 영역에서는스핀 플롭 혹은 스핀의 큰 이탈에 의하여 모델의 결과에서 벗어남을 확인하였다.

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솔-젤법을 이용한 Bismuth Layered Structure를 가진 강유전성 박막의 제조 및 특성평가에 관한 연구 (The preparation and Characterization of Bismuth Layered Ferroelectric Thin Films by Sol-Gel Process)

  • 주진경;송석표;김병호
    • 한국세라믹학회지
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    • 제35권9호
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    • pp.945-952
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    • 1998
  • Ferroelectric Sr0.8Bi2.4Ta2O9 stock solutions were prepared by MOD(Metaloganic Decompostion) process. The phase transformation for the layered perovskite of the SBT thin films by changing RTA(Rapid her-mal Annealing) temperatuer from 700$^{\circ}C$to 780$^{\circ}C$ were observed using XRD and SEM. Layered perovskite phase began to appear above 740$^{\circ}C$ and then SBT thin films were annealed at 800$^{\circ}C$ for 1hr for its com-plete crystallization. The specimens showed well shaped hysteresis curves without post annealing that car-ried out after deposition of Pt top electrode. The SBT thin films showed the asymmetric ferroelectric pro-perties. It was confirmed that the properties were caused by interface effect to SBT and electrode by leak-age current density measurement and asymmetric properties reduced by post annealing. At post annealing temperature of 800$^{\circ}C$ remanant polarization values (2Pr) were 6.7 9 ${\mu}$C/cm2 and those of leakage current densities were 3.73${\times}$10-7 1.32${\times}$10-6 A/cm2 at 3, 5V respectively. Also bismuth bonding types of SBT thin film surface were observed by XPS.

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Improvement of Shelf-life and Quality in Fresh-Cut Tomato Slices:

  • Hong Ji Heun
    • 한국식품저장유통학회:학술대회논문집
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    • 한국식품저장유통학회 2004년도 총회및 심포지움
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    • pp.67-72
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    • 2004
  • Quality of fresh-cut tomato slices was compared during cold storage under various modified atmosphere packaging conditions. Chilling injury of slices in containers sealed with Film A was higher than with Film B; these films had oxygen transmission rates of 87.4 and 60.0 ml $h^{-1}\;m^{-2}\;atm^{-1}$ at $5^{\circ}C\;and\;99\%$ RH, respectively. While slices in containers with an initial atmospheric composition of air, $4\%\;CO_2+1\;or\;20\%\;O_2,\;8\%\;CO_2+1\;or\;20\%\;O_2,\;or\;12\%\;CO_2+20\%\;O_2$ showed fungal growth, slices in containers with $12\%\;CO_2+1\%\;O_2$ did not. Low ethylene in containers enhanced chilling injury. Modified atmosphere packaging provided good quality tomato slices with a shelf-life of 2 weeks or more at $5^{\circ}C$. Experiments were conducted to compare changes in quality of slices of red tomato (Lycopersicon esculentum Mill. 'Sunbeam') fruit from plants grown using black polyethylene or hairy vetch mulches under various foliar disease management systems including: no fungicide applications (NF), a disease forecasting model (Tom-Cast), and weekly fungicide applications (WF), during storage at $5^{\circ}C$ under a modified atmosphere. Slices were analyzed for firmness, soluble solids content (SSC), titratable acidity (TA), pH, electrolyte leakage, fungi, yeasts, and chilling injury. With both NF and Tom-Cast fungicide treatments, slices from tomato fruit grown with hairy vetch (Vicia villosa Roth) mulch were firmer than those from tomato fruit grown with black polyethylene mulch after 12 days storage. Ethylene production of slices from fruit grown using hairy vetch mulch under Tom-Cast was about 1.5- and 5-fold higher than that of slices from WF and NF fungicide treatments after 12 days, respectively. The percentage of water-soaked areas (chilling injury) for slices from tomato fruit grown using black polyethylene mulch under NF was over 7-fold that of slices from tomato fruit grown using hairy vetch under Tom-Cast. When stored at $20^{\circ}C$, slices from light-red tomato fruit grown with black polyethylene or hairy vetch mulches both showed a rapid increase in electrolyte leakage beginning 6 hours after slicing. However, slices from tomato fruit grown using the hairy vetch mulch tended to have lower electrolyte leakage than those grown with black polyethylene mulch. These results suggest that tomato fruit from plants grown using hairy vetch mulch may be more suitable for fresh-cut slices than those grown using black polyethylene mulch. Also, use of the disease forecasting model Tom-Cast, which can result in lower fungicide application than is currently used commercially, resulted in high quality fruit for fresh-cut processing. Experiments were conducted to determine if ethylene influences chilling injury, as measured by percentage of slices exhibiting water-soaked areas in fresh-cut tomato slices of 'Mountain Pride' and 'Sunbeam' tomato (Lycopersicon esculentum Mill.). Ethylene concentration in containers without ventilation significantly increased during storage at $5^{\circ}C$, whereas little or no accumulation of ethylene occurred in containers with one or six perforations. Chilling injury was greatest for slices in containers with six perforations, compared to slices in containers with one perforation, and was over 13-fold greater than that of slices in control containers with no perforations. An experiment was also performed to investigate the effectiveness of including an ethylene absorbent pad in containers on subsequent ethylene accumulation and chilling injury. While ethylene in the no-pad controls increased continually during storage of both 'Mountain Pride' and 'Sunbeam' tomatoes at $5^{\circ}C$ under modified atmosphere conditions, no increase in accumulation of ethylene was observed in containers containing ethylene absorbent pads throughout storage. The ethylene absorbent pad treatment resulted in a significantly higher percentage of chilling injury compared with the no-pad control. In studies aimed at inhibiting ethylene production using AVG during storage of slices, the concentration of ethylene in control containers (no AVG) remained at elevated levels throughout storage, compared to containers with slices treated with AVG. Chilling injury in slices treated with AVG was 5-fold greater than that of controls. Further, we tested the effect of ethylene pretreatment of slices on subsequent slice shelf-life and quality. In slices treated with ethylene (0, 0.1, 1, or $10\;{mu}L\;L^{-1}$) immediately after slicing, ethylene production in non-treated controls was greater than that of all other ethylene pre-treatments. However, pretreatment of slices 3 days after slicing resulted in a different pattern of ethylene production during storage. Ihe rate of ethylene production by slices treated with 1 L $L^{-1}$ ethylene 3 days after slicing was greater during storage than any of the other ethylene treatments. With slices pre-treated with ethylene, both immediately and 3 days after slicing, the rate of ethylene production tended to show an negative correlation with chilling injury. Chemical name used: 1-aminoethoxyvinylglycine (AVG).

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